Stereolithographic method for forming three-dimensional structure
    13.
    发明授权
    Stereolithographic method for forming three-dimensional structure 有权
    用于形成三维结构的立体光刻方法

    公开(公告)号:US07790074B2

    公开(公告)日:2010-09-07

    申请号:US10629742

    申请日:2003-07-30

    IPC分类号: B29C41/02 B29C41/22 B29C41/52

    摘要: A method of forming a three-dimensional object comprises ejecting drops of liquefied material into a vat using an ejector; scanning the ejector in first and second mutually opposed directions to induce the drops of liquefied material from the ejector to deposit and solidify in a predetermined sequence to sequentially form layers of the three-dimensional object; supplying a viscous liquid into the vat to a level which is essentially level with the top of a most recently formed layer of the three-dimensional object; and raising the level of the viscous liquid in accordance with the formation of new layers.

    摘要翻译: 形成三维物体的方法包括使用喷射器将液化物料液滴喷射到大桶中; 在第一和第二相互相对的方向上扫描喷射器,以从喷射器引起液化材料的液滴以预定顺序沉积和固化,以顺序地形成三维物体的层; 将大桶中的粘性液体提供到与最近形成的三维物体层的顶部基本平齐的水平; 并根据新层的形成提高粘性液体的含量。

    Method and apparatus for using an excimer laser to pattern electrodeposited photoresist
    14.
    发明授权
    Method and apparatus for using an excimer laser to pattern electrodeposited photoresist 有权
    使用准分子激光器对电沉积光致抗蚀剂进行图案化的方法和装置

    公开(公告)号:US06777172B2

    公开(公告)日:2004-08-17

    申请号:US09917650

    申请日:2001-07-31

    IPC分类号: G03F720

    摘要: A method for using an excimer laser to pattern electrodeposited photoresist on a sloped surface of a wafer substrate includes depositing a layer of photoresist on top of a substrate that includes a sloped surface and scanning an excimer laser beam over the layer of photoresist to expose the layer of photoresist in a desired pattern. The scanning step includes projecting the excimer laser beam in a small beam spot onto the substrate and scanning the small beam spot of the excimer layer beam relative to the substrate to define the pattern sequentially onto the substrate, including the sloped surface.

    摘要翻译: 使用准分子激光器在晶片衬底的倾斜表面上形成电沉积光致抗蚀剂的方法包括在包括倾斜表面的衬底的顶部上沉积光致抗蚀剂层,并在光致抗蚀剂层上扫描准分子激光束以暴露层 的光刻胶。 扫描步骤包括将准分子激光束投射到基底上的小束斑中,并相对于衬底扫描准分子层束的小束斑,以将图案顺序地定位到包括斜面的衬底上。

    Electrode having macropores and micropores therein
    20.
    发明授权
    Electrode having macropores and micropores therein 有权
    其中具有大孔和微孔的电极

    公开(公告)号:US07371481B2

    公开(公告)日:2008-05-13

    申请号:US11151096

    申请日:2005-06-13

    IPC分类号: H01M4/00

    摘要: An electrode is disclosed. The electrode includes a substrate having macropores therein. A barrier support layer, established on the substrate, has micropores therein. The macropores and at least some of the micropores are substantially lined with an electrolyte layer. A catalyst is in ionic contact with the electrolyte layer. A current collector is in electrical contact with the catalyst. A barrier layer is established on the barrier support layer and is electrically isolated from the current collector.

    摘要翻译: 公开了一种电极。 电极包括其中具有大孔的基板。 建立在基板上的阻挡支撑层在其中具有微孔。 大孔和至少一些微孔基本上衬有电解质层。 催化剂与电解质层离子接触。 集电器与催化剂电接触。 阻挡层建立在阻挡层支撑层上,并与集电器电隔离。