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    MEMS APPARATUS HAVING IMPACT ABSORBER
    11.
    发明申请
    MEMS APPARATUS HAVING IMPACT ABSORBER 审中-公开

    公开(公告)号：US20180186624A1

    公开(公告)日：2018-07-05

    申请号：US15393268

    申请日：2016-12-29

    Applicant: Industrial Technology Research Institute

    Inventor： Yu-Wen Hsu ,  Chin-Fu Kuo ,  Chao-Ta Huang

    IPC: B81B3/00

    CPC classification number: B81B3/0072

    Abstract: A MEMS apparatus includes a substrate, a cover disposed on the substrate, a movable mass disposed on the substrate, and an impact absorber disposed on the cover. The impact absorber includes a restraint, a stationary stopper disposed on a lower surface of the cover, a movable stopper, elastic elements connecting the restraint and the movable stopper, a supporting element connecting the restraint and the stationary stopper, and a space disposed between the stationary stopper and the movable stopper. The impact absorber is adapted to prevent the movable mass from impacting the cover. In addition, the supporting element may be made of an electrical insulation material to reduce electrostatic interaction between the movable mass and the movable stopper.

    MEMS apparatus having impact absorber
    12.
    发明授权
    MEMS apparatus having impact absorber 有权

    公开(公告)号：US10011476B1

    公开(公告)日：2018-07-03

    申请号：US15393268

    申请日：2016-12-29

    Applicant: Industrial Technology Research Institute

    Inventor： Yu-Wen Hsu ,  Chin-Fu Kuo ,  Chao-Ta Huang

    IPC: B81B3/00

    Abstract: A MEMS apparatus includes a substrate, a cover disposed on the substrate, a movable mass disposed on the substrate, and an impact absorber disposed on the cover. The impact absorber includes a restraint, a stationary stopper disposed on a lower surface of the cover, a movable stopper, elastic elements connecting the restraint and the movable stopper, a supporting element connecting the restraint and the stationary stopper, and a space disposed between the stationary stopper and the movable stopper. The impact absorber is adapted to prevent the movable mass from impacting the cover. In addition, the supporting element may be made of an electrical insulation material to reduce electrostatic interaction between the movable mass and the movable stopper.

    Pressure sensor with calibration device and calibration method thereof
    14.
    发明授权
    Pressure sensor with calibration device and calibration method thereof 有权

    公开(公告)号：US11630020B2

    公开(公告)日：2023-04-18

    申请号：US17371102

    申请日：2021-07-09

    Applicant: Industrial Technology Research Institute

    Inventor： Che-Kai Yeh ,  Tzung-Ching Lee ,  Yu-Wen Hsu ,  Chao-Ta Huang

    IPC: G01L27/00 ,  G01L19/14 ,  G01L19/00

    Abstract: A pressure sensor with calibration device includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes the pressure applied to the medium. The pressure sensor with calibration device adjusts the pressure value sensed by the sensing element via the calibration element.

    MEMS device with movable stage
    15.
    发明授权
    MEMS device with movable stage 有权

    公开(公告)号：US10730744B2

    公开(公告)日：2020-08-04

    申请号：US16235054

    申请日：2018-12-28

    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

    Inventor： Yu-Wen Hsu ,  Che-Kai Yeh ,  Chin-Fu Kuo ,  Chao-Ta Huang

    IPC: B81B3/00 ,  B81B7/00 ,  H02N1/00 ,  H04N5/232

    Abstract: A MEMS device includes a substrate, at least one anchor disposed on the substrate, a movable stage, a sensing chip disposed on the movable stage, and at least one elastic member connected with the movable stage and the anchor. The movable stage includes at least one electrode and at least one conductive connecting layer. The sensing chip includes at least one electrical interconnection connected with the conductive connecting layer. The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer disposed between the first electrical channel and the second electrical channel. The first electrical channel is electrically connected with the electrical interconnection, and the second electrical channel is electrically connected with the electrode.

    Microelectromechanical apparatus having a measuring range selector
    16.
    发明授权
    Microelectromechanical apparatus having a measuring range selector 有权

    公开(公告)号：US10203252B2

    公开(公告)日：2019-02-12

    申请号：US15393254

    申请日：2016-12-29

    Applicant: Industrial Technology Research Institute

    Inventor： Yu-Wen Hsu ,  Feng-Chia Hsu ,  Chao-Ta Huang ,  Shih-Ting Lin

    IPC: G01K7/00 ,  G01K1/00 ,  G01K7/22 ,  B81B7/02 ,  G01K1/02 ,  B81B7/00

    Abstract: A MEMS apparatus having measuring range selector including a sensor and an IC chip is provided. The sensor includes a sensing device. The IC chip includes a voltage range selector, an analog front end, a control device and an A/D converter. The sensing device is configured to detect the physical quantity and generate a sensing voltage. The voltage range selector is configured to select a sub-voltage range having a first upper-bound and a first lower-bound. The analog front end is configured to receive the sensing voltage and output a first voltage. The A/D converter has a full scale voltage range having a second lower-bound and a second upper-bound. A ratio of the full scale voltage range to the sub-voltage range is defined as a gain factor. A difference obtained by subtracting the first lower-bound from the first voltage is defined as a shift factor. The control device is configured to adjust the first voltage to the second voltage according to the gain factor and the shift factor.

    MICRO-ELECTRO MECHANICAL APPARATUS WITH INTERDIGITATED SPRING
    18.
    发明申请
    MICRO-ELECTRO MECHANICAL APPARATUS WITH INTERDIGITATED SPRING 有权
    微电子机械装置与间隙弹簧

    公开(公告)号：US20140245832A1

    公开(公告)日：2014-09-04

    申请号：US14151843

    申请日：2014-01-10

    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

    Inventor： Shih-Chieh Lin ,  Chao-Ta Huang ,  Chung-Yuan Su ,  Yu-Wen Hsu

    IPC: G01P15/08

    CPC classification number: G01P15/125 ,  G01P2015/0814 ,  G01P2015/0857

    Abstract: A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.

    Abstract translation: 提供了具有叉指弹簧的微机电装置，其包括基板，至少一个第一质量块，可动电极，固定电极，锚和叉指弹簧。 可移动电极沿轴向设置在质量块上。 固定电极沿着轴向设置在基板上，可动电极和固定电极之间具有临界间隙。 交叉弹簧沿着轴向连接质量块和锚固件。 叉指弹簧包括第一折叠部分，第一连接部分，第二折叠部分和第二连接部分。 每个第一折叠部分包括两个第一跨度和第一头部。 每个第二折叠部分包括两个第二跨度和第二头部。 第一跨度的宽度和第二跨度的宽度分别大于临界间隙。

    Ball screw with force sensor in radial direction
    20.
    发明授权
    Ball screw with force sensor in radial direction 有权

    公开(公告)号：US10914368B2

    公开(公告)日：2021-02-09

    申请号：US16221615

    申请日：2018-12-17

    Applicant: Industrial Technology Research Institute

    Inventor： Chih-Yuan Chen ,  Chung-Yuan Su ,  Chien-Nan Yeh ,  Chao-Ta Huang ,  Yu-Wen Hsu

    IPC: F16H25/22 ,  F16H57/01 ,  G01L5/00

    Abstract: A ball screw with force sensor in radial direction including a screw rod, a screw nut, a plurality of balls, and a force sensor is provided. The screw nut has a cavity. The cavity is extended along a radial direction from an outer surface of the screw nut. The force sensor is disposed in the cavity of the screw nut, and the force sensor includes a stationary base and an elastic component. The stationary base includes a displacement restraint, and the elastic component includes a contact end and a fixed end. The displacement restraint is coupled to the cavity to prevent the stationary base from being displaced in the radial direction for fixing stationary base firmly in the cavity. The fixed end is connected to the stationary base, and the contact end contacts a bottom surface of the cavity in order to sense a force along the radial direction.

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