MICRO HYBRID DIFFERENTIAL/TRIODE ION PUMP
    17.
    发明申请
    MICRO HYBRID DIFFERENTIAL/TRIODE ION PUMP 审中-公开
    微混合差速器/三通离子泵

    公开(公告)号:US20150311048A1

    公开(公告)日:2015-10-29

    申请号:US14448411

    申请日:2014-07-31

    Abstract: An ion pump includes at least one electron source configured to emit electrons into the ion pump; at least one cathode positioned across the ion pump from the at least one electron source; a high-voltage grid positioned between the at least one electron source and the at least one cathode. The high-voltage grid is configured to draw the electrons in between the at least one electron source and the at least one cathode where the electrons collide with gas molecules causing the gas molecules to ionize. The at least one cathode is configured to draw ionized gas molecules toward the at least one cathode such that the ionized gas molecules are trapped by or near the at least one cathode.

    Abstract translation: 离子泵包括配置成将电子发射到离子泵中的至少一个电子源; 从所述至少一个电子源穿过所述离子泵的至少一个阴极; 位于所述至少一个电子源和所述至少一个阴极之间的高压电网。 高电压栅格被配置为将电子吸引在至少一个电子源和至少一个阴极之间,其中电子与气体分子碰撞导致气体分子离子化。 所述至少一个阴极被配置成将离子化气体分子吸向所述至少一个阴极,使得所述电离气体分子被所述至少一个阴极捕获或附近。

    THIN FILM EDGE FIELD EMITTER BASED MICRO ION PUMP
    18.
    发明申请
    THIN FILM EDGE FIELD EMITTER BASED MICRO ION PUMP 审中-公开
    薄膜边缘场发射体微型离子泵

    公开(公告)号:US20150240797A1

    公开(公告)日:2015-08-27

    申请号:US14277309

    申请日:2014-05-14

    Inventor: Steven Tin

    Abstract: A micro-ion pump is provided. The micro-ion pump includes a plurality of thin-film-edge field emitters, a first gate electrode, a second gate electrode, and a high voltage anode. The plurality of thin-film-edge field emitters is in a first X-Z plane. The plurality of thin-film-edge field emitters has a respective plurality of end faces with a high aspect ratio in at least one Y-Z plane. The first gate electrode is in a second X-Z plane offset from the first X-Z plane. The second gate electrode is positioned in a third X-Z plane offset from the first X-Z plane. The high voltage anode is in a fourth X-Z plane offset from the plurality of thin-film-edge field emitters in the first X-Z plane. The second gate electrode is between the high voltage anode and the plurality of thin-film-edge field emitters.

    Abstract translation: 提供微型离子泵。 微离子泵包括多个薄膜边缘场致发射体,第一栅电极,第二栅电极和高电压阳极。 多个薄膜边缘场致发射体处于第一X-Z平面。 多个薄膜边缘场致发射体在至少一个Y-Z平面中具有高纵横比的相应多个端面。 第一栅电极处于从第一X-Z平面偏移的第二X-Z平面。 第二栅电极位于从第一X-Z平面偏移的第三X-Z平面中。 高电压阳极处于与第一X-Z平面中的多个薄膜边缘场发射体偏移的第四X-Z平面。 第二栅电极位于高电压阳极和多个薄膜边缘场发射器之间。

    Ion pump having secondary magnetic field
    19.
    发明授权
    Ion pump having secondary magnetic field 有权
    离子泵具有次级磁场

    公开(公告)号:US06835048B2

    公开(公告)日:2004-12-28

    申请号:US10322991

    申请日:2002-12-18

    CPC classification number: H01J41/18

    Abstract: An ion pump includes one or more anode pump cells, a cathode positioned in proximity to the one or more anode pump cells and a magnet assembly for producing a magnetic field in the one or more anode pump cells. An electric field is applied between the cathode and the one or more anode pump cells. The magnet assembly includes primary magnets of opposite polarities disposed on opposite ends of the anode pump cells and secondary magnets disposed on opposite sides of the anode pump cells. The magnet assembly may further include a magnet yoke which provides a magnetic flux return path. The magnet assembly produces a substantially uniform axial magnetic field in the one or more anode pump cells.

    Abstract translation: 离子泵包括一个或多个阳极泵电池,位于一个或多个阳极泵电池附近的阴极和用于在一个或多个阳极泵电池中产生磁场的磁体组件。 在阴极和一个或多个阳极泵浦电池之间施加电场。 磁体组件包括设置在阳极泵电池的相对两端的相对极性的主磁体和设置在阳极泵电池的相对侧上的次级磁体。 磁体组件还可以包括提供磁通返回路径的磁轭。 磁体组件在一个或多个阳极泵电池中产生基本均匀的轴向磁场。

    Triode ion pump
    20.
    发明授权
    Triode ion pump 有权
    三极离子泵

    公开(公告)号:US06498344B1

    公开(公告)日:2002-12-24

    申请号:US09676822

    申请日:2000-10-02

    CPC classification number: H01J41/18 H01J49/24

    Abstract: A mass spectrometer (MS) which uses the Fourier transform ion cyclotron resonance (FTICR) technique to determine the mass of ions. The MS is prepared with a surface that guarantees that a particle striking the surface will have at least one contact with the cathode and will most likely be re-pumped before escaping into the vacuum chamber volume.

    Abstract translation: 使用傅里叶变换离子回旋共振(FTICR)技术的质谱仪(MS)来确定离子的质量。 MS制备具有表面的表面,该表面保证撞击表面的颗粒将与阴极具有至少一个接触,并且最有可能在逸出到真空室体积之前被再次抽吸。

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