METHOD OF FORMING A PATTERN
    21.
    发明申请
    METHOD OF FORMING A PATTERN 有权
    形成图案的方法

    公开(公告)号:US20120322268A1

    公开(公告)日:2012-12-20

    申请号:US13493146

    申请日:2012-06-11

    IPC分类号: H01L21/302

    摘要: A method of forming a pattern includes forming a mask pattern on a substrate; etching the substrate by deep reactive ion etching (DRIE) and by using the mask pattern as an etch mask; partially removing the mask pattern to expose a portion of an upper surface of the substrate; and etching the exposed portion of the upper surface of the substrate. In the method, when a pattern is formed by DRIE, an upper portion of the pattern does not protrude or scarcely protrudes, and scallops of a sidewall of the pattern are smooth, and thus a conformal material layer may be easily formed on a surface of the pattern.

    摘要翻译: 形成图案的方法包括在基板上形成掩模图案; 通过深反应离子蚀刻(DRIE)蚀刻衬底并通过使用掩模图案作为蚀刻掩模; 部分地去除所述掩模图案以暴露所述基板的上表面的一部分; 并蚀刻衬底的上表面的暴露部分。 在该方法中,当由DRIE形成图案时,图案的上部不突出或几乎不突出,并且图案的侧壁的扇形光滑,因此可以容易地在保护层的表面上形成共形材料层 模式。

    Vibration motor
    22.
    发明授权
    Vibration motor 失效
    振动电机

    公开(公告)号:US08258657B2

    公开(公告)日:2012-09-04

    申请号:US12760116

    申请日:2010-04-14

    IPC分类号: H02K33/00

    CPC分类号: H02K33/16 H02K15/02 H02K15/14

    摘要: A vibration motor is disclosed. In accordance with an embodiment of the present invention, the vibration motor includes a base, a vibrator, which reciprocates in the base, a protruding part, which is formed on at least one of the base and the vibrator, and an elastic body, which is interposed between the base and the vibrator and has a through-part formed therein and in which the protruding part is inserted into the through-part and the elastic body is coupled to the base or the vibrator by caulking or bending the protruding part which is protruded through the through-part. Thus, the vibration motor can have a uniform resonant frequency characteristic since a spring is coupled by way of caulking or bending.

    摘要翻译: 公开了一种振动电动机。 根据本发明的实施例,振动电动机包括基座,在基座中往复运动的振动器,形成在基座和振动器中的至少一个上的突出部分和弹性体,其中 插入在基座和振动器之间并且具有形成在其中的通孔部分,并且突出部分插入到通孔部分中,并且弹性体通过铆接或弯曲突出部分而被连接到基座或振动器 突出穿过通孔。 因此,振动电动机可以具有均匀的谐振频率特性,因为弹簧通过铆接或弯曲而联接。

    Compound semiconductor substrate grown on metal layer, method for manufacturing the same, and compound semiconductor device using the same
    23.
    发明授权
    Compound semiconductor substrate grown on metal layer, method for manufacturing the same, and compound semiconductor device using the same 有权
    在金属层上生长的化合物半导体衬底,其制造方法以及使用其的化合物半导体器件

    公开(公告)号:US08198649B2

    公开(公告)日:2012-06-12

    申请号:US11982716

    申请日:2007-11-02

    IPC分类号: H01L33/20

    摘要: The present invention relates to a compound semiconductor substrate and a method for manufacturing the same. The present invention provides the manufacturing method which coats spherical balls on a substrate, forms a metal layer between the spherical balls, removes the spherical balls to form openings, and grows a compound semiconductor layer from the openings. According to the present invention, the manufacturing method can be simplified and grow a high quality compound semiconductor layer rapidly, simply and inexpensively, as compared with a conventional ELO (Epitaxial Lateral Overgrowth) method or a method for forming a compound semiconductor layer on a metal layer. And, the metal layer serves as one electrode of a light emitting device and a light reflecting film to provide a light emitting device having reduced power consumption and high light emitting efficiency.

    摘要翻译: 化合物半导体基板及其制造方法技术领域本发明涉及化合物半导体基板及其制造方法。 本发明提供一种制造方法,其在基板上涂布球形球,在球形球之间形成金属层,去除球形球以形成开口,并从开口生长化合物半导体层。 根据本发明,与传统的ELO(外延横向生长)方法或在金属上形成化合物半导体层的方法相比,可以简化和简单且廉价地生产高质量的化合物半导体层 层。 并且,金属层用作发光器件和光反射膜的一个电极,以提供具有降低的功率消耗和高发光效率的发光器件。

    Method for preparing compound semiconductor substrate
    24.
    发明授权
    Method for preparing compound semiconductor substrate 有权
    化合物半导体衬底的制备方法

    公开(公告)号:US08158496B2

    公开(公告)日:2012-04-17

    申请号:US12878225

    申请日:2010-09-09

    IPC分类号: H01L21/28

    摘要: Provided is a method for preparing a compound semiconductor substrate. The method includes coating a plurality of spherical balls on a substrate, growing a compound semiconductor epitaxial layer on the substrate coated with the spherical balls while allowing voids to be formed under the spherical balls, and cooling the substrate on which the compound semiconductor epitaxial layer is grown so that the substrate and the compound semiconductor epitaxial layer are self-separated along the voids. The spherical ball treatment can reduce dislocation generations. In addition, because the substrate and the compound semiconductor epitaxial layer are separated through the self-separation, there is no need for laser lift-off process.

    摘要翻译: 提供了一种制备化合物半导体衬底的方法。 该方法包括在基板上涂覆多个球形球,在涂覆有球形球的基材上生长化合物半导体外延层,同时允许在球形球下方形成空隙,并且冷却其上化合物半导体外延层为 生长,使得衬底和化合物半导体外延层沿着空隙自我分离。 球形球处理可以减少错位几代。 此外,由于基板和化合物半导体外延层通过自分离分离,因此不需要激光剥离处理。

    STEAM STERILIZATION SYSTEM FOR A WATER PURIFIER
    25.
    发明申请
    STEAM STERILIZATION SYSTEM FOR A WATER PURIFIER 审中-公开
    一种水净化器的蒸汽灭菌系统

    公开(公告)号:US20120087845A1

    公开(公告)日:2012-04-12

    申请号:US13376668

    申请日:2010-06-07

    IPC分类号: A61L2/07

    摘要: The present invention relates to a sterilization system for a water purifier, i.e., a system which can sterilize, using hot water and steam, the interiors of a filter, a water tank, a cooling tank, a hot water tank, lines connected to each unit, and a water nozzle of the water purifier, which are vulnerable to bacteria. The system of the present invention effectively sterilizes the water purifier to enable users to use a highly clean water purifier.

    摘要翻译: 本发明涉及一种用于净水器的灭菌系统,即一种能够使用热水和蒸汽消毒过滤器,水箱,冷却箱,热水箱,与每个 单元和净水器的水嘴,其易受细菌影响。 本发明的系统有效地消毒净水器,使用户能够使用高度清洁的净水器。

    Apparatus and Method for Processing Substrate Using Neutralized Beams Including Applying a Voltage to a Substrate Support
    26.
    发明申请
    Apparatus and Method for Processing Substrate Using Neutralized Beams Including Applying a Voltage to a Substrate Support 有权
    使用包括对基板支撑施加电压的中和束来处理基板的装置和方法

    公开(公告)号:US20120068058A1

    公开(公告)日:2012-03-22

    申请号:US13306364

    申请日:2011-11-29

    IPC分类号: H05H3/02

    摘要: An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.

    摘要翻译: 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。

    BUILT-IN ANTENNA AND METHOD FOR IMPROVING ANTENNA EFFICIENCY
    27.
    发明申请
    BUILT-IN ANTENNA AND METHOD FOR IMPROVING ANTENNA EFFICIENCY 有权
    内置天线和改善天线效率的方法

    公开(公告)号:US20120044114A1

    公开(公告)日:2012-02-23

    申请号:US13204032

    申请日:2011-08-05

    IPC分类号: H01Q1/24 H01P11/00 H01Q9/04

    摘要: A built-in antenna of a portable terminal and a method of forming the same are provided. The built-in antenna includes a first conductor having a specific length and used for a ground, a second conductor disposed with a specific distance in parallel to the first conductor to couple with the first conductor and used for power feeding, and a separating element disposed between the first conductor and the second conductor to separate the first and second conductors. Accordingly, the built-in antenna may exhibit a smooth radiation property even if a metal construction is used in a device and thus may implement robustness improvement of the device and make the device slim and have an attractive outer appearance. In addition, a method of improving antenna efficiency may prevent deterioration of the radiation property of the antenna radiator of the related art by using simple processing, and the metal construction may be used as a radiator.

    摘要翻译: 提供了便携式终端的内置天线及其形成方法。 内置天线包括具有特定长度并用于地面的第一导体,与第一导体平行设置的具有特定距离的第二导体,以与第一导体耦合并用于供电,以及分配元件设置 在第一导体和第二导体之间,以分离第一和第二导体。 因此,即使在设备中使用金属结构,内置天线也可以呈现平滑的辐射特性,因此可以实现设备的鲁棒性改善并且使设备变得苗条并且具有有吸引力的外观。 此外,通过使用简单的处理,提高天线效率的方法可以防止现有技术的天线辐射体的辐射特性的劣化,并且金属结构可以用作散热器。

    NITRIDE SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD THEREOF
    28.
    发明申请
    NITRIDE SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD THEREOF 有权
    氮化物半导体基板及其制造方法

    公开(公告)号:US20110143525A1

    公开(公告)日:2011-06-16

    申请号:US13031425

    申请日:2011-02-21

    IPC分类号: H01L21/365

    摘要: The present invention relates to a nitride semiconductor substrate such as gallium nitride substrate and a method for manufacturing the same. The present invention forms a plurality of trenches on a lower surface of a base substrate that are configured to absorb or reduce stresses applied larger when growing a nitride semiconductor film on the base substrate from a central portion of the base substrate towards a peripheral portion. That is, the present invention forms the trenches on the lower surface of the base substrate such that pitches get smaller or widths or depths get larger from the central portion of the base substrate towards the peripheral portion.

    摘要翻译: 氮化镓半导体衬底及其制造方法技术领域本发明涉及氮化镓衬底等氮化物半导体衬底及其制造方法。 本发明在基底基板的下表面上形成多个沟槽,该多个沟槽被配置为当从基底基板的中心部朝向周边部分生长氮化物半导体膜时吸收或减小施加更大的应力。 也就是说,本发明在基底基板的下表面上形成沟槽,使得间距变得较小,或者宽度或深度从基底基板的中心部朝向周边部分变大。

    HOST APPARATUS CONNECTED TO IMAGE FORMING APPARATUS AND SETTING INFORMATION MANAGEMENT METHOD THEREOF
    29.
    发明申请
    HOST APPARATUS CONNECTED TO IMAGE FORMING APPARATUS AND SETTING INFORMATION MANAGEMENT METHOD THEREOF 有权
    连接到图像形成装置的主机装置及其信息管理方法

    公开(公告)号:US20110134452A1

    公开(公告)日:2011-06-09

    申请号:US12855021

    申请日:2010-08-12

    IPC分类号: G06F3/12

    摘要: A setting information management method of a host apparatus which is communicatively coupled to a plurality of image forming apparatuses that include setting information, the method including selecting at least two image forming apparatuses, receiving at least one setting item and a setting value corresponding to the setting item of the setting information from the selected image forming apparatuses, displaying the at least one received setting item and setting value for each of the selected image forming apparatuses; comparing and displaying the at least one setting item and setting value of the selected image forming apparatuses according to a comparison option, selecting at least one of the displayed setting item and setting value to be updated, and changing at least one of the setting item and the setting value of at least one of the selected image forming apparatuses.

    摘要翻译: 一种主机设备的设置信息管理方法,其通信地耦合到包括设置信息的多个图像形成装置,所述方法包括:选择至少两个图像形成装置,接收至少一个设置项目和与所述设置相对应的设置值 显示所选择的图像形成装置中的至少一个所接收的设定项目和设定值, 根据比较选项来比较和显示所选择的图像形成装置的至少一个设置项目和设置值,选择所显示的设置项目和要更新的设置值中的至少一个,并且改变设置项目和 所选择的图像形成装置中的至少一个的设定值。