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公开(公告)号：US07550740B2
公开(公告)日：2009-06-23
申请号：US11828714
申请日：2007-07-26
申请人： Koichiro Takeuchi , Tohru Ishitani
发明人： Koichiro Takeuchi , Tohru Ishitani
CPC分类号： H01J37/3056 , H01J37/09 , H01J37/1471 , H01J2237/31745 , H01J2237/31749
摘要： A focused ion beam apparatus enables an ion beam to be focused highly accurately on a sample at the beam spot position of the case of the absence of magnetic field without causing isotope separation of the ion beam on the sample, even when there is a magnetic field on the ion beam optical axis or the magnetic field fluctuates. The focused ion beam apparatus comprises a corrective magnetic field generating unit 10 disposed on the optical axis of the ion beam 3 for correcting the deflection of the ion beam 3 due to an external magnetic field. The corrective magnetic field generating unit 10 includes pole-piece pairs 26A and 26B, each of which having two pole pieces 26a and 26b or 26c and 26d that are adjacent to each other with a gap d. The pole-piece pairs 26A and 26B are disposed opposite to each other with a gap g (>d) across the optical axis of the ion beam 3. Each of the pole pieces 26a to 26d is wound with an internal coil 29, and the pole-piece pairs 26A and 26B are each wound with an external coil 30 in such a manner as to surround the internal coils 29.
摘要翻译： 聚焦离子束装置使得离子束能够在不存在磁场的情况下的光束位置处的样品上高精度地聚焦，而不会导致样品上的离子束同位素分离，即使存在磁场 在离子束光轴上或磁场波动。 聚焦离子束装置包括设置在离子束3的光轴上的校正磁场产生单元10，用于校正由外部磁场引起的离子束3的偏转。 校正磁场产生单元10包括极片对26A和26B，每个具有间隙d彼此相邻的两个极片26a和26b或26c和26d。 极片对26A和26B彼此相对地设置有跨越离子束3的光轴的间隙g（> d）。每个极片26a至26d都缠绕有内部线圈29，并且 极片对26A和26B分别以包围内部线圈29的方式缠绕有外部线圈30。
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12.发明授权Chemical vapor deposition using inductively coupled plasma and system therefor 失效使用电感耦合等离子体的化学气相沉积及其系统
公开(公告)号：US5824158A
公开(公告)日：1998-10-20
申请号：US917803
申请日：1997-08-27
申请人： Koichiro Takeuchi , Hirokazu Ueda , Akira Narai
发明人： Koichiro Takeuchi , Hirokazu Ueda , Akira Narai
IPC分类号： C23C16/507 , H01J37/32 , C23C16/00
CPC分类号： H01J37/321 , C23C16/507
摘要： An ICP (Inductively Coupled Plasma) system is used as a plasma generating means. A CVD process gas is introduced within a vacuum vessel from a gas inlet nozzle, and is then converted into plasma by a high frequency electric field induced within the vacuum vessel by an electromagnetic wave from an antenna. A sample can be located at a position not to be exposed to plasma, and a decomposed product material produced from the CVD process gas by the plasma is deposited on the surface of the sample mounted on a sample stage, thus forming a film. A dielectric viewing port, the antenna and the sample are disposed along the same axial direction such that the directions of the planes thereof correspond to each other, so that the film formation on the surface of the sample within the vacuum vessel can be observed through the transparent dielectric viewing port. When a CVD process gas of a CVD source gas mixed with a rare gas is introduced in the vacuum vessel and a bias voltage is applied to the sample, the film is formed by the CVD source gas and it is simultaneously planarized by sputter etching by the rare gas. When an antenna serving as a target material is disposed within the vacuum vessel, it is possible to eliminate the cutoff of the high frequency power which, has been generated for the inductive coupling from the outside of the vacuum vessel.
摘要翻译： 使用ICP（感应耦合等离子体）系统作为等离子体发生装置。 将CVD工艺气体从气体入口喷嘴引入真空容器内，然后通过来自天线的电磁波在真空容器内感应的高频电场转换成等离子体。 样品可以位于不暴露于等离子体的位置，并且通过等离子体由CVD处理气体产生的分解产物材料沉积在安装在样品台上的样品的表面上，从而形成膜。 电介质观察口，天线和样品沿着相同的轴向方向设置，使得其平面的方向彼此对应，使得真空容器内的样品表面上的成膜可以通过 透明电介质观察口。 当将与稀有气体混合的CVD源气体的CVD工艺气体引入真空容器中并向样品施加偏置电压时，该膜由CVD源气体形成，并且通过溅射蚀刻同时被平坦化 稀有气体 当用作目标材料的天线设置在真空容器内时，可以消除从真空容器的外部产生的用于电感耦合的高频功率的截止。
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公开(公告)号：US5583446A
公开(公告)日：1996-12-10
申请号：US351396
申请日：1995-02-14
IPC分类号： G01Q30/02 , G01Q60/24 , G01R1/06 , G01R1/067 , G01R1/07 , G01R19/00 , G01R31/28 , G01R31/302 , G01R31/316 , G01R31/02
CPC分类号： G01R31/2886 , B82Y35/00 , G01Q60/38 , G01R1/06711 , G01R1/071 , Y10S977/868
摘要： A needle-shaped terminal, i.e., a probe tip, is brought into extremely close proximity with an object being measured. This probe tip is formed from an optically active material and in itself is electrically non-conductive, so that it has no electrical influence whatsoever on the object being measured. When optical pulses are beamed onto this probe tip, the probe tip becomes an electric conductor and a current flows between it and the object being measured, so that the electric potential of the object can be measured. This facilitates previously impossible measurements of high-speed electric waveforms. It also facilitates high spatial resolution monitoring and control of probe tip position and characterization of measurement sites, and enables highly reliable measurements to be made inexpensively.
摘要翻译： PCT No.PCT / JP94 / 00611 Sec。 371日期：1995年2月14日 102（e）1995年2月14日PCT PCT 1994年4月12日PCT公布。 出版物WO94 / 24575 日期：1994年10月27日将针状端子，即探针尖端与被测量物体非常接近。 该探针尖端由光学活性材料形成，并且其本身是非导电的，使得其对所测量的物体无任何电学影响。 当光脉冲发射到该探针尖端上时，探针尖端变成电导体，并且电流在它和被测量物体之间流动，从而可以测量物体的电位。 这有助于以前不可能测量的高速电波形。 它还有助于高空间分辨率监测和控制探针尖端位置和测量位置的表征，并且可以低成本地实现高度可靠的测量。
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公开(公告)号：US5159856A
公开(公告)日：1992-11-03
申请号：US764687
申请日：1991-09-24
CPC分类号： F16H61/0021 , F16H61/0437 , F16H2059/385 , F16H2061/0255 , F16H61/21 , Y10T477/693964 , Y10T477/693965
摘要： An automatic transmission line pressure control system controls line pressure in an automatic transmission equipped with a torque convertor for hydraulically coupling and uncoupling friction coupling elements of the automatic transmission. The automatic transmission line pressure control system regulates line pressure for selectively coupling and uncoupling the friction coupling elements so as to shift the automatic transmission into desired speed gears. The line pressure is forcibly dropped to a level lower than a level present before an occurrence of a manual shift-down operation when a shift-down sensor detects the occurrence of a manual shift-down. The line pressure is then raised as a speed sensor detects an increase in rotational speed transmitted the automatic transmission, thereby shifting the automatic transmission into desired speed gears.
摘要翻译： 自动变速器线压力控制系统控制配备有扭矩转换器的自动变速器中的管路压力，用于液压耦合和解耦自动变速器的摩擦联接元件。 自动传输线压力控制系统调节线路压力，用于选择性地耦合和分离摩擦联接元件，以便将自动变速器移动到期望的速度齿轮。 当减速传感器检测到手动换档的发生时，行压力被强制下降到低于手动换档操作发生之前的水平。 随着速度传感器检测到传动自动变速器的转速的增加，线压力升高，从而将自动变速器移动到所需的速度档位。
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15.发明授权公开(公告)号：US08274048B2
公开(公告)日：2012-09-25
申请号：US12823296
申请日：2010-06-25
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , H01J37/244 , H01J37/28 , H01J2237/24485 , H01J2237/2449
摘要： In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An energy filter is used to discriminate between energy levels. The change in yield of obtained electrons is used to measure the variation in specimen potential. The time constant of charging created during electron beam irradiation is extracted. The scanning method is optimized based on the extracted time constant to reduce the distortion and magnification variation that appear in a SEM image.
摘要翻译： 在扫描电子显微镜中，确定用于减少一次电子束和二次电子的偏转量的最佳扫描方法以获得稳定的图像。 能量滤波器用于区分能级。 获得的电子的产量变化用于测量样品电位的变化。 提取电子束照射期间产生的充电时间常数。 基于提取的时间常数优化扫描方法，以减少出现在SEM图像中的失真和放大变化。
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公开(公告)号：US07928377B2
公开(公告)日：2011-04-19
申请号：US11258035
申请日：2005-10-26
IPC分类号： G01N23/04
CPC分类号： H01J37/26 , G01N1/32 , H01J37/28 , H01J2237/206 , H01J2237/2802 , H01J2237/30466 , H01J2237/3174 , H01J2237/31745 , H01J2237/31749
摘要： It is possible to carry out a highly accurate thin film machining by irradiation of an ion beam to a sample and a high-resolution STEM observation of the sample by irradiating an electron beam with a high throughput almost without moving the sample. The FIB irradiation system has an irradiation axis almost orthogonally intersecting an irradiation axis of the STEM observation electron beam irradiation system. The sample is arranged at the intersection point of the irradiation axes. The FIB machining plane of the sample is extracted from the thin film plane of the STEM observation sample. The transmitting/scattered beam detector are arranged at backward of the sample on the electron beam irradiation axis viewed from the electron beam irradiation direction.
摘要翻译： 通过用离子束照射样品和样品的高分辨率STEM观察，可以通过以高生成量的电子束照射几乎不移动样品来进行高精度的薄膜加工。 FIB照射系统具有与STEM观察电子束照射系统的照射轴几乎正交相交的照射轴。 样品布置在照射轴的交点处。 从STEM观察样品的薄膜平面提取样品的FIB加工面。 发射/散射光束检测器被布置在从电子束照射方向观察的电子束照射轴上样品的后方。
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公开(公告)号：US20090039264A1
公开(公告)日：2009-02-12
申请号：US12188870
申请日：2008-08-08
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J37/21 , H01J37/28 , H01J37/3045 , H01J2237/24564 , H01J2237/2594 , H01J2237/28 , H01J2237/2816 , H01J2237/30461
摘要： Disclosed herein are a method for applying, while a charged particle beam is in a state being irradiated toward the sample, a voltage to the sample so that the charged particle beam does not reach the sample (hereafter such state may be referred to as a mirror state) and detecting information on a potential of a sample using a signal obtained then, and a device for automatically adjusting conditions of the device based on the result of measuring.
摘要翻译： 本文公开了一种在带电粒子束处于向样品照射的状态下施加电压给样品的方法，使得带电粒子束不到达样品（此后，这种状态可以称为反射镜 状态），并且使用随后获得的信号检测样品的电位的信息，以及用于基于测量结果自动调整装置的状态的装置。
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公开(公告)号：US07411192B2
公开(公告)日：2008-08-12
申请号：US11189901
申请日：2005-07-27
申请人： Koichiro Takeuchi , Tohru Ishitani , Yoichi Ose
发明人： Koichiro Takeuchi , Tohru Ishitani , Yoichi Ose
CPC分类号： H01J37/09 , H01J37/3056 , H01J2237/0264 , H01J2237/31749
摘要： A focused ion beam apparatus and a focused ion beam irradiation method are disclosed. Even in the case where a magnetic field exists on the optical axis of an ion beam and the particular magnetic field undergoes a change, the ion beam is focused without separating the isotopes on the sample at the same ion beam spot position as if the magnetic field is not existent. A canceling magnetic field is generated on the optical axis of the ion beam from a canceling magnetic field generator thereby to offset the deflection of the ion beam due to the external magnetic field.
摘要翻译： 公开了一种聚焦离子束装置和聚焦离子束照射方法。 即使在离子束的光轴上存在磁场并且特定的磁场发生变化的情况下，也可以将离子束聚焦，而不会在相同的离子束点位置分离样品上的同位素，就像磁场 不存在 在来自消除磁场发生器的离子束的光轴上产生消除磁场，从而抵消由于外部磁场引起的离子束的偏转。
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公开(公告)号：US20080067396A1
公开(公告)日：2008-03-20
申请号：US11749181
申请日：2007-05-16
IPC分类号： H01J1/50
CPC分类号： H01J37/143 , H01J37/28 , H01J2237/1405 , H01J2237/2813 , H01J2237/31749
摘要： The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.
摘要翻译： 本发明提供一种产生很小像差的小型电子透镜，以及诸如扫描电子显微镜的带电粒子束装置，其具有超级紧凑并且提供高分辨率。 上磁极和样本侧磁极磁耦合到由诸如稀土钴体系或钕铁硼体系的高强度磁性材料制成的永磁体的各极上，即， 轴向对称，并且在其中心具有孔。 在中心轴的一侧产生内部间隙。 因此，磁性透镜轴向形成。 此外，将外部磁场屏蔽并具有调节磁阻的半静态磁路设置在外部。 样品侧磁极和磁路限定永磁体外磁阻最高的区域。 由永磁体，上磁极，样品芯磁极和半静态磁路限定的空间填充有由非磁性材料制成的填充物。 因此，构成物镜。
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公开(公告)号：US20060097166A1
公开(公告)日：2006-05-11
申请号：US11258035
申请日：2005-10-26
CPC分类号： H01J37/26 , G01N1/32 , H01J37/28 , H01J2237/206 , H01J2237/2802 , H01J2237/30466 , H01J2237/3174 , H01J2237/31745 , H01J2237/31749
摘要： It is possible to carry out a highly accurate thin film machining by irradiation of an ion beam to a sample and a high-resolution STEM observation of the sample by irradiating an electron beam with a high throughput almost without moving the sample. The FIB irradiation system has an irradiation axis almost orthogonally intersecting an irradiation axis of the STEM observation electron beam irradiation system. The sample is arranged at the intersection point of the irradiation axes. The FIB machining plane of the sample is extracted from the thin film plane of the STEM observation sample. The transmitting/scattered beam detector are arranged at backward of the sample on the electron beam irradiation axis viewed from the electron beam irradiation direction.
摘要翻译： 通过用离子束照射样品和样品的高分辨率STEM观察，可以通过以高生成量的电子束照射几乎不移动样品来进行高精度的薄膜加工。 FIB照射系统具有与STEM观察电子束照射系统的照射轴几乎正交相交的照射轴。 样品布置在照射轴的交点处。 从STEM观察样品的薄膜平面提取样品的FIB加工面。 发射/散射光束检测器被布置在从电子束照射方向观察的电子束照射轴上样品的后方。
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