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公开(公告)号：US11239051B2
公开(公告)日：2022-02-01
申请号：US16481918
申请日：2017-02-13
Applicant: Hitachi High-Technologies Corporation
Inventor： Mai Yoshihara , Yuusuke Oominami
Abstract: An object of the invention is to provide a device for observing the same field of view with a charged particle beam device and a camera without increasing a size of a housing. A charged particle beam device according to an aspect of the invention includes: a lens barrel that irradiates a sample with a charged particle beam; an imaging unit that images an optical image of the sample; a sample table on which the sample is placed; and a stage that is movable and on which the sample table is placed, wherein when a distance between a physical central axis of the sample table and a physical optical axis of the imaging unit is defined as a first distance, and a distance between a virtual central axis of the sample table and a physical central axis of the imaging unit, or between the physical central axis of the sample table and a virtual central axis of the imaging unit, or between the virtual central axis of the sample table and the virtual central axis of the imaging unit is defined as a second distance, the second distance is shorter than the first distance.
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公开(公告)号：US11231433B2
公开(公告)日：2022-01-25
申请号：US16078063
申请日：2017-01-31
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Yoshiki Muramatsu , Akihiro Yasui , Yoshihiro Suzuki , Yoichi Aruga
Abstract: The invention provides a highly reliable automatic analyzer and dispenser probe cleaning method that allows for the removal of leftover cleaning water from the outer wall surfaces of a probe without increasing the size of a cleaning bath and contaminating the outer wall surfaces of the probe. A cleaning bath 113 (108, 106) comprises: a cleaning water outlet 203 for discharging into the cleaning bath 113 (108, 116) the cleaning water supplied from a cleaning water supply mechanism 123; and a compressed air outlet 204, disposed on the trajectory of the cleaning water discharged from the cleaning water outlet 203, for discharging the compressed air supplied from a compressed air supply mechanism 124 toward a sample probe 111b or a reagent probe 120 inserted in the cleaning bath 113 (108, 106).
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公开(公告)号：US11215629B2
公开(公告)日：2022-01-04
申请号：US16483459
申请日：2018-01-24
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Yoshihiro Kabe , Takenori Okusa
Abstract: An automated analyzer includes a container installation portion in which a container, such as a reagent container, has a protrusion and an openable and closable lid. A lid opening and closing mechanism opens and closes the lid and includes an arm portion having an arm and a horizontal driving portion which moves the arm in a first horizontal direction. The arm includes a protrusion contacting portion that includes a first surface having an angle greater than 0 degrees and less than 90 degrees when the horizontal surface is set as 0 degrees. The lid opening and closing mechanism portion opens the lid by moving the arm in the first horizontal direction, contacting the lid protrusion on the first surface of the protrusion contacting portion, and then moving the lid protrusion along a shape of the first surface in a vertical direction, until the lid is opened.
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公开(公告)号：US11209448B2
公开(公告)日：2021-12-28
申请号：US16520437
申请日：2019-07-24
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Akihisa Makino , Hajime Yamazaki , Keiko Yoshikawa , Manabu Ando , Masahiko Iijima
Abstract: A high-throughput automatic analyzer integrates a biochemical analysis section and a blood coagulation analysis section. The analyzer is capable of achieving a reduction in size, system cost, and lifecycle cost. The automatic analyzer includes: a reaction disk; a first reagent dispensing mechanism that dispenses a reagent to reaction cells on the reaction disk; a photometer that irradiates a reaction solution in the reaction cell with light; a reaction cell cleaning mechanism; a reaction vessel supply unit that supplies a disposable reaction vessel for mixing and reacting a sample and a reagent with each other; a second reagent dispensing mechanism that dispenses a reagent to the disposable reaction vessel; a blood coagulation time measuring section that irradiates a reaction solution in the disposable reaction vessel with light to detect transmitted or scattered light; and a sample dispensing mechanism that dispenses a sample to the reaction cell and the disposable reaction vessel.
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公开(公告)号：US11209197B2
公开(公告)日：2021-12-28
申请号：US16313521
申请日：2016-06-28
Applicant: Hitachi High-Technologies Corporation
Inventor： Tadao Yabuhara , Terumi Tamura , Hiroshi Watanabe
Abstract: The present invention provides a refrigerating/heating device that efficiently refrigerates and heats while suppressing device costs. This refrigerating/heating device for efficiently heating and refrigerating is provided with: a refrigeration chamber; a Peltier-type cooler for supplying cold air to inside the refrigeration chamber; a heat radiation member for radiating Peltier heat; fans for air-cooling the heat radiation member; an exhaust duct through which waste heat from the fans and the heat radiation member passes; and an installation part to which a subject to be heated can be installed. The subject to be heated is installed in the waste heat flow path of the exhaust duct and heated.
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Patent Agency Ranking
公开(公告)号：US11193099B2
公开(公告)日：2021-12-07
申请号：US15758509
申请日：2016-07-27
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Wataru Sato , Nobuyuki Isoshima , Kohshi Maeda , Daisuke Morishima
Abstract: Provided is a highly reliable temperature adjustment apparatus which uses a temperature adjustment element and quantitatively evaluates the temperature adjustment performance of the temperature adjustment element. The temperature adjustment apparatus is provided with: a temperature adjustment element; one or more temperature detection elements provided near the temperature adjustment element; a calculation unit for calculating the output of the temperature detection element; and a display unit for displaying at least one of a time calculated by the calculation unit as a time at which the temperature adjustment performance of the temperature adjustment is predicted to be below a desired level, the number of operations and the time of current conduction or a warning based on the result of calculation.
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公开(公告)号：US20210366791A1
公开(公告)日：2021-11-25
申请号：US16495369
申请日：2018-11-27
Applicant: Hitachi High-Technologies Corporation
Inventor： Keiichi TANAKA
IPC: H01L21/66 , H01L21/3065 , H01J37/32
Abstract: There is provided a sample processing method including: an adsorption step forming a reactant layer on a sample surface inside a processing chamber in a state where plasma is generated by a plasma generation unit in a plasma generation chamber connected to the processing chamber; a desorption step of desorbing the reactant layer from the surface of the sample by heating the sample with a heating lamp disposed outside the processing chamber and a heater disposed inside the sample stage; a cooling step of cooling the sample heated in the desorption step; and repeating the above steps a plurality of times, wherein in the adsorption step, a control unit performs feed-forward control over the heating lamp and the heater to set the sample to a first temperature state, and in the desorption step, the heater is subjected to feed-back control to set the sample to a second temperature state.
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公开(公告)号：US11181502B2
公开(公告)日：2021-11-23
申请号：US15129854
申请日：2015-03-26
Applicant: Hitachi High-Technologies Corporation
Inventor： Naoshi Itabashi , Sonoko Migitaka , Itaru Yanagi , Rena Akahori , Kenichi Takeda
IPC: G01N21/63 , G01N27/00 , G01N27/92 , G01N27/447 , G01N21/64 , G01N21/65 , G01N33/487 , B82Y40/00
Abstract: While an insulating film having a near-field light generating element placed thereon is being irradiated with light in an electrolytic solution, or after the film that has been irradiated with light is disposed in the electrolytic solution, a first voltage is applied between the two electrodes installed in the electrolytic solution across the film, a second voltage is then applied between the two electrodes, and a value of a current that flows between the two electrodes due to the application of the second voltage is detected. This procedure is stopped when the current value reaches or exceeds a pre-set threshold value, whereby a hole is formed at a desired location in the thin-film.
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公开(公告)号：US20210358760A1
公开(公告)日：2021-11-18
申请号：US16495515
申请日：2019-02-01
Applicant: Hitachi High-Technologies Corporation
Inventor： Sumiko FUJISAKI , Yoshihide YAMAGUCHI , Hiroyuki KOBAYASHI , Kazunori SHINODA , Kohei KAWAMURA , Yutaka KOUZUMA , Masaru IZAWA
IPC: H01L21/311 , H01L21/3065 , H01J37/32
Abstract: Provided is a plasma etching method which enables etching with high accuracy while controlling and reducing surface roughness of a transition metal film. The etching is performed for the transition metal film, which is formed on a sample and contains a transition metal element, by a first step of isotropically generating a layer of transition metal oxide on a surface of the transition metal film while a temperature of the sample is maintained at 100° C. or lower, a second step of raising the temperature of the sample to a predetermined temperature of 150° C. or higher and 250° C. or lower while a complexation gas is supplied to the layer of transition metal oxide, a third step of subliming and removing a reactant generated by an reaction between the complexation gas and the transition metal oxide formed in the first step while the temperature of the sample is maintained at 150° C. or higher and 250° C. or lower, and a fourth step of cooling the sample.
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公开(公告)号：US11175301B2
公开(公告)日：2021-11-16
申请号：US15752616
申请日：2016-08-23
Inventor： Takamichi Mori , Kouhei Nonaka , Masaki Hara , Masato Ishizawa , Hitoshi Tokieda , Stephan Sattler
Abstract: An automatic analyzer includes: a reagent mounting unit 103 in which a plurality of reagent bottles 10 are installed when a reagent bottle 10 is loaded into the automatic analyzer; a reagent conveying mechanism 101 including a gripper mechanism 106; and a reagent mounting mechanism 102 for moving the reagent mounting unit 103 between an installation position at which an operator installs the reagent bottle 10 in the reagent mounting unit 103 and a position at which the gripper mechanism 106 grips the reagent bottle 10. It is thereby possible to achieve saving of a mechanism installation space and reduction of the number of constituent components, automatically carry out an operation from opening of the reagent bottle to loading of the reagent bottle into the reagent disk, and alleviate an operator's burden.
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