Method and apparatus for measuring photoluminescence in crystal
    21.
    发明授权
    Method and apparatus for measuring photoluminescence in crystal 失效
    用于测量晶体中光致发光的方法和装置

    公开(公告)号:US5381016A

    公开(公告)日:1995-01-10

    申请号:US37994

    申请日:1993-03-25

    Applicant: Kazuo Moriya

    Inventor: Kazuo Moriya

    CPC classification number: G01N21/9505 G01N21/6489 G01N21/6408

    Abstract: Provided are a method and an apparatus for measuring photoluminescence, which can measure the inside of crystal such as silicon. A lifetime of fluorescence-generating carrier may be evaluated in a mathematical technique without using an expensive pulse laser source. Also, an incident beam wavelength dependency and a polarization dependency of fluorescence may be evaluated by a simple method. A laser having a wavelength which can go into a crystal is projected into an object crystal, fluorescence in generated light inside the crystal is separated through a filter having a frequency band for transmission of fluorescence. An intensity and a spread of fluorescence are obtained as a function of depth from a surface of the crystal to evaluate the lifetime of luminescent center in a mathematical manner. The projection light wavelength dependency of fluorescence may be evaluated by rotating a narrow-band filter, and a polarization dependency by suitably inserting a polarizing filter into an optical patch.

    Abstract translation: 提供了可以测量诸如硅的晶体内部的光致发光的方法和装置。 荧光发生载体的寿命可以在数学技术中进行评估,而不使用昂贵的脉冲激光源。 此外,可以通过简单的方法评估入射光束波长依赖性和荧光的偏振依赖性。 具有能够进入晶体的波长的激光投射到物体中,通过具有用于荧光透射的频带的滤波器分离晶体内的生成光的荧光。 从晶体的表面获得作为深度的函数的荧光的强度和扩散,以数学方式评估发光中心的寿命。 荧光的投射光波长依赖性可以通过旋转窄带滤光片和通过将偏振滤光片适当地插入到光学贴片中来进行极化依赖性来评估。

    Observation apparatus for observing a defect in a moving target object using scattered light
    25.
    发明授权
    Observation apparatus for observing a defect in a moving target object using scattered light 失效
    用于使用散射光观察移动目标物体中的缺陷的观察装置

    公开(公告)号:US06760060B1

    公开(公告)日:2004-07-06

    申请号:US09464191

    申请日:1999-12-16

    Applicant: Kazuo Moriya

    Inventor: Kazuo Moriya

    CPC classification number: H04N5/37206 H04N5/361 H04N5/372

    Abstract: An observation apparatus includes a CCD sensor which has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent line, and sequentially outputs the charge signals through the line at one end; an illuminating device for illuminating a moving observation target with a laser beam; an imaging device for focusing scattered light from the moving observation target to form an image on the light-receiving surface; and a driving circuit for driving the CCD such that the shift speed of the charge signals matches the moving speed of the image on the light-receiving means. In some cases, the CCD sensor and the driving circuit has a function of shifting the charge signals in a direction perpendicular to the shift direction. The CCD sensor has a shift register for receiving the charge signals of the pixels of the line at one end, shifting the charge signals to sequentially output each charge signal, and a dark current buffer for storing charge signals of a dark current output to the shift register through the line at one end, and outputs contents obtained by subtracting, from contents of the shift register, corresponding contents of the dark current buffer.

    Abstract translation: 观察装置包括:CCD传感器,其在受光面上具有包含多个像素的像素线,将在接收光时产生的各行的像素的电荷信号顺序地移位到相邻的行;以及 一端依次输出充电信号, 用激光束照射移动观察目标的照明装置; 用于聚焦来自移动观察目标的散射光以在光接收表面上形成图像的成像装置; 以及用于驱动CCD的驱动电路,使得充电信号的移位速度与光接收装置上的图像的移动速度相匹配。 在某些情况下,CCD传感器和驱动电路具有在垂直于移动方向的方向上移动电荷信号的功能。 CCD传感器具有移位寄存器,用于在一端接收线路的像素的电荷信号,移位电荷信号以顺序地输出每个电荷信号;以及暗电流缓冲器,用于存储输出到移位的暗电流的电荷信号 通过一端的线路寄存器,并输出通过从移位寄存器的内容中减去暗电流缓冲器的相应内容而获得的内容。

    Apparatus and method for observing defect having marks making means
    26.
    发明授权
    Apparatus and method for observing defect having marks making means 失效
    用于观察具有标记制造装置的缺陷的装置和方法

    公开(公告)号:US6118133A

    公开(公告)日:2000-09-12

    申请号:US139041

    申请日:1998-08-24

    Applicant: Kazuo Moriya

    Inventor: Kazuo Moriya

    CPC classification number: G01N21/94

    Abstract: A detect observing apparatus according to the present invention has a purpose for forming an observing specimen by using a TEM and the like in a positive and simple manner and is used in observation of defect or foreign matter in an object to be tested by means of a laser tomography and includes an illumination means for illuminating observing laser light onto the object to be tested, and a microscope for observing the illuminated object to be tested, the apparatus further comprises a marking means for forming marks at a plurality of points on a surface of the object to be tested in the vicinity of the defect or foreign matter to be observed under the microscope, and a position detecting means for detecting positions of the plurality of marks formed on the surface of the object to be tested and a position of the observed defect or foreign matter through the microscope.

    Abstract translation: 根据本发明的检测观察装置具有通过使用TEM等以正确和简单的方式形成观察样本的目的,并且用于通过以下方式观察待测试物体中的缺陷或异物 激光断层摄影,并且包括用于将观察激光照射到待测试物体上的照明装置和用于观察被照射物体的显微镜,该装置还包括用于在多个点上形成标记的标记装置, 在显微镜下要观察的缺陷或异物附近的待测试对象,以及位置检测装置,用于检测形成在待测试对象的表面上的多个标记的位置和所观察到的位置 缺陷或异物通过显微镜。

    Method of drying wood and method of subjecting wood to impregnative
treatment
    27.
    发明授权
    Method of drying wood and method of subjecting wood to impregnative treatment 失效
    木材干燥方法和木材浸渍处理方法

    公开(公告)号:US5970624A

    公开(公告)日:1999-10-26

    申请号:US973262

    申请日:1997-12-03

    Applicant: Kazuo Moriya

    Inventor: Kazuo Moriya

    CPC classification number: F26B5/04 B27K3/0214 B27K3/08

    Abstract: The invention aims to provide a lumber drying method which can dry lumbers in a short period without causing cracks and a lumber impregnation method to permeate processing agents deep into the lumbers at a low cost. The lumber drying method comprises a process to place lumbers in an airtight container and to heat them, a process to vacuum the inside of the airtight container, and a process to restore the air pressure after the vacuuming process. And, the lumber impregnation method comprises a process to heat lumbers, a process to place the heated lumbers under a vacuumed pressure, a process to immerse the heated lumbers in processing agents under the vacuumed pressure, and a process to restore the pressure of the lumbers immersed in the processing agents under the vacuumed pressure to the air pressure, and to immerse the lumbers in the processing agents under the air pressure.

    Abstract translation: PCT No.PCT / JP97 / 01895 Sec。 371日期1997年12月3日第 102(e)日期1997年12月3日PCT提交1997年6月4日PCT公布。 出版物WO97 / 46358 日期:1997年12月11日本发明旨在提供一种能够在短时间内干燥木材而不引起裂纹的木材干燥方法,并且采用木材浸渍方法以低成本将深度渗透到木材中的加工剂。 木材干燥方法包括将木材放置在密闭容器中并加热它们的方法,对气密容器内部进行抽真空的过程以及在真空处理之后恢复空气压力的过程。 而且,木材浸渍方法包括加热木材的方法,将加热的木材置于真空压力下的方法,将加热的木材在真空压力下浸入加工剂中的过程,以及恢复木材的压力的过程 在真空压力下浸入加工剂中至空气压力,并在空气压力下将木材浸入处理剂中。

    Atomic absorption spectrophotometer and graphite tube type cuvette used
for the same
    28.
    发明授权
    Atomic absorption spectrophotometer and graphite tube type cuvette used for the same 失效
    原子吸收分光光度计和石墨管式比色皿用于相同

    公开(公告)号:US5822059A

    公开(公告)日:1998-10-13

    申请号:US633234

    申请日:1996-04-16

    CPC classification number: G01N21/74

    Abstract: The invention intends to provide an atomic absorption spectrophotometer which can establish a uniform heat distribution during heating of a sample and can improve analysis accuracy and analyzing efficiency. For this purpose, a graphite tube type cuvette mounted in a graphite atomizer furnace for an atomic absorption spectrophotometer comprises a large-diameter portion for retaining a sample in place, a small-diameter portion connected to the large-diameter portion and having a smaller diameter than the large-diameter portion, and a step portion for demarcating between the large-diameter portion and the small-diameter portion. The graphite tube type cuvette is formed such that its cross-sectional area in a plane perpendicular to the direction of passage of an electric current supplied to the cuvette is the same in any of the large-diameter portion, the small-diameter portion and the step portion. The amount of resistance heat is thereby also the same in any portions.

    Abstract translation: 本发明旨在提供一种原子吸收分光光度计,可在样品加热期间建立均匀的热分布,并可提高分析精度和分析效率。 为此,安装在用于原子吸收分光光度计的石墨雾化炉中的石墨管型比色皿包括用于将样品保持在适当位置的大直径部分,与大直径部分连接并具有较小直径的小直径部分 和大直径部分之间划分的台阶部分,以及用于在大直径部分和小直径部分之间划定的台阶部分。 石墨管型比色皿形成为使得其在垂直于供给到比色杯的电流的通过方向的平面中的横截面面积在大直径部分,小直径部分和 步骤部分。 因此,电阻热的量在任何部分也是相同的。

    Wiring pattern line width measuring apparatus
    29.
    发明授权
    Wiring pattern line width measuring apparatus 失效
    接线图案线宽测量仪

    公开(公告)号:US5748320A

    公开(公告)日:1998-05-05

    申请号:US794393

    申请日:1997-02-06

    Applicant: Kazuo Moriya

    Inventor: Kazuo Moriya

    CPC classification number: G01B11/02 G01N21/956 H01L2924/0002

    Abstract: An apparatus for measuring the line widths of a wiring pattern obtained by etching a metal foil includes a first illumination means for illuminating the wiring pattern from one side with a light beam having a first wavelength, a second illumination means for illuminating the wiring pattern from the other side with a light beam having a second wavelength which is different from the first wavelength, and a measuring means for obtaining information of a line width by the light beam having the first wavelength and a line width by the light beam having the second wavelength, on the basis of the light beams having the first and second wavelengths which advance at the same time point from the wiring pattern simultaneously illuminated by the first and second illumination means to said the other side. The wiring pattern may be repetitive patterns on a moving tape carrier. In that case, the first and second illumination means output the light beams having the first and second wavelengths as flashes, respectively, every time each repetitive pattern reaches a predetermined measurement position.

    Abstract translation: 用于测量通过蚀刻金属箔获得的布线图案的线宽度的装置包括:第一照明装置,用于从具有第一波长的光束的一侧照射布线图案;第二照明装置,用于从 具有与第一波长不同的第二波长的光束的另一侧;以及测量装置,用于通过具有第二波长的光束获得具有第一波长和线宽的光束的线宽的信息, 基于具有从同时被第一和第二照明装置照射到所述另一侧的布线图案的同一时间点前进的第一和第二波长的光束。 布线图案可以是移动的载带上的重复图案。 在这种情况下,第一和第二照明装置在每次重复图案到达预定测量位置时分别输出具有第一和第二波长的光束作为闪光。

    Method and apparatus for three-dimensional detection of particles
    30.
    发明授权
    Method and apparatus for three-dimensional detection of particles 失效
    用于三维检测颗粒的方法和装置

    公开(公告)号:US5428655A

    公开(公告)日:1995-06-27

    申请号:US119768

    申请日:1993-09-10

    CPC classification number: G01N23/046 G06T7/004 G01N2223/419 Y10S378/901

    Abstract: The position, size, structure, and the like of each particle can be accurately detected. Gray image data of a tomographic image group having a clear positional correlation in a sample where particles are distributed is obtained to obtain three-dimensional gray image data of each particle. Binarization of a density of each pixel data of the three-dimensional gray image data is performed to obtain three-dimensional binary image data of each particle. Three-dimensional shrinkage of the three-dimensional binary image data is performed to convert binary image data of each particle to binary image data of only a central point thereof, thereby the position of each particle is three-dimensionally confirmed.

    Abstract translation: 可以精确地检测每个颗粒的位置,尺寸,结构等。 获得在分散粒子的样品中具有清晰的位置相关性的断层图像组的灰度图像数据,以获得每个粒子的三维灰度图像数据。 执行三维灰度图像数据的每个像素数据的密度的二值化,以获得每个粒子的三维二值图像数据。 执行三维二进制图像数据的三维收缩以将每个粒子的二值图像数据转换成仅其中心点的二值图像数据,从而三维地确认每个粒子的位置。

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