公开(公告)号：US06829399B2

公开(公告)日：2004-12-07

申请号：US09799826

申请日：2001-03-05

Applicant: Carl O. Bozler ,  Steven Rabe ,  Dale C. Flanders ,  Peter S. Whitney

Inventor： Carl O. Bozler ,  Steven Rabe ,  Dale C. Flanders ,  Peter S. Whitney

IPC: G02B626

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US06819820B1

公开(公告)日：2004-11-16

申请号：US09932433

申请日：2001-08-18

Applicant: Murali Chaparala ,  Michael J. Daneman

Inventor： Murali Chaparala ,  Michael J. Daneman

IPC: G02B642

CPC classification number: G02B26/0841 ,  B81B3/0008 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12104

Abstract: A method is disclosed for operating a MEMS device having a flap that is movable with respect to a base. The method includes applying a force to the flap to move the flap at least partially out of contact with an underlying base. Means for applying such a biasing force may be incorporated into a microelectromechanical (MEMS) apparatus having a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

Abstract translation: 公开了一种用于操作具有相对于基座可移动的翼片的MEMS装置的方法。 所述方法包括向所述翼片施加力以使所述翼片至少部分地与下面的基座接触。 用于施加这种偏压力的装置可以结合到具有基部和翼片的微机电（MEMS）装置中，该翼片具有联接到基部的部分，使得翼片可以在第一和第二位置之间移动离开基部的平面。 底座可以具有一个具有很大垂直侧壁的空腔，当瓣片处于第二位置时，电极可以被放置在垂直侧壁上并与底座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。

公开(公告)号：US06813412B2

公开(公告)日：2004-11-02

申请号：US09915232

申请日：2001-07-24

Applicant: Chuang-Chia Lin

Inventor： Chuang-Chia Lin

IPC: G02B635

CPC classification number: G02B6/3518 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/053 ,  B81C1/00214 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358

Abstract: A microelectromechanical systems (MEMS) element and a MEMS optical switch are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element is capable of motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.

Abstract translation: 描述了微机电系统（MEMS）元件和MEMS光开关。 MEMS元件包括可移动地附接到基底的结晶和可移动元件。 可移动元件包括垂直于基本垂直于基底平面的垂直部分。 垂直部分和基底的晶体结构基本相似。 可移动元件能够基本上约束到基本上垂直于衬底的平面定向的平面的运动。 在至少一个位置中，可移动元件的垂直部分的一部分突出超过衬底的表面。 可移动元件可以通过闩锁保持在适当的位置。 可以实现这种结构的阵列以用作光学开关。 光学开关可以包括结晶衬底和可移动地附接到衬底的一个或多个可移动元件。 各种实施例提供了可以简单地制造和密集包装的鲁棒且可靠的MEMS元件。

公开(公告)号：US06808275B2

公开(公告)日：2004-10-26

申请号：US10682679

申请日：2003-10-09

Applicant: Murray Steven Rodgers

Inventor： Murray Steven Rodgers

IPC: G02B508

CPC classification number: G02B7/182 ,  B81B3/004 ,  B81B7/0003 ,  B81B2201/045 ,  G02B5/08

Abstract: The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with a first elevator lifter. The MEM system generally includes a first microstructure (such as a mirror) disposed in vertically spaced relation to a substrate. The positioning system generally includes an actuator assembly movably interconnected with the substrate, an elevator pivotally interconnected with the substrate and further interconnected with the microstructure, and a tether interconnecting the actuator assembly and the elevator. The first elevator lifter is provided to engage the elevator to lift/elevate the microstructure away from the substrate generally after fabrication of the MEM system and prior to utilizing the microstructure in operation of the MEM system.

Abstract translation: 本发明一般涉及用于通过将MEM系统的定位系统与第一电梯升降机接合来提升和支撑MEM系统的微结构的方法和组件。 MEM系统通常包括与衬底垂直间隔设置的第一微结构（例如反射镜）。 定位系统通常包括可移动地与衬底互连的致动器组件，与衬底枢转地互连并与微结构相互连接的电梯以及将致动器组件和电梯互连的系绳。 第一电梯升降器被设置成接合电梯，以在MEM系统的制造之后以及在MEM系统的操作中利用微结构之前，一般地将微结构提升/升高。

公开(公告)号：US20040183395A1

公开(公告)日：2004-09-23

申请号：US10792427

申请日：2004-03-02

Applicant: NIKON CORPORATION

Inventor： Keiichi Akagawa ,  Junji Suzuki ,  Tohru Ishizuya ,  Yoshihiko Suzuki

IPC: G02B006/26 ,  H02N001/00

CPC classification number: G02B6/358 ,  B81B3/0037 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B2006/12104

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract translation: 可动部21经由弯曲部27a，27b固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。 可移动部分21具有第二电极部分23a和23b，该第二电极部分23a和23b可以通过施加在这些电极部分和基板11上的电压以及布置在电极部分中的电流通路25而在这些电极部分和基板11之间产生静电力 在磁场中，并且当电流通过该电流路径时产生洛仑兹力。 在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗 小尺寸。

公开(公告)号：US06791730B2

公开(公告)日：2004-09-14

申请号：US10409416

申请日：2003-04-08

Applicant: Jeffry J. Sniegowski ,  M. Steven Rodgers

Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

IPC: G02B2600

CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract translation: 公开了用于表面微加工光学系统的加强镜微结构的各种实施例。 公开了多层和结构加强的镜面微观结构，包括两层和三层微结构。 这些多层反射镜微结构中的相邻结构层可以通过多个垂直设置的柱，或多个至少大致横向延伸的轨道或肋或其某些组合在结构上加强和互连。 还公开了具有从其下表面悬臂的结构增强组件的单层反射镜微结构的各种实施例。

公开(公告)号：US06788840B2

公开(公告)日：2004-09-07

申请号：US10365370

申请日：2003-02-12

Applicant: Robert E. Stewart ,  Agop H. Cherbettchian ,  Samuel Fersht ,  David B. Hall

Inventor： Robert E. Stewart ,  Agop H. Cherbettchian ,  Samuel Fersht ,  David B. Hall

IPC: G02B626

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/053 ,  G02B6/3512 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3576 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/0866 ,  H01H2001/0042

Abstract: A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. The mirror blocks or reflects the optical axis. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.

Abstract translation: 双稳态微致动器由在电接触层处熔合在一起的第一和第二绝缘体上硅晶片形成。 具有V形槽的盖子定义了光轴。 V沟槽中的准直光信号源将光信号耦合到V沟槽中的光端口。 转印部件上的镜面阻挡或反射光信号。 传送构件在第一和第二端具有支撑点。 镜子阻挡或反射光轴。 可膨胀结构沿着压缩轴线在转移构件的第一和第二支撑点之间施加压缩力，以将转印构件保持在弯曲的第一状态或弯曲的第二状态。 施加到可膨胀结构中的加热元件的控制信号减小了压缩力，将转印构件切换到第二状态。

公开(公告)号：US06771158B2

公开(公告)日：2004-08-03

申请号：US10307367

申请日：2002-12-02

Applicant: Hsiao-Wen Lee ,  Wen-I Wu ,  Shih-Yi Wen ,  Wu-Cheng Kuo ,  Jui-Ping Weng

Inventor： Hsiao-Wen Lee ,  Wen-I Wu ,  Shih-Yi Wen ,  Wu-Cheng Kuo ,  Jui-Ping Weng

IPC: H01P110

CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/053 ,  G02B26/001 ,  G02B26/0808

Abstract: A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.

公开(公告)号：US06767751B2

公开(公告)日：2004-07-27

申请号：US10161191

申请日：2002-05-28

Applicant: James A. Hunter

Inventor： James A. Hunter

IPC: H01L2100

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611

Abstract: An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.

公开(公告)号：US06743653B2

公开(公告)日：2004-06-01

申请号：US10434761

申请日：2003-05-08

Applicant: Yasuyuki Tanabe ,  Katsuyuki Machida ,  Hiromu Ishii ,  Shouji Yagi

Inventor： Yasuyuki Tanabe ,  Katsuyuki Machida ,  Hiromu Ishii ,  Shouji Yagi

IPC: H01L2100

CPC classification number: B81C1/00182 ,  B81B2201/045

Abstract: A micromachine manufacturing method according to this invention includes at least the movable portion formation step of selectively etching a single-crystal silicon layer by using a movable portion formation mask pattern as a mask, thereby forming on the single-crystal silicon layer a movable portion which is coupled to the surrounding single-crystal silicon layer via a coupling portion on a buried oxide, the movable portion protective film formation step of forming a movable portion protective film on the single-crystal silicon layer so as to cover the movable portion while the movable portion is formed on the buried oxide, and the step of forming a buried protective film which covers the movable portion exposed in the substrate opening and movable portion opening, and the single-crystal silicon layer around the movable portion while the movable portion protective film is formed.