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公开(公告)号：US20140170049A1
公开(公告)日：2014-06-19
申请号：US13715988
申请日：2012-12-14
Applicant: INTERMOLECULAR, INC.
Inventor： Guowen Ding , Mohd Fadzli Anwar Hassan , Minh Huu Le , Zhi-Wen Sun , Yu Wang
CPC classification number: B05D5/061 , C01B35/10 , C03C17/245 , C03C2217/21 , C03C2217/732 , C03C2218/155 , C23C14/0036 , C23C14/08 , C23C14/14 , C23C14/18 , C23C14/34 , G02B1/113
Abstract: A method for forming boron oxide films formed using reactive sputtering. The boron oxide films are candidates as an anti-reflection coating. Boron oxide films with a refractive index of about 1.38 can be formed. The boron oxide films can be formed using power densities between 2 W/cm2 and 11 W/cm2 applied to the target. The oxygen in the reactive sputtering atmosphere can be between 40 volume % and 90 volume %.
Abstract translation: 一种用反应溅射形成氧化硼膜的方法。 氧化硼膜是抗反射涂层的候选物。 可以形成折射率为约1.38的氧化硼膜。 可以使用施加到目标的2W / cm 2和11W / cm 2之间的功率密度来形成氧化硼膜。 反应性溅射气氛中的氧可以在40体积％至90体积％之间。
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12.发明授权Base-layer consisting of two materials layer with extreme high/low index in low-e coating to improve the neutral color and transmittance performance 有权基层由低e涂层中具有极高/低折射率的两层材料层组成，以改善中性色和透光性能公开(公告)号：US09365450B2
公开(公告)日：2016-06-14
申请号：US13728042
申请日：2012-12-27
Applicant: Intermolecular Inc. , Guardian Industries Corp.
Inventor： Guowen Ding , Brent Boyce , Muhammad Imran , Minh Huu Le , Zhi-Wen Sun , Yu Wang , Yongli Xu
IPC: C03C17/36
CPC classification number: C03C17/36 , C03C17/3618 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C2217/734 , Y10T428/24975
Abstract: Low emissivity coated panels can be fabricated using a base layer having a low refractive index layer on a high refractive index layer. The low refractive index layer can have refractive index less than 1.5, and can include MgF2, CaF2, SiO2, or BO. The high refractive index layer can have refractive index greater than 2.3, and can include TiOx, NbOx, or BiOx. The multilayer base structure can allow color tuning with enhanced transmission, for example, as compared to similar structures having single layer base layer.
Abstract translation: 可以使用在高折射率层上具有低折射率层的基底层来制造低发射率涂层面板。 低折射率层可以具有小于1.5的折射率，并且可以包括MgF 2，CaF 2，SiO 2或BO。 高折射率层可以具有大于2.3的折射率，并且可以包括TiO x，NbO x或BiO x。 与具有单层基底层的类似结构相比，多层基底结构可以允许具有增强的透射率的颜色调节。
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13.发明授权Systems, methods, and apparatus for production coatings of low-emissivity glass 有权低辐射玻璃生产涂料的系统，方法和装置公开(公告)号：US09309149B2
公开(公告)日：2016-04-12
申请号：US14144828
申请日：2013-12-31
Applicant: Intermolecular Inc.
Inventor： Guowen Ding , Brent Boyce , Jeremy Cheng , Jose Ferreira , Muhammad Imran , Minh Huu Le , Daniel Schweigert , Yu Wang , Yongli Xu , Guizhen Zhang
CPC classification number: C03C17/366 , C03C17/3435 , C03C17/36 , C03C17/3613 , C03C17/3618 , C03C17/3626 , C03C17/3639 , C03C17/3644 , C03C17/3681 , C03C25/226 , C03C2218/155 , C23C14/0036 , C23C14/0652 , C23C14/0688 , C23C14/083 , C23C14/086
Abstract: Disclosed herein are systems, methods, and apparatus for forming a low emissivity panel. In various embodiments, a partially fabricated panel may be provided. The partially fabricated panel may include a substrate, a reflective layer formed over the substrate, and a top dielectric layer formed over the reflective layer such that the reflective layer is formed between the substrate and the top dielectric layer. The top dielectric layer may include tin having an oxidation state of +4. An interface layer may be formed over the top dielectric layer. A top diffusion layer may be formed over the interface layer. The top diffusion layer may be formed in a nitrogen plasma environment. The interface layer may substantially prevent nitrogen from the nitrogen plasma environment from reaching the top dielectric layer and changing the oxidation state of tin included in the top dielectric layer.
Abstract translation: 本文公开了用于形成低发射率面板的系统，方法和装置。 在各种实施例中，可以提供部分制造的面板。 部分制造的面板可以包括衬底，在衬底上形成的反射层，以及形成在反射层上的顶部电介质层，使得反射层形成在衬底和顶部电介质层之间。 顶部电介质层可以包括具有+4的氧化态的锡。 界面层可以形成在顶部介电层上。 可以在界面层上形成顶部扩散层。 顶部扩散层可以在氮等离子体环境中形成。 界面层可以基本上防止来自氮等离子体环境的氮到达顶部电介质层并改变顶部电介质层中包含的锡的氧化态。
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公开(公告)号：US09206078B2
公开(公告)日：2015-12-08
申请号：US13801635
申请日：2013-03-13
Applicant: Intermolecular Inc.
Inventor： Guizhen Zhang , Jeremy Cheng , Guowen Ding , Minh Huu Le , Daniel Schweigert , Yu Wang
CPC classification number: C23C14/22 , C03C17/36 , C03C17/3605 , C03C17/3618 , C03C17/3644 , C03C17/3652 , C03C17/366 , C03C17/3681 , C23C14/0036 , C23C14/042 , C23C14/14 , C23C14/34 , G02B1/12 , G02B1/14 , Y10T428/12542 , Y10T428/12549 , Y10T428/12611 , Y10T428/12778 , Y10T428/31678
Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium—25-30%, titanium and aluminum—30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
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15.发明授权Electrochromic device with improved transparent conductor and method for forming the same 有权具有改进的透明导体的电致变色器件及其形成方法公开(公告)号：US09081245B2
公开(公告)日：2015-07-14
申请号：US14102768
申请日：2013-12-11
Applicant: Intermolecular, Inc.
Inventor： Minh Huu Le , Thai Cheng Chua , Guowen Ding , Minh Anh Nguyen , Yu Wang , Guizhen Zhang
CPC classification number: G02F1/155
Abstract: Embodiments provided herein describe electrochromic devices and methods for forming electrochromic devices. The electrochromic devices include a transparent substrate, a transparent conducting oxide layer coupled to the transparent substrate, and a layer of electrochromic material coupled to the transparent conducting oxide layer. The transparent conducting oxide layer includes indium and zinc.
Abstract translation: 本文提供的实施例描述了用于形成电致变色器件的电致变色器件和方法。 电致变色器件包括透明衬底，耦合到透明衬底的透明导电氧化物层和耦合到透明导电氧化物层的电致变色材料层。 透明导电氧化物层包括铟和锌。
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Patent Agency Ranking
公开(公告)号：US09052456B2
公开(公告)日：2015-06-09
申请号：US13797412
申请日：2013-03-12
Applicant: Intermolecular Inc.
Inventor： Mohd Fadzli Anwar Hassan , Brent Boyce , Guowen Ding , Muhammad Imran , Minh Huu Le , Zhi-Wen Wen Sun , Yu Wang , Yongli Xu
CPC classification number: C03C17/23 , C03C17/06 , C03C17/34 , C03C17/36 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C2217/211 , C03C2217/24 , C30B23/00 , C30B25/00 , G02B5/208 , G02B5/285 , Y10T428/24868 , Y10T428/24975 , Y10T428/265
Abstract: A bi-layer seed layer can exhibit good seed property for an infrared reflective layer, together with improved thermal stability. The bi-layer seed layer can include a thin zinc oxide layer having a desired crystallographic orientation for a silver infrared reflective layer disposed on a bottom layer having a desired thermal stability. The thermal stable layer can include aluminum, magnesium, or bismuth doped tin oxide (AlSnO, MgSnO, or BiSnO), which can have better thermal stability than zinc oxide but poorer lattice matching for serving as a seed layer template for silver (111).
Abstract translation: 双层种子层可以表现出良好的红外反射层的种子性质以及改进的热稳定性。 双层种子层可以包括具有设置在具有期望的热稳定性的底层上的银红外反射层的所需晶体取向的薄氧化锌层。 热稳定层可以包括铝，镁或铋掺杂的氧化锡（AlSnO，MgSnO或BiSnO），其可以比氧化锌具有更好的热稳定性，但是用作银（111）的种子层模板更差的晶格匹配。
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公开(公告)号：US20140272455A1
公开(公告)日：2014-09-18
申请号：US13797504
申请日：2013-03-12
Applicant: INTERMOLECULAR INC.
Inventor： Guowen Ding , Brent Boyce , Jeremy Cheng , Muhammad Imran , Jingyu Lao , Minh Huu Le , Daniel Schweigert , Zhi-Wen Wen Sun , Yu Wang , Yongli Xu , Guizhen Zhang
CPC classification number: C23C14/083 , C03C17/3615 , C03C17/3618 , C03C17/3644 , C03C17/366 , C23C14/0036 , C23C14/08 , C23C14/185 , C23C14/3464 , G02B5/0875 , G02B5/208 , Y10T428/12611
Abstract: A method for making low emissivity panels, including control the composition of a barrier layer formed on a thin conductive silver layer. The barrier structure can include a ternary alloy of titanium, nickel and niobium, which showed improvements in overall performance than those from binary barrier results. The percentage of titanium can be between 5 and 15 wt %. The percentage of nickel can be between 30 and 50 wt %. The percentage of niobium can be between 40 and 60 wt %.
Abstract translation: 一种制造低发射率面板的方法，包括控制形成在薄导电银层上的阻挡层的组成。 阻挡结构可以包括钛，镍和铌的三元合金，其显示出比来自二元屏障结果的整体性能的改善。 钛的百分比可以在5和15重量％之间。 镍的百分比可以在30-50重量％之间。 铌的百分比可以在40至60重量％之间。
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公开(公告)号：US20140272335A1
公开(公告)日：2014-09-18
申请号：US13797412
申请日：2013-03-12
Applicant: INTERMOLECULAR INC.
Inventor： Mohd Fadzli Anwar Hassan , Brent Boyce , Guowen Ding , Muhammad Imran , Minh Huu Le , Zhi-Wen Wen Sun , Yu Wang , Yongli Xu
CPC classification number: C03C17/23 , C03C17/06 , C03C17/34 , C03C17/36 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C2217/211 , C03C2217/24 , C30B23/00 , C30B25/00 , G02B5/208 , G02B5/285 , Y10T428/24868 , Y10T428/24975 , Y10T428/265
Abstract: A bi-layer seed layer can exhibit good seed property for an infrared reflective layer, together with improved thermal stability. The bi-layer seed layer can include a thin zinc oxide layer having a desired crystallographic orientation for a silver infrared reflective layer disposed on a bottom layer having a desired thermal stability. The thermal stable layer can include aluminum, magnesium, or bismuth doped tin oxide (AlSnO, MgSnO, or BiSnO), which can have better thermal stability than zinc oxide but poorer lattice matching for serving as a seed layer template for silver (111).
Abstract translation: 双层种子层可以表现出良好的红外反射层的种子性质以及改进的热稳定性。 双层种子层可以包括具有设置在具有期望的热稳定性的底层上的银红外反射层的所需晶体取向的薄氧化锌层。 热稳定层可以包括铝，镁或铋掺杂的氧化锡（AlSnO，MgSnO或BiSnO），其可以比氧化锌具有更好的热稳定性，但是用作银（111）的种子层模板更差的晶格匹配。
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19.发明申请Method to Extend Single Wavelength Ellipsometer to Obtain Spectra of Refractive Index 有权扩展单波长椭偏仪以获得折射率光谱的方法公开(公告)号：US20140185034A1
公开(公告)日：2014-07-03
申请号：US13727854
申请日：2012-12-27
Applicant: Intermolecular Inc.
Inventor： Guowen Ding , Brent Boyce , Mohd Fadzli Anwar Hassan , Minh Huu Le , Zhi-Wen Wen Sun , Yu Wang
IPC: G01N21/41
CPC classification number: G01N21/4133 , G01N21/211 , G01N21/41
Abstract: Methods are provided to use data obtained from a single wavelength ellipsometer to determine the refractive index of materials as a function of wavelength for thin conductive films. The methods may be used to calculate the refractive index spectrum as a function of wavelength for thin films of metals, and conductive materials such as conductive metal nitrides or conductive metal oxides.
Abstract translation: 提供了使用从单个波长椭偏仪获得的数据来确定作为薄导电膜的波长的函数的材料的折射率的方法。 该方法可用于计算作为金属薄膜和导电材料如导电金属氮化物或导电金属氧化物的波长的函数的折射率谱。
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公开(公告)号：US09448345B2
公开(公告)日：2016-09-20
申请号：US13725126
申请日：2012-12-21
Applicant: Intermolecular Inc. , Guardian Industries Corp.
Inventor： Mohd Fadzli Anwar Hassan , Brent Boyce , Guowen Ding , Minh Huu Le , Zhi-Wen Wen Sun , Yu Wang , Yongli Xu
CPC classification number: G02B5/208 , C03C17/36 , C03C17/3644 , C03C17/3649 , C03C17/3652 , C03C17/366 , C03C17/40 , G02B5/282
Abstract: A method for making low emissivity panels, including control the composition of a barrier layer formed on a thin conductive silver layer. The barrier structure can include an alloy of a first element having high oxygen affinity with a second element having low oxygen affinity. The first element can include Ta, Nb, Zr, Hf, Mn, Y, Si, and Ti, and the second element can include Ru, Ni, Co, Mo, and W, which can have low oxygen affinity property. The alloy barrier layer can reduce optical absorption in the visible range, can provide color-neutral product, and can improve adhesion to the silver layer.
Abstract translation: 一种制造低发射率面板的方法，包括控制形成在薄导电银层上的阻挡层的组成。 阻挡结构可以包括具有高氧亲和力的第一元素与具有低氧亲合力的第二元素的合金。 第一元素可以包括Ta，Nb，Zr，Hf，Mn，Y，Si和Ti，第二元素可以包括可以具有低氧亲和性的Ru，Ni，Co，Mo和W。 合金阻挡层可以减少可见光范围内的光吸收，可以提供颜色中性的产品，并可以提高对银层的粘附性。
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