公开(公告)号：US2432091A

公开(公告)日：1947-12-09

申请号：US2432091D

CPC classification number: B05D3/10 ,  D06M13/188

公开(公告)号：US2388319A

公开(公告)日：1945-11-06

申请号：US40195241

申请日：1941-07-11

Applicant: BELL TELEPHONE LABOR INC

Inventor： FULLER CALVIN S

IPC: B05D3/10 ,  C08G63/52 ,  C09D5/25 ,  H01B3/42

CPC classification number: B05D3/10 ,  C08G63/52 ,  H01B3/425 ,  Y10S260/28

公开(公告)号：US1023745A

公开(公告)日：1912-04-16

申请号：US1910541964

申请日：1910-02-04

Applicant: MARR ROBERT ATHELSTAN

Inventor： MARR ROBERT ATHELSTAN

CPC classification number: B05D3/10 ,  C10M173/025

公开(公告)号：US89738A

公开(公告)日：1869-05-04

申请号：US89738D

CPC classification number: C10M173/025 ,  B05D3/10

公开(公告)号：US12084592B2

公开(公告)日：2024-09-10

申请号：US16339489

申请日：2017-10-02

Applicant: NISSAN CHEMICAL CORPORATION

Inventor： Hiroaki Yaguchi ,  Makoto Nakajima ,  Yuki Endo ,  Wataru Shibayama ,  Shuhei Shigaki

IPC: C09D183/06 ,  B05D1/32 ,  B05D1/36 ,  B05D3/10 ,  B05D7/00 ,  B05D7/04 ,  B05D7/24 ,  C08G77/38 ,  C09D183/04 ,  G03F7/11 ,  G03F7/16 ,  G03F7/40 ,  H01L21/027

CPC classification number: C09D183/06 ,  B05D1/32 ,  B05D1/36 ,  B05D3/10 ,  B05D7/00 ,  B05D7/04 ,  B05D7/24 ,  C08G77/38 ,  C09D183/04 ,  G03F7/11 ,  G03F7/16 ,  G03F7/40 ,  H01L21/027

Abstract: A coating composition for pattern inversion that fills a gap in an organic underlayer film pattern formed on a substrate to be processed by transferring a resist pattern to an underlayer and forms a flat polysiloxane film, the coating composition including a polysiloxane obtained by a reaction of an alcohol with a silanol group in a hydrolysis-condensate of a hydrolysable silane having a hydrolysable silane containing in the molecule four hydrolysable groups, in a ratio of 50% by mole to 100% by mole relative to the total amount of silanes. The hydrolysable silane is represented by Formula (1):

R1aSi(R2)4-a  Formula (1)

and contains 50% by mole to 100% by mole of a hydrolysable silane in which a is 0 and 0% by mole to 50% by mole of a hydrolysable silane in which a is 1 or 2. The alcohol is propylene glycol monomethyl ether, propylene glycol monoethyl ether, or 3-methoxybutanol.

公开(公告)号：US11938511B2

公开(公告)日：2024-03-26

申请号：US17809947

申请日：2022-06-30

Applicant: Tokyo Electron Limited

Inventor： Masatoshi Kawakita ,  Yusaku Hashimoto ,  Kosuke Yoshihara

IPC: B05D1/00 ,  B05C5/02 ,  B05D3/10

CPC classification number: B05D1/005 ,  B05C5/02 ,  B05D3/10

Abstract: A coating method includes supplying a film forming liquid onto a center of a front surface of a substrate from a nozzle in a state that a distance between the front surface and the nozzle is maintained at a coating distance; rotating the substrate at a first rotation speed in a period during which the film forming liquid is supplied onto the front surface, to allow the film forming liquid to be diffused toward an edge of the substrate from an outer periphery of the nozzle; and rotating the substrate at a second rotation speed after the supplying of the film forming liquid is stopped, to allow the film forming liquid to be further diffused. The coating distance is set to allow the film forming liquid to be kept between the nozzle and the front surface when a discharge of the film forming liquid is stopped.

公开(公告)号：US11802348B2

公开(公告)日：2023-10-31

申请号：US16448099

申请日：2019-06-21

Applicant: Murata Manufacturing Co., Ltd. ,  NATIONAL UNIVERSITY CORPORATION KYOTO INSTITUTE OF TECHNOLOGY

Inventor： Yasushi Yoshida ,  Tatsuya Fukutani ,  Tatsuo Kunishi ,  Masahiko Minoda ,  Ryota Mori

IPC: H01G4/12 ,  C25D5/00 ,  C04B41/85 ,  C04B41/91 ,  C09D163/00 ,  C25D5/02 ,  H01G4/224 ,  H01G4/232 ,  H01G4/30 ,  H01G13/00 ,  C25D5/12 ,  B05D3/10 ,  B05D1/18 ,  B05D5/12

CPC classification number: C25D5/627 ,  C04B41/85 ,  C04B41/91 ,  C09D163/00 ,  C25D5/022 ,  C25D5/12 ,  H01G4/12 ,  H01G4/224 ,  H01G4/232 ,  H01G4/30 ,  H01G13/00 ,  B05D1/18 ,  B05D3/10 ,  B05D5/12

Abstract: An element body has an exposed surface including a selective surface material which is to be coated with the coating material and a non-selected surface material which is not to be coated with the coating material. The selected surface material has different material properties than the non-selected surface material. The element body is coated with the coating material by applying a surface modifier only on the surface of the selected surface material and thereafter coating the surface of the selected surface material to which the surface modifier has been applied with the coating material.

公开(公告)号：US20230158537A1

公开(公告)日：2023-05-25

申请号：US17920450

申请日：2021-06-30

Applicant: Dürr Systems AG

Inventor： Tobias JÄGER ,  Michael LAUER ,  Marek DOWNAR ,  Klaus HEINSOHN ,  Oliver SEYBOTH

IPC: B05C3/109 ,  B05D3/10 ,  B05C11/10 ,  B05D1/18 ,  B08B3/14

CPC classification number: B05C3/109 ,  B05D3/10 ,  B05C11/10 ,  B05D1/18 ,  B08B3/14

Abstract: In order to provide a device and a method for treating workpieces (102), in which an optimized workpiece treatment is possible, it is proposed that a treatment station (114) comprise a treatment chamber (136) that can be flooded for workpiece treatment.

公开(公告)号：US20190074389A1

公开(公告)日：2019-03-07

申请号：US16150914

申请日：2018-10-03

Applicant: NANOCLEAR TECHNOLOGIES INC.

Inventor： Harold Frank GREER ,  Scott S. HARRIED ,  Ryan Morrow BRIGGS ,  Tony LEE

IPC: H01L31/0236 ,  B05D1/12 ,  H01L31/0216

CPC classification number: H01L31/02363 ,  B05D1/12 ,  B05D1/32 ,  B05D3/10 ,  B05D5/06 ,  B05D5/12 ,  C23C16/02 ,  C23C16/04 ,  H01L31/02168 ,  H01L31/048 ,  H01L51/0003 ,  H01L51/426 ,  Y02E10/50

Abstract: The physical and chemical properties of surfaces can be controlled by bonding nanoparticles, microspheres, or nanotextures to the surface via inorganic precursors. Surfaces can acquire a variety of desirable properties such as antireflection or reflection, antifogging, antifrosting, UV blocking, and IR absorption, while maintaining transparency to visible light. Micro or nanomaterials can also be used as etching masks to texture a surface and control its physical and chemical properties via its micro or nanotexture.

公开(公告)号：US20180258243A1

公开(公告)日：2018-09-13

申请号：US15455208

申请日：2017-03-10

Applicant: Hong Kong Applied Science and Technology Research Institute Company Limited

Inventor： Wenwei Zheng ,  Hailong Wu ,  Yaofeng Sun

IPC: C08J5/12 ,  B05D1/18 ,  B05D3/00 ,  C09J4/06

CPC classification number: C08J5/124 ,  B05D1/18 ,  B05D3/007 ,  B05D3/10 ,  C08J5/12 ,  C08J2365/04 ,  C08J2443/04 ,  C09J4/00 ,  C09J4/06 ,  H05K1/00

Abstract: The invention provides a composition for adhering one or more polymers to a substrate. The composition comprises at least one first compound adapted to be coated on a surface of the substrate. The first compound comprises one or more first units each having at least one functional group adapted to chemically react with at least one monomer to form the one or more polymers. Said composition also comprises at least one second compound adapted to be coated on the surface of the substrate. The second compound comprising one or more second units interspersed among the one or more first units of the first compound. Each of the one or more second units is not chemically reactive to the at least one monomer. The invention also provides a method of preparing a polymer coated surface on a substrate using the composition described.