公开(公告)号：US20140123754A1

公开(公告)日：2014-05-08

申请号：US14068486

申请日：2013-10-31

Applicant: Seiko Epson Corporation

Inventor： Jun Watanabe ,  Kazuyuki Nakasendo

IPC: G01P15/02

CPC classification number: G01P15/09 ,  G01P1/023 ,  G01P2015/0828

Abstract: A physical quantity detecting device includes a metal block (a holding section) having six surfaces, inclination detectors (physical quantity detectors) respectively arranged on selected three surfaces among the six surfaces, an electronic component electrically connected to the inclination detectors, and a heat insulating material (a heat-conduction reducing section) present between the metal block and the electronic component and having thermal conductivity smaller than the thermal conductivity of the metal block.

Abstract translation: 物理量检测装置包括具有六个表面的金属块（保持部），分别布置在六个表面中的选定三个表面上的倾斜检测器（物理量检测器），电连接到倾斜检测器的电子部件，以及绝热 存在于金属块和电子部件之间并且具有小于金属块的热导率的导热性的材料（导热减小部）。

公开(公告)号：US20140090468A1

公开(公告)日：2014-04-03

申请号：US13844956

申请日：2013-03-16

Applicant: Advanced NuMicro Systems, Inc.

Inventor： Yee-Chung Fu

IPC: B81B3/00 ,  G01P15/14

CPC classification number: B81B3/0021 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: A micro-electromechanical systems (MEMS) inertial sensor includes first, second, and third fixed electrodes, a first translational element to translate along a first direction, first mobile electrodes extending from the first translation element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a second translation element to translate along a second direction, second mobile electrodes extending from the second translation element and being interdigitated with the second fixed electrodes to form second sensor assemblies, and a rotation element to rotate about the second direction, the rotation element having a surface opposite the third fixed electrodes to form third sensor assemblies, wherein the third fixed electrode being displaced from the surface of the rotation element along a third direction.

Abstract translation: 微机电系统（MEMS）惯性传感器包括第一固定电极，第二固定电极和第三固定电极，沿着第一方向平移的第一平移元件，从第一平移元件延伸并与第一固定电极交叉的第一移动电极，以形成 第一传感器组件，沿着第二方向平移的第二平移元件，从第二平移元件延伸并与第二固定电极交叉的第二移动电极，以形成第二传感器组件;以及围绕第二方向旋转的旋转元件， 旋转元件具有与第三固定电极相对的表面，以形成第三传感器组件，其中第三固定电极沿着第三方向从旋转元件的表面移位。

公开(公告)号：US20130340527A1

公开(公告)日：2013-12-26

申请号：US13693256

申请日：2012-12-04

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takahiro KONISHI ,  Kazuhiro YOSHIDA

IPC: G01P15/12

CPC classification number: G01P15/123 ,  G01P2015/0828 ,  H01L29/84

Abstract: An acceleration sensor with improved impact resistance includes a beam portion connected to a supporting portion at a base side and connected to a weight portion at a top side. The beam portion has a T-shaped cross-section, and piezoresistors are located on an upper surface of the beam portion. The weight portion connects to a top of the beam portion and is arranged inside the supporting portion. A C-shaped slit is provided between the weight portion and the supporting portion so as to surround the weight portion. The weight portion includes an extended portion in which an end of a top surface layer on a side facing the beam portion extends out toward the beam portion beyond an end of the supporting substrate layer on a side facing the beam portion.

Abstract translation: 具有改进的抗冲击性的加速度传感器包括连接到底侧的支撑部分并连接到顶侧的重物部分的梁部分。 梁部分具有T形横截面，并且压电电阻器位于梁部分的上表面上。 重物部分连接到梁部分的顶部并且布置在支撑部分内部。 在重量部分和支撑部分之间设置有围绕重物部分的C形狭缝。 重物部分包括延伸部分，其中面向梁部分的一侧上的顶表面层的端部在面向梁部分的一侧上朝向梁部分延伸超过支撑基底层的端部。

公开(公告)号：US20130312522A1

公开(公告)日：2013-11-28

申请号：US13984255

申请日：2012-02-07

Applicant: Ken Kan Deng

Inventor： Ken Kan Deng

IPC: G01P15/09

CPC classification number: H02N1/006 ,  G01H11/08 ,  G01P15/09 ,  G01P15/0915 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0805 ,  G01P2015/0828 ,  G01V1/18 ,  G01V1/38 ,  G01V13/00 ,  Y10T29/49005

Abstract: Methods and apparatuses are disclosed that assist in sensing underwater signals in connection with geophysical surveys. One embodiment relates to a transducer including a cantilever coupled to a base. The cantilever may include a beam and a first coupling surface angularly oriented from the beam, and the base may include a second coupling surface angularly oriented from the beam and substantially parallel to the first coupling surface of the cantilever. The transducer may further include a sensing material coupled between the first coupling surface of the cantilever and the second coupling surface of the base.

Abstract translation: 公开了协助感测与地球物理勘测有关的水下信号的方法和装置。 一个实施例涉及一种包括耦合到基座的悬臂的换能器。 悬臂可以包括梁和从梁成角度地定向的第一联接表面，并且基座可以包括从梁成角度地取向并基本上平行于悬臂的第一联接表面的第二联接表面。 换能器还可以包括耦合在悬臂的第一联接表面和基座的第二联接表面之间的感测材料。

公开(公告)号：US20130309797A1

公开(公告)日：2013-11-21

申请号：US13882337

申请日：2011-05-19

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: B81C1/00

CPC classification number: B81C1/0015 ,  B81B2203/0118 ,  B81B2207/07 ,  B81C1/00293 ,  B81C2201/0109 ,  B81C2201/0125 ,  B81C2203/0145 ,  G01P15/0802 ,  G01P2015/0828 ,  H03H3/0072

Abstract: A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency

Abstract translation: 提供了一种用于制造微机电系统（MEMS）装置的方法。 该方法包括：提供半导体衬底，其中形成有金属互连结构（100）的半导体衬底; 在所述半导体衬底的表面上形成第一牺牲层（201），所述第一牺牲层的材料是无定形碳; 蚀刻第一牺牲层以形成第一凹部（301）; 在第一牺牲层的表面上覆盖并形成第一介电层（401）; 通过化学机械抛光（CMP）工艺使第一介电层变薄，直到暴露出第一牺牲层; 在所述第一牺牲层的表面上形成微机械结构层（500）并暴露所述第一牺牲层，其中所述微机械结构层的一部分连接到所述第一介电层。 该方法避免抛光无定形碳，缩短生产周期，提高生产效率

公开(公告)号：US20130292783A1

公开(公告)日：2013-11-07

申请号：US13934390

申请日：2013-07-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Junichi YOSHIDA

IPC: B81B3/00

CPC classification number: B81B3/0018 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/053 ,  B81B2207/095 ,  B81B2207/096 ,  B81C1/00587 ,  B81C2201/0133 ,  B81C2203/0118 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: An acceleration sensor is formed using an etched layer sandwiched between first and second substrates. In this case, a structure including a movable portion which is displaceable in the thickness direction of the substrates, and a support frame are formed in the etched layer. In addition, first and second fixed electrodes are formed on the first and second substrates, respectively, at a position facing the movable portion. Further, a remaining sacrificial layer is provided on the substrate by leaving a portion of a second sacrificial layer when a first sacrificial layer is entirely etched away. Therefore, when the first sacrificial layer is etched away, corrosion of the structure and the support beams is prevented because the second sacrificial layer is preferentially corroded as compared to the structure.

Abstract translation: 使用夹在第一和第二基板之间的蚀刻层形成加速度传感器。 在这种情况下，在蚀刻层中形成有包括可在基板的厚度方向上移动的可动部分和支撑框架的结构。 此外，第一和第二固定电极分别在面对可动部分的位置上形成在第一和第二基板上。 此外，当第一牺牲层被完全蚀刻掉时，通过留下第二牺牲层的一部分，在衬底上提供剩余的牺牲层。 因此，当第一牺牲层被蚀刻掉时，由于与结构相比，第二牺牲层被优先腐蚀，所以防止了结构和支撑梁的腐蚀。

公开(公告)号：US20130104677A1

公开(公告)日：2013-05-02

申请号：US13661433

申请日：2012-10-26

Applicant: Seiko Epson Corporation

Inventor： Jun WATANABE ,  Kazuyuki NAKASENDO

IPC: G01N37/00

CPC classification number: G01C9/06 ,  G01P15/09 ,  G01P15/097 ,  G01P2015/0828

Abstract: A physical quantity detection device includes: a base portion; a movable portion supported by the base portion via a joint and shifting in accordance with a change of a physical quantity; a physical quantity detection element extending over the base portion and the movable portion; a first support member extending from the base portion and having a first fixing portion; and a second support member extending from the base portion and having a second fixing portion. The distance between the first fixing portion and the second fixing portion is shorter than the distance between the root of the first support member at the junction with the base portion and the root of the second support member at the junction with the base portion.

Abstract translation: 物理量检测装置包括：基部; 可动部，其经由接头被基部支撑，并且根据物理量的变化而移动; 物理量检测元件，其在所述基部和所述可动部上延伸; 第一支撑构件，其从所述基部延伸并具有第一固定部; 以及从所述基部延伸并具有第二固定部的第二支撑构件。 第一固定部分和第二固定部分之间的距离比第一支撑部件的根部与基部的接合处的距离和第二支撑部件的与基部的接合处的根部之间的距离短。

公开(公告)号：US08413510B2

公开(公告)日：2013-04-09

申请号：US12529675

申请日：2008-03-06

Applicant: Takeshi Uemura ,  Toshiyuki Nozoe

Inventor： Takeshi Uemura ,  Toshiyuki Nozoe

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/0842

Abstract: An acceleration sensor includes first and second opposed electrode units. The first opposed electrode unit includes a first electrode and a second electrode spaced away from and facing the first electrode, and provides a first capacitance. The second opposed electrode unit includes a third electrode and a fourth electrode spaced away from and facing the third electrode, and provides a second capacitance. The first and third electrodes are arranged along a first direction. A component of acceleration along the first direction applied to the object is detected based on the first and second capacitances. A control voltage is applied to the first and second opposed electrode units. The control voltage is changed when both of the first capacitance and the second capacitance simultaneously increase or decrease. This acceleration sensor detects the acceleration accurately.

Abstract translation: 加速度传感器包括第一和第二相对电极单元。 第一相对电极单元包括第一电极和与第一电极间隔开并面向第一电极的第二电极，并提供第一电容。 第二相对电极单元包括第三电极和与第三电极间隔开并面向第三电极的第四电极，并提供第二电容。 第一和第三电极沿第一方向布置。 基于第一和第二电容来检测沿着施加到物体的第一方向的加速度分量。 控制电压施加到第一和第二相对电极单元。 当第一电容和第二电容同时增加或减小时，控制电压发生变化。 该加速度传感器可以准确地检测加速度。

公开(公告)号：US08382934B2

公开(公告)日：2013-02-26

申请号：US13183511

申请日：2011-07-15

Applicant: Hiroki Horiguchi ,  Yuji Kimura ,  Kazuhiro Yoshida

Inventor： Hiroki Horiguchi ,  Yuji Kimura ,  Kazuhiro Yoshida

IPC: B29C65/02 ,  B32B37/14

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81C1/00269 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  H01L21/50 ,  H01L23/10 ,  H01L2924/0002 ,  Y10T29/49002 ,  Y10T156/10 ,  H01L2924/00

Abstract: A triaxial acceleration sensor which has a structure including a cover joined to a substrate including a mechanically operable functional unit to be sealed, is adapted in such a way that the joined state can be reliably obtained so as to not interfere with a displacement of the functional unit. A sealing frame is made of a heated polyimide on a periphery of an upper main surface of a substrate provided with a functional unit, and a sealing layer made of a polyimide is formed over an entire lower main surface of a cover. For integrating the substrate and the cover so as to seal the functional unit, the sealing frame and the sealing layer are joined to each other by heating and pressurizing the sealing frame and the sealing layer at a temperature that is about 50° C. to about 150° C. higher than a glass transition temperature of the polyimide while bringing the sealing frame and the sealing layer into contact with each other. In this case, a recess is formed in the vicinity of a portion of the sealing layer to be brought into contact with the sealing frame so that a bump, generated from the sealing layer which is deformed in the joining step, is prevented from protruding toward the functional unit.

Abstract translation: 一种三轴加速度传感器，其具有包括接合到包括要被密封的机械可操作功能单元的基板的盖的结构，使得可以可靠地获得接合状态，以便不干扰功能的位移 单元。 密封框架由设置有功能单元的基板的上主表面的周边上的加热的聚酰亚胺制成，并且在盖的整个下主表面上形成由聚酰亚胺制成的密封层。 为了整合基板和盖以便密封功能单元，密封框架和密封层通过在约50℃到约50℃的温度下加热和加压密封框架和密封层而彼此接合 比使聚酰亚胺的玻璃化转变温度高150℃，同时使密封框和密封层相互接触。 在这种情况下，在密封层的一部分附近形成凹部以与密封框架接触，从而防止在接合步骤中变形的密封层产生的凸块朝向 功能单元。

公开(公告)号：US20130032906A1

公开(公告)日：2013-02-07

申请号：US13642208

申请日：2011-04-18

Applicant: Junya Ogawa ,  Norihiro Yamauchi ,  Tomoaki Matsushima ,  Koichi Aizawa

Inventor： Junya Ogawa ,  Norihiro Yamauchi ,  Tomoaki Matsushima ,  Koichi Aizawa

IPC: H01L29/84

CPC classification number: H01L41/1136 ,  B81B2201/032 ,  B81C1/00658 ,  G01J5/04 ,  G01J5/046 ,  G01J5/34 ,  G01P15/09 ,  G01P2015/0828 ,  H01L37/02 ,  H01L41/0815 ,  H02N2/186

Abstract: A ferroelectric device comprises: a silicon substrate (a first substrate); a lower electrode (a first electrode) formed on one surface side of first substrate; a ferroelectric film formed on a surface of lower electrode opposite to first substrate side; and an upper electrode (a second electrode) formed on a surface of ferroelectric film opposite to lower electrode side. The ferroelectric film is formed of a ferroelectric material with a lattice constant difference from silicon. The ferroelectric device further comprises a shock absorbing layer formed of a material with better lattice matching with ferroelectric film than silicon and provided directly below the lower electrode. The first substrate is provided with a cavity that exposes a surface of shock absorbing layer opposite to lower electrode side.

Abstract translation: 铁电体器件包括：硅衬底（第一衬底）; 形成在第一基板的一个表面侧的下电极（第一电极） 形成在与第一基板侧相反的下电极的表面上的铁电体膜; 以及形成在与下电极侧相反的铁电体膜的表面上的上电极（第二电极）。 铁电体膜由与硅形成的晶格常数不等的铁电体形成。 所述铁电体元件还包括由比铁强电介质膜更好的晶格匹配的材料形成的冲击吸收层，并且直接设置在下电极的下方。 第一基板设置有暴露与下电极侧相对的减震层的表面的空腔。