公开(公告)号：US11828594B2

公开(公告)日：2023-11-28

申请号：US17472747

申请日：2021-09-13

Applicant: TRUMPF Photonic Components GmbH

Inventor： Hans Spruit ,  Jochen Hellmig ,  Alexander Marc Van der Lee ,  Jeroen Dragt ,  Pieter Hoeven

IPC: H01S5/00 ,  G01B9/02

CPC classification number: G01B9/02092 ,  H01S5/0028

Abstract: A laser sensor module includes a first laser source configured to emit first modulated light, the first modulated light being modulated laser light. The laser sensor module further includes circuitry configured to drive the first laser source with a first modulated driving current to cause the first laser source to emit the modulated laser light, a detector configured to detect the modulated laser light, which induces a photocurrent with variations resulting from modulation of the modulated laser light, and a second laser source configured to emit second modulated light. The circuitry is further configured to drive the second laser source with a second modulated driving current to cause the second laser source to emit the second modulated light. The detector is configured to detect the second modulated light. The circuitry is configured to adapt the amplitude of the second modulated driving current to induce a contribution to the photocurrent.

公开(公告)号：US20230184519A1

公开(公告)日：2023-06-15

申请号：US17924397

申请日：2021-05-10

Applicant: MBDA UK LIMITED

Inventor： Andrew PETERS ,  Jon DAW ,  Martyn Robert JENNINGS ,  William Michael George HALSTEAD ,  Colin BRIDGEWATER ,  Mark OWEN

IPC: F41H13/00 ,  H01S5/00

CPC classification number: F41H13/0062 ,  H01S5/0028

Abstract: A safety assembly for use with a laser-directed energy weapon is disclosed. The assembly comprises a control system comprising a photodetector and a processing unit; and an optical device configured to attach to a target such that, when attached, the optical device provides a light beam to the photodetector. The processing unit is arranged to compare the received light beam against one or more predetermined attributes, and to permit the laser-directed energy weapon to fire only when the received light beam is determined to have the one or more attributes.

公开(公告)号：US20180034240A1

公开(公告)日：2018-02-01

申请号：US15553436

申请日：2016-03-17

Applicant: Applied Materials, Inc.

Inventor： Wenwei QIAO

IPC: H01S5/068 ,  H01S5/40 ,  H01S5/00

CPC classification number: H01S5/06825 ,  G03F7/0002 ,  H01S5/0028 ,  H01S5/042 ,  H01S5/4018

Abstract: Embodiments described herein generally relate to an apparatus and method for performing photolithography processes. More particularly, embodiments described herein generally relate to an apparatus and method for the digital control of optical-coupled solid state relays employed on a laser diode. Digital control of the optical-coupled solid state relays may allow for the turning on and/or turning off of the optical-coupled solid state relays and allow for the failure detection of each laser diode. Furthermore, the embodiments described herein allow for an increase in current provided to the laser diodes such that overall laser diode output for optimized illumination may be maintained while life time and tool reliability are also increased.

公开(公告)号：US09816920B2

公开(公告)日：2017-11-14

申请号：US15112163

申请日：2014-11-21

Applicant: Robert Bosch GmbH

Inventor： Richard Fix ,  Rene Hartke ,  Jochen Beintner

IPC: G01N1/10 ,  G01N21/3504 ,  G01N21/359 ,  G01N21/39 ,  H01S5/00 ,  H01S5/026 ,  H01S5/06 ,  H01S5/183

CPC classification number: G01N21/3504 ,  G01N21/359 ,  G01N21/39 ,  G01N2201/0612 ,  H01S5/0028 ,  H01S5/0264 ,  H01S5/0607 ,  H01S5/18361 ,  H01S5/18363

Abstract: A method for producing an integrated micromechanical fluid sensor component includes forming a first wafer with a first Bragg reflector and with a light-emitting device on a first substrate. The light-emitting device is configured to emit light rays in an emission direction from a surface of the light-emitting device facing away from the first Bragg reflector. The method further includes forming a second wafer with a second Bragg reflector and with a photodiode on a second substrate. The photodiode is arranged on a surface of the second Bragg reflector facing towards the second substrate. The method also includes bonding or gluing the first wafer to the second wafer such that there is formed a cavity into which a fluid is introduced and through which the light rays can pass. The method further includes separating the fluid sensor component from the first and the second wafer.

公开(公告)号：US20160033397A1

公开(公告)日：2016-02-04

申请号：US14884716

申请日：2015-10-15

Applicant: Lawrence Livermore National Security, LLC

Inventor： Tiziana C Bond ,  Garrett Cole ,  Lynford Goddard

IPC: G01N21/39 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/08

CPC classification number: G01N21/39 ,  G01N21/774 ,  G01N2021/396 ,  G01N2021/399 ,  G01N2201/06113 ,  G01N2201/068 ,  H01S3/08059 ,  H01S3/1053 ,  H01S3/1055 ,  H01S5/0028 ,  H01S5/10 ,  H01S5/18366 ,  H01S5/18369 ,  H01S2302/00

Abstract: Configurations for in-situ gas detection are provided, and include miniaturized photonic devices, low-optical-loss, guided-wave structures and state-selective adsorption coatings. High quality factor semiconductor resonators have been demonstrated in different configurations, such as micro-disks, micro-rings, micro-toroids, and photonic crystals with the properties of very narrow NIR transmission bands and sensitivity up to 10−9 (change in complex refractive index). The devices are therefore highly sensitive to changes in optical properties to the device parameters and can be tunable to the absorption of the chemical species of interest. Appropriate coatings applied to the device enhance state-specific molecular detection.

Abstract translation: 提供原位气体检测的结构，包括小型光子器件，低光损耗，导波结构和状态选择性吸附涂层。 已经在不同的配置中证明了高品质因子半导体谐振器，例如微盘，微环，微环形圈和具有非常窄的NIR透射带的性质的光子晶体和高达10-9的灵敏度（复折射率的变化 指数）。 因此，器件对于器件参数的光学性质的变化非常敏感，并且可以调节为感兴趣的化学物质的吸收。 施加到装置上的合适的涂层增强状态特异性分子检测。

公开(公告)号：US20140353530A1

公开(公告)日：2014-12-04

申请号：US14290607

申请日：2014-05-29

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  BANDWIDTH10, INC.

Inventor： Connie Chang-Hasnain ,  Li Zhu ,  Weijian Yang ,  Christopher Chase ,  Yi Rao ,  Michael Chung-Yi Huang

IPC: G01J1/08

CPC classification number: H01L31/02327 ,  H01L31/0304 ,  H01L31/035236 ,  H01L31/035272 ,  H01L31/108 ,  H01L31/11 ,  H01S5/0028 ,  H01S5/18341 ,  H01S5/18366

Abstract: A dual usage HCG VCSEL detector is provided with a high contrast grating (HCG) reflector first reflector that has a two dimensional periodic structure. The two dimensional structure is a periodic structure that is a symmetric structure with periodic repeating. The symmetrical structure provides that polarization modes of light are undistinguishable. A second reflector is in an opposing relationship to the first reflector. A tunable optical cavity is between the first and second reflectors. An active region is positioned in the cavity between the first and second reflectors. The photodetector is polarization independent. An MQW light absorber is included converts light to electrons. A dual usage HCG VCSEL-detector includes a high contrast grating (HCG) reflector first reflector, and a second reflector in an opposing relationship to the first reflector. A tunable optical cavity is between the first and second reflectors. An active region is positioned in the cavity between the first and second reflectors. The dual usage HCG VCSEL-detector that operates as a dual usage HCG VCSEL and as a tunable photodetector.

Abstract translation: 双用途HCG VCSEL检测器提供有具有二维周期结构的高对比度光栅（HCG）反射器第一反射器。 二维结构是具有周期性重复的对称结构的周期性结构。 对称结构提供了光的偏振模式是不可区分的。 第二反射器与第一反射器处于相对关系。 可调谐光腔位于第一和第二反射器之间。 有源区域位于第一和第二反射器之间的空腔中。 光电探测器与偏振无关。 包括MQW光吸收器将光转换成电子。 双用途HCG VCSEL检测器包括高对比度光栅（HCG）反射器第一反射器和与第一反射器相对关系的第二反射器。 可调谐光腔位于第一和第二反射器之间。 有源区域位于第一和第二反射器之间的空腔中。 双用途HCG VCSEL检测器，作为双用途HCG VCSEL和可调谐光电探测器。

公开(公告)号：US20140123729A1

公开(公告)日：2014-05-08

申请号：US13668005

申请日：2012-11-02

Applicant: LI-COR, INC.

Inventor： Alexander Kachanov ,  Serguei Koulikov

IPC: G01N21/17

CPC classification number: G01N21/39 ,  G01N21/17 ,  G01N33/0062 ,  G01N2201/06113 ,  H01S5/0028 ,  H01S5/0085 ,  H01S5/0656

Abstract: Cavity enhanced absorption spectroscopy systems and methods for detecting trace gases using a resonance optical cavity, which contains a gas mixture to be analyzed, and a laser coupled to the cavity by optical feedback. The cavity has any of a variety of configurations with two or more mirrors, including for example a linear cavity, a v-shaped cavity and a ring optical cavity. The cavity will have multiple cavity resonant modes, or a comb of frequencies spaced apart, as determined by the parameters of the cavity, including the length of the cavity, as is well known. Systems and methods herein also allow for optimization of the cavity modes excited during a scan and/or the repetition rate.

Abstract translation: 使用包含要分析的气体混合物的共振光腔检测痕量气体的腔增强吸收光谱系统和方法，以及通过光学反馈耦合到腔的激光。 空腔具有两种或更多种反射镜的各种结构中的任何一种，包括例如线性腔，V形空腔和环形光腔。 空腔将具有多个空腔谐振模式，或者由空腔的参数确定的频率间隔开的梳子，包括空腔的长度，如众所周知的那样。 这里的系统和方法还允许优化在扫描期间激发的腔模式和/或重复率。

公开(公告)号：US20130235710A1

公开(公告)日：2013-09-12

申请号：US13774657

申请日：2013-02-22

Applicant: SONY CORPORATION

Inventor： Tsutomu Maruyama ,  Goro Fujita

IPC: H01S5/00 ,  G11B7/0045

CPC classification number: H01S5/0085 ,  G11B7/0045 ,  G11B7/127 ,  H01S5/0028 ,  H01S5/0602 ,  H01S5/06246 ,  H01S5/0657 ,  H01S5/141 ,  H01S5/22 ,  H01S5/4006

Abstract: There is provided a light source including a mode-lock laser unit that includes a semiconductor laser and an external resonator unit and emits a laser beam having a predetermined frequency, the semiconductor laser including a saturable absorber unit that applies a reverse bias voltage and a gain unit that applies a gain current, a semiconductor optical amplifier that performs amplification modulation on the laser beam emitted from the mode-lock laser unit, a laser clock generating unit that generates a laser clock synchronized with the laser beam based on a signal detected from the saturable absorber unit when the laser beam oscillates in the mode-lock laser unit, and a modulating unit that generates a driving current synchronized with the laser clock and applies the driving current to the semiconductor optical amplifier.

Abstract translation: 提供了一种光源，其包括模式锁定激光器单元，其包括半导体激光器和外部谐振器单元，并且发射具有预定频率的激光束，所述半导体激光器包括可饱和吸收器单元，其施加反向偏置电压和增益 单元，其施加增益电流;半导体光放大器，对从所述模式锁定激光器单元发射的激光束进行放大调制;激光器时钟产生单元，其基于从所述激光束检测到的信号产生与所述激光束同步的激光时钟; 激光束在模式锁定激光单元中振荡的可饱和吸收体单元，以及产生与激光时钟同步的驱动电流并向半导体光放大器施加驱动电流的调制单元。

公开(公告)号：US20130063718A1

公开(公告)日：2013-03-14

申请号：US13696640

申请日：2011-05-10

Applicant: Olivier Bernal ,  Francis Bony ,  Thierry Bosch ,  Usman Zabit

Inventor： Olivier Bernal ,  Francis Bony ,  Thierry Bosch ,  Usman Zabit

IPC: G01B11/14

CPC classification number: G01B9/02072 ,  G01B9/0207 ,  G01B9/02092 ,  G01S7/4916 ,  G01S7/497 ,  G01S17/32 ,  G01S17/50 ,  H01S5/0028 ,  H01S5/0656

Abstract: A device (10) for the optical measurement of a physical parameter includes: a laser light source (11) for generating a measurement beam in the direction of a target (20) and for receiving the measurement beam reflected by the target; the measurement beam travelling along an optical path whose variation depends on the physical parameter to be determined and the laser light source having an optical cavity (111); a motion sensor (14) for the laser light source (11); elements (15) for calculating the physical parameter from a signal measured at the laser light source (11) and a signal measured by the motion sensor (14).

Abstract translation: 用于光学测量物理参数的装置（10）包括：激光源（11），用于在目标（20）的方向上产生测量光束并用于接收由目标反射的测量光束; 所述测量光束沿着其变化取决于待确定的物理参数的光路和具有光腔（111）的激光光源传播; 用于激光光源（11）的运动传感器（14）; 用于根据在激光光源（11）处测量的信号计算物理参数的元件（15）和由运动传感器（14）测量的信号。

公开(公告)号：US07773657B2

公开(公告)日：2010-08-10

申请号：US12188840

申请日：2008-08-08

Applicant: Hideto Furuyama

Inventor： Hideto Furuyama

IPC: H01S3/03

CPC classification number: G02B6/12004 ,  H01S5/0028 ,  H01S5/0608 ,  H01S5/10 ,  H01S5/101 ,  H01S5/1025 ,  H01S5/1046 ,  H01S5/1203 ,  H01S5/20 ,  H01S5/4031 ,  H01S5/4056

Abstract: A laser-induced optical wiring apparatus includes a substrate, first and second light-reflecting members provided on the substrate separately from each other, an optical waveguide provided on the substrate for optically coupling the first and second light-reflecting members to form an optical resonator, a first optical gain member provided across the optical waveguide and forming a laser oscillator along with the first and second light-reflecting members, and a second optical gain member provided across the optical waveguide separately from the first optical gain member, and forming another laser oscillator along with the first and second light-reflecting members.

Abstract translation: 激光诱导光线路装置包括：基板，分别设置在基板上的第一和第二光反射部件，设置在基板上的光波导，用于光耦合第一和第二光反射部件，以形成光谐振器 设置在所述光波导上并与所述第一和第二光反射部件一起形成激光振荡器的第一光学增益部件和与所述第一光学增益部件分开设置在所述光波导上的第二光学增益部件，以及形成另一激光器 振荡器以及第一和第二光反射部件。