High-energy laser system having gyroscopically stabilized optical
elements
    21.
    发明授权
    High-energy laser system having gyroscopically stabilized optical elements 失效
    具有陀螺稳定光学元件的高能激光系统

    公开(公告)号:US4580270A

    公开(公告)日:1986-04-01

    申请号:US512172

    申请日:1983-07-08

    IPC分类号: H01S3/08

    CPC分类号: H01S3/08081

    摘要: A high-energy laser system having gyroscopically stabilized optical elements includes an unstable confocal laser resonator having first and second spinning cavity feedback mirrors that resist mechanical wave energy induced spatial dislocations by gyroscopic inertia. One or both of the spinning cavity mirrors are preferably mounted for rotation with the rotor of a gyroscope. The gyroscope is operative as an actuator for selectively tilting the spinning mirror, and as a direction indicator for controlling the pointing direction of other elements with respect to inertial space. The angular rotation of the cavity feedback mirrors generates aerodynamic flows that cool the spinning mirrors by convective heat transport. Every material particle thereof describes an annular path once per revolution that prevents hot-spot formation and extends the useful lifetime.

    摘要翻译: 具有陀螺稳定的光学元件的高能激光系统包括具有第一和第二纺丝腔反馈反射镜的不稳定的共焦激光谐振器,该反射镜通过陀螺惯性抵抗机械波能引起的空间位错。 纺丝腔镜中的一个或两个优选安装成与陀螺仪的转子一起旋转。 陀螺仪作为用于选择性地倾斜旋转镜的致动器,以及作为用于控制其它元件相对于惯性空间的指向方向的方向指示器。 腔反馈反射镜的角度旋转产生通过对流热传递来冷却旋转镜的空气动力学流。 其每个材料颗粒每转一次描述环形路径,防止热点形成并延长使用寿命。

    Temperature compensated oscillating accelerometer with force multiplier
    26.
    发明授权
    Temperature compensated oscillating accelerometer with force multiplier 有权
    带力乘数的温度补偿型振荡加速度计

    公开(公告)号:US06269696B1

    公开(公告)日:2001-08-07

    申请号:US09483326

    申请日:2000-01-14

    IPC分类号: G01P1508

    摘要: A temperature compensated oscillating accelerometer with force multiplier includes a support substrate; a tuning fork suspended above the substrate; a primary anchor device connected between the tuning fork and substrate; a proof mass having an input axis; a force multiplier interconnected between the proof mass and the tuning fork; and a force multiplier anchor connected to the substrate and disposed at approximately the same area along the input axis as the primary anchor for offsetting the opposing effects of thermal expansion and stiffness in response to variations in temperature.

    摘要翻译: 具有力乘数的温度补偿振荡加速度计包括支撑衬底; 悬挂在基板上方的音叉; 连接在音叉和基板之间的主锚装置; 具有输入轴的检验质量块; 在力量乘法器之间相互连接的证明质量块和音叉; 以及连接到基板并且沿着与主锚相关的输入轴线大致相同的区域设置的力乘数锚,用于抵消温度变化引起的热膨胀和刚度的相反影响。

    Micromechanical angular accelerometer with auxiliary linear accelerometer
    27.
    发明授权
    Micromechanical angular accelerometer with auxiliary linear accelerometer 失效
    具有辅助线性加速度计的微机械角加速度计

    公开(公告)号:US5635739A

    公开(公告)日:1997-06-03

    申请号:US428531

    申请日:1995-04-25

    摘要: A micromechanical accelerometer comprises a mass of monocrystalline silicon in which a substantially symmetrical plate attached to a silicon frame by flexible linkages is produced by selective etching. The plate has a plurality of apertures patterned and etched therethrough to speed further etching and freeing of the plate and flexible linkages, suspending them above a void etched beneath. The plate is capable of limited motion about an axis created by the flexible linkages. An accelerometer comprised of a substantially symmetrical, linkage supported plate configuration is implemented as an angular accelerometer paired with an auxiliary linear accelerometer, which is used to compensate for the linear sensitivity of the angular sensor, to achieve an instrument that is insensitive to linear acceleration and responds to angular acceleration.

    摘要翻译: 微机械加速度计包括大量单晶硅,其中通过选择性蚀刻产生通过柔性连接件附接到硅框架的基本上对称的板。 该板具有图案化并通过其蚀刻的多个孔,以进一步蚀刻和释放板和柔性连接件,将它们悬挂在蚀刻在下面的空隙之上。 该板能够围绕由柔性连杆产生的轴限制运动。 由基本上对称的连接支撑板结构构成的加速度计被实现为与辅助线性加速度计配对的角加速度计,其用于补偿角度传感器的线性灵敏度,以实现对线性加速度不敏感的仪器, 响应角加速度。

    Wide bandwidth stable member without angular accelerometers
    28.
    发明授权
    Wide bandwidth stable member without angular accelerometers 失效
    宽带宽稳定的成员无角加速度计

    公开(公告)号:US5357817A

    公开(公告)日:1994-10-25

    申请号:US511230

    申请日:1990-04-19

    申请人: Marc S. Weinberg

    发明人: Marc S. Weinberg

    IPC分类号: G01C19/42 G01C21/18 G01C19/02

    摘要: A three axis, single degree of freedom gyroscope based rate sensing platform has restraining torque developed for the platform from a feedback loop that includes electronics that decouples individual gyroscope outputs from the rate inputs that correspond to axes other than the input axis for that gyroscope and provides an enhanced frequency response. The outputs from the various gyroscopes are processed in a compensator that estimates the platform rates on independent axes using either a Kalman filter estimator or a matrix inverse of the matrix equation of motion between platform input rate and gyroscope output. High bandwidth performance is obtained by an increased stiffness and prefiltering of the gyro torque inputs.

    摘要翻译: 基于三轴,单自由度陀螺仪的速率感测平台具有针对平台从反馈回路开发的约束扭矩,该反馈回路包括将各个陀螺仪输出与对应于该陀螺仪的输入轴的轴的速率输入分离的电子装置,并提供 增强的频率响应。 来自各种陀螺仪的输出在补偿器中进行处理,该补偿器使用卡尔曼滤波器估计器或平台输入速率和陀螺仪输出之间的运动矩阵方程的矩阵逆估计独立轴上的平台速率。 通过增加陀螺仪转矩输入的刚度和预滤波可获得高带宽性能。

    Comb drive micromechanical tuning fork gyro
    29.
    发明授权
    Comb drive micromechanical tuning fork gyro 失效
    梳齿驱动微机械音叉陀螺仪

    公开(公告)号:US5349855A

    公开(公告)日:1994-09-27

    申请号:US870414

    申请日:1992-04-07

    摘要: A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

    摘要翻译: 微调音叉速率敏感结构和驱动电子设备,其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中,第一和第二支撑电极又通过弯曲部悬挂,以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环,以便在扭矩平衡回路中将组件重新扭转到中立位置。

    Permanent magnet force rebalance micro accelerometer
    30.
    发明授权
    Permanent magnet force rebalance micro accelerometer 失效
    永磁力重新平衡微加速度计

    公开(公告)号:US5060039A

    公开(公告)日:1991-10-22

    申请号:US314453

    申请日:1989-02-22

    IPC分类号: G01C19/5719

    摘要: An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member. A conductor is formed in one of the legs. A permanent magnet is placed with opposite polarity poles on either side of the leg and the acceleration displacement of the member sensed from which a current is developed through the leg conductor to restore the member position and provide an output indication of acceleration.

    摘要翻译: 通过微结晶技术从结晶前体制造的加速度计。 加速度计通过将部分掺杂到耐蚀刻状态而形成在诸如硅的半导体晶体的主体中,并且蚀刻其周围的空腔以释放弹性悬挂的多腿构件。 导体形成在一条腿中。 永磁体被放置成在腿的任一侧上具有相反的极性极,并且感测到的构件的加速度位移通过腿导体从该位置产生电流,以恢复构件位置并提供加速度的输出指示。