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公开(公告)号:US20130292775A1
公开(公告)日:2013-11-07
申请号:US13936214
申请日:2013-07-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Guang-Yaw Hwang , Ling-Chun Chou , I-Chang Wang , Shin-Chuan Huang , Jiunn-Hsiung Liao , Shin-Chi Chen , Pau-Chung Lin , Chiu-Hsien Yeh , Chin-Cheng Chien , Chieh-Te Chen
IPC: H01L27/088
CPC classification number: H01L27/088 , H01L21/823807 , H01L21/823814 , H01L29/165 , H01L29/66636 , H01L29/7848
Abstract: A strained silicon substrate structure includes a first transistor and a second transistor disposed on a substrate. The first transistor includes a first gate structure and two first source/drain regions disposed at two sides of the first gate structure. A first source/drain to gate distance is between each first source/drain region and the first gate structure. The second transistor includes a second gate structure and two source/drain doped regions disposed at two side of the second gate structure. A second source/drain to gate distance is between each second source/drain region and the second gate structure. The first source/drain to gate distance is smaller than the second source/drain to gate distance.
Abstract translation: 应变硅衬底结构包括设置在衬底上的第一晶体管和第二晶体管。 第一晶体管包括第一栅极结构和设置在第一栅极结构的两侧的两个第一源极/漏极区域。 第一源极/漏极到栅极间距在每个第一源极/漏极区域和第一栅极结构之间。 第二晶体管包括第二栅极结构和设置在第二栅极结构的两侧的两个源极/漏极掺杂区域。 第二源极/漏极到栅极间距在每个第二源极/漏极区域和第二栅极结构之间。 第一源极/漏极到栅极距离小于第二源极/漏极到栅极距离。
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公开(公告)号:US20240120419A1
公开(公告)日:2024-04-11
申请号:US18528806
申请日:2023-12-05
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ling-Chun Chou , Yu-Hung Chang , Kun-Hsien Lee
CPC classification number: H01L29/7823 , H01L29/0623
Abstract: A lateral diffusion metal-oxide semiconductor (LDMOS) device includes a first gate structure and a second gate structure extending along a first direction on a substrate, a first source region extending along the first direction on one side of the first gate structure, a second source region extending along the first direction on one side of the second gate structure, a drain region extending along the first direction between the first gate structure and the second gate structure, a guard ring surrounding the first gate structure and the second gate structure, and a shallow trench isolation (STI) surrounding the guard ring.
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公开(公告)号:US10439066B2
公开(公告)日:2019-10-08
申请号:US15721177
申请日:2017-09-29
Applicant: United Microelectronics Corp.
Inventor: Ling-Chun Chou , Kun-Hsien Lee
IPC: H01L29/78 , H01L27/088 , H01L29/165 , H01L29/66 , H01L21/8234 , H01L27/06
Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a plurality of first gate structures, a plurality of second gate structures, a first strained region, and a second strained region. The substrate has a first region and a second region. The first gate structures are disposed in the first region on the substrate. The second gate structures are disposed in the second region on the substrate. The first strained region is formed in the substrate and has a first distance from an adjacent first gate structure. The second strained region is formed in the substrate and has a second distance from an adjacent second gate structure, wherein the second distance is greater than the first distance.
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公开(公告)号:US09312258B2
公开(公告)日:2016-04-12
申请号:US13936214
申请日:2013-07-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Guang-Yaw Hwang , Ling-Chun Chou , I-Chang Wang , Shin-Chuan Huang , Jiunn-Hsiung Liao , Shin-Chi Chen , Pau-Chung Lin , Chiu-Hsien Yeh , Chin-Cheng Chien , Chieh-Te Chen
IPC: H01L27/088 , H01L21/8238 , H01L29/66 , H01L29/78 , H01L29/165
CPC classification number: H01L27/088 , H01L21/823807 , H01L21/823814 , H01L29/165 , H01L29/66636 , H01L29/7848
Abstract: A strained silicon substrate structure includes a first transistor and a second transistor disposed on a substrate. The first transistor includes a first gate structure and two first source/drain regions disposed at two sides of the first gate structure. A first source/drain to gate distance is between each first source/drain region and the first gate structure. The second transistor includes a second gate structure and two source/drain doped regions disposed at two side of the second gate structure. A second source/drain to gate distance is between each second source/drain region and the second gate structure. The first source/drain to gate distance is smaller than the second source/drain to gate distance.
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公开(公告)号:US08841193B2
公开(公告)日:2014-09-23
申请号:US13928366
申请日:2013-06-26
Applicant: United Microelectronics Corp.
Inventor: Ted Ming-Lang Guo , Chin-Cheng Chien , Shu-Yen Chan , Ling-Chun Chou , Tsung-Hung Chang , Chun-Yuan Wu
IPC: H01L21/336 , H01L29/78 , H01L29/66
CPC classification number: H01L29/66477 , H01L29/6653 , H01L29/66545 , H01L29/7843 , H01L29/7847
Abstract: A semiconductor structure including a substrate and a gate structure disposed on the substrate is disclosed. The gate structure includes a gate dielectric layer disposed on the substrate, a gate material layer disposed on the gate dielectric layer and an outer spacer with a rectangular cross section. The top surface of the outer spacer is lower than the top surface of the gate material layer.
Abstract translation: 公开了一种包括衬底和设置在衬底上的栅极结构的半导体结构。 栅极结构包括设置在基板上的栅极介质层,设置在栅极介电层上的栅极材料层和具有矩形横截面的外部间隔物。 外隔离物的顶表面比栅极材料层的顶表面低。
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公开(公告)号:US11664450B2
公开(公告)日:2023-05-30
申请号:US17216642
申请日:2021-03-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ling-Chun Chou , Te-Chi Yen , Yu-Hung Chang , Kun-Hsien Lee , Kai-Lin Lee
CPC classification number: H01L29/7835 , H01L29/0653 , H01L29/086 , H01L29/0878
Abstract: A high voltage semiconductor device includes a semiconductor substrate, first and second deep well regions, and first and second well regions disposed in the semiconductor substrate. The second deep well region is located above the first deep well region. The first well region is located above the first deep well region. The second well region is located above the second deep well region. A conductivity type of the second deep well region is complementary to that of the first deep well region. A conductivity type of the second well region is complementary to that of the first well region and the second deep well region. A length of the second deep well region is greater than or equal to that of the second well region and less than that of the first deep well region. The first well region is connected with the first deep well region.
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公开(公告)号:US10978589B2
公开(公告)日:2021-04-13
申请号:US16529523
申请日:2019-08-01
Applicant: United Microelectronics Corp.
Inventor: Ling-Chun Chou , Kun-Hsien Lee
IPC: H01L29/78 , H01L21/8234 , H01L27/06 , H01L27/088 , H01L29/66 , H01L29/165
Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a plurality of first gate structures, a plurality of second gate structures, a first strained region, and a second strained region. The substrate has a first region and a second region. The first gate structures are disposed in the first region on the substrate. The second gate structures are disposed in the second region on the substrate. The first strained region is formed in the substrate and has a first distance from an adjacent first gate structure. The second strained region is formed in the substrate and has a second distance from an adjacent second gate structure, wherein the second distance is greater than the first distance.
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公开(公告)号:US20190067480A1
公开(公告)日:2019-02-28
申请号:US15721177
申请日:2017-09-29
Applicant: United Microelectronics Corp.
Inventor: Ling-Chun Chou , Kun-Hsien Lee
IPC: H01L29/78 , H01L29/66 , H01L27/088 , H01L29/165
CPC classification number: H01L29/7848 , H01L21/823412 , H01L21/823418 , H01L21/823456 , H01L21/823481 , H01L27/0605 , H01L27/088 , H01L29/165 , H01L29/6653 , H01L29/6656 , H01L29/66636
Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a plurality of first gate structures, a plurality of second gate structures, a first strained region, and a second strained region. The substrate has a first region and a second region. The first gate structures are disposed in the first region on the substrate. The second gate structures are disposed in the second region on the substrate. The first strained region is formed in the substrate and has a first distance from an adjacent first gate structure. The second strained region is formed in the substrate and has a second distance from an adjacent second gate structure, wherein the second distance is greater than the first distance.
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公开(公告)号:US20180068998A1
公开(公告)日:2018-03-08
申请号:US15289988
申请日:2016-10-11
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuan-Ti Wang , Ling-Chun Chou , Kun-Hsien Lee
IPC: H01L27/082 , H01L29/06 , H01L27/02
CPC classification number: H01L27/082 , H01L27/0207 , H01L27/0623 , H01L29/0649 , H01L29/0657 , H01L29/0813 , H01L29/1008 , H01L29/407 , H01L29/735
Abstract: A bipolar junction transistor (BJT) includes a semiconductor substrate and a first isolation structure. The semiconductor substrate includes a first fin structure disposed in an emitter region, a second fin structure disposed in a base region, and a third fin structure disposed in a collector region. The first, the second, and the third fin structures are elongated in a first direction respectively. The base region is adjacent to the emitter region, and the base region is located between the emitter region and the collector region. The first isolation structure is disposed between the first fin structure and the second fin structure, and a length of the first isolation structure in the first direction is shorter than or equal to 40 nanometers. An effective base width of the BJT may be reduced by the disposition of the first isolation structure, and a current gain of the BJT may be enhanced accordingly.
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公开(公告)号:US09853021B1
公开(公告)日:2017-12-26
申请号:US15614624
申请日:2017-06-06
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuan-Ti Wang , Ling-Chun Chou , Kun-Hsien Lee
IPC: H01L29/49 , H01L27/06 , H01L21/8238 , H01L29/78 , H01L29/66 , H01L21/8234 , H01L29/423
CPC classification number: H01L27/0617 , H01L21/82345 , H01L21/823821 , H01L21/823842 , H01L21/82385 , H01L21/823864 , H01L21/823878 , H01L29/0653 , H01L29/1045 , H01L29/4236 , H01L29/4966 , H01L29/4983 , H01L29/517 , H01L29/66545 , H01L29/66621 , H01L29/7825 , H01L29/7835 , H01L29/785
Abstract: A method for fabricating semiconductor device includes the steps of: forming a first fin-shaped structure on a substrate; forming a shallow trench isolation (STI) adjacent to the first fin-shaped structure; and forming a gate structure on the first fin-shaped structure and the STI. Preferably, the gate structure comprises a left portion and the right portion and the work functions in the left portion and the right portion are different.
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