REMOTE CONTACTS FOR A TRENCH SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES

    公开(公告)号:US20210313453A1

    公开(公告)日:2021-10-07

    申请号:US16841167

    申请日:2020-04-06

    Abstract: A semiconductor device structure comprises a region of semiconductor material comprising a first conductivity type, a first major surface, and a second major surface opposite to the first major surface. A first trench gate structure includes a first trench extending from the first major surface into the region of semiconductor material, a first dielectric structure is over sidewall surfaces and a portion of a lower surface of the first trench, wherein the first dielectric structure comprises a first opening adjacent to the lower surface of the first trench, a first recessed contact extends through the first opening, and a first contact region is over the first recessed contact within the first trench, wherein the first recessed contact and the first contact region comprise different materials. A first doped region comprising a second dopant conductivity type opposite to the first conductivity type is in the region of semiconductor material and is spaced apart from the first major surface and below the first trench. A gate contact region is in the region of semiconductor material and is electrically connected to the first doped region.

    METHOD OF FORMING A SEMICONDUCTOR DEVICE INCLUDING TRENCH TERMINATION AND TRENCH STRUCTURE THEREFOR
    18.
    发明申请
    METHOD OF FORMING A SEMICONDUCTOR DEVICE INCLUDING TRENCH TERMINATION AND TRENCH STRUCTURE THEREFOR 有权
    形成包含TRENCH终止和其结构的半导体器件的方法

    公开(公告)号:US20150108569A1

    公开(公告)日:2015-04-23

    申请号:US14297204

    申请日:2014-06-05

    Abstract: In an embodiment, a method of forming a semiconductor may include forming a plurality of active trenches and forming a termination trench substantially surrounding an outer periphery of the plurality of active trenches. The method may also include forming at least one active trench of the plurality of active trenches having corners linking trench ends to sides of active trenches wherein each active trench of the plurality of active trenches has a first profile along the first length and a second profile at or near the trench ends; and forming a termination trench substantially surrounding an outer periphery of the plurality of active trenches and having a second profile wherein one of the first profile or the second profile includes a non-linear shape.

    Abstract translation: 在一个实施例中,形成半导体的方法可以包括形成多个有源沟槽并且形成基本上围绕多个有源沟槽的外周边的端接沟槽。 该方法还可以包括形成多个有源沟槽中的至少一个有源沟槽,其具有将沟槽端部连接到有源沟槽侧面的拐角,其中多个有源沟槽中的每个有源沟槽具有沿第一长度的第一分布, 或在沟槽末端附近; 以及形成基本上围绕所述多个有源沟槽的外周边的终端沟槽,并且具有第二形状,其中所述第一形状或所述第二形状中的一个包括非线性形状。

    SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURE

    公开(公告)号:US20190267252A1

    公开(公告)日:2019-08-29

    申请号:US16406899

    申请日:2019-05-08

    Abstract: In accordance with an embodiment, a semiconductor component includes a support having a side in which a device receiving structure and an interconnect structure are formed and a side from which a plurality of leads extends. A semiconductor device having a control terminal and first and second current carrying terminals and configured from a III-N semiconductor material is mounted to the device receiving structure. A first electrical interconnect is coupled between the first current carrying terminal of the semiconductor device and a first lead. A second electrical interconnect is coupled between the control terminal of the semiconductor device and a second lead.

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