公开(公告)号：US20110014489A1

公开(公告)日：2011-01-20

申请号：US12889688

申请日：2010-09-24

申请人： Igor C. Ivanov ,  Weiguo Zhang ,  Artur Kolics

发明人： Igor C. Ivanov ,  Weiguo Zhang ,  Artur Kolics

IPC分类号： B32B15/00 ,  B32B3/02 ,  B05D5/12 ,  B05D3/06 ,  B05C11/00

CPC分类号： H01L21/64 ,  C23C8/02 ,  C23C18/1605 ,  C23C18/1632 ,  C23C18/1683 ,  C23C18/1803 ,  C23C28/00 ,  C23C28/321 ,  C23C28/322 ,  C23C28/34 ,  C23C28/345 ,  C23C28/3455 ,  H01L21/288 ,  H01L21/321 ,  H01L21/76843 ,  H01L21/76849 ,  H01L21/76855 ,  H01L21/76856 ,  H01L21/76864 ,  H01L21/76874 ,  Y10T428/1241 ,  Y10T428/12493 ,  Y10T428/12549 ,  Y10T428/23 ,  Y10T428/24628

摘要： A method is provided which includes forming a metal layer and converting at least a portion of the metal layer to a hydrated metal oxide layer. Another method is provided which includes selectively depositing a dielectric layer upon another dielectric layer and selectively depositing a metal layer adjacent to the dielectric layer. Consequently, a microelectronic topography is formed which includes a metal feature and an adjacent dielectric portion comprising lower and upper layers of hydrophilic and hydrophobic material, respectively. A topography including a metal feature having a single layer with at least four elements lining a lower surface and sidewalls of the metal feature is also provided herein. The fluid/s used to form such a single layer may be analyzed by test equipment configured to measure the concentration of all four elements. In some cases, the composition of the fluid/s may be adjusted based upon the analysis.

摘要翻译： 提供了一种方法，其包括形成金属层并将金属层的至少一部分转化为水合金属氧化物层。 提供了另一种方法，其包括在另一电介质层上选择性地沉积电介质层并且选择性地沉积与电介质层相邻的金属层。 因此，形成微电子拓扑，其包括分别包括亲水和疏水材料的下层和上层的金属特征和相邻电介质部分。 本文还提供了包括具有单层的金属特征的地形，其中至少四个元件衬在下表面和金属特征的侧壁。 用于形成这种单层的流体可以通过配置成测量所有四个元素的浓度的测试设备进行分析。 在一些情况下，可以基于分析来调整流体的组成。

公开(公告)号：US07393414B2

公开(公告)日：2008-07-01

申请号：US11102143

申请日：2005-04-08

申请人： Igor C. Ivanov ,  Weiguo Zhang

发明人： Igor C. Ivanov ,  Weiguo Zhang

IPC分类号： B05B1/28 ,  B05B15/12 ,  B05C11/02 ,  C25C14/00

CPC分类号： H01L21/68728 ,  H01L21/67051 ,  H01L21/6708 ,  Y02P80/30

摘要： Methods and systems are provided which are adapted to process a microelectronic topography, particularly in association with an electroless deposition process. In general, the methods may include loading the topography into a chamber, closing the chamber to form an enclosed area, and supplying fluids to the enclosed area. In some embodiments, the fluids may fill the enclosed area. In addition or alternatively, a second enclosed area may be formed about the topography. As such, the provided system may be adapted to form different enclosed areas about a substrate holder. In some cases, the method may include agitating a solution to minimize the accumulation of bubbles upon a wafer during an electroless deposition process. As such, the system provided herein may include a means for agitating a solution in some embodiments. Such a means for agitation may be distinct from the inlet/s used to supply the solution to the chamber.

摘要翻译： 提供了适于处理微电子拓扑的方法和系统，特别是与无电沉积工艺相关联。 通常，方法可以包括将形貌加载到腔室中，关闭腔室以形成封闭区域，并将流体供应到封闭区域。 在一些实施例中，流体可以填充封闭区域。 另外或替代地，围绕地形可以形成第二封闭区域。 因此，所提供的系统可以适于在基板保持器周围形成不同的封闭区域。 在一些情况下，该方法可以包括搅拌溶液以在无电沉积工艺期间使气泡在晶片上的累积最小化。 因此，本文提供的系统可以包括在一些实施例中用于搅拌溶液的装置。 用于搅拌的这种手段可能不同于用于将溶液供应到室的入口。

公开(公告)号：US20070159643A1

公开(公告)日：2007-07-12

申请号：US11327042

申请日：2006-01-06

申请人： John Bennetto ,  Jon Avner ,  Kevin Chase ,  Nicole Allen ,  Paul Bowden ,  Weiguo Zhang

发明人： John Bennetto ,  Jon Avner ,  Kevin Chase ,  Nicole Allen ,  Paul Bowden ,  Weiguo Zhang

IPC分类号： G06F15/00

CPC分类号： G06F11/3476

摘要： Automated multiple step tasks are executed on a computing device to analyze a computer system. A step engine performs a complex task such as troubleshooting, performance analysis, or disaster recovery as defined by an input file. The step engine parses the input file into individual steps and dispatches actions of the steps to another device for execution. The device returns a file with the results of the action. The step engine progresses through the list of steps and generates a log file representative of the actions taken and data collected during performance of the task.

摘要翻译： 在计算设备上执行自动多步骤任务以分析计算机系统。 步骤引擎执行复杂任务，例如由输入文件定义的故障排除，性能分析或灾难恢复。 步骤引擎将输入文件解析成单独的步骤，并将步骤的操作分派到另一个设备执行。 设备将返回一个带有该操作结果的文件。 步骤引擎通过步骤列表进行演示，并生成代表在执行任务期间采集的操作和数据的日志文件。

公开(公告)号：US20050160974A1

公开(公告)日：2005-07-28

申请号：US11034363

申请日：2005-01-10

申请人： Igor Ivanov ,  Weiguo Zhang

发明人： Igor Ivanov ,  Weiguo Zhang

IPC分类号： C23C18/16 ,  H01L21/00 ,  H01L21/288 ,  H01L21/768 ,  C23C14/00

CPC分类号： H01L21/76843 ,  C23C18/1619 ,  H01L21/288 ,  H01L21/6715 ,  H01L21/76802 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76849 ,  H01L21/76855 ,  H01L21/76856 ,  H01L21/76862 ,  H01L21/76864 ,  H01L21/76874

摘要： A process chamber is provided which includes a gate configured to align barriers with an opening of the gate and an opening of the process chamber such that the two openings are either sealed or provide an air passage to the chamber. A method is provided and includes sealing an opening of a chamber with a gate latch and exposing a topography to a first set of process steps, opening the gate latch such that an air passage is provided to the process chamber, and exposing the topography to a second set of process steps without allowing liquids within the chamber to flow through the air passage. A substrate holder comprising a clamping jaw with a lever and a support member coupled to the lever is also contemplated herein. A process chamber with a reservoir arranged above a substrate holder is also provided herein.

摘要翻译： 提供了一种处理室，其包括门，所述门被配置为使障碍物与门的开口和处理室的开口对齐，使得两个开口被密封或提供​​到腔室的空气通道。 提供了一种方法，包括用门闩将密封一个开口的腔室，并将地形暴露于第一组工艺步骤，打开门闩，使得空气通道被提供到处理室，并将该地形暴露于 第二组处理步骤，而不允许室内的液体流过空气通道。 包括具有杠杆的夹爪和联接到杠杆的支撑构件的衬底保持器也在本文中考虑。 本文还提供了一种具有布置在衬底保持器上方的储存器的处理室。

公开(公告)号：US20050040824A1

公开(公告)日：2005-02-24

申请号：US10960669

申请日：2004-10-08

申请人： Weiguo Zhang

发明人： Weiguo Zhang

IPC分类号： G01R33/54 ,  A61B5/055 ,  G01R33/48 ,  G01R33/561 ,  G01R33/565 ,  G01V3/00

CPC分类号： G01R33/56554 ,  G01R33/56518 ,  G01R33/56563

摘要： A method is disclosed for determining a gradient-induced cross-term magnetic field in a magnetic resonance imaging (MRI) system comprising: positioning an object in a static magnetic field; applying a radio frequency (RF) saturation pulse that spatially saturates nuclei of a slice of the object and applying an echo planar imaging (EPI) sequence to form an image of a slice of the object; generating a cross-field correction factor by analyzing the spatial distribution of the saturation line in the image.

摘要翻译： 公开了一种用于确定磁共振成像（MRI）系统中的梯度诱导的交叉磁场的方法，包括：将物体定位在静态磁场中; 施加射频（RF）饱和脉冲，空间上饱和物体切片的核并施加回波平面成像（EPI）序列以形成物体的切片的图像; 通过分析图像中的饱和线的空间分布来产生交叉场校正因子。

公开(公告)号：US06836113B2

公开(公告)日：2004-12-28

申请号：US10348009

申请日：2003-01-22

申请人： Weiguo Zhang

发明人： Weiguo Zhang

IPC分类号： G01V300

CPC分类号： G01R33/56554 ,  G01R33/56518 ,  G01R33/56563

摘要： A method is disclosed for determining a gradient-induced cross-term magnetic field in a magnetic resonance imaging (MRI) system involving the steps of: positioning an object in a static magnetic field; applying a radio frequency (RF) excitation pulse that spatially selects a slice of the object; applying an incremented phase-encoding magnetic gradient field along a phase encoding gradient field direction parallel to the slice phase; applying a selective RF refocusing pulse to select a line in the slice; applying a switched readout magnetic gradient; which causes a cross-term magnetic field, generating a data array of a phase-encoding gradient and a corresponding sample data point along the selected line, and determining a center frequency distribution (CF) for the selected line, where the CFR is indicative of a gradient-induced cross-term magnetic field.

摘要翻译： 公开了一种用于确定磁共振成像（MRI）系统中的梯度诱导的交叉磁场的方法，其涉及以下步骤：将物体定位在静态磁场中; 施加射频（RF）激励脉冲，其在空间上选择对象的切片; 沿平行于切片相位的相位编码梯度场方向施加递增的相位编码磁梯度场; 应用选择性RF重聚焦脉冲来选择切片中的线; 应用开关读出磁梯度; 其导致交叉项磁场，沿着所选择的线产生相位编码梯度的数据阵列和对应的采样数据点，以及确定所选线的中心频率分布（CF），其中CFR表示 梯度诱导的交叉磁场。

公开(公告)号：US20150316022A1

公开(公告)日：2015-11-05

申请号：US14649545

申请日：2013-11-05

申请人： Weiguo Zhang

发明人： Weiguo Zhang

IPC分类号： F03B17/02

CPC分类号： F03B17/02 ,  Y02E10/20

摘要： A floating buoy turnover hydraulic power output device, comprising a buoy (1), an outer frame support (2), support stands (35, 36), a power turnover mechanism (27), and a hydraulic actuator (41). The device can continuously and circularly rotate around the rotary shafts (23, 24) under little external force, and can release the buoy (1) during the rotation to convert buoyancy potential energy into hydraulic energy. Combined use of a set of the devices can continuously force hydraulic oil into the high pressure accumulator (42) for direct use.

摘要翻译： 一种浮动浮标翻转液压动力输出装置，包括浮标（1），外框架支撑件（2），支撑架（35,36），动力翻转机构（27）和液压致动器（41）。 该装置可以在很小的外力下围绕旋转轴（23,24）连续地和圆周地旋转，并且在旋转期间可以释放浮标（1），以将浮力势能转换成液压能量。 组合使用一组装置可以将液压油连续地压入高压蓄能器（42）以供直接使用。

公开(公告)号：US07651723B2

公开(公告)日：2010-01-26

申请号：US11034363

申请日：2005-01-10

申请人： Igor C. Ivanov ,  Weiguo Zhang

发明人： Igor C. Ivanov ,  Weiguo Zhang

IPC分类号： B05D7/00 ,  B05D1/26 ,  C23C18/54

CPC分类号： H01L21/76843 ,  C23C18/1619 ,  H01L21/288 ,  H01L21/6715 ,  H01L21/76802 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76849 ,  H01L21/76855 ,  H01L21/76856 ,  H01L21/76862 ,  H01L21/76864 ,  H01L21/76874

摘要： A process chamber is provided which includes a gate configured to align barriers with an opening of the gate and an opening of the process chamber such that the two openings are either sealed or provide an air passage to the chamber. A method is provided and includes sealing an opening of a chamber with a gate latch and exposing a topography to a first set of process steps, opening the gate latch such that an air passage is provided to the process chamber, and exposing the topography to a second set of process steps without allowing liquids within the chamber to flow through the air passage. A substrate holder comprising a clamping jaw with a lever and a support member coupled to the lever is also contemplated herein. A process chamber with a reservoir arranged above a substrate holder is also provided herein.

摘要翻译： 提供了一种处理室，其包括门，所述门被配置为使障碍物与门的开口和处理室的开口对齐，使得两个开口被密封或提供​​到腔室的空气通道。 提供了一种方法，包括用门闩将密封一个开口的腔室，并将地形暴露于第一组工艺步骤，打开门闩，使得空气通道被提供到处理室，并将该地形暴露于 第二组处理步骤，而不允许室内的液体流过空气通道。 包括具有杠杆的夹爪和联接到杠杆的支撑构件的衬底保持器也在本文中考虑。 本文还提供了一种具有布置在衬底保持器上方的储存器的处理室。

公开(公告)号：US07355407B1

公开(公告)日：2008-04-08

申请号：US11566225

申请日：2006-12-03

申请人： Weiguo Zhang

发明人： Weiguo Zhang

IPC分类号： G01V3/00

CPC分类号： G01R33/56341 ,  G01R33/543 ,  G01R33/5616 ,  G01R33/5617

摘要： For isotropic diffusion weighting during magnetic resonance imaging, a motion-probing magnetic field gradient pattern is manufactured from a template by searching for an optimum value of a skew parameter (ε) of the template. The gradient pattern includes a first pattern before at least one RF refocusing pulse and a second pattern after the refocusing pulse in which the second pattern is symmetrical with the first pattern. For example, gradient coils produce a respective gradient component along each of three orthogonal directions, and for each component and each pattern, the gradient pattern has one cycle of opposite polarity lobes about a crossing point, and for each pattern, the crossing point of the cycle in one of the orthogonal directions is a midpoint of the cycle; and the skew parameter (ε) specifies a difference in time between the crossing points of the cycles in the other orthogonal directions.

摘要翻译： 对于磁共振成像期间的各向同性扩散加权，通过搜索模板的偏斜参数（ε）的最佳值，从模板制造运动探测磁场梯度图案。 梯度图案包括至少一个RF再聚焦脉冲之前的第一图案和在其中第二图案与第一图案对称的再聚焦脉冲之后的第二图案。 例如，梯度线圈沿着三个正交方向中的每一个产生相应的梯度分量，并且对于每个分量和每个图案，梯度图案具有围绕交叉点的相反极性波瓣的一个周期，并且对于每个图案， 在正交方向之一上的循环是循环的中点; 并且偏斜参数（ε）指定在其它正交方向上的循环的交叉点之间的时间差。

公开(公告)号：US20070272299A1

公开(公告)日：2007-11-29

申请号：US11640434

申请日：2006-12-15

申请人： Jack Schuss ,  William Holber ,  John Summerson ,  Susan Trulli ,  Weiguo Zhang ,  Xing Chen

发明人： Jack Schuss ,  William Holber ,  John Summerson ,  Susan Trulli ,  Weiguo Zhang ,  Xing Chen

IPC分类号： B01D53/00 ,  F17D1/02

CPC分类号： B01D53/68 ,  B01D53/32 ,  B01D53/70 ,  B01D2257/204 ,  B01D2257/206 ,  B01D2259/818 ,  Y10T137/0391

摘要： A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.

摘要翻译： 用于激活和解离气体的方法和装置包括用位于室中的等离子体产生活化气体。 下游气体输入端相对于腔室的输出定位，以使得活化气体能够促进由气体输入引入的下游气体的解离，其中解离的下游气体基本上不与腔室的内表面相互作用。