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公开(公告)号：US20080164237A1
公开(公告)日：2008-07-10
申请号：US12038568
申请日：2008-02-27
IPC分类号： H01L41/22
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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公开(公告)号：US20080074005A1
公开(公告)日：2008-03-27
申请号：US11946913
申请日：2007-11-29
申请人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01L41/047
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
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公开(公告)号：US20060103561A1
公开(公告)日：2006-05-18
申请号：US11268615
申请日：2005-11-08
IPC分类号： H03M3/00
CPC分类号： H04L27/2276
摘要： A digital demodulator includes a resonator having a resonance frequency same as a carrier frequency to store a charge corresponding to a digital signal modulated by phase shift keying, a capacitor to store the charge of the resonator, an amplifier including an input node and an output node between which the capacitor is connected to convert a stored charge of the capacitor into a voltage signal, and a controller configured to accumulate in the resonator the charge induced by the frequency signal modulated by phase shift keying in a first control mode and configured to transfer the charge of the resonator to the capacitor in a second control mode, to output the voltage signal corresponding to the stored charge of the capacitor from the output node of the amplifier.
摘要翻译： 数字解调器包括具有与载波频率相同的谐振频率的谐振器，以存储与通过相移键控调制的数字信号相对应的电荷，存储谐振器的电荷的电容器，包括输入节点和输出节点的放大器 其间连接有电容器以将存储的电容器的电荷转换成电压信号，以及控制器，被配置为在第一控制模式中在谐振器中累积由相移键控调制的频率信号引起的电荷， 在第二控制模式下将谐振器充电到电容器，以从放大器的输出节点输出与电容器的存储电荷相对应的电压信号。
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24.发明申请Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element 失效配有压电MEMS元件的压电MEMS元件和可调谐滤波器公开(公告)号：US20060067840A1
公开(公告)日：2006-03-30
申请号：US11229694
申请日：2005-09-20
CPC分类号： H03H9/542 , H01G5/16 , H01H57/00 , H01H2057/006 , H03H9/605 , H03H2007/008 , H03H2210/025 , H03H2210/033
摘要： In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.
摘要翻译： 在具有压电驱动机构的MEMS型可变容量中，具有可移动电极的可动头布置在其上，固定电极被定位成面对可动电极，并且压电驱动梁结构接合到可动头部，并且一端固定到 底物。 可动电极和固定电极形成可变容量。 在可变容量中，可变电容和可变电容的固定电极之间的距离和电容可以保持恒定，从而实现再现性和可靠的可控性。
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25.发明申请Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR 失效薄膜体声波谐振器（FBAR），FBAR实现的滤波器和FBAR制造方法公开(公告)号：US20060001508A1
公开(公告)日：2006-01-05
申请号：US11169645
申请日：2005-06-30
申请人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
发明人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
IPC分类号： H03H9/56
CPC分类号： H03H9/02094 , H03H3/04 , H03H9/02133 , H03H9/173 , H03H9/174 , H03H9/703 , H03H2003/021 , H03H2003/023
摘要： A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.
摘要翻译： 薄膜体声波谐振器包括具有空腔的基板; 部分地固定在基板上的底部电极，底部电极的一部分机械地悬挂在空腔上方; 设置在底部电极上的压电层; 以及设置在压电体层上的顶电极，其具有沿着压电体层的厚度方向取向的晶轴，所述晶轴的取向分布的半峰全宽小于或等于约6度。
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公开(公告)号：US20050280476A1
公开(公告)日：2005-12-22
申请号：US11151343
申请日：2005-06-14
申请人： Kazuhide Abe , Michihiko Nishigaki , Toshihiko Nagano , Ryoichi Ohara , Hiroshi Yoshida , Hiroshi Tsurumi , Takashi Kawakubo
发明人： Kazuhide Abe , Michihiko Nishigaki , Toshihiko Nagano , Ryoichi Ohara , Hiroshi Yoshida , Hiroshi Tsurumi , Takashi Kawakubo
CPC分类号： H03H7/0161 , H03B21/01 , H03L7/07 , H03L7/0805 , H03L7/0812 , H03L7/099 , H03L7/0995
摘要： A filter control apparatus which controls a frequency variable filter capable of changing a transmission band width by controlling a capacitance of at least a portion of a plurality of voltage variable capacitors connected in series and parallel to a resonator has an input unit, and a filter control circuit. The input unit inputs a reference signal with a predetermined reference frequency to the frequency variable filter. The filter control circuit controls a center frequency and the transmission band width of the frequency variable filter by detecting a phase change generated when the reference signal passes through the frequency variable filter and by variably controlling the capacitance of at least a portion of the voltage variable capacitor by using a direct voltage in proportion to the phase change.
摘要翻译： 控制能够通过控制串联并联到谐振器的多个电压可变电容器的至少一部分的电容来改变传输带宽的滤波器控制装置具有输入单元和滤波器控制 电路。 输入单元将具有预定参考频率的参考信号输入到频率可变滤波器。 滤波器控制电路通过检测当参考信号通过频率可变滤波器时产生的相位变化并且通过可变地控制电压可变电容器的至少一部分的电容来控制频率可变滤波器的中心频率和传输带宽 通过使用与相变成比例的直流电压。
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公开(公告)号：US20050184627A1
公开(公告)日：2005-08-25
申请号：US11043257
申请日：2005-01-27
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译： 压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。 压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。
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公开(公告)号：US20120206018A1
公开(公告)日：2012-08-16
申请号：US13422023
申请日：2012-03-16
IPC分类号： H01L41/053 , H01L41/18
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译： 根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。
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公开(公告)号：US07847252B2
公开(公告)日：2010-12-07
申请号：US12207744
申请日：2008-09-10
申请人： Takashi Kawakubo , Michihiko Nishigaki , Toshihiko Nagano , Yoshinori Iida , Ikuo Fujiwara , Hiroto Honda
发明人： Takashi Kawakubo , Michihiko Nishigaki , Toshihiko Nagano , Yoshinori Iida , Ikuo Fujiwara , Hiroto Honda
IPC分类号： H01L27/14
摘要： An infrared-detecting element includes: a substrate; a laminated body; an anchor coupling a part of the laminated body with the substrate and supporting the laminated body with a gap above the substrate; and an amplifier provided on the substrate and connected to at least one of the lower electrode and the upper electrode. The laminated body has a lower electrode, an upper electrode, and a piezoelectric film made of aluminum nitride which is provided between the lower electrode and the upper electrode and in which a c-axis is oriented almost perpendicularly to a film plane. The amplifier has a circuit performing conversion into voltage according to a charge generated in the laminated body.
摘要翻译： 红外线检测元件包括：基板; 层压体; 将所述层叠体的一部分与所述基板连接的支撑体，并且在所述基板的上方具有间隙地支撑所述层叠体; 以及设置在所述基板上并连接到所述下电极和所述上电极中的至少一个的放大器。 层叠体具有下电极，上电极和由氮化铝制成的压电膜，该氮化铝设置在下电极和上电极之间，并且其中c轴几乎垂直于膜平面取向。 放大器具有根据层叠体中产生的电荷而进行电压转换的电路。
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公开(公告)号：US07830068B2
公开(公告)日：2010-11-09
申请号：US12354182
申请日：2009-01-15
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , B81B3/0021 , B81B2201/032 , H01G5/18 , H01H2057/006 , H01L41/094 , H01L41/0973
摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.
摘要翻译： 致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。 第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。 第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。 第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。 第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。
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