公开(公告)号：US5286567A

公开(公告)日：1994-02-15

申请号：US912792

申请日：1992-07-13

Applicant: Yoshihiro Kubota ,  Meguru Kashida ,  Yoshihiko Nagata ,  Hitoshi Noguchi

Inventor： Yoshihiro Kubota ,  Meguru Kashida ,  Yoshihiko Nagata ,  Hitoshi Noguchi

IPC: C08F214/06 ,  B29C35/08 ,  B29C59/16 ,  C08F34/00 ,  C08F214/26 ,  C08F234/02 ,  G03F1/40 ,  G03F1/62 ,  H01L21/027 ,  B32B27/00

CPC classification number: G03F1/62 ,  B29C59/16 ,  B29C2035/0827 ,  B29C2035/0838 ,  Y10T428/31544

Abstract: A pellicle for dust-proofing of a photolithographic mask used for patterning in the manufacturing process of semiconductor devices. The drawback due to dust deposition can be greatly decreased in the use of a pellicle made from a fluorocarbon resin which is a copolymer of tetrafluoroethylene and another fluorocarbon monomer capable of introducing a cyclic perfluoroether group into the molecule when the pellicle film is rendered antistatically hydrophilic, for example, by a plasma treatment.

Abstract translation: 用于在半导体器件的制造过程中用于图案化的光刻掩模的防尘薄膜组件。 在使用由氟树脂制成的防护薄膜树脂时，由于粉尘沉积的缺点可以大大降低，因为当防护薄膜成为抗静电亲水性时，能够将环状全氟醚基团引入到分子中的四氟乙烯与另一氟碳单体的共聚物， 例如通过等离子体处理。

公开(公告)号：US5234609A

公开(公告)日：1993-08-10

申请号：US899330

申请日：1992-06-16

Applicant: Meguru Kashida ,  Yoshihiko Nagata ,  Hitoshi Noguchi

Inventor： Meguru Kashida ,  Yoshihiko Nagata ,  Hitoshi Noguchi

IPC: C23C16/01 ,  C23C16/36 ,  G03F1/22 ,  H01L21/027

CPC classification number: G03F1/22 ,  C23C16/01 ,  C23C16/36

Abstract: Disclosed is an X-ray-permeable membrane for X-ray lithographic mask for fine patterning in the manufacture of semiconductor devices having good transparency to visible light and exhibiting excellent resistance against high-energy beam irradiation. The membrane has a chemical composition expressed by the formula SiC.sub.x N.sub.y and can be prepared by the thermal CVD method in an atmosphere of a gaseous mixture consisting of gases comprising, as a group, the elements of silicon, carbon and nitrogen such as a ternary combination of silane, propane and ammonia.

Abstract translation: 公开了一种用于X射线光刻掩模的X射线透过膜，用于制造对可见光具有良好透明度并且显示出优异的高能束照射阻力的半导体器件的精细图案化。 膜具有由式SiC x N y表示的化学组成，并且可以在气体混合物气氛中通过热CVD法制备，所述气体混合物由以下组成的气体组成，所述气体包含硅，碳和氮的元素，例如三元组合 硅烷，丙烷和氨。

公开(公告)号：US09353458B2

公开(公告)日：2016-05-31

申请号：US12225570

申请日：2007-02-05

Applicant: Atsuhito Sawabe ,  Hitoshi Noguchi ,  Shintaro Maeda

Inventor： Atsuhito Sawabe ,  Hitoshi Noguchi ,  Shintaro Maeda

IPC: C30B23/02 ,  C30B25/10 ,  C30B25/18 ,  C30B29/02 ,  C30B29/04 ,  H01L21/02 ,  C23C16/27 ,  H01J37/32 ,  H01J37/34

CPC classification number: C30B23/02 ,  C23C16/272 ,  C30B25/105 ,  C30B25/18 ,  C30B29/02 ,  C30B29/04 ,  H01J37/32009 ,  H01J37/34 ,  H01J37/3447 ,  H01L21/0242 ,  H01L21/02433 ,  H01L21/02491 ,  H01L21/02516 ,  H01L21/02527 ,  H01L21/0262

Abstract: The present invention provides a base substrate for epitaxial diamond film capable of epitaxially growing a large area of high quality diamond, having a diameter of 1 inch (2.5 cm) or more, on an iridium base by using the CVD method, a method for producing the base substrate for epitaxial diamond film, an epitaxial diamond film produced with the base substrate for epitaxial diamond film and a method for producing the epitaxial diamond film. An iridium (Ir) film is formed by epitaxial growth on a single crystal magnesium oxide (MgO) substrate or a single crystal sapphire (α-Al2O3) substrate by means of a vacuum deposition method or a sputtering method, and a bias nucleus generation process of forming epitaxial diamond nuclei is applied to the surface of the iridium (Ir) base formed as a film by exposing an ion-containing direct current plasma to the surface of the iridium (Ir) base formed as a film.

Abstract translation: 本发明提供一种用于外延金刚石膜的基底，其能够通过使用CVD法在铱基上外延生长具有1英寸（2.5cm）或更大直径的大面积的高品质金刚石， 用于外延金刚石膜的基底衬底，用外延金刚石膜制成的外延金刚石膜和用于制造外延金刚石膜的方法。 通过真空沉积法或溅射法在单晶氧化镁（MgO）衬底或单晶蓝宝石（α-Al 2 O 3）衬底上外延生长形成铱（Ir）膜，并且偏置核生成工艺 通过将含离子的直流等离子体暴露于形成为膜的铱（Ir）基底的表面，将形成外延金刚石核的形成的铱（Ir）基底的表面施加于膜。

公开(公告)号：US09127375B2

公开(公告)日：2015-09-08

申请号：US12591539

申请日：2009-11-23

Applicant: Hitoshi Noguchi

Inventor： Hitoshi Noguchi

IPC: C30B29/04 ,  C30B25/18

CPC classification number: C30B25/18 ,  C30B29/04 ,  Y10T117/10

Abstract: The present invention is a base material for forming a single crystal diamond comprising, at least, a seed base material of a single crystal and a thin film heteroepitaxially grown on the seed base material, wherein the seed base material is a single crystal diamond and the thin film is Iridium film or Rhodium film. As a result, there is provided a base material for forming a single crystal diamond that enables a single crystal diamond having a high crystallinity to be heteroepitaxially grown thereon and that can be reused repeatedly and a method for producing a single crystal diamond that enables a single crystal diamond having a high crystallinity and a large area to be produced at low cost.

Abstract translation: 本发明是用于形成单晶金刚石的基材，其至少包括单晶晶种基材和在种子基材上异质外延生长的薄膜，其中种子基材为单晶金刚石， 薄膜是铱膜或铑膜。 结果，提供了一种用于形成单晶金刚石的基材，其使得能够使具有高结晶度的单晶金刚石在其上异质外延生长并且可以重复使用，并且可以制造单晶金刚石的方法， 具有高结晶度和大面积的水晶钻石以低成本生产。

公开(公告)号：US09076653B2

公开(公告)日：2015-07-07

申请号：US12662616

申请日：2010-04-26

Applicant: Hitoshi Noguchi

Inventor： Hitoshi Noguchi

IPC: C30B25/02 ,  H01L21/205 ,  H01L21/02 ,  H01L29/06 ,  C30B25/18 ,  C30B25/20 ,  C30B29/02 ,  C30B29/04 ,  C30B33/06

CPC classification number: H01L21/02527 ,  C30B25/02 ,  C30B25/186 ,  C30B25/20 ,  C30B29/02 ,  C30B29/04 ,  C30B33/06 ,  H01L21/02021 ,  H01L21/02376 ,  H01L21/02491 ,  H01L21/02664 ,  H01L29/0657 ,  Y10T428/219 ,  Y10T428/24488

Abstract: The present invention is a substrate for growing a single crystal diamond layer including: at least, a base material made of a single crystal diamond, and an iridium film or a rhodium film heteroepitaxially grown on a side of the base material where the single crystal diamond layer is to be grown; wherein a peripheral end portion of a surface of the base material on the side where the single crystal diamond layer is to be grown is chamfered with a curvature radius (r), the curvature radius satisfying (r)≧50 μm. As a result, there is provided a substrate for growing a single crystal diamond layer and a method for producing a single crystal diamond substrate, the substrate and the method in which a single crystal diamond having uniform and high crystallinity can be reproducibly produced at low cost.

Abstract translation: 本发明是用于生长单晶金刚石层的基板，包括：至少由单晶金刚石制成的基材，以及异质外延生长在基材侧的铱膜或铑膜，其中单晶金刚石 层要生长; 其中，要生长单晶金刚石层一侧的基材的表面的外周端部以曲率半径（r）倒角，曲率半径满足（r）≥50μm。 结果，提供了用于生长单晶金刚石层的基板和用于制造单晶金刚石基板的方法，该基板和其中可以以低成本可再现地制造具有均匀和高结晶度的单晶金刚石的方法 。

公开(公告)号：US20120292153A1

公开(公告)日：2012-11-22

申请号：US13442136

申请日：2012-04-09

Applicant: Hitoshi NOGUCHI ,  Hiroshi OKADA ,  Hiroyuki USAMI ,  Yoshihiro YAMASHITA

Inventor： Hitoshi NOGUCHI ,  Hiroshi OKADA ,  Hiroyuki USAMI ,  Yoshihiro YAMASHITA

IPC: F16D13/38 ,  F16D29/00

CPC classification number: B60K6/405 ,  B60K6/48 ,  F16H57/0412 ,  F16H57/0473 ,  F16H57/0476 ,  Y02T10/6221

Abstract: A main shaft has a shaft cylindrical portion extending from an outer periphery of a large-diameter portion. A drum has a drum cylindrical portion extending from an outer periphery of a drum plate portion. An axial forward end of the drum cylindrical portion is arranged in an inside of the shaft cylindrical portion. A frictional engagement unit of a clutch is provided in an inside of the shaft cylindrical portion. A motor generator has a rotor, which is firmly fitted to outer walls of the large-diameter portion and the shaft cylindrical portion and rotatable relative to a stator. A working-oil supply passage is formed in an inside of an input shaft.

Abstract translation: 主轴具有从大直径部的外周延伸的轴筒部。 滚筒具有从鼓板部分的外周延伸的滚筒圆柱形部分。 鼓圆筒部的轴向前端配置在轴圆筒部的内侧。 离合器的摩擦接合单元设置在轴圆筒部的内侧。 电动发电机具有转子，该转子牢固地配合到大直径部分的外壁和轴圆筒部分上并相对于定子可旋转。 工作油供给通道形成在输入轴的内侧。

公开(公告)号：US20100294196A1

公开(公告)日：2010-11-25

申请号：US12662616

申请日：2010-04-26

Applicant: Hitoshi Noguchi

Inventor： Hitoshi Noguchi

IPC: C30B25/20 ,  B32B3/02

CPC classification number: H01L21/02527 ,  C30B25/02 ,  C30B25/186 ,  C30B25/20 ,  C30B29/02 ,  C30B29/04 ,  C30B33/06 ,  H01L21/02021 ,  H01L21/02376 ,  H01L21/02491 ,  H01L21/02664 ,  H01L29/0657 ,  Y10T428/219 ,  Y10T428/24488

Abstract: The present invention is a substrate for growing a single crystal diamond layer including: at least, a base material made of a single crystal diamond, and an iridium film or a rhodium film heteroepitaxially grown on a side of the base material where the single crystal diamond layer is to be grown; wherein a peripheral end portion of a surface of the base material on the side where the single crystal diamond layer is to be grown is chamfered with a curvature radius (r), the curvature radius satisfying (r)≧50 μm. As a result, there is provided a substrate for growing a single crystal diamond layer and a method for producing a single crystal diamond substrate, the substrate and the method in which a single crystal diamond having uniform and high crystallinity can be reproducibly produced at low cost.

Abstract translation: 本发明是用于生长单晶金刚石层的基板，包括：至少由单晶金刚石制成的基材，以及异质外延生长在基材侧的铱膜或铑膜，其中单晶金刚石 层要生长; 其中，要生长单晶金刚石层一侧的基材的表面的外周端部以曲率半径（r）倒角，曲率半径满足（r）≥50μm。 结果，提供了用于生长单晶金刚石层的基板和用于制造单晶金刚石基板的方法，该基板和其中可以以低成本可再现地制造具有均匀和高结晶度的单晶金刚石的方法 。

公开(公告)号：US20090098414A1

公开(公告)日：2009-04-16

申请号：US12240406

申请日：2008-09-29

Applicant: Tadahiro OOISHI ,  Kazufumi Omura ,  Hitoshi Noguchi ,  Hiroaki Takano

Inventor： Tadahiro OOISHI ,  Kazufumi Omura ,  Hitoshi Noguchi ,  Hiroaki Takano

IPC: G11B5/706 ,  B05D5/00

CPC classification number: G11B5/7021 ,  G11B5/7013 ,  G11B5/714 ,  G11B5/842

Abstract: The present invention relates to a method of manufacturing a magnetic recording medium wherein the magnetic layer coating liquid comprising a ferromagnetic powder having an average particle size of 10 to 40 nm and a moisture content of 0.3 to 3.0 weight percent; a binder (a) comprising 0.2 to 0.7 meq/g of at least one polar group selected from the group consisting of —SO3M, —OSO3M, —PO(OM)2, —OPO(OM)2, and COOM (M denotes a hydrogen atom or the like) and having a weight average molecular weight of 20,000 to 200,000, and/or (b) comprising 0.5 to 5 meq/g of at least one polar group selected from the group consisting of —CONR1R2, —NR1R2, and —NR+R1R2R3 (wherein R1, R2, and R3 each independently denote a hydrogen atom or the like) and having a weight average molecular weight of 20,000 to 200,000; and a compound comprising at least one carboxyl group and/or hydroxyl group per molecule.

Abstract translation: 磁记录介质的制造方法技术领域本发明涉及一种制造磁记录介质的方法，其中所述磁性层涂布液含有平均粒度为10〜40nm，水分含量为0.3〜3.0重量％的铁磁性粉末; 包含0.2至0.7meq / g的至少一种选自-SO 3 M，-OSO 3 M，-PO（OM）2，-OPO（OM）2和COOM的极性基团的粘合剂（a）（M表示 氢原子等），重均分子量为20,000〜200,000，和/或（b）含有0.5〜5meq / g的至少一种极性基团，选自-CONR1R2，-NR1R2和 -NR + R1R2R3（其中R1，R2和R3各自独立地表示氢原子等），重均分子量为20,000〜200,000; 和每分子含有至少一个羧基和/或羟基的化合物。

公开(公告)号：US20090027812A1

公开(公告)日：2009-01-29

申请号：US12180580

申请日：2008-07-28

Applicant: Hitoshi Noguchi ,  Yasushi Endo ,  Osamu Shimizu ,  Makoto Yoshida ,  Kazuhiko Maejima ,  Mitsuyoshi Kawai

Inventor： Hitoshi Noguchi ,  Yasushi Endo ,  Osamu Shimizu ,  Makoto Yoshida ,  Kazuhiko Maejima ,  Mitsuyoshi Kawai

IPC: G11B5/33

CPC classification number: G11B5/70 ,  G11B5/00826 ,  G11B5/29 ,  G11B5/3106 ,  G11B5/3906 ,  G11B5/70678 ,  G11B5/7085 ,  G11B5/71 ,  G11B5/714

Abstract: The magnetic signal reproduction system comprises a magnetic recording medium comprising a magnetic layer comprising a ferromagnetic powder and a binder on a nonmagnetic support and a reproduction head, wherein a number of protrusions equal to or greater than 10 nm in height on the magnetic layer surface, as measured by an atomic force microscope, ranges from 50 to 2500/10,000 μm2, a quantity of lubricant on the magnetic layer surface, denoted as a surface lubricant index, ranges from 0.5 to 5.0, a surface abrasive occupancy of the magnetic layer ranges from 2 to 20 percent, the reproduction head is a magnetoresistive magnetic head comprising a spin-valve layer, the spin-valve layer comprises a magnetization free layer, a magnetization pinned layer and an antiferromagnetic layer, and the antiferromagnetic layer is comprised of alloy comprising iridium and manganese, and the reproduction head comes in sliding contact with the magnetic recording medium during signal reproduction.

Abstract translation: 磁信号再现系统包括磁记录介质，磁记录介质包括在非磁性载体上的铁磁性粉末和粘合剂的磁性层和再现磁头，其中在磁性层表面上高度等于或大于10nm的突起数目， 通过原子力显微镜测量的范围为50至2500 / 10,000mum2，表面润滑指数表示为磁性层表面的润滑剂的数量为0.5至5.0，磁性层的表面磨料占据率为 2〜20％，再现头是包括自旋阀层的磁阻磁头，自旋阀层包括磁化自由层，磁化钉扎层和反铁磁层，反铁磁层由包含铱的合金 和锰，并且再现头在信号再现期间与磁记录介质滑动接触。

公开(公告)号：US07070650B2

公开(公告)日：2006-07-04

申请号：US10421562

申请日：2003-04-23

Applicant: Hitoshi Noguchi ,  Yoshihiro Kubota

Inventor： Hitoshi Noguchi ,  Yoshihiro Kubota

IPC: C30B23/00

CPC classification number: C23C16/274 ,  C23C16/278 ,  C30B25/105 ,  C30B29/04

Abstract: There is disclosed a method for producing a diamond film on a base material by a vapor phase reaction at least with introducing a raw material gas, wherein B(OCH3)3 gas is added to the raw material gas as a source of boron to be doped, and a diamond film is deposited on the base material by a vapor phase reaction utilizing the mixed raw material gas. There can be provided a method enabling easy and uniform production of a diamond film showing a low electric resistivity value with good reproducibility and few problems concerning handling such as serious bad influence on human bodies and explosiveness during the doping process.

Abstract translation: 公开了至少通过引入原料气体，通过气相反应在基材上制备金刚石膜的方法，其中B（OCH 3 3）3气体 作为待掺杂的硼源加入到原料气体中，并且通过利用混合原料气体的气相反应将金刚石膜沉积在基材上。 可以提供一种能够容易且均匀地制造金刚石膜的方法，其具有低的电阻率值，具有良好的再现性，并且在掺杂过程中对诸如对人体的严重不良影响和爆炸性的处理问题很少。