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    In-plane MEMS thermal actuator and associated fabrication methods
    11.
    发明授权
    In-plane MEMS thermal actuator and associated fabrication methods 有权
    平面MEMS热致动器

    公开(公告)号：US06211598B1

    公开(公告)日：2001-04-03

    申请号：US09395068

    申请日：1999-09-13

    Applicant: Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    Inventor： Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    IPC: H02N1000

    CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0036 ,  F16K99/0042 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H1/0036 ,  H01H37/32 ,  H01H2037/008 ,  Y10S310/06

    Abstract: A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate.

    Abstract translation: 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，MEMS热致动器可以提供独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并且覆盖在基底的第一表面上。 组合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。

    Microelectromechanical actuators including driven arched beams for mechanical advantage
    13.
    发明授权
    Microelectromechanical actuators including driven arched beams for mechanical advantage 失效
    微机电致动器包括驱动的拱形梁，用于机械优点

    公开(公告)号：US06360539B1

    公开(公告)日：2002-03-26

    申请号：US09542672

    申请日：2000-04-05

    Applicant: Edward A. Hill ,  Vijayakumar R. Dhuler ,  Allen B. Cowen ,  Ramaswamy Mahadevan ,  Robert L. Wood

    Inventor： Edward A. Hill ,  Vijayakumar R. Dhuler ,  Allen B. Cowen ,  Ramaswamy Mahadevan ,  Robert L. Wood

    IPC: F01B2910

    CPC classification number: H01H1/0036 ,  H01H61/02 ,  H01H2061/006

    Abstract: Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One or more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the driven arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof.

    Abstract translation: 微机电致动器包括衬底，衬底上的间隔开的支撑件和在间隔开的支撑件之间延伸的热拱形梁，并且在其加热时进一步拱形地沿着衬底运动。 一个或多个被驱动的弓形梁联接到热拱形梁。 被驱动的拱形梁的端部相对于彼此移动，以响应于热拱形梁的进一步拱形来改变被驱动的弓形梁的拱形，以便驱动的拱形梁的运动。 被驱动的弓形梁还包括在其端部之间的中间部分处的致动元件，其中相应的致动元件机械地联接到相关联的被驱动的弓形梁以与其一起运动，并且与剩余的被驱动的弓形梁机械地分离以便独立运动 其中。

    MEMS variable optical attenuator
    15.
    发明授权
    MEMS variable optical attenuator 失效
    MEMS可变光衰减器

    公开(公告)号：US06275320B1

    公开(公告)日：2001-08-14

    申请号：US09405789

    申请日：1999-09-27

    Applicant: Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

    Inventor： Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

    IPC: G02B2600

    CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/038 ,  B81B2201/047 ,  G02B6/266

    Abstract: A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.

    Abstract translation: 提供了一种能够在全光范围内进行光衰减的MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括微电子衬底，MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。 可变光衰减器能够衰减其光轴平行且垂直于衬底的光束。 另外，本发明的MEMS致动器可以包括MEMS致动器的阵列，其能够向光学快门提供更大的位移距离，并且因此具有更宽的光学衰减范围。 在本发明的一个实施例中，MEMS致动器包括热拱形梁致动器。 另外，本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。 该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。 热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。 在激活时，热双压电晶片截取光束的路径并提供所需的光衰减水平。 本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。

    Reflective mems actuator with a laser
    16.
    发明授权
    Reflective mems actuator with a laser 有权
    带激光的反射式MEMs执行器

    公开(公告)号：US6134042A

    公开(公告)日：2000-10-17

    申请号：US283030

    申请日：1999-04-01

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: G02B26/10 ,  B32B3/10 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Microelectromechanical devices including rotating plates and related methods
    19.
    发明授权
    Microelectromechanical devices including rotating plates and related methods 失效
    微机电装置包括旋转板及相关方法

    公开(公告)号：US5914801A

    公开(公告)日：1999-06-22

    申请号：US719711

    申请日：1996-09-27

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: G02B26/10 ,  B32B3/10 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H02N1/00 ,  G02B26/02

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Microelectromechanical device having single crystalline components and metallic components
    20.
    发明授权
    Microelectromechanical device having single crystalline components and metallic components 有权
    具有单晶组分和金属组分的微机电装置

    公开(公告)号：US06628039B2

    公开(公告)日：2003-09-30

    申请号：US09891700

    申请日：2001-06-26

    Applicant: Vijayakumar R. Dhuler

    Inventor： Vijayakumar R. Dhuler

    IPC: H02N1000

    CPC classification number: H01H1/0036 ,  H01H59/0009 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0078 ,  H01H2061/006

    Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator that may include a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure.

    Abstract translation: 提供了一种微机电（MEMS）器件，其包括微电子衬底，设置在衬底上并由单晶材料形成的微致动器，以及设置在与微致动器相邻的衬底上的至少一个金属结构。虽然MEMS器件可以包括各种微致动器， 微致动器的一个实施例是热致动微致动器，其可以包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 因此，在致动时，微致动器在其中微致动器与至少一个金属结构间隔开的第一位置移动到第二位置，在第二位置，微致动器可操作地接合至少一个金属结构。

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