APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING A GAS MIXER
    15.
    发明申请
    APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING A GAS MIXER 审中-公开
    用于制造具有气体混合器的半导体器件的装置

    公开(公告)号:US20160362785A1

    公开(公告)日:2016-12-15

    申请号:US15048995

    申请日:2016-02-19

    Abstract: An apparatus for manufacturing semiconductor devices having a gas mixer includes a gas supply and a reaction chamber, and the gas supply includes an upper gas mixer, an intermediate gas mixer disposed under the upper gas mixer, a lower gas mixer disposed under the intermediate gas mixer, a first gas supply pipe which is disposed on an upper portion of the upper gas mixer and supplies a first gas to the upper gas mixer, a second gas supply pipe which is disposed on an upper end portion of a side surface of the upper gas mixer and supplies a second gas to the upper gas mixer, and a third gas supply pipe which is disposed on a side surface of the intermediate gas mixer and supplies a third gas to the intermediate gas mixer.

    Abstract translation: 一种用于制造具有气体混合器的半导体器件的装置包括气体供应和反应室,并且气体供应包括上部气体混合器,设置在上部气体混合器下方的中间气体混合器,设置在中间气体混合器下方的下部气体混合器 第一气体供给管,其设置在上部气体混合器的上部,并向第一气体混合器供给第一气体;第二气体供给管,其设置在上部气体的侧面的上端部; 混合器并将第二气体供应到上部气体混合器,以及第三气体供应管,其设置在中间混合气体的侧表面上并将第三气体供应到中间气体混合器。

    SEMICONDUCTOR DEVICES AND DATA STORAGE SYSTEMS INCLUDING THE SAME

    公开(公告)号:US20240422976A1

    公开(公告)日:2024-12-19

    申请号:US18656694

    申请日:2024-05-07

    Abstract: A semiconductor device including gate electrodes stacked and spaced apart from each other in a first direction, extending by different lengths in a second direction on the second region, and each including a pad region having an upper surface exposed upwardly in the second region and a stack region other than the pad region, the gate electrodes including a first gate electrode and a second gate electrode below the first gate electrode, a first contact plug insulating layer on interlayer insulating layers in the pad region of the first gate electrode, surrounding a gate contact plug, and vertically overlapping the first gate electrode, second contact plug insulating layers alternating with the interlayer insulating layers below the pad region of the first gate electrode and surrounding the gate contact plug may be provided.

    ORGANIC ELECTROLYTE SOLUTION AND LITHIUM BATTERY INCLUDING THE SAME

    公开(公告)号:US20190198931A1

    公开(公告)日:2019-06-27

    申请号:US16152498

    申请日:2018-10-05

    Abstract: An organic electrolyte solution includes a lithium salt; an organic solvent; and a fluorine-containing phosphate compound represented by Formula 1: wherein, in Formula 1, R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, R14, and R15 are each independently a hydrogen atom, a fluorine atom, a C1-C5 alkyl group substituted or not substituted with a halogen atom, a C4-C10 cycloalkyl group substituted or not substituted with a halogen atom, a C6-C10 aryl group substituted or not substituted with a halogen atom, a C2-C10 heteroaryl group substituted or not substituted with a halogen atom, or a C2-C10 alkenyl group substituted or not substituted with a halogen atom, at least one of R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, R14, or R15 is a fluorine atom, and at least one phenyl group does not have a fluorine atom.

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