公开(公告)号：US06846355B2

公开(公告)日：2005-01-25

申请号：US10464131

申请日：2003-06-18

申请人： Kazuo Hokkirigawa ,  Noriyuki Yoshimura ,  Jun Hirose

发明人： Kazuo Hokkirigawa ,  Noriyuki Yoshimura ,  Jun Hirose

IPC分类号： C04B26/26 ,  C04B35/622 ,  C08L95/00 ,  E01C7/18 ,  E01C7/26 ,  C09D195/00

CPC分类号： E01C7/262 ,  C04B35/62204 ,  C04B35/62213 ,  C04B35/6262 ,  C04B2235/48 ,  C04B2235/5212 ,  C04B2235/526 ,  C04B2235/5264 ,  C04B2235/5427 ,  C04B2235/5463 ,  C04B2235/604 ,  C04B2235/656 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/94 ,  C08L95/00 ,  E01C7/182 ,  C08L2666/74 ,  C08L2666/72

摘要： A road paving material includes an aggregate, asphalt, and fine ceramic particles selected from the group consisting of RBC particles, CRBC particles, and mixtures thereof.

摘要翻译： 道路铺路材料包括选自由RBC颗粒，CRBC颗粒及其混合物组成的组的骨料，沥青和细陶瓷颗粒。

公开(公告)号：US06606912B2

公开(公告)日：2003-08-19

申请号：US09825340

申请日：2001-04-04

申请人： Tadahiro Ohmi ,  Takashi Hirose ,  Eiji Ideta ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Satoshi Kagatsume ,  Jun Hirose ,  Kazuo Fukasawa ,  Hiroshi Koizumi ,  Hideki Nagaoka

发明人： Tadahiro Ohmi ,  Takashi Hirose ,  Eiji Ideta ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Satoshi Kagatsume ,  Jun Hirose ,  Kazuo Fukasawa ,  Hiroshi Koizumi ,  Hideki Nagaoka

IPC分类号： G01L700

CPC分类号： G01L19/0023 ,  G01L19/0645 ,  G01L19/145 ,  G01L19/147

摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.

摘要翻译： 用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变，因为检测器安装在设置在管线等中的夹具主体中，从而保持了输出特性和温度特性 检测器在安装前后差异很大。 压力检测器通过将具有隔膜的膜片基座和具有传感器元件的传感器基座组合并紧固在一起而构成，该传感器基座通过隔膜基座的位移而被激活。 压力检测器，其上放置有垫圈，设置在安装在管道中的固定装置本体的安装孔中。 压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。 压板构件与隔膜基座的块上表面接触，并且垫圈也与隔膜基座的块下表面接触。 浅槽在块体的下表面上在与金属垫片接触的部分的内侧的位置处以环的形式限定，使得浅槽吸收由压紧构件引起的应变。

公开(公告)号：USD459254S1

公开(公告)日：2002-06-25

申请号：US29131294

申请日：2000-10-19

申请人： Jun Hirose ,  Eiji Hirose ,  Jun Ozawa ,  Takaaki Hirooka

设计人： Jun Hirose ,  Eiji Hirose ,  Jun Ozawa ,  Takaaki Hirooka

公开(公告)号：US07922865B2

公开(公告)日：2011-04-12

申请号：US10362879

申请日：2001-08-28

申请人： Koji Miyata ,  Jun Hirose ,  Akira Kodashima ,  Shigeki Tozawa ,  Kazuhiro Kubota ,  Yuki Chiba

发明人： Koji Miyata ,  Jun Hirose ,  Akira Kodashima ,  Shigeki Tozawa ,  Kazuhiro Kubota ,  Yuki Chiba

IPC分类号： H01L21/306

CPC分类号： H01J37/3266 ,  H01J37/3408

摘要： In a magnetic field generator for magnetron plasma generation which comprises a dipole-ring magnet with a plurality of columnar anisotropic segment magnets arranged in a ring-like manner, or in an etching apparatus and a method both of which utilize the magnetic field generator, the uniformity of plasma treatment over the entire surface of a wafer (workpiece) is improved by controlling the direction of the magnetic field relative to the working surface of the wafer (workpiece) which is subject to plasma treatment such as etching.

摘要翻译： 在用于磁控管等离子体生成的磁场发生器中，其包括具有以环状布置的多个柱状各向异性区段磁体的偶极环磁体，或者在利用磁场发生器的蚀刻装置和方法中， 通过控制相对于进行诸如蚀刻等离子体处理的晶片（工件）的工作表面的磁场方向来改善晶片（工件）整个表面上的等离子体处理的均匀性。

公开(公告)号：US20100261567A1

公开(公告)日：2010-10-14

申请号：US12066400

申请日：2006-09-13

申请人： Masakazu Kurita ,  Jun Hirose ,  Koji Kawashima

发明人： Masakazu Kurita ,  Jun Hirose ,  Koji Kawashima

IPC分类号： F16H1/32

CPC分类号： F16H1/32

摘要： There is provided an eccentrically oscillating speed reducer capable of reducing a number of parts more than that of a background art.An eccentrically oscillating speed reducer 100 includes a case 110 having inner teeth 110a, a plurality of crankshafts having outer teeth, outer teeth gears 131 and 132 having outer teeth 131a and 132a brought in mesh with the inner teeth 110a of the case 110 and eccentrically moved by the crankshafts, a carrier 140 rotatably supporting the crankshafts and rotated to move relative to the case 110 by the crankshafts, and a cylindrical gear 180 brought in mesh with the outer teeth of the crankshafts for transmitting a power inputted to one crankshaft 121 of the plurality of crankshafts to remaining crankshafts, and the cylindrical gear 180 is rotatably supported by sliding friction.

摘要翻译： 提供了一种能够比背景技术更多的零件的偏心摆动减速器。 偏心摆动减速器100包括具有内齿110a的壳体110，具有外齿的多个曲轴，外齿齿轮131和132，外齿131a和132a与外壳110的内齿110a啮合并偏心移动 通过曲轴，托架140可旋转地支撑曲轴并被曲轴相对于壳体110旋转以移动;以及圆柱形齿轮180，其与曲轴的外齿啮合，用于传递输入到曲轴121的一个曲轴121的动力 多个曲轴到剩余的曲轴，并且圆筒形齿轮180由滑动摩擦可旋转地支撑。

公开(公告)号：US20080295623A1

公开(公告)日：2008-12-04

申请号：US11571749

申请日：2005-08-10

申请人： Masakazu Kurita ,  Toshiharu Hibino ,  Jun Hirose

发明人： Masakazu Kurita ,  Toshiharu Hibino ,  Jun Hirose

IPC分类号： F16H21/00

CPC分类号： F16H1/32 ,  B25J9/102 ,  Y10T74/18056

摘要： A speed reducer 100 to be attached to an articulated portion of an industrial robot includes a first-stage reduction gear mechanism 10 of a spur gear type speed reducing unit and a second-stage reduction gear mechanism 30 of an eccentric rocking type speed reducing unit, and the output from the eccentric rocking type speed reducing unit is extracted from an internal gear member or a support member. When the input speed to the first input gear unit is 2,000 RPM, the output from the eccentric rocking type speed reducing unit is 20 RPM or higher. The reduction ratio of the first-stage reduction gear mechanism is so selected that individual crankshafts may rotate not over 1,000 RPM when the output from the eccentric rocking type speed reducing unit is 20 RPM or higher.

摘要翻译： 安装在工业机器人的铰接部的减速机100具有正齿轮式减速单元的第一级减速机构10和偏心摇摆式减速单元的第二级减速齿轮机构30， 并且来自偏心摇摆式减速单元的输出从内齿轮构件或支撑构件提取。 当第一输入齿轮单元的输入速度为2000RPM时，来自偏心摇摆式减速单元的输出为20RPM以上。 第一级减速机构的减速比被选择为当偏心摇摆式减速单元的输出为20RPM以上时，单个曲轴可以旋转不超过1,000RPM。

公开(公告)号：US20060097644A1

公开(公告)日：2006-05-11

申请号：US11295649

申请日：2005-12-07

申请人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

发明人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

IPC分类号： H01J7/24

CPC分类号： G05D16/206 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/87877

摘要： Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard-interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

摘要翻译： 提供一种相对压力控制系统具有简单的结构，但是能够精确地调节操作气体的分配比，并且在紧急情况下同时可以从操作气体管道可靠地排出操作气体。 该系统包括多个常开型气动阀，其连接到供给操作气体的操作气体管道; 压力传感器串联连接到相应的气动阀并且检测各个气动阀的输出压力; 控制器，其根据压力传感器检测到的压力来控制各个气动阀的操作压力; 以及将所述多个气动阀彼此关联使得所述多个气动阀中的至少一个正常打开的硬联锁电磁阀。 在这种构造中，调节多个气动阀中的指定的一个的开度，以预定的分配比率输出操作气体。

公开(公告)号：US20050269292A1

公开(公告)日：2005-12-08

申请号：US11137492

申请日：2005-05-26

申请人： Akira Koshiishi ,  Jun Hirose ,  Masahiro Ogasawara ,  Taichi Hirano ,  Hiromitsu Sasaki ,  Tetsuo Yoshida ,  Michishige Saito ,  Hiroyuki Ishihara ,  Jun Ooyabu ,  Kohji Numata

发明人： Akira Koshiishi ,  Jun Hirose ,  Masahiro Ogasawara ,  Taichi Hirano ,  Hiromitsu Sasaki ,  Tetsuo Yoshida ,  Michishige Saito ,  Hiroyuki Ishihara ,  Jun Ooyabu ,  Kohji Numata

IPC分类号： H05H1/46 ,  B01J3/00 ,  B01J19/08 ,  C23F1/00 ,  H01J37/32 ,  H01L21/304 ,  H01L21/306 ,  H01L21/3065

CPC分类号： H01J37/32449 ,  H01J37/32027 ,  H01J37/32091 ,  H01J37/32174 ,  H01J37/32541 ,  H01J37/3255 ,  H01J37/32587

摘要： A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.

摘要翻译： 一种等离子体处理装置，包括被配置为在其中具有真空气氛的处理容器。 第一上电极被设置成具有环形并且面对放置在处理容器内的目标衬底。 第二上电极径向设置在第一上电极内并与其电绝缘。 第一馈电器被配置为以第一功率值将第一RF电源的第一RF输出提供给第一上电极。 第二馈电器从第一馈电器分支并且被配置为以小于第一功率值的第二功率值将第一RF电源的第一RF输出提供给第二上电极。

公开(公告)号：US06848470B2

公开(公告)日：2005-02-01

申请号：US10775104

申请日：2004-02-11

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处以特定延迟时间Deltat达到设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US06820632B2

公开(公告)日：2004-11-23

申请号：US10162552

申请日：2002-06-06

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。