公开(公告)号：US20220205784A1

公开(公告)日：2022-06-30

申请号：US17700275

申请日：2022-03-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US11280611B2

公开(公告)日：2022-03-22

申请号：US16696709

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US11085769B2

公开(公告)日：2021-08-10

申请号：US16243876

申请日：2019-01-09

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/5776 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US10862449B2

公开(公告)日：2020-12-08

申请号：US16171885

申请日：2018-10-26

Applicant: STMicroelectronics S.r.l.

Inventor： Carlo Valzasina ,  Gabriele Gattere ,  Alessandro Tocchio ,  Giacomo Langfelder

IPC: H03H9/02 ,  H03B5/30 ,  H03B5/04 ,  H03L1/02 ,  H03L7/197 ,  H03H9/24

Abstract: A MEMS resonator system has a micromechanical resonant structure and an electronic processing circuit including a first resonant loop that excites a first vibrational mode of the structure and generates a first signal at a first resonance frequency. A compensation module compensates, as a function of a measurement of temperature variation, a first variation of the first resonance frequency caused by the temperature variation to generate a clock signal at a desired frequency that is stable relative to temperature. The electronic processing circuit further includes a second resonant loop, which excites a second vibrational mode of the structure and generates a second signal at a second resonance frequency. A temperature-sensing module receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and a second variation of the second resonance frequency caused by the temperature variation.

公开(公告)号：US10591505B2

公开(公告)日：2020-03-17

申请号：US15280720

申请日：2016-09-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Francesco Rizzini ,  Carlo Valzasina ,  Giacomo Langfelder

IPC: G01P1/00 ,  G01P15/125

Abstract: The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.

公开(公告)号：US20200025567A1

公开(公告)日：2020-01-23

申请号：US16243876

申请日：2019-01-09

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS, INC. ,  STMICROELECTRONICS INTERNATIONAL N.V.

Inventor： Carlo Valzasina ,  Huantong Zhang ,  Matteo Fabio Brunetto ,  Gert Ingvar Andersson ,  Erik Daniel Svensson ,  Nils Einar Hedenstierna

IPC: G01C19/5776 ,  G01C19/5719 ,  G01C19/574

Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

公开(公告)号：US10113872B2

公开(公告)日：2018-10-30

申请号：US15610251

申请日：2017-05-31

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/00 ,  B81B3/00 ,  G01C19/5712 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

公开(公告)号：US09941821B2

公开(公告)日：2018-04-10

申请号：US14446237

申请日：2014-07-29

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Carlo Valzasina ,  Alberto Corigliano ,  Raffaele Ardito ,  Giacomo Gafforelli

IPC: H02N2/18

CPC classification number: H02N2/186 ,  H02N2/181 ,  H02N2/188

Abstract: A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

公开(公告)号：US09869550B2

公开(公告)日：2018-01-16

申请号：US14964347

申请日：2015-12-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5747 ,  G01C19/5733

CPC classification number: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US09718675B2

公开(公告)日：2017-08-01

申请号：US14971639

申请日：2015-12-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giorgio Allegato ,  Barbara Simoni ,  Carlo Valzasina ,  Lorenzo Corso

IPC: B81B7/02 ,  B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0074 ,  B81B7/007 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/012 ,  B81B2207/015 ,  B81B2207/07 ,  B81B2207/092 ,  B81B2207/093 ,  B81B2207/096 ,  B81B2207/097 ,  B81C1/0023 ,  B81C2203/0118 ,  B81C2203/0792 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.