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    METHOD AND SYSTEM FOR COMPENSATING SYSTEMATIC NON-LINEARITIES OF A SIGNAL PROVIDED BY A CAPACITIVE INERTIAL SENSOR
    22.
    发明申请
    METHOD AND SYSTEM FOR COMPENSATING SYSTEMATIC NON-LINEARITIES OF A SIGNAL PROVIDED BY A CAPACITIVE INERTIAL SENSOR 有权
    用于补偿由电容式惯性传感器提供的信号的系统非线性的方法和系统

    公开(公告)号：US20150323560A1

    公开(公告)日：2015-11-12

    申请号：US14672575

    申请日：2015-03-30

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Marco Castellano ,  Pierluigi Montinari ,  Salvatore Poli ,  Alessandro Tocchio ,  Giovanni Carlo Tripoli

    IPC: G01P21/00 ,  G01P15/125

    CPC classification number: G01P21/00 ,  G01C25/00 ,  G01P15/125

    Abstract: A method for compensating non-linearities of a read signal generated by a variable-capacitance inertial sensor including a first fixed electrode and a second fixed electrode and a mobile electrode, which is spatially arranged between the first and second fixed electrodes and is capacitively coupled to the first and second fixed electrodes, said method comprising the steps of: acquiring the read signal; identifying a first linear component and at least one first nonlinear component of the read signal; a generating a compensated output signal by subtracting the first nonlinear component from the read signal.

    Abstract translation: 一种用于补偿由包括第一固定电极和第二固定电极和移动电极的可变电容惯性传感器产生的读取信号的非线性的方法，所述第一固定电极和第二固定电极和移动电极被空间地布置在第一和第二固定电极之间并且电容耦合到 所述第一和第二固定电极，所述方法包括以下步骤：获取读取信号; 识别所述读取信号的第一线性分量和至少一个第一非线性分量; 通过从读取信号中减去第一非线性分量来产生补偿输出信号。

    Mems inertial sensor with high resistance to stiction
    23.
    发明授权
    Mems inertial sensor with high resistance to stiction 有权

    公开(公告)号：US12117464B2

    公开(公告)日：2024-10-15

    申请号：US18147629

    申请日：2022-12-28

    Applicant: STMicroelectronics S.r.l.

    Inventor： Gabriele Gattere ,  Francesco Rizzini ,  Alessandro Tocchio

    IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08

    CPC classification number: G01P15/125 ,  B81C1/00968 ,  G01P2015/0874

    Abstract: An inertial structure is elastically coupled through a first elastic structure to a supporting structure so as to move along a sensing axis as a function of a quantity to be detected. The inertial structure includes first and second inertial masses which are elastically coupled together by a second elastic structure to enable movement of the second inertial mass along the sensing axis. The first elastic structure has a lower elastic constant than the second elastic structure so that, in presence of the quantity to be detected, the inertial structure moves in a sensing direction until the first inertial mass stops against a stop structure and the second elastic mass can move further in the sensing direction. Once the quantity to be detected ends, the second inertial mass moves in a direction opposite to the sensing direction and detaches the first inertial mass from the stop structure.

    MEMS accelerometer self-test using an active mobile mass deflection technique
    25.
    发明授权
    MEMS accelerometer self-test using an active mobile mass deflection technique 有权

    公开(公告)号：US11320452B2

    公开(公告)日：2022-05-03

    申请号：US16452904

    申请日：2019-06-26

    Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

    Inventor： Yamu Hu ,  David McClure ,  Alessandro Tocchio ,  Naren K. Sahoo ,  Anthony Junior Casillan

    IPC: G01P21/00 ,  G01P15/08

    Abstract: A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal is applied to the sensing capacitor during a reset phase of a sensing circuit coupled to the sensing capacitor. The test signal is configured to cause an electrostatic force which produces a physical displacement of the mobile mass corresponding to a desired acceleration value. Then, during a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the physical displacement of the mobile mass is sensed. This sensed variation in capacitance is converted to a sensed acceleration value. A comparison of the sensed acceleration value to the desired acceleration value provides an indication of an error in operation of the MEMS accelerometer sensor if the sensed acceleration value and desired acceleration value are not substantially equal.

    Microelectromechanical sensor device with reduced stress sensitivity
    29.
    发明授权
    Microelectromechanical sensor device with reduced stress sensitivity 有权

    公开(公告)号：US10274512B2

    公开(公告)日：2019-04-30

    申请号：US15182317

    申请日：2016-06-14

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Alessandro Tocchio ,  Francesco Rizzini ,  Luca Guerinoni

    IPC: B81B3/00 ,  G01P1/00 ,  G01P15/125 ,  G01C19/5755 ,  G01P15/08

    Abstract: A MEMS sensor device provided with a sensing structure, having: a substrate with a top surface extending in a horizontal plane; an inertial mass, suspended over the substrate; elastic coupling elements, elastically connected to the inertial mass so as to enable inertial movement thereof with respect to the substrate as a function of a quantity to be detected along a sensing axis belonging to the horizontal plane; and sensing electrodes, capacitively coupled to the inertial mass so as to form at least one sensing capacitor, a value of capacitance of which is indicative of the quantity to be detected. The sensing structure moreover has a suspension structure, to which the sensing electrodes are rigidly coupled, and to which the inertial mass is elastically coupled through the elastic coupling elements; the suspension structure is connected to an anchorage structure, fixed with respect to the substrate, by means of elastic suspension elements.

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