公开(公告)号：US11698303B2

公开(公告)日：2023-07-11

申请号：US16234641

申请日：2018-12-28

Applicant: Spectral Engines Oy

Inventor： Jarkko Antila ,  Uula Kantojärvi

IPC: G01J3/26 ,  G01N21/31 ,  G01J3/45

CPC classification number: G01J3/26 ,  G01J3/45 ,  G01N21/314 ,  G01N2021/3129 ,  G01N2201/1293

Abstract: According to an example aspect of the present invention, there is provided a method for analysing a chemical composition of a target, the method comprising placing an electrically tunable Fabry-Perot interferometer in a path of radiation emitted by a radiation source, and detecting the radiation, which has passed the Fabry-Perot interferometer and which has passed or was reflected by the target, by means of a detector, and wherein detection is made such that multiple pass bands are allowed to be detected simultaneously.

公开(公告)号：US20180348125A1

公开(公告)日：2018-12-06

申请号：US16035587

申请日：2018-07-14

Applicant: International Moisture Analysers Limited

Inventor： Paul Stockwell ,  David Widdup ,  Michael Foster ,  Jonathan Storey

IPC: G01N21/45 ,  G01J3/45 ,  G01N21/85 ,  G01N21/65 ,  G01J3/44

CPC classification number: G01N21/45 ,  G01J3/4412 ,  G01J3/45 ,  G01N21/65 ,  G01N21/85 ,  G01N21/8507

Abstract: An optical chemical analyser comprises a source of a first amount of radiation (46), an optics module configured to direct the first amount of radiation such that it is incident on or passes through a target (14) at a target location, the optics module further being configured to receive a second amount of Raman scattered radiation from the target and direct the second amount of radiation (206) to a Spatial Interference Fourier Transform (SIFT) module, the SIFT module including a first dispersive element (216) and a second dispersive element (218), the SIFT module being configured such that a portion of the second amount of radiation is received by the first dispersive element and interferes with a portion of the second amount of radiation received by the second dispersive element to form an interference pattern; the SIFT module further comprising a detector (48) configured to capture an image of at least a portion of the interference pattern and produce a detector signal (226) based on the captured image; and a processor configured to receive the detector signal from the detector and perform a Fourier transform on the detector signal to thereby obtain a frequency spectrum of the second amount of radiation.

公开(公告)号：US20180226282A1

公开(公告)日：2018-08-09

申请号：US15887446

申请日：2018-02-02

Applicant: APPLIED MATERIALS, INC.

Inventor： SIEW KIT HOI ,  Ananthkrishna JUPUDI ,  YUEH SHENG OW

IPC: H01L21/67 ,  G01J1/42 ,  G01J3/45 ,  G01J5/08 ,  G01J5/00

CPC classification number: H01L21/67248 ,  G01J1/42 ,  G01J3/45 ,  G01J5/0007 ,  G01J5/026 ,  G01J5/0821 ,  G01J5/0896 ,  H01L21/67115

Abstract: In some embodiments, an apparatus for processing substrates includes: a substrate support within a processing chamber; a light source directly coupled to a light isolator and configured to deliver incident light to and through a first surface of the substrate when disposed on the substrate support; an optical fiber having a first end spaced apart a first distance from the first surface and a second end directly coupled to the light source via a coupling element; a photodetector directly coupled to the second end of the optical fiber via the coupling element and configured to receive a first reflected light beam reflected off the first surface and a second reflected light beam reflected off an inner boundary of a second surface of the substrate, opposite the first surface; and a signal processor to determine a temperature of the substrate based on the first and second reflected light beams.

公开(公告)号：US20180143075A1

公开(公告)日：2018-05-24

申请号：US15802993

申请日：2017-11-03

Applicant: ESPROS Photonics AG

Inventor： Beat DE COI

IPC: G01J3/45 ,  G01J3/28

CPC classification number: G01J3/45 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01J2003/1221 ,  G01J2003/1239

Abstract: Spectrometer for recording a spectrum, in particular in a wavelength range of 250 nm to 1150 nm, comprising: a sensor array and a filter array for filtering the radiation depending on the wavelength, wherein, in order to reduce production costs, provision is made of a device for identifying the sensor pixels covered by the filter array, having a nonvolatile memory in which the coordinates of the filter array in relation to the sensor array and/or the coordinate transformation of the filter array in relation to the sensor array are/is stored in order to assign the sensor pixels to the individual filter pixels on the basis of the stored coordinates and/or coordinate transformation and/or in order to activate the individual filter pixels depending on which of the sensor pixels are covered by the corresponding filter pixels.

公开(公告)号：US20180128682A1

公开(公告)日：2018-05-10

申请号：US15793800

申请日：2017-10-25

Applicant: TruTag Technologies, Inc.

Inventor： Ron R. Nissim ,  Timothy Learmonth ,  Mark Hsu ,  Hod Finkelstein

IPC: G01J3/45 ,  G01J3/02

CPC classification number: G01J3/45 ,  G01J3/0297 ,  G01J3/26 ,  G01J3/28

Abstract: A system for determining a calibrated spectral measurement includes a tunable Fabry-Perot etalon, a detector, and a processor. The tunable Fabry-Perot etalon has a settable gap. The detector measures light intensity. The processor is configured to determine the calibrated spectral measurement. The calibrated spectral measurement is based at least in part on a measurement set of detected light intensities for a plurality of settable gaps and a reconstruction matrix. The reconstruction matrix is based at least in part on calibration measurements. For a calibration measurement, a settable gap is selected and a set of input monochromatic source wavelengths is used to measure responses at a detector after transmission through the Fabry-Perot etalon. Each input monochromatic source wavelength is also measured using a radiometer to scale detector measurements.

公开(公告)号：US20180113026A1

公开(公告)日：2018-04-26

申请号：US15565002

申请日：2015-04-16

Applicant: Shimadzu Corporation

Inventor： Tadafumi KAMIKAKE

IPC: G01J3/453 ,  G01J3/10

CPC classification number: G01J3/4535 ,  G01J3/108 ,  G01J3/45 ,  G01J2003/2866 ,  G01N2021/3595

Abstract: A Fourier transform spectroscope having a control interferometer capable of facilitating optical axis adjustment and miniaturization by reducing the number of optical elements. Using a first reflection mirror provided with a reflection surface configured to reflect measurement light emitted from a measurement light source toward a beam splitter and a first through-hole extending along an optical axis direction of the measurement light reflected on the reflection surface and a laser light source holding portion configured to hold a laser light source such that laser light emitted from the laser light source is incident to the beam splitter through the first through-hole, optical axes of the measurement light and the laser light are aligned with each other.

公开(公告)号：US09927366B2

公开(公告)日：2018-03-27

申请号：US14667607

申请日：2015-03-24

Applicant: Sebastien Tixier ,  Frank Martin Haran

Inventor： Sebastien Tixier ,  Frank Martin Haran

IPC: G01J3/00 ,  G01N21/84 ,  G01B11/06 ,  G01G9/00 ,  G01J3/45 ,  G01N21/31 ,  G01N21/86 ,  G01N21/3563 ,  G01N21/03 ,  G01N21/3559

CPC classification number: G01N21/8422 ,  G01B11/0625 ,  G01B11/0675 ,  G01G9/00 ,  G01G9/005 ,  G01J3/45 ,  G01N21/031 ,  G01N21/31 ,  G01N21/3559 ,  G01N21/3563 ,  G01N21/86 ,  G01N2021/3155 ,  G01N2021/8427 ,  G01N2021/8609 ,  G01N2201/061 ,  G01N2201/068

Abstract: Continuous on-line thin film measurements employ a sensor having a spectrometer for interferometric measurements and a stack of single channel detectors for adsorption measurements. The stack is separated from the spectrometer, which analyzes radiation that emerges (transmitted pass or reflected from) the film, whereas the stack analyzes radiation that has passed through the film multiple times. The spectrometer is (i) positioned directly opposite the source of radiation so that it detects transmitted radiation or (ii) disposed on the same side of the film as is the source of radiation so that the spectrometer detects radiation that is specularly reflected from the film. The sensor includes a broadband radiation source emitting visible to far infrared light which propagates through a measurement cell defined by reflective surfaces exhibiting Lambertian-type scattering. The sensor is capable of measuring thin plastic films with thicknesses down to 1 micron or less.

公开(公告)号：US09927355B2

公开(公告)日：2018-03-27

申请号：US15356722

申请日：2016-11-21

Applicant: University of Massachusetts

Inventor： Robert H. Giles ,  Gargi Sharma ,  Cecil S. Joseph

IPC: G01J3/02 ,  G01N21/3581 ,  G01B9/02 ,  G01J3/42 ,  G01J3/45 ,  G01N21/47 ,  A61B5/00

CPC classification number: G01N21/3581 ,  A61B5/0066 ,  G01B9/0203 ,  G01B9/02044 ,  G01B9/02091 ,  G01J3/2823 ,  G01J3/42 ,  G01J3/45 ,  G01J3/4535 ,  G01N21/4795

Abstract: A single-shot terahertz imaging system including an interferometer and a terahertz spectrometer. The interferometer includes a beam splitter configured to receive input terahertz radiation and output first terahertz radiation and second terahertz radiation, a sample configured to reflect the first terahertz radiation, and a mirror configured to reflect the second terahertz radiation. The beam splitter is further configured to receive the reflected first terahertz radiation and the reflected second terahertz radiation, and output interfered terahertz radiation. The terahertz spectrometer is configured to measure the interfered terahertz radiation and includes a frequency dispersive element configured to receive the interfered terahertz radiation and output spatially dispersed terahertz radiation, and a terahertz radiation detector configured to determine the intensity of the spatially dispersed terahertz radiation.

公开(公告)号：US09921107B2

公开(公告)日：2018-03-20

申请号：US15363186

申请日：2016-11-29

Applicant: Thermo Scientific Portable Analytical Instruments Inc.

Inventor： Michael Derek Hargreaves ,  Timothy M. Pastore ,  Gregory H. Vander Rhodes ,  Brendon D. Tower

IPC: G01N21/00 ,  G01J3/44 ,  G01J3/02 ,  G01N21/65 ,  G01N21/35 ,  G01J3/453 ,  G01J3/45 ,  G01J3/28

CPC classification number: G01J3/4412 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/28 ,  G01J3/44 ,  G01J3/45 ,  G01J3/453 ,  G01J2003/2833 ,  G01N21/35 ,  G01N21/65 ,  G01N2021/3595 ,  G01N2201/0221

Abstract: A spectrometer system comprising a housing configured as a handheld device with a screen; a source of narrow band illumination; a sensor that detects Raman scattering signals; a source of wide band illumination; an optical element that detect Fourier transform infrared (FTIR) signals; a memory device comprising a library of information with Raman scattering reference information and FTIR reference information; and a processor configured to execute software instructions, wherein the software instructions are configured to: direct the narrow band illumination to the sample; detect the Raman scattering signals; direct the wide band illumination to the sample; detect the FTIR signals; determine a composition of the sample from a similarity between the Raman scattering spectral information and the Raman scattering reference information, and from a similarity between the FTIR spectral information and the FTIR reference information; and display the composition of the sample on the screen.

公开(公告)号：US20180066990A1

公开(公告)日：2018-03-08

申请号：US15808898

申请日：2017-11-10

Applicant: Technische Universität München

Inventor： Michael Schardt

IPC: G01J3/45 ,  G01J3/02

CPC classification number: G01J3/45 ,  G01J3/021 ,  G01J3/453 ,  G01J3/4531

Abstract: A static Fourier transform spectrometer is disclosed that includes a beam splitter, a mirror device, and a collection optic. The beam splitter divides an input light beam into a first arm and a second arm, wherein the first arm is reflected by the beam splitter and the second arm passes through the beam splitter, wherein the first arm extends to the converging optical unit without deflection after reflection at the mirror device, wherein the second arm extends to the converging optical unit without deflection after passing through the beam splitter, and wherein the collection optic merges the first arm and the second arm for interference.