公开(公告)号：US10984979B2

公开(公告)日：2021-04-20

申请号：US16475726

申请日：2018-01-25

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shin Imamura ,  Takashi Ohshima ,  Tomonobu Tsuchiya ,  Hajime Kawano ,  Shahedul Hoque ,  Shunsuke Mizutani ,  Makoto Suzuki

IPC: G01T1/20 ,  H01J37/244 ,  G01N23/2258 ,  H01J37/28 ,  H01J49/02

Abstract: The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x

公开(公告)号：US20140197725A1

公开(公告)日：2014-07-17

申请号：US14239144

申请日：2012-09-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Souichi Katagiri ,  Takashi Ohshima ,  Sukehiro Ito

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J1/16 ,  H01J1/3044 ,  H01J9/025 ,  H01J9/04 ,  H01J37/06 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source.

Abstract translation: 增加作为扩散源和供应源的氧化锆的体积或重量，延长场致发射型电子源的寿命引起扩散和供给源本身或钨针容易受到损伤的问题。 作为另一个问题，虽然考虑使用薄膜形成扩散和供应源以避免上述问题，但是难以稳定地获得超过8000小时的实际寿命。 已经发现，通过提供在扩散和供给源中不产生切屑或裂纹的场发射型电子源，可以稳定地获得超过8000小时的实际寿命，并且可以延长使用寿命，同时增加使用量 扩散和供应源。

公开(公告)号：US10134564B2

公开(公告)日：2018-11-20

申请号：US15527562

申请日：2015-11-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Taiga Okumura ,  Takashi Ohshima ,  Yuusuke Oominami ,  Minami Shouji ,  Akiko Hisada ,  Akio Yoneyama

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

Abstract: Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

公开(公告)号：US09570268B2

公开(公告)日：2017-02-14

申请号：US14787263

申请日：2014-04-14

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuta Imai ,  Takashi Ohshima ,  Hideo Morishita

IPC: H01J29/28 ,  H01J29/00 ,  H01J27/02 ,  H01J37/073 ,  H01J27/26 ,  H01J37/063 ,  H01J37/08 ,  H01J37/28 ,  H01J37/06 ,  H01J29/48 ,  H01J37/145 ,  H01J37/20

CPC classification number: H01J37/073 ,  H01J27/02 ,  H01J27/26 ,  H01J29/481 ,  H01J37/06 ,  H01J37/063 ,  H01J37/08 ,  H01J37/145 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/062 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0802 ,  H01J2237/1508 ,  H01J2237/2007 ,  H01J2237/2801

Abstract: The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.

Abstract translation: 本发明的目的是提供一种仅使用静电透镜的带电粒子枪，所述带电粒子枪相对较小并且具有较小的像差，并且提供即使具有高电流也具有高亮度的场致发射型带电粒子枪 。 该带电粒子枪具有：带电粒子源; 加速电极，其加速从带电粒子源发射的带电粒子; 控制电极，其设置成比加速电极更加朝向带电粒子源侧，并且具有比加速电极的开口直径大的孔径; 以及控制单元，其基于对加速电极施加的电位控制施加到控制电极的电位。