公开(公告)号：US20190049851A1

公开(公告)日：2019-02-14

申请号：US16161010

申请日：2018-10-15

申请人： KLA-Tencor Corporation

发明人： Yung-Ho Alex Chuang ,  Yinying Xiao-Li ,  Xuefeng Liu ,  John Fielden

IPC分类号： G03F7/20 ,  H01J37/073 ,  H01J1/34 ,  H01J1/304 ,  H01J35/06

CPC分类号： G03F7/70008 ,  H01J1/304 ,  H01J1/34 ,  H01J35/065 ,  H01J37/073 ,  H01J2201/30411 ,  H01J2201/3048 ,  H01J2237/0635

摘要： An electron source is formed on a silicon substrate having opposing first and second surfaces. At least one field emitter is prepared on the second surface of the silicon substrate to enhance the emission of electrons. To prevent oxidation of the silicon, a thin, contiguous boron layer is disposed directly on the output surface of the field emitter using a process that minimizes oxidation and defects. The field emitter can take various shapes such as pyramids and rounded whiskers. One or several optional gate layers may be placed at or slightly lower than the height of the field emitter tip in order to achieve fast and accurate control of the emission current and high emission currents. The field emitter can be p-type doped and configured to operate in a reverse bias mode or the field emitter can be n-type doped.

公开(公告)号：US20180174792A1

公开(公告)日：2018-06-21

申请号：US15843919

申请日：2017-12-15

申请人： KETEK GmbH

发明人： Felix Düsberg ,  Michael Bachmann

IPC分类号： H01J29/96 ,  H01J35/14 ,  H01J35/06 ,  H01J29/62

CPC分类号： H01J29/96 ,  H01J27/26 ,  H01J29/62 ,  H01J35/065 ,  H01J35/14 ,  H01J37/073 ,  H01J37/08 ,  H01J37/243 ,  H01J2237/0635 ,  H01J2237/0802 ,  H05G1/34

摘要： A device for generating a source current of charge carriers by a field emission and a method stabilizing a source current of charge carriers emitted by a field emission element are disclosed. In an embodiment the device includes at least one field emission element from which the charge carriers emerge during operation, which lead to an emission current in the field emission element, at least one extraction electrode in order to extract the charge carriers from the field emission element, wherein a first part of the extracted charge carriers contributes to the source current, and a second part of the extracted charge carriers impinges on the extraction electrode and leads to an extraction current in the extraction electrode, an additional electrode on which the source current of charge carriers impinges at least in part and which contributes to an electrode current in the additional electrode.

公开(公告)号：US09984847B2

公开(公告)日：2018-05-29

申请号：US15359946

申请日：2016-11-23

申请人： MARS TOHKEN SOLUTION CO., LTD.

发明人： Kohei Shirota ,  Katsunori Minami ,  Kenji Oohashi

IPC分类号： H01J35/14 ,  H01J35/06 ,  H01J35/16 ,  H01J35/30 ,  G01N23/04

CPC分类号： H01J35/14 ,  G01N23/04 ,  H01J35/065 ,  H01J35/16 ,  H01J35/30 ,  H01J2235/087 ,  H01J2235/1204

摘要： An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

公开(公告)号：US20180096816A1

公开(公告)日：2018-04-05

申请号：US15820955

申请日：2017-11-22

申请人： GENERAL ELECTRIC COMPANY

发明人： Sergio Lemaitre

IPC分类号： H01J35/14 ,  A61B6/03 ,  H01J35/06 ,  H01J35/08

CPC分类号： H01J35/14 ,  A61B6/032 ,  A61B6/40 ,  H01J35/045 ,  H01J35/06 ,  H01J35/065 ,  H01J35/08

摘要： In the present invention, a computed tomography system, an X-ray tube used therein and a cathode assembly disposed in the X-ray tube, as well as an associated method of use, is provided that includes a gantry and the X-ray tube coupled to the gantry. The X-ray tube includes the cathode assembly having a pair of emission surfaces for generating an electron beam, where the pair of emission surfaces are disposed in the cathode assembly at angles with respect to one another. The X-ray tube further includes a focusing electrode for focusing the electron beam, an extraction electrode which electrostatically controls the intensity of the electron beam by adjustment of a positive or negative biasing voltage applied to the extraction electrode, a target for generating X-rays when impinged upon by the electron beam and a magnetic focusing assembly located between the cathode assembly and the target for focusing the electron beam towards the target.

公开(公告)号：US20180076000A1

公开(公告)日：2018-03-15

申请号：US15264845

申请日：2016-09-14

申请人： The Boeing Company

发明人： Morteza Safai

IPC分类号： H01J35/14 ,  H01J35/06 ,  H01J35/08 ,  H01J35/16 ,  G01N23/203

CPC分类号： H01J35/14 ,  G01N23/203 ,  G21K1/06 ,  H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H05G1/02

摘要： Described herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus includes an x-ray emitter and a zone plate. The x-ray emitter includes an x-ray shield, a vacuum tube, a cathode, and an anode. The x-ray shield has an emission aperture. The vacuum tube is within the x-ray shield. The cathode and anode are enclosed within the vacuum tube. The cathode generates an electron emission. The anode is located relative to the cathode to receive the electron emission and convert the electron emission to a hard x-ray emission and is located relative to the emission aperture to direct at least a portion of the hard x-ray emission through the emission aperture. The zone plate is external to the x-ray shield and located relative to the emission aperture to receive the portion of the hard x-ray emission and focus the portion into a focused hard x-ray emission.

公开(公告)号：US20180019088A1

公开(公告)日：2018-01-18

申请号：US15544854

申请日：2016-01-18

申请人： SIEMENS AKTIENGESELLSCHAFT

发明人： Andreas Geisler ,  Svetlana Goßmann ,  Oliver Heid

IPC分类号： H01J1/304 ,  H01J35/10 ,  H01J35/06 ,  H01J31/08 ,  H01J9/02 ,  H01J35/14 ,  H01J3/02

CPC分类号： H01J1/304 ,  H01J3/021 ,  H01J9/025 ,  H01J31/08 ,  H01J35/065 ,  H01J35/10 ,  H01J35/14

摘要： An apparatus is provided for generating X-ray radiation in an outer magnetic field, which may be generated by a magnetic field device. The apparatus includes a cathode configured to generate an electron beam and an anode configured to retard the electrons of the electron beam and generate an X-ray beam. The apparatus further includes a device configured to generate an electric field orientated from the anode in the direction of the cathode and substantially collinear to the outer magnetic field, wherein the cathode, as an electron emitter, includes a cold cathode that passively provides free electrons by field emission.

公开(公告)号：US20170347438A1

公开(公告)日：2017-11-30

申请号：US15459661

申请日：2017-03-15

申请人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

发明人： Jun Tae KANG ,  Yoon-Ho SONG ,  Jin-Woo JEONG

IPC分类号： H05G1/34 ,  H01J35/06 ,  H05G1/32

CPC分类号： H05G1/34 ,  H01J35/065 ,  H05G1/10 ,  H05G1/32

摘要： Provided is an X-ray generator including a thermal electron emission type X-ray generator configured to generate a negative high voltage and a filament current, a field electron emission type X-ray generator including an anode electrode to be grounded, and configured to use the negative high voltage to bias the cathode electrode, and a field emission current control unit configured to convert the filament current to generate an output voltage to be provided to a gate electrode of the field electron emission type X-ray generator and convert the filament current to fix, to a specific level, a level of an emission current flowing through the cathode electrode.

公开(公告)号：US20170301505A1

公开(公告)日：2017-10-19

申请号：US15472656

申请日：2017-03-29

申请人： Nanox Imaging PLC

发明人： Hidenori KENMOTSU ,  Hitoshi MASUYA ,  Koichi IIDA

IPC分类号： H01J35/14 ,  H01J35/06 ,  H01J35/08 ,  H05G1/56

CPC分类号： H01J35/14 ,  G21K1/025 ,  H01J9/39 ,  H01J35/065 ,  H01J35/08 ,  H01J35/20 ,  H05G1/56

摘要： The X-ray tube disclosed herein includes an electron emission unit including an electron emission element using a cold cathode; an anode unit disposed opposite to the electron emission unit, with which electrons emitted from the electron emission unit collide; and a focus structure disposed between the electron emission unit and a target unit disposed on a surface of the anode unit that is opposed to the electron emission unit. The electron emission unit is divided into first and second regions which can independently be turned ON/OFF. The X-ray tube is focus-designed such that collision regions, at the anode unit, of electron beams emitted from the respective first and second regions substantially coincide with each other.

公开(公告)号：US09761404B2

公开(公告)日：2017-09-12

申请号：US14490509

申请日：2014-09-18

申请人： TSINGHUA UNIVERSITY ,  NUCTECH COMPANY LIMITED

发明人： Chuanxiang Tang ,  Huaping Tang ,  Huaibi Chen ,  Wenhui Huang ,  Huayi Zhang ,  Shuxin Zheng ,  Yaohong Liu ,  Jinsheng Liu

IPC分类号： H01J35/06 ,  H01J35/04 ,  H01J35/10 ,  H01J35/14 ,  H01J35/16 ,  G01N23/04

CPC分类号： H01J35/045 ,  G01N23/046 ,  H01J35/06 ,  H01J35/065 ,  H01J35/10 ,  H01J35/14 ,  H01J35/16 ,  H01J2235/087

摘要： A x-ray apparatus of the present application comprises: a vacuum box which is sealed at its periphery, and the interior thereof is high vacuum; a plurality of electron transmitting units arranged in a linear array and installed on the wall at one end within the vacuum box, each electron transmitting unit is independent to each other; the electron transmitting unit having: a heating filament; a cathode connected to the heating filament; a grid arranged above the cathode opposing the cathode; anode made of metal and installed at the other end of the vacuum box, and in the direction of length, the anode is parallel to the plane of the grid of the electron transmitting unit, and in the direction of width, the anode has a predetermined angle with respect to the plane of the grid of the electron transmitting unit.

公开(公告)号：US20170248532A1

公开(公告)日：2017-08-31

申请号：US15517122

申请日：2015-10-29

申请人： Massachusetts Institute of Technology ,  The General Hospital Corporation

发明人： Achuta Kadambi ,  Ramesh Raskar ,  Rajiv Gupta ,  Adam Pan

IPC分类号： G01N23/083 ,  H01J35/14 ,  G01T1/24 ,  H01J35/06 ,  G01N23/04 ,  G21K1/04

CPC分类号： G01N23/083 ,  G01N23/046 ,  G01N2223/04 ,  G01N2223/1016 ,  G01N2223/304 ,  G01N2223/419 ,  G01T1/248 ,  G21K1/043 ,  H01J35/065 ,  H01J35/14

摘要： For each X-ray path through a tissue, numerous trials are conducted. In each trial, X-ray photons are emitted along the path until a Geiger-mode avalanche photodiode “clicks”. A temporal average—i.e., the average amount of time elapsed before a “click” occurs—is calculated. This temporal average is, in turn, used to estimate a causal intensity of X-ray light that passes through the tissue along the path and reaches the diode. Based on the causal intensities for multiple paths, a computer generates computed tomography (CT) images or 2D digital radiographic images. The causal intensities used to create the images are estimated from temporal statistics, and not from conventional measurements of intensity at a pixel. X-ray dosage needed for imaging is dramatically reduced as follows: a “click” of the photodiode triggers negative feedback that causes the system to halt irradiation of the tissue along a path, until the next trial begins.