WAFER, WAFER POLISHING APPARATUS, WAFER POLISHING METHOD, METHOD OF FABRICATING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIOWAVE TIMEPIECE
    23.
    发明申请
    WAFER, WAFER POLISHING APPARATUS, WAFER POLISHING METHOD, METHOD OF FABRICATING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIOWAVE TIMEPIECE 有权
    滤波器,抛光抛光装置,波浪抛光方法,压电振动器,压电振动器,振荡器,电子装置和放射线计时器的制造方法

    公开(公告)号:US20100231088A1

    公开(公告)日:2010-09-16

    申请号:US12361913

    申请日:2009-01-29

    申请人: Takashi Kobayashi

    发明人: Takashi Kobayashi

    IPC分类号: H01L41/00 B24C3/32 B24B1/00

    摘要: To provide a wafer preventing a breakage of a crack or a chip off from being brought about in a polishing step and a polishing apparatus and a polishing method of polishing the wafer, there is provided a wafer in a shape of a plate substantially in an angular rectangular shape used as a raw material of a piezoelectric vibrator. All of corner portions D1, D2, D3, D4 substantially in the angular shape are formed in shapes of curved faces by chamfering providing curvatures. The corner portions D1, D2, D3, D4 in the shapes of the curved faces at least include a first curved face portion and a second curved face portion chamfered by curvatures different from each other or the same curvature. A reference face of a crystal orientation of the raw material is specified by the first curved face portion or the second curved face portion.

    摘要翻译: 为了提供防止在抛光步骤中产生裂纹或切屑的破裂的晶片以及研磨装置和抛光晶片的抛光方法,提供了一种基本上呈角度的板状的晶片 用作压电振动器的原料的矩形形状。 基本上呈角度形状的所有拐角部分D1,D2,D3,D4都通过倒角提供曲率形成曲面的形状。 曲面形状的角部D1,D2,D3,D4至少包括由彼此不同的曲率或相同曲率的曲率倒角的第一曲面部和第二曲面部。 原料的晶体取向的参照面由第一弯曲面部或第二弯曲面部指定。

    METHOD FOR FORMING SILICON OXIDE FILM, PLASMA PROCESSING APPARATUS AND STORAGE MEDIUM
    25.
    发明申请
    METHOD FOR FORMING SILICON OXIDE FILM, PLASMA PROCESSING APPARATUS AND STORAGE MEDIUM 失效
    形成硅氧烷膜,等离子体加工设备和储存介质的方法

    公开(公告)号:US20100093185A1

    公开(公告)日:2010-04-15

    申请号:US12443044

    申请日:2007-09-28

    摘要: The present invention provides a method for forming a silicon oxide film, with a substantially uniform film thickness and without being so influenced by dense sites and scattered sites in a pattern provided on an object to be processed, while keeping advantageous points of a plasma oxidation process performed under a lower-pressure and lower-oxygen-concentration condition. In this method, plasma of a processing gas is applied to a surface of the object having a concavo-convex pattern, in a processing chamber of a plasma processing apparatus, so as to oxidize silicon on the surface of the object, thereby forming the silicon oxide film. The plasma is generated under the condition that a ratio of oxygen in the processing gas is within a range of 0.1% to 10% and pressure is within a range of 0.133 Pa to 133.3 Pa. This plasma oxidation process is performed, with a plate, having a plurality of through-holes formed therein, being provided between a region for generating the plasma in the processing chamber and the object to be processed.

    摘要翻译: 本发明提供一种形成氧化硅膜的方法,其具有基本上均匀的膜厚度,并且不受等离子体氧化工艺的优点的保证,在受加工物体上设置的图案中的致密部位和散射部位的影响 在低压和低氧浓度条件下进行。 在该方法中,在等离子体处理装置的处理室中,将处理气体的等离子体施加到具有凹凸图案的物体的表面,以氧化物体表面上的硅,从而形成硅 氧化膜。 在处理气体中的氧的比例在0.1〜10%的范围内且压力在0.133Pa〜133.3Pa的范围内的条件下产生等离子体,用等离子体氧化法, 具有形成在其中的多个通孔,设置在处理室中用于产生等离子体的区域和待处理物体之间。

    Work conveying apparatus, method for producing work and method for producing image forming apparatus
    27.
    发明授权
    Work conveying apparatus, method for producing work and method for producing image forming apparatus 有权
    工件输送装置,制作方法及图像形成装置的制造方法

    公开(公告)号:US07681716B2

    公开(公告)日:2010-03-23

    申请号:US11366403

    申请日:2006-03-03

    申请人: Takashi Kobayashi

    发明人: Takashi Kobayashi

    IPC分类号: B23P19/00

    CPC分类号: B61J3/08 B23P19/001 B65G25/10

    摘要: A work conveying apparatus including at least one movable work conveying device to support a work, a drive device capable of reciprocating by a predetermined distance in a predetermined direction, and a latching portion formed on at least one of the working conveying device and the drive device and configured to latch the working conveying device with the drive device and move the work conveying device when the drive device is moved in one direction in the reciprocating direction.

    摘要翻译: 一种工件输送装置,包括至少一个用于支撑工件的可移动工件输送装置,能够沿预定方向往复运动预定距离的驱动装置和形成在所述工作输送装置和所述驱动装置中的至少一个上的闩锁部分 并且构造成当所述驱动装置沿着往复方向沿一个方向移动时,使所述工作输送装置与所述驱动装置锁定并移动所述工件输送装置。

    CONTROL VALVE FOR VARIABLE DISPLACEMENT COMPRESSOR
    28.
    发明申请
    CONTROL VALVE FOR VARIABLE DISPLACEMENT COMPRESSOR 审中-公开
    可变位移压缩机的控制阀

    公开(公告)号:US20100068074A1

    公开(公告)日:2010-03-18

    申请号:US12516621

    申请日:2007-11-29

    IPC分类号: F04B49/22

    摘要: A control valve is configured such that as a position of a high pressure-side valve body positioned by a solenoid is closer to one side, a degree of opening for communication of a high pressure valve portion is more widened and a pressure on the side of a discharge flow path acting on the high pressure-side valve body is weakened. Further, the control valve is configured such that as a position of a low pressure-side valve body positioned by the solenoid is closer to the other side, a degree of opening for communication of a low pressure valve portion is more widened. When the high pressure-side valve body and the low pressure-side valve body are integrally positioned on the one side by the solenoid and the low pressure-side valve body is positioned on the other side by the solenoid, the high pressure-side valve body and the low pressure-side valve body are separated from each other.

    摘要翻译: 控制阀被构造成使得当由螺线管定位的高压侧阀体的位置更靠近一侧时,高压阀部分的连通的开度更加扩大,并且在侧面的压力 作用在高压侧阀体上的排出流路变弱。 此外,控制阀被构造成使得当由螺线管定位的低压侧阀体的位置更靠近另一侧时,低压阀部分的连通的开度更大。 当高压侧阀体和低压侧阀体通过螺线管一体地定位在一侧时,低压侧阀体由螺线管位于另一侧时,高压侧阀 主体和低压侧阀体彼此分离。

    Data communication system, data communication method, and data communication apparatus
    30.
    发明授权
    Data communication system, data communication method, and data communication apparatus 有权
    数据通信系统,数据通信方法和数据通信装置

    公开(公告)号:US07590133B2

    公开(公告)日:2009-09-15

    申请号:US09253783

    申请日:1999-02-22

    IPC分类号: H04J12/28

    摘要: A data communication apparatus (a) determines a segment size and a segment data size in accordance with a size of a receiving buffer of the destination node, the size of the receiving buffer being determined by the destination node in accordance with a maximum payload size that can be received by the destination node, (b) divides object data into segments in accordance with the segment size, and (c) divides each segment into a plurality of segment data in accordance with the segment data size. The data communication apparatus (c) generates packets from the plurality of segment data, and (d) transfers the packets from the data communication apparatus to the destination node via a logical connection set between te data communication apparatus and the destination node, the logical connection being set by a controller.

    摘要翻译: 数据通信装置(a)根据目的地节点的接收缓冲器的大小确定段大小和段数据大小,接收缓冲器的大小由目的地节点根据最大有效负载大小确定 可以由目的地节点接收,(b)根据段大小将对象数据划分成段,并且(c)根据段数据大小将每个段划分成多个段数据。 数据通信装置(c)从多个分段数据生成分组,(d)经由数据通信装置与目的地节点之间的逻辑连接将数据从数据通信装置传送到目的地节点,逻辑连接 由控制器设置。