公开(公告)号：US11880052B2

公开(公告)日：2024-01-23

申请号：US17100416

申请日：2020-11-20

Applicant: Applied Materials, Inc.

Inventor： Lan Yu ,  Benjamin D. Briggs ,  Tyler Sherwood ,  Raghav Sreenivasan

IPC: G02B5/08 ,  H01L33/46 ,  H01L23/48 ,  H01L33/10 ,  G02F1/1335 ,  G02F1/1362

CPC classification number: G02B5/0808 ,  H01L23/481 ,  H01L33/10 ,  H01L33/46 ,  G02F1/133553 ,  G02F1/136277

Abstract: Processing methods may be performed to form a grounded mirror structure on a semiconductor substrate. The methods may include revealing a metal layer. The metal layer may underlie a spacer layer. The metal layer may be revealed by a dry etch process. The method may include forming a mirror layer overlying the spacer layer and the metal layer. The mirror layer may contact the metal layer. The method may also include forming an oxide inclusion overlying a portion of the mirror layer. The portion of the mirror layer may be external to the spacer layer.

公开(公告)号：US20230263075A1

公开(公告)日：2023-08-17

申请号：US17898880

申请日：2022-08-30

Applicant: Applied Materials, Inc.

Inventor： Zihao Yang ,  Mingwei Zhu ,  Lan Yu ,  Zhebo Chen ,  Robert Jan Visser ,  Nag Patibandla

IPC: H01L39/24 ,  H01L39/02 ,  G06N10/40

CPC classification number: H01L39/2493 ,  G06N10/40 ,  H01L39/025

Abstract: Exemplary methods of fabricating high quality quantum computing components are described. The methods include removing native oxide from a deposition surface of a silicon substrate in a cleaning chamber of a processing system, and transferring the silicon substrate under vacuum to a deposition chamber of the processing system. The methods further include depositing an aluminum layer on the deposition surface of the silicon substrate in the deposition chamber, where an interface between the aluminum layer and the deposition surface of the silicon substrate is oxygen free.

公开(公告)号：US11573452B2

公开(公告)日：2023-02-07

申请号：US17100422

申请日：2020-11-20

Applicant: Applied Materials, Inc.

Inventor： Lan Yu ,  Benjamin D. Briggs ,  Tyler Sherwood ,  Raghav Sreenivasan

IPC: G02F1/1335 ,  G02F1/1362

Abstract: Processing methods may be performed to forming a pixel material in a semiconductor structure. The methods may include forming a sacrificial hardmask overlying an uppermost layer of an optical stack of the semiconductor structure, the uppermost layer having a thickness. The methods may include forming a via through the sacrificial hardmask in the optical stack by a first etch process unselective to a metal layer of the semiconductor structure. The methods may include filling the via with a fill material, wherein a portion of the fill material extends over the sacrificial hardmask and contacts the metal layer. The methods may include removing a portion of the fill material external to the via by a removal process selective to the fill material. The methods may also include removing the sacrificial hardmask by a second etch process selective to the sacrificial hardmask while maintaining the thickness of the uppermost layer.

公开(公告)号：US11410873B2

公开(公告)日：2022-08-09

申请号：US16953567

申请日：2020-11-20

Applicant: Applied Materials, Inc.

Inventor： Lan Yu ,  Tyler Sherwood ,  Michael Chudzik ,  Siddarth Krishnan

IPC: H01L29/00 ,  H01L29/94 ,  H01L31/062 ,  H01L21/768 ,  H01L29/06 ,  H01L21/762

Abstract: Exemplary methods of forming a semiconductor device may include etching a trench from a first surface of a semiconductor substrate to a first depth within the semiconductor substrate. The trench may be characterized by a first width through the first depth. The methods may include forming a liner along sidewalls of the trench. The methods may include etching the trench to a second depth at least ten times greater than the first depth. The trench may be characterized by a second width through the second depth. The methods may include filling the trench with a dielectric material. A seam formed in the dielectric material may be maintained below the first depth.

公开(公告)号：US20220165564A1

公开(公告)日：2022-05-26

申请号：US16953577

申请日：2020-11-20

Applicant: Applied Materials, Inc.

Inventor： Lan Yu ,  Tyler Sherwood

IPC: H01L21/02 ,  H01L21/762 ,  H01L29/06

Abstract: Exemplary methods of forming a semiconductor structure may include forming a liner along sidewalls of a trench defined from a first surface of a semiconductor substrate. The liner may extend along the first surface of the semiconductor substrate. The methods may include filling the trench with a dielectric material. The methods may include removing the dielectric material and the liner from the first surface of the semiconductor substrate. The methods may include forming a layer of the liner across the first surface of the semiconductor substrate and the trench defined within the semiconductor substrate.

公开(公告)号：US12055821B2

公开(公告)日：2024-08-06

申请号：US17100400

申请日：2020-11-20

Applicant: Applied Materials, Inc.

Inventor： Lan Yu ,  Benjamin D. Briggs ,  Tyler Sherwood ,  Zihao Yang

IPC: H01L21/66 ,  G02F1/1339 ,  H01L21/67 ,  H01L23/522 ,  H01L23/532 ,  H01L29/423 ,  H01L31/20 ,  H01L33/46 ,  H10K59/50 ,  H10N10/855 ,  G02F1/1335 ,  G02F1/1362 ,  H01L21/311

CPC classification number: G02F1/13394 ,  H01L21/67207 ,  H01L21/67225 ,  H01L22/26 ,  H01L23/5226 ,  H01L23/53219 ,  H01L23/53276 ,  H01L29/42368 ,  H01L31/206 ,  H01L33/46 ,  H01L33/465 ,  H10K59/50 ,  H10N10/855 ,  G02F1/133553 ,  G02F1/136227 ,  G02F1/136277 ,  H01L21/31122 ,  H01L2224/05181 ,  H01L2224/05184

Abstract: Processing methods may be performed to form a pixel isolation structure on a semiconductor substrate. The method may include forming a pixel isolation bilayer on the semiconductor substrate. The pixel isolation bilayer may include a high-k layer overlying a stopping layer. The method may include forming a lithographic mask on a first region of the pixel isolation bilayer. The method may also include etching the pixel isolation bilayer external to the first region. The etching may reveal the semiconductor substrate. The etching may form the pixel isolation structure.

公开(公告)号：US11705490B2

公开(公告)日：2023-07-18

申请号：US17169916

申请日：2021-02-08

Applicant: Applied Materials, Inc.

Inventor： Ashish Pal ,  El Mehdi Bazizi ,  Siddarth Krishnan ,  Xing Chen ,  Lan Yu ,  Tyler Sherwood

IPC: H01L21/02 ,  H01L29/36 ,  H01L29/872 ,  H01L29/66 ,  H01L21/285 ,  H01L21/3065 ,  H01L21/265

CPC classification number: H01L29/36 ,  H01L21/02164 ,  H01L21/26513 ,  H01L21/28537 ,  H01L21/3065 ,  H01L29/66143 ,  H01L29/872

Abstract: Exemplary methods of forming a semiconductor structure may include forming a doped silicon layer on a semiconductor substrate. A level of doping may be increased at an increasing distance from the semiconductor substrate. The methods may include etching the doped silicon layer to define a trench extending to the semiconductor substrate. The doped silicon layer may define a sloping sidewall of the trench. The trench may be characterized by a depth of greater than or about 30 μm. The methods may include lining the trench with a first oxide material. The methods may include depositing a second oxide material within the trench. The methods may include forming a contact to produce a power device.

公开(公告)号：US20230015781A1

公开(公告)日：2023-01-19

申请号：US17376504

申请日：2021-07-15

Applicant: Applied Materials, Inc.

Inventor： Ria Someshwar ,  Seshadri Ganguli ,  Lan Yu ,  Siddarth Krishnan ,  Srinivas Gandikota ,  Jacqueline S. Wrench ,  Yixiong Yang

IPC: H01L29/45 ,  H01L29/40 ,  H01L21/285 ,  H01L21/324

Abstract: Methods for forming a semiconductor structure and semiconductor structures are described. The method comprises patterning a substrate to form a first opening and a second opening, the substrate comprising an n transistor and a p transistor, the first opening over the n transistor and the second opening over the p transistor; pre-cleaning the substrate; depositing a titanium silicide (TiSi) layer on the n transistor and on the p transistor by plasma-enhanced chemical vapor deposition (PECVD); optionally depositing a first barrier layer on the titanium silicide (TiSi) layer and selectively removing the first barrier layer from the p transistor; selectively forming a molybdenum silicide (MoSi) layer on the titanium silicide (TiSi) layer on the n transistor and the p transistor; forming a second barrier layer on the molybdenum silicide (MoSi) layer; and annealing the semiconductor structure. The method may be performed in a processing chamber without breaking vacuum.

公开(公告)号：US20220165912A1

公开(公告)日：2022-05-26

申请号：US17100402

申请日：2020-11-20

Applicant: Applied Materials, Inc.

Inventor： Lan Yu ,  Benjamin D. Briggs ,  Tyler Sherwood ,  Raghav Sreenivasan

IPC: H01L33/00 ,  G02F1/1362 ,  H01L33/62

Abstract: Processing methods may be performed to form a pixel material in a semiconductor substrate. The methods may include forming a lithographic mask overlying the semiconductor substrate. The lithographic mask may include a window. The method may include forming a via in the semiconductor substrate by a dry etch process through the window. The method may also include forming the pixel material by depositing a fill material in the via.