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    Microfabricated Neural Probes and Methods of Making Same
    12.
    发明申请
    Microfabricated Neural Probes and Methods of Making Same 有权
    微型神经探针及其制作方法

    公开(公告)号：US20080255439A1

    公开(公告)日：2008-10-16

    申请号：US11628003

    申请日：2005-06-01

    申请人： Hongxing Tang ,  Michael L. Roukes ,  Richard Renaud

    发明人： Hongxing Tang ,  Michael L. Roukes ,  Richard Renaud

    IPC分类号： A61B5/04

    CPC分类号： A61B5/04001 ,  A61B5/685 ,  A61B2562/028 ,  A61N1/05 ,  B82Y15/00

    摘要： An embodiment of the invention provides a neural probe (100) containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.

    摘要翻译： 本发明的实施例提供了一种包含多个纳米级记录电极的神经探针（100）。 记录电极具有1微米或更小的宽度，并且相邻记录电极之间的距离为10微米或更小。 本发明的另一个实施方案提供了一种神经探针，其包含位于聚合物基材上的多个微细加工的记录电极，例如柔性聚合物悬臂。

    Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
    13.
    发明授权
    Dynamics bionems sensors and arrays of bionems sensor immersed in fluids 有权
    传感器和传感器的传感器和传感器浸入液体中

    公开(公告)号：US07375321B2

    公开(公告)日：2008-05-20

    申请号：US10502551

    申请日：2003-05-07

    申请人： Michael L. Roukes ,  Scott E. Fraser ,  Jerry E. Solomon ,  Jessica L. Arlett ,  Michael C. Cross

    发明人： Michael L. Roukes ,  Scott E. Fraser ,  Jerry E. Solomon ,  Jessica L. Arlett ,  Michael C. Cross

    IPC分类号： G01N13/16

    CPC分类号： G01N33/54373

    摘要： A bioNEMS device comprises a piezoresistive cantilever having flexing legs of which attach the cantilever to a support and a biofunctionalized portion at the tip. A bias current applied to the legs is limited by a maximal acceptable temperature increase at the biofunctionalized tip. The length of the cantilever has a magnitude chosen to minimize background Johnson noise. A catalyzed receptor on the device binds to a ligand whose binding rate coefficient is enhanced. The catalyst lowers the receptor-ligand binding activation energy and is designed by forced evolution to preferentially bind with the ligand. A carrier signal is injected by a magnetic film disposed on the cantilever which is electromagnetically coupled to a source of the carrier signal. A plurality of NEMS fluidicly coupled transducers generate a plurality of output signals from which a collective output signal is derived, either by averaging or thresholding. The NEMS devices are disposed in microfluidic flow channels and fabricated in a membrane. A linking molecule is attached to the tip of the transducer and a fluffball attached to the linking molecule to increase damping.

    摘要翻译： bioNEMS装置包括压阻悬臂，其具有将悬臂连接到支撑件上的弯曲腿和在尖端的生物功能化部分。 施加到腿上的偏置电流受生物功能化尖端的最大可接受的温度升高的限制。 悬臂的长度具有选择的最小化背景约翰逊噪声的大小。 器件上的催化受体与结合速率系数增强的配体结合。 催化剂降低受体 - 配体结合活化能，并通过强制进化来优先与配体结合而设计。 载体信号由布置在悬臂上的磁膜注入，该磁膜电磁耦合到载波信号源。 多个NEMS流体耦合的换能器产生多个输出信号，通过平均或阈值从该输出信号导出集体输出信号。 NEMS装置设置在微流体流动通道中并制成膜。 连接分子连接到换能器的尖端，并且连接到连接分子上的绒毛增加阻尼。

    ELECTROMECHANICAL OSCILLATORS, PARAMETRIC OSCILLATORS, AND TORSIONAL RESONATORS BASED ON PIEZORESISTIVE NANOWIRES
    15.
    发明申请
    ELECTROMECHANICAL OSCILLATORS, PARAMETRIC OSCILLATORS, AND TORSIONAL RESONATORS BASED ON PIEZORESISTIVE NANOWIRES 有权
    机电振荡器，参数振荡器和基于纯化纳米级的扭转谐振器

    公开(公告)号：US20130194048A1

    公开(公告)日：2013-08-01

    申请号：US13560037

    申请日：2012-07-27

    申请人： Philip X.-L. Feng ,  Luis Guillermo Villanueva ,  Michael L. Roukes

    发明人： Philip X.-L. Feng ,  Luis Guillermo Villanueva ,  Michael L. Roukes

    IPC分类号： H03B5/32

    CPC分类号： H03B5/32 ,  H03B5/30 ,  H03H7/00 ,  H03H9/02259 ,  H03H9/2463 ,  H03H9/505 ,  H03H2009/02291 ,  H03H2009/02496 ,  H03H2009/02519

    摘要： Doubly-clamped nanowire electromechanical resonators that can be used to generate parametric oscillations and feedback self-sustained oscillations. The nanowire electromechanical resonators can be made using conventional NEMS and CMOS fabrication methods. In very thin nanowire structures (sub-micron-meter in width), additive piezoresistance patterning and fabrication can be highly difficult and thus need to be avoided. This invention shows that, in piezoresistive nanowires with homogeneous material composition and symmetric structures, no conventional and additive piezoresistance loops are needed. Using AC and DC drive signals, and bias signals of controlled frequency and amplitude, output signals having a variety of frequencies can be obtained. Various examples of such resonators and their theory of operation are described.

    摘要翻译： 双夹紧纳米线机电谐振器，可用于产生参数振荡和反馈自持续振荡。 纳米线机电谐振器可以使用传统的NEMS和CMOS制造方法制成。 在非常薄的纳米线结构（亚微米级宽度）中，添加剂压阻图案化和制造可能非常困难，因此需要避免。 本发明表明，在具有均匀材料组成和对称结构的压阻纳米线中，不需要常规和附加的压阻环路。 使用AC和DC驱动信号以及受控频率和幅度的偏置信号，可以获得具有各种频率的输出信号。 描述了这种谐振器的各种示例及其操作理论。

    Uncooled IR detector arrays based on nanoelectromechanical systems
    16.
    发明授权
    Uncooled IR detector arrays based on nanoelectromechanical systems 有权
    基于纳米机电系统的非冷却红外探测器阵列

    公开(公告)号：US08487385B2

    公开(公告)日：2013-07-16

    申请号：US12536036

    申请日：2009-08-05

    申请人： Michael L. Roukes

    发明人： Michael L. Roukes

    IPC分类号： H01L29/66

    CPC分类号： G01J5/44

    摘要： We describe the use of a high-quality-factor torsional resonator of microscale dimensions. The resonator has a paddle that is supported by two nanoscale torsion rods made of a very low thermal conductivity material, such as amorphous (“a-”) silicon. The body of the torsion paddle is coated with an infrared-absorbing material that is thin and light weight, but provides sufficient IR absorption for the applications. It may be placed above a reflecting material of similar dimensions to form a quarter wave cavity. Sensing of the response of the paddle to applied electromagnetic radiation provides a measure of the intensity of the radiation as detected by absorption, and the resulting temperature change, in the paddle.

    摘要翻译： 我们描述了使用微尺寸尺寸的高品质因子扭转谐振器。 谐振器具有由两个由非常低导热材料制成的纳米级扭力杆（例如非晶（“a”）硅）支撑的桨。 扭力桨的主体涂有红外吸收材料，其重量轻且重量轻，但为应用提供足够的红外吸收。 它可以放置在类似尺寸的反射材料上方以形成四分之一波浪腔。 感测桨对应用电磁辐射的响应提供了通过吸收检测的辐射强度的测量，以及桨中所产生的温度变化。

    Single molecule mass spectroscopy enabled by nanoelectromechanical systems (NEMS-MS)
    17.
    发明授权
    Single molecule mass spectroscopy enabled by nanoelectromechanical systems (NEMS-MS) 有权
    通过纳米机电系统（NEMS-MS）实现的单分子质谱

    公开(公告)号：US08227747B2

    公开(公告)日：2012-07-24

    申请号：US12358807

    申请日：2009-01-23

    申请人： Michael L. Roukes ,  Akshay Naik ,  Mehmet Selim Hanay

    发明人： Michael L. Roukes ,  Akshay Naik ,  Mehmet Selim Hanay

    IPC分类号： B01D59/44 ,  H01J49/00

    CPC分类号： H01J49/34 ,  B82Y15/00 ,  H01J49/0018

    摘要： The present invention relates to an apparatus for measuring a mass of a sample, using a nanoelectromechanical system (NEMS) arranged to receive the sample added onto a resonator of the NEMS and a microfluidic sample delivery and sample ionization system. The nanoelectromechanical system is located at an output of the ionization system. The nanoelectromechanical resonator system is highly sensitive and is capable of detecting masses in the single Dalton range.

    摘要翻译： 本发明涉及一种使用纳米机电系统（NEMS）测量样品质量的装置，所述纳米机电系统被布置为接收加入到NEMS的谐振器上的样品和微流体样品输送和样品电离系统。 纳米机电系统位于电离系统的输出端。 纳米机电谐振器系统是高灵敏度的，能够检测单个道尔顿范围内的质量。

    Very low voltage, ultrafast nanoelectromechanical switches and resonant switches
    18.
    发明授权
    Very low voltage, ultrafast nanoelectromechanical switches and resonant switches 有权
    超低电压，超高速纳米机电开关和谐振开关

    公开(公告)号：US08115344B2

    公开(公告)日：2012-02-14

    申请号：US12546485

    申请日：2009-08-24

    申请人： Philip Xiaoli Feng ,  Matthew Matheny ,  Rassul Karbalin ,  Michael L. Roukes

    发明人： Philip Xiaoli Feng ,  Matthew Matheny ,  Rassul Karbalin ,  Michael L. Roukes

    IPC分类号： H01H59/00

    CPC分类号： H01H1/0094 ,  H01H59/0009 ,  H01H2001/0078 ,  Y10T307/74

    摘要： The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.

    摘要翻译： 本发明提供了侧向纳米机电开关，其用于集成到使用标准半导体处理方法制造的电路中，或者使用与主流半导体处理技术兼容的技术。 描述制造开关的方法。 提供了两个和三个端子开关的一些示例性设计。 给出了一些示例性开关的结构特征和操作参数的描述。 这些开关预期与在基于计算机的系统中可操作的电路兼容。

    UNCOOLED IR DETECTOR ARRAYS BASED ON NANOELECTROMECHANICAL SYSTEMS
    19.
    发明申请
    UNCOOLED IR DETECTOR ARRAYS BASED ON NANOELECTROMECHANICAL SYSTEMS 有权
    基于纳米电子系统的红外检测器阵列

    公开(公告)号：US20100096709A1

    公开(公告)日：2010-04-22

    申请号：US12536036

    申请日：2009-08-05

    申请人： Michael L. Roukes

    发明人： Michael L. Roukes

    IPC分类号： H01L29/66

    CPC分类号： G01J5/44

    摘要： We describe the use of a high-quality-factor torsional resonator of microscale dimensions. The resonator has a paddle that is supported by two nanoscale torsion rods made of a very low thermal conductivity material, such as amorphous (“a-”) silicon. The body of the torsion paddle is coated with an infrared-absorbing material that is thin and light weight, but provides sufficient IR absorption for the applications. It may be placed above a reflecting material of similar dimensions to form a quarter wave cavity. Sensing of the response of the paddle to applied electromagnetic radiation provides a measure of the intensity of the radiation as detected by absorption, and the resulting temperature change, in the paddle.

    摘要翻译： 我们描述了使用微尺寸尺寸的高品质因子扭转谐振器。 谐振器具有由两个由非常低导热材料制成的纳米级扭力杆（例如非晶（“a”）硅）支撑的桨。 扭力桨的主体涂有红外吸收材料，其重量轻且重量轻，但为应用提供足够的红外吸收。 它可以放置在类似尺寸的反射材料上方以形成四分之一波浪腔。 感测桨对应用电磁辐射的响应提供了通过吸收检测的辐射强度的测量，以及桨中所产生的温度变化。