FORMING SHIELD CONTACTS IN A SHIELDED-GATE TRENCH POWER MOSFET

    公开(公告)号:US20220310813A1

    公开(公告)日:2022-09-29

    申请号:US17653235

    申请日:2022-03-02

    Abstract: A device includes a mesa disposed between a pair of vertical trenches in a semiconductor substrate. A gate electrode is disposed in each of the pair of vertical trenches, and a shield electrode is disposed below each of the gate electrodes in the pair of vertical trenches. The device further includes a bridge connection trench traversing the mesa. The bridge connection trench is in fluid communication with each of the pair of vertical trenches. A bridge shield electrode is disposed in the bridge connection trench and is coupled to the shield electrode disposed below each of the gate electrodes in the pair of vertical trenches.

    INSULATED GATE SEMICONDUCTOR DEVICE HAVING TRENCH TERMINATION STRUCTURE AND METHOD

    公开(公告)号:US20190115436A1

    公开(公告)日:2019-04-18

    申请号:US16134598

    申请日:2018-09-18

    Abstract: A semiconductor device structure includes a region of semiconductor material comprising a first conductivity type, an active region, and a termination region. A first active trench structure is disposed in the active region, and a second active trench structure is disposed in the active region and laterally separated from the first active trench by an active mesa region having a first width. A first termination trench structure is disposed in the termination region and separated from the second active trench by a transition mesa region having a second width and a higher carrier charge than that of the active mesa region. In one example, the second width is greater than the first width to provide the higher carrier charge. In another example, the dopant concentration in the transition mesa region is higher than that in the active mesa region to provide the higher carrier charge. The semiconductor device structure exhibits improved device ruggedness including, for example, improve unclamped inductive switching (UIS) performance.

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