公开(公告)号：US4954705A

公开(公告)日：1990-09-04

申请号：US416996

申请日：1989-10-02

Applicant: Matthias Brunner ,  Burkhard Lischke

Inventor： Matthias Brunner ,  Burkhard Lischke

IPC: H01J37/147 ,  G01R31/302 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J37/30 ,  H01L21/66

CPC classification number: H01J37/3005 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24592

Abstract: For localization of the defects on mask and wafers generated by particle occupation, electron-optical imaging methods have been developed where the subject to be examined is scanned with a focused electron beam. Since the signal-to-noise ratio needed for a reliable defect recognition limits the scan rate, the throughput of inspected subjects remains low. It is therefore proposed that the subject be scanned with a line-shaped electron probe and that the triggered secondary electons be imaged onto a detector with the assistance of an electron optics comprising an immersion lens, whereby one line element of the surface region illuminated by the electron probe is assigned to each detector element.

Abstract translation: 为了对由颗粒占据产生的掩模和晶片上的缺陷进行定位，已经开发了电子 - 光学成像方法，其中将用聚焦电子束扫描要检查的对象。 由于可靠的缺陷识别所需的信噪比限制了扫描速率，检测对象的吞吐量保持较低。 因此，提出用线形电子探针扫描对象，并且借助于包括浸没透镜的电子光学器件将触发的次级电极成像到检测器上，由此由表面区域的一个线元件被 电子探针被分配给每个检测器元件。

公开(公告)号：US4841242A

公开(公告)日：1989-06-20

申请号：US161758

申请日：1988-02-29

Applicant: Matthias Brunner

Inventor： Matthias Brunner

IPC: G01R31/02 ,  G01R31/306

CPC classification number: G01R31/306

Abstract: A method of testing conductor networks on printed circuit boards and wiring modules comprising charging various points on the conductor network with one or more charging beams while simultaneously irridating the conductor network with a large area holding beam which compensates for charge losses during the charge detecting period which determines whether shorts or open circuits occur in the network.

Abstract translation: 一种在印刷电路板和布线模块上测试导体网络的方法，包括用一个或多个充电波束对导体网络上的各个点进行充电，同时用大面积的保持波束对导体网络进行充电，该大面积的保持波束在电荷检测期间补偿电荷损失， 确定网络中是否发生短路或开路。

公开(公告)号：US4831267A

公开(公告)日：1989-05-16

申请号：US147338

申请日：1988-01-22

Applicant: Matthias Brunner

Inventor： Matthias Brunner

IPC: G01T1/20 ,  G01Q30/02 ,  G01Q80/00 ,  G01T1/28 ,  H01J37/244

CPC classification number: G01T1/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24507 ,  H01J2237/24578

Abstract: A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.

Abstract translation: 用于带电粒子的检测器包括大致平行于样品表面布置的三个栅格电极，并通过绝缘间隔物彼此分离，以及几乎完全覆盖样品的带电粒子敏感部分。 颗粒敏感部件包括多个棒状闪烁体或者位于高电位的光导体，用于二次粒子的后加速并且位于大致平行于样品表面的平面中。

公开(公告)号：US08115506B2

公开(公告)日：2012-02-14

申请号：US12119821

申请日：2008-05-13

Applicant: Matthias Brunner

Inventor： Matthias Brunner

IPC: G01R31/26

CPC classification number: G09G3/006 ,  G09G3/3648

Abstract: Methods and apparatus for determining whether a malfunctioning pixel in a large area substrate, such as a liquid crystal display (LCD) panel, is due to the pixel itself or to the driver circuit for that pixel and for localizing any driver circuit defects are provided. In an effort to localize the driver circuit defects, test pads coupled to the input and/or output of certain driver circuits may be fabricated on the substrate. The voltage or charge of these test pads may be detected using any suitable sensing device, such as an electron beam, an electro-optical sensor, or an electrode in close proximity to the surface of the pixels and/or drivers capacitively coupled to the pixel or driver. For some embodiments, the defective driver circuits may be repaired in the same area as the test area or may be transported via conveyor or robot to a separate repair station.

Abstract translation: 提供了用于确定诸如液晶显示器（LCD）面板的大面积基板中的故障像素是由于像素本身还是由于该像素的驱动器电路以及用于定位任何驱动器电路缺陷的方法和装置。 为了定位驱动器电路缺陷，可以在衬底上制造耦合到某些驱动器电路的输入和/或输出的测试焊盘。 这些测试焊盘的电压或电荷可以使用任何合适的感测装置来检测，例如电子束，电光传感器或靠近像素表面的电极和/或与电容耦合到像素的驱动器 或司机。 对于一些实施例，有缺陷的驱动器电路可以在与测试区域相同的区域中修复，或者可以经由输送机或机器人被传送到单独的维修站。

公开(公告)号：US20100327162A1

公开(公告)日：2010-12-30

申请号：US12826635

申请日：2010-06-29

Applicant: FAYEZ E. ABBOUD ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

Inventor： FAYEZ E. ABBOUD ,  Sriram Krishnaswami ,  Benjamin M. Johnston ,  Hung T. Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John M. White ,  Shinichi Kurita ,  James C. Hunter

IPC: G01N23/00

CPC classification number: H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

Abstract translation: 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

公开(公告)号：US20090179656A1

公开(公告)日：2009-07-16

申请号：US12296055

申请日：2007-04-04

Applicant: Bernhard Gunter Mueller ,  Ralf Schmid ,  Matthias Brunner

Inventor： Bernhard Gunter Mueller ,  Ralf Schmid ,  Matthias Brunner

IPC: G01R31/305 ,  G01N23/225 ,  G01N21/88

CPC classification number: G02F1/1309 ,  G02F2001/136254

Abstract: The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.

Abstract translation: 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

公开(公告)号：US07372250B2

公开(公告)日：2008-05-13

申请号：US10782503

申请日：2004-02-19

Applicant: Shinichi Kurita ,  Emanuel Beer ,  Edgar Kehrberg ,  Matthias Brunner

Inventor： Shinichi Kurita ,  Emanuel Beer ,  Edgar Kehrberg ,  Matthias Brunner

IPC: G01R31/02 ,  G01R31/28

CPC classification number: H01L21/67265 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/70791 ,  G03F9/7011

Abstract: A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.

Abstract translation: 感测系统包括围绕适于支撑衬底的平台间隔设置的多个探针。 每个探针包括适于从已知起始位置移动到由所述载物台支撑的所述基底的边缘的检测部分; 在衬底由载物台支撑的同时检测衬底的边缘; 在所述检测之后产生检测信号; 并且在所述检测之后停止移动到基板的边缘。 控制器可以基于每个检测部分的已知开始位置并且基于由每个检测部分生成的检测信号来确定基板相对于载物台的边缘位置。 提供了许多其他方面。

公开(公告)号：US07319335B2

公开(公告)日：2008-01-15

申请号：US10889695

申请日：2004-07-12

Applicant: Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

Inventor： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

IPC: G01R31/305

CPC classification number: G09G3/006 ,  G01R31/2893 ,  G01R31/305

Abstract: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

Abstract translation: 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

公开(公告)号：US20070296437A1

公开(公告)日：2007-12-27

申请号：US11746515

申请日：2007-05-09

Applicant: Benjamin Johnston ,  Sriram Krishnaswami ,  Hung Nguyen ,  Matthias Brunner ,  Yong Liu

Inventor： Benjamin Johnston ,  Sriram Krishnaswami ,  Hung Nguyen ,  Matthias Brunner ,  Yong Liu

IPC: G01R31/02

CPC classification number: G01R31/2808 ,  G09G3/006

Abstract: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

Abstract translation: 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

公开(公告)号：US20070296426A1

公开(公告)日：2007-12-27

申请号：US11746530

申请日：2007-05-09

Applicant: SRIRAM KRISHNASWAMI ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin Johnston ,  Hung Nguyen ,  Ludwig Ledl ,  Ralf Schmid

Inventor： SRIRAM KRISHNASWAMI ,  Matthias Brunner ,  William Beaton ,  Yong Liu ,  Benjamin Johnston ,  Hung Nguyen ,  Ludwig Ledl ,  Ralf Schmid

IPC: G01R31/02

CPC classification number: G01R31/2887 ,  G09G3/006 ,  G09G3/3208 ,  G09G3/3611

Abstract: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

Abstract translation: 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案，而不从测试台移除探测器组件。