Radiation sensitive resin composition
    21.
    发明授权
    Radiation sensitive resin composition 失效
    辐射敏感树脂组合物

    公开(公告)号:US5952150A

    公开(公告)日:1999-09-14

    申请号:US892200

    申请日:1997-07-14

    摘要: A positive-tone or negative-tone radiation sensitive resin composition which allows easy preparation of a resist, exhibits superior storage stability, high sensitivity, and high resolution capability, and is capable of producing excellent resist patterns. The positive-tone type composition comprises (A) a disulfonylmethane derivative in which the main chain with two sulfonyl groups bonded forms a three to eleven member cyclic carbon structure and (B) (a) a resin protected by an acid decomposable group or (b) an alkali-soluble resin and an alkali-solubility control agent. The negative-tone type composition comprises the component (A), (C) an alkali-soluble resin, and (D) a cross-linking agent.

    摘要翻译: 可以容易地制备抗蚀剂的正色调或负色度辐射敏感性树脂组合物,显示出优异的储存稳定性,高灵敏度和高分辨能力,并且能够产生优异的抗蚀剂图案。 正调型组合物包含(A)二磺酰基甲烷衍生物,其中具有两个磺酰基键合的主链形成三至十一个环状碳结构,(B)(a)由酸可分解基团保护的树脂或(b )碱溶性树脂和碱溶性控制剂。 负色型组合物包含组分(A),(C)碱溶性树脂和(D)交联剂。

    Radiation-sensitive resin composition
    26.
    发明授权
    Radiation-sensitive resin composition 失效
    辐射敏感树脂组合物

    公开(公告)号:US06171750B2

    公开(公告)日:2001-01-09

    申请号:US09094469

    申请日:1998-06-10

    IPC分类号: G03F7023

    CPC分类号: G03F7/0233

    摘要: A radiation-sensitive resin composition including (A) an alkali-soluble novolak resin obtained by condensing a particular combination of a first phenol having formula: wherein R1 and R2 are the same or different and each represent an alkyl group, a cycloalkyl group, an alkoxyl group or an aryl group; and a second phenol selected from the group consisting of phenol, o-cresol, m-cresol, p-cresol, 2,3-dimethylphenol, 2,5-dimethylphenol, 2,6-dimethylphenol, 3,4-dimethylphenol, 3,5-dimethylphenol, 2,3,5-trimethylphenol, 3,4,5-trimethylphenol, resorcinol, 2-methylresorcinol, 4-ethylresorcinol, hydroquinone, methylhydroquinone, catechol, 4-methyl-catechol, pyrogallol, phloroglucinol, thymol and isothymol with an aldehyde in the presence of an acidic catalyst; and (B) a quinonediazidosulfonic acid ester compound. This composition exhibits good resolution, developability, heat resistance, pattern shape, exposure margin and focal latitude in a well balanced state. It also can effectively prevent occurrence of scum and also has a good sensitivity.

    摘要翻译: 一种辐射敏感性树脂组合物,其包含(A)通过将具有下式的第一酚的特定组合缩合得到的碱溶性酚醛清漆树脂:其中R1和R2相同或不同,并且各自表示烷基,环烷基, 烷氧基或芳基; 和选自苯酚,邻甲酚,间甲酚,对甲酚,2,3-二甲基苯酚,2,5-二甲基苯酚,2,6-二甲基苯酚,3,4-二甲基苯酚, 5-二甲基苯酚,2,3,5-三甲基苯酚,3,4,5-三甲基苯酚,间苯二酚,2-甲基间苯二酚,4-乙基间苯二酚,氢醌,甲基氢醌,儿茶酚,4-甲基邻苯二酚,连苯三酚,间苯三酚,百里酚和异黄酮 在酸性催化剂存在下的醛; 和(B)醌二叠氮磺酸酯化合物。 该组合物在良好平衡状态下表现出良好的分辨率,显影性,耐热性,图案形状,曝光余量和焦点纬度。 也可以有效防止浮渣的发生,并具有良好的灵敏度。

    Diazodisulfone compound and radiation-sensitive resin composition
    27.
    发明授权
    Diazodisulfone compound and radiation-sensitive resin composition 有权
    重氮二砜化合物和辐射敏感树脂组合物

    公开(公告)号:US6143460A

    公开(公告)日:2000-11-07

    申请号:US314124

    申请日:1999-05-19

    IPC分类号: G03F7/004 G03F7/039

    摘要: A novel diazodisulfone compound capable of generating acid having high sensitivity to far ultraviolet rays typified by a KrF excimer laser and the like and capable of providing a resist with superior resolution and patterns when used as a photoacid generator for a chemically amplified resist, and a radiation-sensitive resin composition comprising the diazodisulfone compound. The diazodisulfone compound is represented by the following formulas (1) and (2). ##STR1## The radiation-sensitive resin composition comprises the diazodisulfone compound and resin represented by 4-hydroxystyrene/4-(1'-ethoxyethoxy)styrene copolymer.

    摘要翻译: 一种能够产生以KrF准分子激光器等为代表的远紫外线具有高灵敏度的酸并且当用作化学放大抗蚀剂的光酸产生剂时能够提供具有优异分辨率和图案的抗蚀剂的新型重氮二砜化合物, 包含重氮二砜化合物的敏感性树脂组合物。 重氮二砜化合物由下式(1)和(2)表示。 辐射敏感性树脂组合物包含重氮二砜化合物和由4-羟基苯乙烯/ 4-(1'-乙氧基乙氧基)苯乙烯共聚物表示的树脂。

    Paper coating composition
    28.
    发明授权
    Paper coating composition 失效
    纸涂料组合物

    公开(公告)号:US5700852A

    公开(公告)日:1997-12-23

    申请号:US414592

    申请日:1995-03-31

    CPC分类号: D21H19/58 C09D113/02

    摘要: A paper coating composition which comprises as a binder a latex of a copolymer (referred to hereinafter the particle A) consisting of (a) 20 to 80% by weight of an aliphatic conjugated diene monomer unit, (b) 0.5 to 10% by weight of an ethylenically unsaturated carboxylic acid monomer unit and (c) 20 to 79.5% by weight of a unit of another monomer copolymerizable with the above components (a) and (b) and having two glass transition points in the range of from -100.degree. C. to 50.degree. C. the difference between the two transition points being at least 5.degree. C.

    摘要翻译: 一种纸涂料组合物,其包含由(a)20至80重量%的脂族共轭二烯单体单元组成的共聚物(以下称为颗粒A)的胶乳,(b)0.5至10重量% 的烯键式不饱和羧酸单体单元和(c)20-79.5重量%的可与上述组分(a)和(b)共聚的另一单体的单元,并且具有-100℃的两个玻璃化转变点 C.至50℃,两个转变点之间的差异至少为5℃。

    Photosensitive resin film and cured film made therefrom
    30.
    发明授权
    Photosensitive resin film and cured film made therefrom 有权
    感光树脂膜和由其制成的固化膜

    公开(公告)号:US07214471B2

    公开(公告)日:2007-05-08

    申请号:US10551447

    申请日:2004-03-25

    IPC分类号: G03F7/033

    摘要: The photosensitive resin film in an uncured state of the invention comprises (A) a specific alkali-soluble copolymer, (B) a compound having at least one ethylenically unsaturated double bond and (C) a radiation-sensitive radical polymerization initiator by the use of which a coating film having a dry film thickness of 70 μm in an uncured state has a 365 nm radiation transmittance of not less than 10% and a 405 nm radiation transmittance of not less than 60%, contains the radiation-sensitive radical polymerization initiator (C) in an amount of 20 to 40 parts by weight based on 100 parts by weight of the component (A), and has a dry film thickness of not less than 50 μm. According to the photosensitive resin film, a high bump having a height of not less than 50 μm can be readily formed on a chip substrate with high precision though formation of such a high bump is difficult by the conventional technique. Moreover, connection failure of an element can be inhibited, and reliability of an element can be enhanced.

    摘要翻译: 本发明的未固化状态的感光性树脂膜包含(A)特定的碱溶性共聚物,(B)具有至少一个烯键式不饱和双键的化合物和(C)使用辐射敏感性自由基聚合引发剂的 在未固化状态下具有70μm的干膜厚度的涂膜具有不小于10%的365nm辐射透射率和不小于60%的405nm辐射透射率,其含有辐射敏感性自由基聚合引发剂( C)相对于100重量份组分(A)为20至40重量份,干膜厚度不小于50微米。 根据感光性树脂膜,通过以往的技术难以形成这样高的凸起,难以高精度地在芯片基板上形成高度不小于50μm的高凸点。 此外,可以抑制元件的连接故障,并且可以提高元件的可靠性。