Method of forming electrical contact between interconnection layers
located at different layer levels
    22.
    发明授权
    Method of forming electrical contact between interconnection layers located at different layer levels 失效
    形成位于不同层级的互连层之间的电气接触的方法

    公开(公告)号:US5081064A

    公开(公告)日:1992-01-14

    申请号:US532709

    申请日:1990-06-04

    IPC分类号: H01L21/768 H01L23/522

    摘要: A method of forming an electrical contact between interconnection layers located at different layer levels includes the steps of forming a contact hole in an interlayer insulating film, and forming a metallic intermediate layer on an exposed surface portion of a first conductive interconnection layer and the interlayer insulating film. Then, a portion of said metallic intermediate layer exposed through said contact hole and an oxide film formed on said surface portion of the first conductive interconnection layer are eliminated by an etching process. This process is carried out in a vacuum. After that, in the vacuum, a second conductive interconnection layer is formed in said contact hole and formed on said interlayer insulating film so that an electrical contact between said first and second conductive interconnection layers are formed.

    Aluminum metallized layer formed on silicon wafer
    24.
    发明授权
    Aluminum metallized layer formed on silicon wafer 失效
    在硅晶片上形成铝金属化层

    公开(公告)号:US4902582A

    公开(公告)日:1990-02-20

    申请号:US300186

    申请日:1989-01-23

    申请人: Minoru Inoue

    发明人: Minoru Inoue

    摘要: A semiconductor device comprising a metallized layer formed on a silicon substrate, wherein said metallized layer is an aluminum alloy consisting essentially of aluminum, silicon and at least one element selected from the group consisting of titanium, vanadium, chromium, tungsten, and phosphorus the amount of silicon being 1.0% to 3.0% by weight, the amount of said selected element corresponding to the relative service life required of the metallized layer, said required service life being 10 times that of a metallized layer having the same composition as that of the above-mentioned metallized layer except for being free from said element, and the rest being aluminum. For example, the metallized layer may contain at least 0.04% and less than 0.10% by weight of titanium, 1.0% by weight of silicon, and the rest aluminum.

    摘要翻译: 一种半导体器件,包括形成在硅衬底上的金属化层,其中所述金属化层是基本上由铝,硅和至少一种选自钛,钒,铬,钨和磷的元素组成的铝合金,其量 的硅为1.0〜3.0重量%,所述选定元素的量相当于金属化层所需的相对使用寿命,所述使用寿命为与上述相同组成的金属化层的10倍 所述金属化层除了不含所述元素,其余为铝。 例如,金属化层可以含有至少0.04重量%且小于0.10重量%的钛,1.0重量%的硅和其余的铝。

    Data processing apparatus that performs test validation and computer-readable storage medium
    25.
    发明授权
    Data processing apparatus that performs test validation and computer-readable storage medium 有权
    执行测试验证和计算机可读存储介质的数据处理设备

    公开(公告)号:US08775873B2

    公开(公告)日:2014-07-08

    申请号:US13343765

    申请日:2012-01-05

    IPC分类号: G06F11/00

    CPC分类号: G06F11/3684

    摘要: In a data processing apparatus, when an instruction for starting validation is provided, or when definition information is updated, data input from a data source is collected, and a process for narrowing down of the collected data is executed. In the data narrowing process, by extracting records and items as process targets according to the definition information that defines the operation of the apparatus, the number of data items used for validation is reduced. Then, the operation is validated using the narrowed data. In the operation validation process, a virtual transfer destination of output of data is provided within the apparatus, and the data is output to the virtual transfer destination, for comparison with the output data, whereby the validation of the operation is performed.

    摘要翻译: 在数据处理装置中,当提供用于开始验证的指令时,或者当更新定义信息时,收集从数据源输入的数据,并且执行收集的数据的缩小处理。 在数据收缩处理中,通过根据定义设备的操作的定义信息,提取记录和项目作为过程目标,减少了用于验证的数据项的数量。 然后,使用变窄的数据验证操作。 在操作验证过程中,在设备内提供数据输出的虚拟传送目的地,并且将数据输出到虚拟传送目的地,以与输出数据进行比较,由此执行操作的验证。

    Fluorescent X-ray analyzer useable as wavelength dispersive type and energy dispersive type
    28.
    发明授权
    Fluorescent X-ray analyzer useable as wavelength dispersive type and energy dispersive type 失效
    荧光X射线分析仪可用作波长色散型和能量色散型

    公开(公告)号:US06292532B1

    公开(公告)日:2001-09-18

    申请号:US09460972

    申请日:1999-12-15

    IPC分类号: G01N23223

    CPC分类号: G01N23/223 G01N2223/076

    摘要: A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyzing fluorescent X-ray (5) emitted from at least one target area (1a) of a sample (1) to be analyzed as a result of excitation of such target area (1a) with a primary X-ray (3). The detecting unit includes a wavelength dispersive type detecting unit (6) including a spectroscope (8) and a first detector (9), and an energy dispersive type detecting unit (11) including a second detector (12) of an energy dispersive type. The angle &thgr;1 formed between a first path (81) of travel of the fluorescent X-ray from the target area (1a) towards the spectroscope (8) and a surface of the sample (1) is equal to the angle &thgr;2 formed between a second path (82) of travel of the fluorescent X-ray from the target area (1a) towards the second detector (12) of the energy dispersive type and a surface of the sample (1), but the second path (82) is shorter than the first path (81).

    摘要翻译: 提供能够用作波长色散型或能量色散型的荧光X射线分析装置,可以快速准确地进行分析。 荧光X射线分析装置包括:检测并分析从待分析的样品(1)的至少一个目标区域(1a)发射的荧光X射线(5)的检测单元,作为该目标区域的激发 (1a)与主X射线(3)。 检测单元包括具有分光器(8)和第一检测器(9)的波长色散型检测单元(6),以及包括能量分散型的第二检测器(12)的能量分散型检测单元(11)。 在从目标区域(1a)到分光器(8)的荧光X射线的行进的第一路径(81)和样品(1)的表面之间形成的角度θ1等于形成在 来自目标区域(1a)的荧光X射线的第二路径(82)朝向能量分散型的第二检测器(12)和样品(1)的表面,但是第二路径(82)是 比第一路径(81)短。