公开(公告)号：US20150206762A1

公开(公告)日：2015-07-23

申请号：US14676697

申请日：2015-04-01

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Christina E. INMAN ,  Alexander MASTROIANNI ,  Wolfgang HINZ ,  Shifeng LI ,  Scott C. BENSON

IPC: H01L21/311 ,  G01N27/414

CPC classification number: H01L21/31105 ,  G01N27/4145 ,  H01L21/31144

Abstract: A method of manufacturing a sensor, the method including forming an array of chemically-sensitive field effect transistors (chemFETs), depositing a dielectric layer over the chemFETs in the array, depositing a protective layer over the dielectric layer, etching the dielectric layer and the protective layer to form cavities corresponding to sensing surfaces of the chemFETs, and removing the protective layer. The method further includes, etching the dielectric layer and the protective layer together to form cavities corresponding to sensing surfaces of the chemFETs. The protective layer is at least one of a polymer, photoresist material, noble metal, copper oxide, and zinc oxide. The protective protective layer is removed using at least one of sodium hydroxide, organic solvent, aqua regia, ammonium carbonate, hydrochloric acid, acetic acid, and phosphoric acid.

Abstract translation: 一种制造传感器的方法，所述方法包括形成化学敏感场效应晶体管阵列（chemFET），在阵列中的chemFET上沉积电介质层，在电介质层上沉积保护层，蚀刻电介质层和 保护层以形成对应于chemFET的感测表面的空腔，以及去除保护层。 该方法还包括：将电介质层和保护层一起蚀刻以形成对应于chemFET的感测表面的空腔。 保护层是聚合物，光致抗蚀剂材料，贵金属，氧化铜和氧化锌中的至少一种。 使用氢氧化钠，有机溶剂，王水，碳酸铵，盐酸，乙酸和磷酸中的至少一种除去保护性保护层。

公开(公告)号：US20140264469A1

公开(公告)日：2014-09-18

申请号：US14197710

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414

CPC classification number: G01N27/4145

Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor. A material defines an opening overlying the floating gate conductor. The material comprises a conductive element having an inner surface defining a lower portion of a sidewall of the opening. A dielectric is on the conductive element and has an inner surface defining an upper portion of the sidewall.

Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有浮栅导体的化学敏感场效应晶体管。 材料限定了覆盖浮栅导体的开口。 该材料包括具有限定开口的侧壁的下部的内表面的导电元件。 电介质位于导电元件上，并具有限定侧壁上部的内表面。

公开(公告)号：US20140113303A1

公开(公告)日：2014-04-24

申请号：US14139647

申请日：2013-12-23

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Wolfgang HINZ ,  John M. MAURO ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414 ,  C12Q1/68 ,  G01N27/26

CPC classification number: G01N27/4148 ,  C12Q1/6874 ,  G01N27/26 ,  G01N27/414 ,  G01N27/4145 ,  H01L29/78 ,  Y10T436/143333

Abstract: The described embodiments may provide a method of fabricating a chemical detection device. The method may comprise forming a microwell above a CMOS device. The microwell may comprise a bottom surface and sidewalls. The method may further comprise applying a first chemical to be selectively attached to the bottom surface of the microwell, forming a metal oxide layer on the sidewalls of the microwell, and applying a second chemical to be selectively attached to the sidewalls of the microwell. The second chemical may lack an affinity to the first chemical.

Abstract translation: 所描述的实施例可以提供一种制造化学检测装置的方法。 该方法可以包括在CMOS器件上形成微孔。 微孔可以包括底表面和侧壁。 该方法可以进一步包括施加第一化学物质以选择性地连接到微孔的底表面，在微孔的侧壁上形成金属氧化物层，以及施加第二化学物质以选择性地连接到微孔的侧壁。 第二种化学物质可能与第一种化学物质不具有亲和力。

公开(公告)号：US20160011146A1

公开(公告)日：2016-01-14

申请号：US14863173

申请日：2015-09-23

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  James Bustillo ,  Wolfgang Hinz

IPC: G01N27/414 ,  H01L21/302 ,  H01L21/31

CPC classification number: G01N27/4148 ,  B01L3/5027 ,  B01L2200/0668 ,  B01L2200/12 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0819 ,  B01L2300/0877 ,  B01L2300/0893 ,  G01N27/26 ,  G01N27/27 ,  G01N27/4145 ,  H01L21/302 ,  H01L21/31 ,  Y10T436/14 ,  Y10T436/142222 ,  Y10T436/143333

Abstract: A system includes a sensor including a sensor pad and includes a well wall structure defining a well operatively connected to the sensor pad. The sensor pad is associated with a lower surface of the well. The well wall structure defines an upper surface and a wall surface extending between the upper surface and the lower surface. The upper surface is defined by an upper buffer material having an intrinsic buffer capacity of at least 2×1017 groups/m2. The wall surface is defined by a wall material having an intrinsic buffer capacity of not greater than 1.7×1017 groups/m2.

公开(公告)号：US20150168345A1

公开(公告)日：2015-06-18

申请号：US14628913

申请日：2015-02-23

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Jonathan PUTNAM ,  Shifeng LI

IPC: G01N27/414

CPC classification number: G01N27/4145 ,  G01N27/414 ,  G01N27/4148

Abstract: In one implementation, a chemical detection device is described. The device includes a chemically-sensitive field effect transistor including a floating gate conductor coupled to a gate dielectric and having an upper surface, and a sensing material on the upper surface. The device also includes a fill material defining a reaction region extending above the sensing material, the reaction region overlying and substantially aligned with the floating gate conductor.

Abstract translation: 在一个实施方式中，描述了化学检测装置。 该器件包括化学敏感的场效应晶体管，其包括耦合到栅极电介质并具有上表面的浮动栅极导体和在上表面上的感测材料。 该装置还包括填充材料，其限定在感测材料上方延伸的反应区域，反应区域覆盖并基本上与浮动栅极导体对准。

公开(公告)号：US20150160153A1

公开(公告)日：2015-06-11

申请号：US14566098

申请日：2014-12-10

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  Jordan Owens

IPC: G01N27/414

CPC classification number: G01N27/4145 ,  B01L3/502707 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2200/12 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0663 ,  B01L2300/0877 ,  B01L2300/0887 ,  B01L2300/12 ,  H01L21/302

Abstract: A method of forming a sensor component includes forming a first layer over a sensor pad of a sensor of a sensor array. The first layer includes a first inorganic material. The method further includes forming a second layer over the first layer. The second layer includes a polymeric material. The method also includes forming a third layer over the second layer, the third layer comprising a second inorganic material; patterning the third layer; and etching the second layer to define a well over the sensor pad of the sensor array.

Abstract translation: 形成传感器部件的方法包括在传感器阵列的传感器的传感器焊盘上形成第一层。 第一层包括第一无机材料。 该方法还包括在第一层上形成第二层。 第二层包括聚合材料。 该方法还包括在第二层上形成第三层，第三层包括第二无机材料; 图案化第三层; 并蚀刻第二层以在传感器阵列的传感器焊盘上限定一个孔。