公开(公告)号：US5343460A

公开(公告)日：1994-08-30

申请号：US738427

申请日：1991-07-31

申请人： Toshihiko Miyazaki ,  Kunihiro Sakai ,  Hiroyasu Nose ,  Etsuro Kishi ,  Ryo Kuroda

发明人： Toshihiko Miyazaki ,  Kunihiro Sakai ,  Hiroyasu Nose ,  Etsuro Kishi ,  Ryo Kuroda

IPC分类号： G01Q10/00 ,  G01Q60/10 ,  G01Q60/18 ,  G01Q60/22 ,  G01Q70/14 ,  G01Q80/00 ,  G11B7/00 ,  G11B7/004 ,  G11B7/0045 ,  G11B7/005 ,  G11B7/12 ,  G11B7/135 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/08

CPC分类号： G11B7/005 ,  G11B11/00 ,  G11B7/00455 ,  G11B7/0052 ,  G11B7/12 ,  G11B7/1384 ,  G11B9/14 ,  B82Y10/00 ,  B82Y20/00 ,  G01Q80/00

摘要： Information is recorded by providing a recording medium having a recording layer on an electroconductive substrate transmitting an electromagnetic wave and an electroconductive optical probe arranged proximate to the recording medium, and applying a voltage between the substrate and the optical probe. The recorded information is read by irradiating an electromagnetic wave, preferably with a plurality of wavelengths, on the recording layer from the substrate side, and detecting with the optical probe an electromagnetic wave oozed out on the surface of the recording layer.

摘要翻译： 通过在传输电磁波的导电基片上提供具有记录层的记录介质和布置在记录介质附近的导电光学探针，并在基片和光学探针之间施加电压来记录信息。 通过从基板侧在记录层上照射优选具有多个波长的电磁波来读取所记录的信息，并用光学探针检测在记录层的表面上渗出的电磁波。

公开(公告)号：US5508527A

公开(公告)日：1996-04-16

申请号：US298316

申请日：1994-09-01

申请人： Ryo Kuroda ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Hiroyasu Nose ,  Kiyoshi Takimoto

发明人： Ryo Kuroda ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Hiroyasu Nose ,  Kiyoshi Takimoto

IPC分类号： G03F9/00 ,  G01B7/00 ,  G01J1/00 ,  G01Q60/24 ,  H01L21/027 ,  H01L21/68

CPC分类号： G03F9/7061 ,  G01B7/003 ,  G03F9/7038 ,  H01L21/681 ,  B82Y10/00 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q40/02 ,  G01Q60/38 ,  G01Q80/00

摘要： A method and apparatus for detecting the relative positional displacement between a mask and a wafer. The mask is provided with a cantilever. The position mark is provided on the wafer so as to face the cantilever. A relative positional displacement between the mask and the wafer is detected from a deformation amount of the cantilever based on a force acting between the position mark and the cantilever upon relative movement of the position mark and the cantilever.

摘要翻译： 一种用于检测掩模和晶片之间的相对位置偏移的方法和装置。 面罩配有悬臂。 在晶片上设置位置标记以面对悬臂。 基于在位置标记和悬臂的相对运动时基于在位置标记和悬臂之间作用的力，从悬臂的变形量检测掩模和晶片之间的相对位置偏移。

公开(公告)号：US5260567A

公开(公告)日：1993-11-09

申请号：US865227

申请日：1992-04-08

申请人： Ryo Kuroda ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Takayuki Yagi ,  Toshimitsu Kawase ,  Katsuhiko Shinjo

发明人： Ryo Kuroda ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Takayuki Yagi ,  Toshimitsu Kawase ,  Katsuhiko Shinjo

IPC分类号： G01B21/30 ,  G01B7/34 ,  G01B9/02 ,  G01N37/00 ,  G01P15/08 ,  G01Q20/02 ,  G01Q60/08 ,  G01Q60/24 ,  G01Q60/40 ,  G01Q60/50 ,  G01Q60/56 ,  G01Q70/14 ,  G01Q80/00 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14 ,  H01J5/16

CPC分类号： G01B9/02051 ,  B82Y35/00 ,  G01B9/02022 ,  G01B9/02023 ,  G01P15/0894 ,  G01Q20/02 ,  G01Q60/08 ,  G01Q60/38 ,  G01Q60/56 ,  G01R33/0385 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  B82Y10/00 ,  B82Y25/00 ,  G01B2290/30 ,  G01Q80/00 ,  Y10S977/868 ,  Y10S977/873

摘要： A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of an displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.

公开(公告)号：US5426631A

公开(公告)日：1995-06-20

申请号：US167140

申请日：1993-12-16

申请人： Toshihiko Miyazaki ,  Masaru Nakayama ,  Ryo Kuroda ,  Toshimitsu Kawase ,  Masahiro Tagawa

发明人： Toshihiko Miyazaki ,  Masaru Nakayama ,  Ryo Kuroda ,  Toshimitsu Kawase ,  Masahiro Tagawa

IPC分类号： G01Q70/02 ,  B81B3/00 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  G11B9/10

CPC分类号： G11B9/1409 ,  G11B9/1418 ,  B82Y10/00 ,  G01Q80/00 ,  Y10S977/947

摘要： An information recording and reproducing apparatus is provided with a probe electrode supported by a probe plate and arranged to face a recording medium supported by a recording medium plate, drive elements for relatively moving the recording medium and the probe electrode, voltage application circuit for applying a voltage between the recording medium and the probe electrode and an electric wire take-out portion for taking out an electric wire provided on at least one of a plane of the probe plate opposite to the probe electrode and a plane of the recording medium plate opposite to the recording medium.

摘要翻译： 信息记录和再现装置设置有由探针板支撑并且被布置成面对由记录介质板支撑的记录介质的探针电极，用于相对移动记录介质和探针电极的驱动元件，用于施加 记录介质和探针电极之间的电压和用于取出设置在与探针电极相对的探针板的平面中的至少一个上的电线的电线取出部分和与探针电极相对的记录介质板的平面 记录介质。

公开(公告)号：US5412641A

公开(公告)日：1995-05-02

申请号：US55088

申请日：1993-05-03

申请人： Katsuhiko Shinjo ,  Toshihiko Miyazaki ,  Ryo Kuroda ,  Keisuke Yamamoto ,  Toshimitsu Kawase

发明人： Katsuhiko Shinjo ,  Toshihiko Miyazaki ,  Ryo Kuroda ,  Keisuke Yamamoto ,  Toshimitsu Kawase

IPC分类号： G01Q60/16 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q70/06 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01L27/10

CPC分类号： G11B9/1418 ,  G11B9/1454 ,  G11B9/1472 ,  B82Y10/00 ,  G01Q70/06 ,  G01Q80/00 ,  Y10S977/874

摘要： An information recording and/or reproducing apparatus performs at least one of record and reproduction of information on an information record medium with a plurality of probes. The apparatus includes a support plate supporting the plurality of probes and segmented into a plurality of blocks, and a driving mechanism for driving the plurality of blocks independently of one another. Another apparatus may include an information record medium segmented into a plurality of blocks, a support plate supporting a plurality of probes, and a driving mechanism for driving the plurality of blocks independently of one another.

摘要翻译： 信息记录和/或再现装置利用多个探针在信息记录介质上执行信息的记录和再现中的至少一个。 该装置包括支撑多个探针并分割成多个块的支撑板，以及用于彼此独立地驱动多个块的驱动机构。 另一装置可以包括分割成多个块的信息记录介质，支撑多个探针的支撑板以及用于彼此独立地驱动多个块的驱动机构。

公开(公告)号：US5297130A

公开(公告)日：1994-03-22

申请号：US832595

申请日：1992-02-07

申请人： Masahiro Tagawa ,  Toshihiko Miyazaki ,  Toshimitsu Kawase

发明人： Masahiro Tagawa ,  Toshihiko Miyazaki ,  Toshimitsu Kawase

IPC分类号： G01B7/34 ,  G01Q10/00 ,  G11B9/00 ,  G11B9/08 ,  H01L41/09 ,  H01L41/08

CPC分类号： H02N2/028 ,  B82Y35/00 ,  G01Q10/04 ,  G11B9/1436 ,  H02N2/02 ,  H02N2/065 ,  B82Y10/00 ,  G01Q60/16 ,  G01Q80/00

摘要： A driving apparatus for driving an object comprises a pair of piezoelectric elements, one of them being arranged on the one side of the object while the other of them on the other side of the object, and the respective electrode arrangement directions of the pair of piezoelectric elements being substantially identical to each other, and a control circuit which applies a predetermined voltage across the outer electrodes of the pair of piezoelectric elements respectively, gives an equipotential to the inner electrodes thereof, and causes the pair of piezoelectric elements to drive the object by varying the value of the potential given to the inner electrodes. Hence, the increased amount of a voltage applied to one piezoelectric element is exactly identical to the decreased amount for the other so as to make the extended and contracted amounts of the piezoelectric elements on both sides of the object the same. Consequently, no useless stress is given to the piezoelectric elements for the prevention of the deterioration of the elements to implement a precise fine driving over a long period.

摘要翻译： 用于驱动物体的驱动装置包括一对压电元件，其中一个压电元件被布置在物体的一侧，而另一个位于物体的另一侧，并且一对压电元件的各个电极排列方向 元件彼此基本相同，并且分别在一对压电元件的外部电极上施加预定电压的控制电路给予其内部电极等电位，并且使一对压电元件通过 改变给予内部电极的电位的值。 因此，施加到一个压电元件的电压的增加量与另一个压电元件的电压的减少量完全相同，从而使物体两侧的压电元件的伸长和收缩量相同。 因此，为了防止元件的劣化，长时间地实现精密的精细驱动，没有给压电元件带来无用的应力。

公开(公告)号：US5418771A

公开(公告)日：1995-05-23

申请号：US201430

申请日：1994-02-24

申请人： Yuji Kasanuki ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Haruki Kawada ,  Tsutomi Ikeda ,  Ryo Kuroda ,  Takehiko Kawasaki ,  Akihiko Yamano ,  Masahiro Tagawa

发明人： Yuji Kasanuki ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Haruki Kawada ,  Tsutomi Ikeda ,  Ryo Kuroda ,  Takehiko Kawasaki ,  Akihiko Yamano ,  Masahiro Tagawa

IPC分类号： G01B7/31 ,  G01Q10/02 ,  G11B9/00 ,  G01N21/86

CPC分类号： G01B7/31 ,  G11B9/1436 ,  B82Y10/00 ,  Y10S977/849 ,  Y10S977/943 ,  Y10S977/947

摘要： An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.

摘要翻译： 信息处理装置包括设置在第一基板上的第一，第二和第三上电极以及分别设置在与第一，第二和第三上电极相对的第二基板上的第一，第二和第三下电极。 还提供了用于检测第一上电极和下电极之间的第一电容的第一，第二和第三检测器，第二上电极和下电极之间的第二电容以及第三上电极和下电极之间的第三电容。 此外，该装置还包括第一驱动器，用于相对于基板表面在第一方向上相对于彼此移动第一和第二基板;第二驱动器，用于沿第二方向相对于彼此移动第一和第二基板 垂直于第一方向的第三驱动器，用于使垂直于第一和第二方向的第三方向上的第一和第二基板相对于彼此旋转的第三驱动器，以及控制单元。

公开(公告)号：US5392275A

公开(公告)日：1995-02-21

申请号：US176516

申请日：1994-01-03

申请人： Haruki Kawada ,  Toshihiko Miyazaki ,  Hideyuki Kawagishi ,  Akihiko Yamano

发明人： Haruki Kawada ,  Toshihiko Miyazaki ,  Hideyuki Kawagishi ,  Akihiko Yamano

IPC分类号： G01Q10/00 ,  G01Q70/06 ,  G11B9/00 ,  G11B9/14 ,  G11B21/21 ,  G11B23/00 ,  G11B25/04

CPC分类号： G11B23/0014 ,  G11B21/21 ,  G11B25/04 ,  G11B9/14 ,  B82Y10/00 ,  G01Q70/06 ,  G01Q80/00 ,  Y10S977/851 ,  Y10S977/872 ,  Y10S977/932 ,  Y10S977/947

摘要： A method and apparatus for recording information on an information recording medium and/or reproducing information from the recording medium. Probes for recording and/or reproducing information and a support for supporting the probes are arranged so that the probes are positioned to face the information recording medium. The support and the information recording medium are relatively moved by sliding on sliding surfaces thereof. The distance between the support and the recording medium is roughly set by projections formed between the support and the recording medium, and is finely adjusted during operation by a mechanism for moving the probes.

摘要翻译： 一种用于在信息记录介质上记录信息和/或从记录介质再现信息的方法和装置。 用于记录和/或再现信息的探针和用于支撑探针的支撑件被布置成使得探针被定位成面对信息记录介质。 支撑体和信息记录介质通过在其滑动表面上滑动而相对移动。 支撑体和记录介质之间的距离通过在支撑体和记录介质之间形成的突起粗略设定，并且在操作期间通过用于移动探针的机构进行微调。

公开(公告)号：US5396453A

公开(公告)日：1995-03-07

申请号：US272373

申请日：1994-07-06

申请人： Haruki Kawada ,  Toshihiko Miyazaki ,  Hideyuki Kawagishi ,  Akihiko Yamano

发明人： Haruki Kawada ,  Toshihiko Miyazaki ,  Hideyuki Kawagishi ,  Akihiko Yamano

IPC分类号： G01Q30/04 ,  G11B9/00 ,  G11B9/14 ,  G11B25/04

CPC分类号： G11B25/04 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1454 ,  B82Y10/00 ,  Y10S977/861 ,  Y10S977/869 ,  Y10S977/874 ,  Y10S977/943 ,  Y10S977/947

摘要： A memory apparatus for effecting the writing or reading of information on a recording medium by a probe has a base having the probe attached thereto, a substrate supporting the recording medium thereon and movable relative to the base, and a frame containing the base and the substrate therein, and the coefficients of linear expansion of the base and the substrate are made approximate to each other since the coefficients of linear expansion of the base and the substrate are approximate to each other, any relative positional deviation between the probe and the recording medium will not occur even if temperature changes.

摘要翻译： 用于通过探头进行记录介质上的信息的写入或读取的存储装置具有安装有探针的底座，支撑其上的记录介质并能相对于基座移动的基板，以及容纳基座和基板的框架 并且基底和基板的线性膨胀系数彼此相近，因为基底和基底的线性膨胀系数彼此接近，探针和记录介质之间的任何相对位置偏差将 即使温度变化也不会发生。

公开(公告)号：US5414690A

公开(公告)日：1995-05-09

申请号：US328391

申请日：1994-10-24

申请人： Shun-Ichi Shido ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Takahiro Oguchi

发明人： Shun-Ichi Shido ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Takahiro Oguchi

IPC分类号： G01Q10/04 ,  G01N27/00 ,  G01Q10/06 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/04 ,  G11B9/00 ,  H01J37/26

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q60/16 ,  G11B9/1436 ,  B82Y10/00 ,  Y10S977/851

摘要： An apparatus for and a method of moving a probe for causing a physical phenomenon to occur between it and a predetermined object and moving the probe and the object relative to each other to make the probe approach the object. At least one of the probe and the object is driven in a predetermined direction to displace one of the probe and the object in the predetermined direction relative to the other. A physical phenomenon occurring between the probe and the object is detected. At least one of the probe and the object is driven so as to bring the probe and the object close to each other. The driving for the approach of the probe to the object is controlled on the basis of the result of the detection of the physical phenomenon during the driving in the predetermined direction. The specification also discloses an information detection and/or input apparatus using such apparatus and method.

摘要翻译： 一种用于使探针移动以使其与预定物体之间发生物理现象的装置和方法，并且使探针和物体相对于彼此移动以使探针接近物体。 将探头和物体中的至少一个沿预定方向驱动，以相对于另一个在预定方向上移动探针和物体中的一个。 检测到探针和物体之间发生的物理现象。 探针和物体中的至少一个被驱动以使探针和物体彼此靠近。 基于在预定方向上的驱动期间的物理现象的检测结果来控制探针到物体的接近的驱动。 本说明书还公开了使用这种装置和方法的信息检测和/或输入装置。