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公开(公告)号:US08617992B2
公开(公告)日:2013-12-31
申请号:US13427091
申请日:2012-03-22
申请人: Aditi Chandra , Arvind Kamath , James Montague Cleeves , Joerg Rockenberger , Mao Takashima , Erik Scher
发明人: Aditi Chandra , Arvind Kamath , James Montague Cleeves , Joerg Rockenberger , Mao Takashima , Erik Scher
IPC分类号: H01L21/44
CPC分类号: H01L21/288 , H01L21/28518 , H01L21/32051 , H01L21/32053 , H01L21/76838 , H01L21/76873 , H01L21/76895 , H01L27/1285 , H01L27/1292 , H01L29/458 , H01L29/78618 , H01L2924/0002 , H01L2924/00
摘要: Methods of forming contacts (and optionally, local interconnects) using an ink comprising a silicide-forming metal, electrical devices such as diodes and/or transistors including such contacts and (optional) local interconnects, and methods for forming such devices are disclosed. Electrical devices, such as diodes and transistors may be made using such printed contact and/or local interconnects. A metal ink may be printed for contacts as well as for local interconnects at the same time, or in the alternative, the printed metal can act as a seed for electroless deposition of other metals if different metals are desired for the contact and the interconnect lines. This approach advantageously reduces the number of processing steps and does not necessarily require any etching.
摘要翻译: 公开了使用包含硅化物形成金属的油墨形成触点(和任选的局部互连)的方法,诸如二极管和/或包括这种触点的晶体管的电气器件,(可选的)局部互连)以及用于形成这种器件的方法。 可以使用这种印刷的接触和/或局部互连来制造电子器件,例如二极管和晶体管。 金属墨水可以同时印刷以用于接触以及局部互连,或者替代地,如果需要用于接触和互连线的不同金属,印刷金属可以用作其它金属的无电沉积的种子 。 这种方法有利地减少了处理步骤的数量,并且不一定需要任何蚀刻。
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公开(公告)号:US08530589B2
公开(公告)日:2013-09-10
申请号:US12114741
申请日:2008-05-02
申请人: Erik Scher , Steven Molesa , Joerg Rockenberger , Arvind Kamath , Ikuo Mori
发明人: Erik Scher , Steven Molesa , Joerg Rockenberger , Arvind Kamath , Ikuo Mori
CPC分类号: C09D5/24 , C09D11/101 , C09D11/322 , C09D11/36 , C09D11/54 , H01B3/02 , H01L21/02532 , H01L21/02601 , H01L21/02628 , H01L21/28008 , H01L27/1292 , H01L29/6675 , H01L29/78696 , Y10T428/24802
摘要: Embodiments relate to printing features from an ink containing a material precursor. In some embodiments, the material includes an electrically active material, such as a semiconductor, a metal, or a combination thereof. In another embodiment, the material includes a dielectric. The embodiments provide improved printing process conditions that allow for more precise control of the shape, profile and dimensions of a printed line or other feature. The composition(s) and/or method(s) improve control of pinning by increasing the viscosity and mass loading of components in the ink. An exemplary method thus includes printing an ink comprising a material precursor and a solvent in a pattern on the substrate; precipitating the precursor in the pattern to form a pinning line; substantially evaporating the solvent to form a feature of the material precursor defined by the pinning line; and converting the material precursor to the patterned material.
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公开(公告)号:US08304780B2
公开(公告)日:2012-11-06
申请号:US12797274
申请日:2010-06-09
IPC分类号: H01L29/10 , H01L29/76 , H01L31/036 , H01L31/112
CPC分类号: H01L21/316 , H01L21/02211 , H01L21/02288 , H01L21/02318 , H01L21/3165 , H01L27/1285 , H01L27/1292 , H01L29/66757 , H01L29/78621
摘要: A method for making an electronic device, such as a MOS transistor, including the steps of forming a plurality of semiconductor islands on an electrically functional substrate, printing a first dielectric layer on or over a first subset of the semiconductor islands and optionally a second dielectric layer on or over a second subset of the semiconductor islands, and annealing. The first dielectric layer contains a first dopant, and the (optional) second dielectric layer contains a second dopant different from the first dopant. The dielectric layer(s), semiconductor islands and substrate are annealed sufficiently to diffuse the first dopant into the first subset of semiconductor islands and, when present, the second dopant into the second subset of semiconductor islands.
摘要翻译: 一种用于制造诸如MOS晶体管的电子器件的方法,包括以下步骤:在电功能衬底上形成多个半导体岛,在第一半导体岛子集上或第二子体上印刷第一介电层, 在半导体岛的第二子集上或之上,以及退火。 第一介电层包含第一掺杂剂,并且(任选的)第二介电层包含不同于第一掺杂剂的第二掺杂剂。 电介质层,半导体岛和衬底被充分退火以将第一掺杂剂扩散到半导体岛的第一子集中,并且当存在时将第二掺杂剂扩散到半导体岛的第二子集中。
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公开(公告)号:US07767520B2
公开(公告)日:2010-08-03
申请号:US11888949
申请日:2007-08-03
IPC分类号: H01L21/8242
CPC分类号: H01L21/316 , H01L21/02211 , H01L21/02288 , H01L21/02318 , H01L21/3165 , H01L27/1285 , H01L27/1292 , H01L29/66757 , H01L29/78621
摘要: A method for making an electronic device, such as a MOS transistor, including the steps of forming a plurality of semiconductor islands on an electrically functional substrate, printing a first dielectric layer on or over a first subset of the semiconductor islands and optionally a second dielectric layer on or over a second subset of the semiconductor islands, and annealing. The first dielectric layer contains a first dopant, and the (optional) second dielectric layer contains a second dopant different from the first dopant. The dielectric layer(s), semiconductor islands and substrate are annealed sufficiently to diffuse the first dopant into the first subset of semiconductor islands and, when present, the second dopant into the second subset of semiconductor islands.
摘要翻译: 一种用于制造诸如MOS晶体管的电子器件的方法,包括以下步骤:在电功能衬底上形成多个半导体岛,在第一半导体岛子集上或第二子体上印刷第一介电层, 在半导体岛的第二子集上或之上,以及退火。 第一介电层包含第一掺杂剂,并且(任选的)第二介电层包含不同于第一掺杂剂的第二掺杂剂。 电介质层,半导体岛和衬底被充分退火以将第一掺杂剂扩散到半导体岛的第一子集中,并且当存在时将第二掺杂剂扩散到半导体岛的第二子集中。
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公开(公告)号:US20080042212A1
公开(公告)日:2008-02-21
申请号:US11888942
申请日:2007-08-03
IPC分类号: H01L27/092
CPC分类号: H01L27/12 , H01L27/1292 , H01L29/78618
摘要: An electronic device, including a substrate, a plurality of first semiconductor islands on the substrate, a plurality of second semiconductor islands on the substrate, a first dielectric film on the first subset of the semiconductor islands, second dielectric film on the second semiconductor islands, and a metal layer in electrical contact with the first and second semiconductor islands. The first semiconductor islands and the first dielectric film contain a first diffusible dopant, and the second semiconductor islands and the second dielectric layer film contain a second diffusible dopant different from the first diffusible dopant. The present electronic device can be manufactured using printing technologies, thereby enabling high-throughput, low-cost manufacturing of electrical circuits on a wide variety of substrates.
摘要翻译: 一种电子器件,包括衬底,衬底上的多个第一半导体岛,衬底上的多个第二半导体岛,半导体岛的第一子集上的第一电介质膜,第二半导体岛上的第二电介质膜, 以及与第一和第二半导体岛电接触的金属层。 第一半导体岛和第一介电膜包含第一可扩散掺杂剂,第二半导体岛和第二介电层膜含有不同于第一可扩散掺杂剂的第二可扩散掺杂物。 本电子装置可以使用印刷技术制造,从而能够在各种基板上实现高通量,低成本的电路制造。
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16.
公开(公告)号:US20070007342A1
公开(公告)日:2007-01-11
申请号:US11452108
申请日:2006-06-12
申请人: James Cleeves , J. MacKenzie , Arvind Kamath
发明人: James Cleeves , J. MacKenzie , Arvind Kamath
CPC分类号: H01L27/1255 , G06K19/073 , G06K19/07749 , H01F17/0006 , H01L23/13 , H01L23/142 , H01L23/66 , H01L27/127 , H01L27/1292 , H01L28/60 , H01L29/66143 , H01L29/66742 , H01L29/78696 , H01L29/872 , H01L2223/6611 , H01L2223/6677 , H01L2924/0002 , H01L2924/00
摘要: Radio frequency identification (RFID) tags and processes for manufacturing the same. The RFID device generally includes (1) a metal antenna and/or inductor; (2) a dielectric layer thereon, to support and insulate integrated circuitry from the metal antenna and/or inductor; (3) a plurality of diodes and a plurality of transistors on the dielectric layer, the diodes having at least one layer in common with the transistors; and (4) a plurality of capacitors in electrical communication with the metal antenna and/or inductor and at least some of the diodes, the plurality of capacitors having at least one layer in common with the plurality of diodes and/or with contacts to the diodes and transistors. The method preferably integrates liquid silicon-containing ink deposition into a cost effective, integrated manufacturing process for the manufacture of RFID circuits. Furthermore, the present RFID tags generally provide higher performance (e.g., improved electrical characteristics) as compared to tags containing organic electronic devices.
摘要翻译: 射频识别(RFID)标签及其制造方法。 RFID设备通常包括(1)金属天线和/或电感器; (2)其上的介电层,用于支撑和绝缘来自金属天线和/或电感器的集成电路; (3)介电层上的多个二极管和多个晶体管,二极管具有至少一个与晶体管共同的层; 和(4)与金属天线和/或电感器以及至少一些二极管电连通的多个电容器,所述多个电容器具有与所述多个二极管共同的至少一个层和/或与所述多个二极管的触点 二极管和晶体管。 该方法优选将液态含硅油墨沉积物集成到用于制造RFID电路的成本有效的集成制造工艺中。 此外,与含有机电子器件的标签相比,本RFID标签通常提供更高的性能(例如,改进的电气特性)。
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公开(公告)号:US08796774B2
公开(公告)日:2014-08-05
申请号:US13585673
申请日:2012-08-14
IPC分类号: H01L29/66 , H01L29/788
CPC分类号: H01L21/28518 , H01L21/288 , H01L21/76801 , H01L21/76895 , H01L27/115 , H01L27/11558 , H01L27/1292 , H01L29/66757 , H01L29/66825 , H01L29/7881
摘要: A nonvolatile memory cell is disclosed, having first and second semiconductor islands at the same horizontal level and spaced a predetermined distance apart, the first semiconductor island providing a control gate and the second semiconductor island providing source and drain terminals; a gate dielectric layer on at least part of the first semiconductor island; a tunneling dielectric layer on at least part of the second semiconductor island; a floating gate on at least part of the gate dielectric layer and the tunneling dielectric layer; and a metal layer in electrical contact with the control gate and the source and drain terminals. In one advantageous embodiment, the nonvolatile memory cell may be manufactured using an “all-printed” process technology.
摘要翻译: 公开了一种非易失性存储单元,其具有位于相同水平位置并且间隔开预定距离的第一和第二半岛,所述第一半岛具有提供控制栅极和所述第二半岛岛提供源极和漏极端子; 在所述第一半导体岛的至少一部分上的栅介质层; 在所述第二半导体岛的至少一部分上的隧道介电层; 至少部分栅极电介质层和隧道电介质层上的浮栅; 以及与控制栅极以及源极和漏极端子电接触的金属层。 在一个有利的实施例中,可以使用“全印刷”工艺技术来制造非易失性存储单元。
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公开(公告)号:US08426905B2
公开(公告)日:2013-04-23
申请号:US12243880
申请日:2008-10-01
申请人: Arvind Kamath , Erik Scher , Patrick Smith , Aditi Chandra , Steven Molesa
发明人: Arvind Kamath , Erik Scher , Patrick Smith , Aditi Chandra , Steven Molesa
IPC分类号: H01L29/788
CPC分类号: H01L21/36 , C23C18/08 , C23C18/122 , C23C18/1245 , C23C18/1295 , H01L21/02532 , H01L21/02601 , H01L21/02628 , H01L21/28273 , H01L21/28518 , H01L21/288 , H01L21/76871 , H01L21/76895 , H01L27/1285 , H01L27/1292 , H01L28/40 , H01L29/0657 , H01L29/66143 , H01L29/6675 , H01L29/7881 , H01L29/872 , H05K1/16 , H05K1/162 , H05K3/125 , H05K2201/098
摘要: The present invention relates to electrically active devices (e.g., capacitors, transistors, diodes, floating gate memory cells, etc.) having dielectric, conductor, and/or semiconductor layers with smooth and/or dome-shaped profiles and methods of forming such devices by depositing or printing (e.g., inkjet printing) an ink composition that includes a semiconductor, metal, or dielectric precursor. The smooth and/or dome-shaped cross-sectional profile allows for smooth topological transitions without sharp steps, preventing feature discontinuities during deposition and allowing for more complete step coverage of subsequently deposited structures. The inventive profile allows for both the uniform growth of oxide layers by thermal oxidation, and substantially uniform etching rates of the structures. Such oxide layers may have a uniform thickness and provide substantially complete coverage of the underlying electrically active feature. Uniform etching allows for an efficient method of reducing a critical dimension of an electrically active structure by simple isotropic etch.
摘要翻译: 本发明涉及具有平滑和/或圆顶形轮廓的电介质,导体和/或半导体层的电活性器件(例如,电容器,晶体管,二极管,浮动栅极存储单元等)和形成这种器件的方法 通过沉积或印刷(例如喷墨印刷)包括半导体,金属或电介质前体的油墨组合物。 平滑和/或圆顶形的横截面轮廓允许平滑的拓扑转变而没有尖锐的步骤,防止沉积期间的特征不连续性,并允许随后沉积的结构的更完整的阶梯覆盖。 本发明的轮廓允许通过热氧化均匀生长氧化物层,以及基本均匀的结构蚀刻速率。 这样的氧化物层可以具有均匀的厚度并且提供基本的电活性特征的基本上完整的覆盖。 均匀蚀刻允许通过简单的各向同性蚀刻来降低电活性结构的临界尺寸的有效方法。
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19.
公开(公告)号:US08227320B2
公开(公告)日:2012-07-24
申请号:US12249735
申请日:2008-10-10
申请人: Vivek Subramanian , Patrick Smith , Vikram Pavate , Arvind Kamath , Criswell Choi , Aditi Chandra , James Montague Cleeves
发明人: Vivek Subramanian , Patrick Smith , Vikram Pavate , Arvind Kamath , Criswell Choi , Aditi Chandra , James Montague Cleeves
IPC分类号: H01L21/20
CPC分类号: G08B13/2431 , G06K19/067 , G06K19/07749 , G08B13/242 , G08B13/2437
摘要: The present invention relates to methods of making capacitors for use in surveillance/identification tags or devices, and methods of using such surveillance/identification devices. The capacitors manufactured according to the methods of the present invention and used in the surveillance/identification devices described herein comprise printed conductive and dielectric layers. The methods and devices of the present invention improve the manufacturing tolerances associated with conventional metal-plastic-metal capacitor, as well as the deactivation reliability of the capacitor used in a surveillance/identification tag or device.
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公开(公告)号:US20100123582A1
公开(公告)日:2010-05-20
申请号:US12467121
申请日:2009-05-15
申请人: Patrick Smith , Criswell Choi , James Montague Cleeves , Vivek Subramanian , Arvind Kamath , Steven Molesa
发明人: Patrick Smith , Criswell Choi , James Montague Cleeves , Vivek Subramanian , Arvind Kamath , Steven Molesa
CPC分类号: G08B13/242 , B31D1/025 , G06K19/07783 , G06K19/07798 , G08B13/2414 , G08B13/2431 , G08B13/2437 , G08B13/2442 , H01G4/18 , Y10T29/413 , Y10T29/435 , Y10T29/49016 , Y10T29/49128 , Y10T29/49155
摘要: The present invention relates to surveillance and/or identification devices having capacitors connected in parallel or in series, and methods of making and using such devices. Devices with capacitors connected in parallel, where one capacitor is fabricated with a relatively thick capacitor dielectric and another is fabricated with a relatively thin capacitor dielectric achieve both a high-precision capacitance and a low breakdown voltage for relatively easy surveillance tag deactivation. Devices with capacitors connected in series result in increased lateral dimensions of a small capacitor. This makes the capacitor easier to fabricate using techniques that may have relatively limited resolution capabilities.
摘要翻译: 本发明涉及具有并联或串联连接的电容器的监视和/或识别装置以及制造和使用这些装置的方法。 具有并联连接电容器的器件,其中一个电容器用相对较厚的电容器电介质制造,另一个电容器由相对薄的电容器电介质制成,实现了高精度电容和低击穿电压,以便相对容易的监视标签去激活。 具有串联连接的电容器的装置增加了小电容器的横向尺寸。 这使得使用可能具有相对有限的分辨能力的技术来制造电容器更容易。
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