Element having microstructure and manufacturing method thereof
    11.
    发明申请
    Element having microstructure and manufacturing method thereof 失效
    具有微结构的元件及其制造方法

    公开(公告)号:US20070029567A1

    公开(公告)日:2007-02-08

    申请号:US11544615

    申请日:2006-10-10

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微细结构的元件的方法包括以下步骤:在基底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Method of forming grating microstrutures by anodic oxidation
    14.
    发明授权
    Method of forming grating microstrutures by anodic oxidation 失效
    通过阳极氧化形成光栅微尺寸的方法

    公开(公告)号:US07129183B2

    公开(公告)日:2006-10-31

    申请号:US11155480

    申请日:2005-06-20

    IPC分类号: H01L21/302 H01L21/461

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Element having microstructure and manufacturing method thereof
    15.
    发明申请
    Element having microstructure and manufacturing method thereof 失效
    具有微结构的元件及其制造方法

    公开(公告)号:US20050245090A1

    公开(公告)日:2005-11-03

    申请号:US11155480

    申请日:2005-06-20

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Semiconductor laser apparatus and optical pickup apparatus using the same
    17.
    发明授权
    Semiconductor laser apparatus and optical pickup apparatus using the same 失效
    半导体激光装置及使用其的光学拾取装置

    公开(公告)号:US5727009A

    公开(公告)日:1998-03-10

    申请号:US811457

    申请日:1997-03-03

    摘要: In an optical pickup apparatus, a laser beam emitted from a semiconductor laser device is reflected upward by a reflecting member, transmitted through a transmission type diffraction grating and split into at least three beams, and which beams are transmitted through a transmission type holographic optical element and condensed onto an optical recording medium by a condenser portion. A return beam reflected by the optical recording medium passes through the condenser portion and diffracted not to impinge upon the transmission type diffraction grating by the holographic optical element and directed to a photodetector portion of a light receiving device. The semiconductor laser device and the light receiving device are disposed in a mount member. The transmission type holographic optical element is supported by a supporting member three-dimensionally movably with respect to the mount member, and the supporting member or/and the holographic optical element is/are fixed with adhesive material with the transmission type holographic optical element being positioned with respect to the mount member.

    摘要翻译: 在光学拾取装置中,从半导体激光装置发射的激光束被反射部件向上反射,通过透射型衍射光栅透射并分裂成至少三束光束,并且哪些光束通过透射型全息光学元件 并通过冷凝器部分冷凝到光学记录介质上。 由光记录介质反射的返回光束通过冷凝器部分,并通过全息光学元件衍射而不被撞击在透射型衍射光栅上并被引导到光接收装置的光电检测器部分。 半导体激光装置和光接收装置设置在安装构件中。 透射型全息光学元件由相对于安装构件三维地移动的支撑构件支撑,并且支撑构件或/和全息光学元件被固定有粘合材料,透射型全息光学元件被定位 相对于安装构件。

    Element having microstructure and manufacturing method thereof
    18.
    发明授权
    Element having microstructure and manufacturing method thereof 失效
    具有微结构的元件及其制造方法

    公开(公告)号:US07348650B2

    公开(公告)日:2008-03-25

    申请号:US11544615

    申请日:2006-10-10

    IPC分类号: H01L31/0232

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Optical pickup device
    20.
    发明授权
    Optical pickup device 失效
    光学拾取装置

    公开(公告)号:US6072607A

    公开(公告)日:2000-06-06

    申请号:US866444

    申请日:1997-05-30

    摘要: An optical pickup device of the present invention includes a substrate having at least a major surface, a semiconductor laser provided on the surface of the substrate for emitting laser beam, a reflection-type diffraction grating oriented to the semiconductor laser for splitting the laser beam into at least three beams and reflecting them upward, a hologram for receiving the three beams reflected from the reflection-type diffraction grating, and an objective lens for converging onto an optical recording medium the three beams transmitted by the hologram. The three beams reflected from the optical recording medium are focused by the hologram and directed onto the photodetector from the above.

    摘要翻译: 本发明的光拾取装置包括至少具有主表面的基板,设置在用于发射激光束的基板的表面上的半导体激光器,定向到用于将激光束分裂的半导体激光器的反射型衍射光栅 至少三个光束并向上反射,用于接收从反射型衍射光栅反射的三个光束的全息图,以及用于会聚到光记录介质上的由全息图传输的三个光束的物镜。 从光记录介质反射的三个光束由全息图聚焦并从上面引导到光电探测器上。