摘要:
A tunable laser comprised of a gain section for creating a light beam by spontaneous emission over a bandwidth, a phase section for controlling the light beam around a center frequency of the bandwidth, a cavity for guiding and reflecting the light beam, a front mirror bounding an end of the cavity, and a back mirror bounding an opposite end of the cavity. The back mirror has a &kgr;effB approximately equal to &agr;Tune, where &kgr;effB is an effective coupling constant and &agr;Tune is the maximum amount of propagation loss anticipated for an amount of peak tuning required, and a length of the back mirror is made to produce greater than approximately 80% reflectivity.
摘要:
Anisotropic chemically enhanced etching apparatus producing extremely low surface damage during the etching process. There is an evacuated main chamber in which an etching process takes place. A temperature-controlled, tiltable stage receives and holds the substrate to be etched within the main chamber. There is a nozzle directing a flow against a substrate mounted on the stage. There is a microwave cracker connected to a supply of molecular chlorine on an input side and connected to the nozzle on an output side for exciting and disassociating the molecular chlorine to be discharged through the nozzle as chlorine radicals. A first controller is operably connected to the cracker for controlling the flow of chlorine radicals being emitted from the nozzle. There is an ion gun for controlling the beam of ions. The second controller includes a feedback signal.
摘要:
Traveling-wave optoelectronic wavelength conversion is provided by a monolithic optoelectronic integrated circuit that includes an interconnected traveling-wave photodetector and traveling-wave optical modulator with a widely tunable laser source. Either parallel and series connections between the photodetector and modulator may be used. An input signal modulated onto a first optical wavelength develops a traveling wave voltage on transmission line electrodes of the traveling-wave photodetector, and this voltage is coupled via an interconnecting transmission line of the same characteristic impedance to transmission line electrodes of the traveling-wave optical modulator to modulate the signal onto a second optical wavelength derived from the tunable laser. The traveling wave voltage is terminated in a load resistor having the same characteristic impedance as the photodetector and modulator transmission lines. However, the interconnecting transmission lines and the load resistor may have different impedances than the photodetector and modulator.
摘要:
A wavelength monitor is provided based on the transmission response of an optical filter. The monitor provides feedback to the laser enabling it to lock to any given wavelength within its tuning range. The invention is also a process for integrating the wavelength monitor directly on chip with a variety of tunable semiconductor lasers. The invention also comprises a method for controlling the wavelength of a tunable laser by using a wavelength monitor to measure the output light and provide feedback to a control system. The laser and wavelength monitor are integrated together on a single indium phosphide chip. The wavelength monitor comprises a filter with a wavelength dependent transmission function and a pair of detectors. One detector is illuminated with light that has passed through the filter and the other provides a reference to measure the input intensity. Taking the ratio of the filtered light level to the unfiltered light provides a wavelength dependent wavelength. The filter is designed such that the transmission function is monotonic and varies from a minimum at one extent of the laser's tuning range to a maximum at the other extent.
摘要:
A vertical cavity surface emitting laser (VCSEL) includes a semiconductor device having a pair of mirror portions, an active region, a tunnel junction, a pair of cladding layers and a substrate. Heat generated by the VCSEL dissipates through the cladding layers, which utilize an indium phosphide material. The VCSEL also includes selective etches that are used to aperture the active region to allow electric current to be injected into the active region.
摘要:
A distributed Bragg reflector (DBR) for a vertical cavity surface emitting laser (VCSEL) includes alternating layers of different semiconductor materials to improve thermal and electrical characteristics for the VCSEL. Use of particular materials reduces the thermal resistivity of the DBR and allows heat to dissipate quickly during operation of the VCSEL.
摘要:
Epitaxial regrowth by vapor phase epitaxy of controlled composition semiconductor material in and around undercut regions of a processed heterostructure wafer permits formation of a ridge waveguide capable of active or passive operation. Subsequent material selective and crystallographically preferential etching is employed to form mirror facets on each end of the ridge waveguide.
摘要:
A control circuit for stabilizing the emission wavelength of the coupled cavity semiconductor laser is described which uses measurements of the voltage across the laser cavity to maintain stable single longitudinal mode output.
摘要:
A semiconductor laser is disclosed wherein a grid-like conductive current mask is fabricated between the active region of the laser and one of its electrodes. In one embodiment, the conductive current mask is fabricated in the bottom regions of a corrugated pattern that is created along the length of the semiconductor laser. In a second embodiment, the conductive current mask is totally embedded within a lightly doped buffer layer that is grown proximate to the active region.
摘要:
Objects are displaced with precision over very small distances by a micropositioner which includes a body of crystalline material having at least one domain wall. One end of the crystalline body is affixed to a base. An object to be moved is secured to the opposite end. The crystalline material is such that movement of the domain wall causes relative motion between the ends of the crystalline body, resulting in a displacement of the object with respect to the base. A ruled scale is disposed along the path of travel of each domain wall to indicate displacement over known, precisely controllable distances. In a first embodiment, the object is a microprobe and the crystalline body includes a single domain wall. Movement of the latter provides linear motion of the microprobe. In another embodiment, the object is an electron microscope grid assembly. Here the crystalline body includes two domain walls, allowing two-dimensional planar motion of the assembly.