摘要:
A method of forming a pattern includes forming a mask pattern on a substrate; etching the substrate by deep reactive ion etching (DRIE) and by using the mask pattern as an etch mask; partially removing the mask pattern to expose a portion of an upper surface of the substrate; and etching the exposed portion of the upper surface of the substrate. In the method, when a pattern is formed by DRIE, an upper portion of the pattern does not protrude or scarcely protrudes, and scallops of a sidewall of the pattern are smooth, and thus a conformal material layer may be easily formed on a surface of the pattern.
摘要:
A vibration motor is disclosed. In accordance with an embodiment of the present invention, the vibration motor includes a base, a vibrator, which reciprocates in the base, a protruding part, which is formed on at least one of the base and the vibrator, and an elastic body, which is interposed between the base and the vibrator and has a through-part formed therein and in which the protruding part is inserted into the through-part and the elastic body is coupled to the base or the vibrator by caulking or bending the protruding part which is protruded through the through-part. Thus, the vibration motor can have a uniform resonant frequency characteristic since a spring is coupled by way of caulking or bending.
摘要:
The present invention relates to a compound semiconductor substrate and a method for manufacturing the same. The present invention provides the manufacturing method which coats spherical balls on a substrate, forms a metal layer between the spherical balls, removes the spherical balls to form openings, and grows a compound semiconductor layer from the openings. According to the present invention, the manufacturing method can be simplified and grow a high quality compound semiconductor layer rapidly, simply and inexpensively, as compared with a conventional ELO (Epitaxial Lateral Overgrowth) method or a method for forming a compound semiconductor layer on a metal layer. And, the metal layer serves as one electrode of a light emitting device and a light reflecting film to provide a light emitting device having reduced power consumption and high light emitting efficiency.
摘要:
Provided is a method for preparing a compound semiconductor substrate. The method includes coating a plurality of spherical balls on a substrate, growing a compound semiconductor epitaxial layer on the substrate coated with the spherical balls while allowing voids to be formed under the spherical balls, and cooling the substrate on which the compound semiconductor epitaxial layer is grown so that the substrate and the compound semiconductor epitaxial layer are self-separated along the voids. The spherical ball treatment can reduce dislocation generations. In addition, because the substrate and the compound semiconductor epitaxial layer are separated through the self-separation, there is no need for laser lift-off process.
摘要:
The present invention relates to a sterilization system for a water purifier, i.e., a system which can sterilize, using hot water and steam, the interiors of a filter, a water tank, a cooling tank, a hot water tank, lines connected to each unit, and a water nozzle of the water purifier, which are vulnerable to bacteria. The system of the present invention effectively sterilizes the water purifier to enable users to use a highly clean water purifier.
摘要:
An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
摘要:
A built-in antenna of a portable terminal and a method of forming the same are provided. The built-in antenna includes a first conductor having a specific length and used for a ground, a second conductor disposed with a specific distance in parallel to the first conductor to couple with the first conductor and used for power feeding, and a separating element disposed between the first conductor and the second conductor to separate the first and second conductors. Accordingly, the built-in antenna may exhibit a smooth radiation property even if a metal construction is used in a device and thus may implement robustness improvement of the device and make the device slim and have an attractive outer appearance. In addition, a method of improving antenna efficiency may prevent deterioration of the radiation property of the antenna radiator of the related art by using simple processing, and the metal construction may be used as a radiator.
摘要:
The present invention relates to a nitride semiconductor substrate such as gallium nitride substrate and a method for manufacturing the same. The present invention forms a plurality of trenches on a lower surface of a base substrate that are configured to absorb or reduce stresses applied larger when growing a nitride semiconductor film on the base substrate from a central portion of the base substrate towards a peripheral portion. That is, the present invention forms the trenches on the lower surface of the base substrate such that pitches get smaller or widths or depths get larger from the central portion of the base substrate towards the peripheral portion.
摘要:
A setting information management method of a host apparatus which is communicatively coupled to a plurality of image forming apparatuses that include setting information, the method including selecting at least two image forming apparatuses, receiving at least one setting item and a setting value corresponding to the setting item of the setting information from the selected image forming apparatuses, displaying the at least one received setting item and setting value for each of the selected image forming apparatuses; comparing and displaying the at least one setting item and setting value of the selected image forming apparatuses according to a comparison option, selecting at least one of the displayed setting item and setting value to be updated, and changing at least one of the setting item and the setting value of at least one of the selected image forming apparatuses.
摘要:
The present invention relates to a cosmetic composition which mimics the extracellular matrix to stimulate the regeneration of skin cells, and more particularly to a cosmetic composition which contains active ingredients consisting of low-molecular-weight materials, which easily permeate through the skin, at a composition ratio similar to that in the extracellular matrix. The cosmetic composition stimulates the repair of the skin to maintain homeostasis and is effective for the regeneration of skin cells.