公开(公告)号：US20070296426A1

公开(公告)日：2007-12-27

申请号：US11746530

申请日：2007-05-09

申请人： SRIRAM KRISHNASWAMI ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin Johnston ,  Hung Nguyen ,  Ludwig Ledl ,  Ralf Schmid

发明人： SRIRAM KRISHNASWAMI ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin Johnston ,  Hung Nguyen ,  Ludwig Ledl ,  Ralf Schmid

IPC分类号： G01R31/02

CPC分类号： G01R31/2887 ,  G09G3/006 ,  G09G3/3208 ,  G09G3/3611

摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案，而不从测试台移除探测器组件。

公开(公告)号：US07319335B2

公开(公告)日：2008-01-15

申请号：US10889695

申请日：2004-07-12

申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC分类号： G01R31/305

CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

公开(公告)号：US07847566B2

公开(公告)日：2010-12-07

申请号：US11940432

申请日：2007-11-15

申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC分类号： G01R31/26

CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.

摘要翻译： 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

公开(公告)号：US20050179451A1

公开(公告)日：2005-08-18

申请号：US10889695

申请日：2004-07-12

申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

公开(公告)号：US20080061807A1

公开(公告)日：2008-03-13

申请号：US11940432

申请日：2007-11-15

申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC分类号： G01R31/02

CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.

摘要翻译： 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

公开(公告)号：US20050179452A1

公开(公告)日：2005-08-18

申请号：US10903216

申请日：2004-07-30

申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

CPC分类号： G01R1/07364 ,  G01R31/2893 ,  G01R31/305 ,  G09G3/006

摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.

摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

公开(公告)号：US20070296437A1

公开(公告)日：2007-12-27

申请号：US11746515

申请日：2007-05-09

申请人： Benjamin Johnston ,  Sriram Krishnaswami ,  Hung Nguyen ,  Matthias Brunner ,  Yong Liu

发明人： Benjamin Johnston ,  Sriram Krishnaswami ,  Hung Nguyen ,  Matthias Brunner ,  Yong Liu

IPC分类号： G01R31/02

CPC分类号： G01R31/2808 ,  G09G3/006

摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

公开(公告)号：US20120113559A1

公开(公告)日：2012-05-10

申请号：US13288743

申请日：2011-11-03

申请人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Paul Bocian ,  Matthias Brunner ,  Bernhard G. Mueller

发明人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Paul Bocian ,  Matthias Brunner ,  Bernhard G. Mueller

IPC分类号： H05F3/00

CPC分类号： H01L21/67748 ,  H01L21/6831 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： Embodiments of the invention relate to methods and apparatus for minimizing electrostatic discharge in processing and testing systems utilizing large area substrates in the production of flat panel displays, solar panels, and the like. In one embodiment, an apparatus is described. The apparatus includes a testing chamber, a substrate support disposed in the testing chamber, the substrate support having a substrate support surface, a structure disposed in the testing chamber, the structure having a length that spans a width of the substrate support surface, the structure being linearly movable relative to the substrate support, and a brush device having a plurality of conductive bristles coupled to the structure and spaced a distance away from the substrate support surface of the substrate support, the brush device electrically coupling the support surface to ground through the structure.

摘要翻译： 本发明的实施例涉及在平板显示器，太阳能电池板等的生产中利用大面积基板的处理和测试系统中的静电放电最小化的方法和装置。 在一个实施例中，描述了一种装置。 该装置包括测试室，设置在测试室中的衬底支撑件，衬底支撑件具有衬底支撑表面，设置在测试室中的结构，该结构具有跨过衬底支撑表面的宽度的长度，该结构 相对于衬底支撑件可线性移动;以及刷子装置，其具有耦合到该结构并且离开衬底支撑件的衬底支撑表面间隔一定距离的多个导电刷毛，刷装置通过 结构体。

公开(公告)号：US07372250B2

公开(公告)日：2008-05-13

申请号：US10782503

申请日：2004-02-19

申请人： Shinichi Kurita ,  Emanuel Beer ,  Edgar Kehrberg ,  Matthias Brunner

发明人： Shinichi Kurita ,  Emanuel Beer ,  Edgar Kehrberg ,  Matthias Brunner

IPC分类号： G01R31/02 ,  G01R31/28

CPC分类号： H01L21/67265 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/70791 ,  G03F9/7011

摘要： A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.

摘要翻译： 感测系统包括围绕适于支撑衬底的平台间隔设置的多个探针。 每个探针包括适于从已知起始位置移动到由所述载物台支撑的所述基底的边缘的检测部分; 在衬底由载物台支撑的同时检测衬底的边缘; 在所述检测之后产生检测信号; 并且在所述检测之后停止移动到基板的边缘。 控制器可以基于每个检测部分的已知开始位置并且基于由每个检测部分生成的检测信号来确定基板相对于载物台的边缘位置。 提供了许多其他方面。

公开(公告)号：US20060022694A1

公开(公告)日：2006-02-02

申请号：US10901936

申请日：2004-07-29

申请人： Matthias Brunner ,  Shinichi Kurita ,  Wendell Blonigan ,  Edgar Kehrberg

发明人： Matthias Brunner ,  Shinichi Kurita ,  Wendell Blonigan ,  Edgar Kehrberg

IPC分类号： G01R31/26

CPC分类号： H01J37/185 ,  G01R31/2886 ,  H01J2237/204

摘要： A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.

摘要翻译： 提供了用于测试一个或多个大基板的方法和系统。 在一个或多个实施例中，系统包括具有设置在其中的衬底台的测试室。 衬底台适于在各个方向上移动测试室内的衬底。 更具体地，衬底台包括可在第一方向上移动的第一阶段和沿第二方向移动的第二阶段，其中每个阶段沿X方向，Y方向或X方向和Y方向两者移动。 该系统还包括至少部分地设置在测试室下方的负载锁定室和耦合到负载锁定室和测试室的传送室。 在一个或多个实施例中，传送室包括设置在其中的机器人，其适于在载荷锁定室和测试室之间传送基板。