DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME
    22.
    发明申请
    DISPLAY DEVICE AND APPARATUS AND METHOD FOR MANUFACTURING THE SAME 有权
    显示装置及其制造方法及其制造方法

    公开(公告)号:US20160133873A1

    公开(公告)日:2016-05-12

    申请号:US14811729

    申请日:2015-07-28

    Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

    Abstract translation: 公开了一种显示装置及其制造方法。 显示装置包括:基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的无机层,其中所述无机层的水蒸气透过率(WVTR)为5×10 -5 g / m 2·天以下。 用于制造显示装置的装置包括:腔室; 用于将混合气体喷射到所述室中的淋浴头; 用于从所述混合气体形成等离子体的等离子体产生单元; 面向淋浴喷头的感受器,其上安置有基底; 以及电连接到所述等离子体产生单元的电源单元,其中从所述电源单元提供给所述等离子体产生单元的电流的频率在约27MHz至约42MHz之间。

    APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS
    23.
    发明申请
    APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS 审中-公开
    装置和制造显示装置的方法

    公开(公告)号:US20160097124A1

    公开(公告)日:2016-04-07

    申请号:US14793562

    申请日:2015-07-07

    Abstract: An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.

    Abstract translation: 公开了一种制造显示装置的装置和方法。 一方面,该装置包括腔室和形成在腔室中并构造成形成至少一个无机层的无机层形成喷嘴单元。 所述设备还包括形成在所述室中并构造成形成至少一个有机层的有机层形成喷嘴单元,其中所述有机层形成喷嘴单元基本上与所述无机层形成喷嘴单元一致。 该装置还包括形成在无机层形成喷嘴单元和有机层形成喷嘴单元之间的分离喷嘴单元,并且构造成喷射惰性气体。

    DEPOSITION APPARATUS INCLUDING CLEANING GAS VALVE UNIT AND DEPOSITION METHOD INCLUDING THE SAME

    公开(公告)号:US20190206659A1

    公开(公告)日:2019-07-04

    申请号:US16239874

    申请日:2019-01-04

    Abstract: A deposition apparatus includes a deposition gas supply unit including an opening and closing valve. The deposition gas supply unit is configured to selectively supply a source gas or a mixture gas into a chamber. A cleaning gas supply unit is configured to supply a cleaning gas into the chamber. A deposition head includes a first deposition head including a first nozzle configured to supply the source gas and the cleaning gas and a second deposition head including a second nozzle configured to supply the source gas, the mixture gas, and the cleaning gas. An exhaust unit is configured to discharge the cleaning gas and remaining source and mixture gases from the chamber. A cleaning gas valve unit is configured to be selectively opened and closed to supply the cleaning gas to at least any one of the first deposition head and the second deposition head.

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