公开(公告)号：US06509415B1

公开(公告)日：2003-01-21

申请号：US09545058

申请日：2000-04-07

申请人： Kreisler Lau ,  Feng Quan Liu ,  Boris Korolev ,  Emma Brouk ,  Rusian Zherebin ,  Roger Leung

发明人： Kreisler Lau ,  Feng Quan Liu ,  Boris Korolev ,  Emma Brouk ,  Rusian Zherebin ,  Roger Leung

IPC分类号： C08F28100

CPC分类号： C08J3/246 ,  C08F257/02 ,  C08G61/12 ,  C08L51/003 ,  Y10S977/902 ,  Y10S977/963 ,  C08L2666/02

摘要： A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslinked via the first and second reactive groups in a crosslinking reaction without an additional crosslinker, and wherein a cage structure having at least 10 atoms is covalently bound to at least one of the first and second backbone.

公开(公告)号：US20060057837A1

公开(公告)日：2006-03-16

申请号：US11203558

申请日：2005-08-12

申请人： Anil Bhanap ,  Boris Korolev ,  Roger Leung ,  Beth Munoz

发明人： Anil Bhanap ,  Boris Korolev ,  Roger Leung ,  Beth Munoz

IPC分类号： H01L21/4763

CPC分类号： H01L21/02216 ,  H01L21/02126 ,  H01L21/316 ,  H01L21/31695 ,  H01L21/76814 ,  H01L21/76826

摘要： A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which may be an acid, a base, an onium compound, a dehydrating agent, and combinations thereof, and a solvent or mixture of a main solvent and a co-solvent.

摘要翻译： 一种用于在施加到所述膜上时增加有机硅酸盐玻璃介电膜的疏水性的处理剂组合物。 它包括能够通过甲硅烷基化将有机硅酸盐玻璃介电膜的硅烷醇部分烷基化或芳基化的组分，以及可以是酸，碱，鎓化合物，脱水剂及其组合的活化剂，以及溶剂或混合物 的主要溶剂和共溶剂。

公开(公告)号：US06890641B1

公开(公告)日：2005-05-10

申请号：US10615812

申请日：2003-07-08

申请人： Shyama Mukherjee ,  Roger Leung ,  Kreisler Lau

发明人： Shyama Mukherjee ,  Roger Leung ,  Kreisler Lau

IPC分类号： B32B5/16 ,  C08J9/28 ,  H01L20060101 ,  H01L21/316 ,  H05K1/16

CPC分类号： H01L21/31695 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02343 ,  H05K1/162 ,  H05K2201/0116 ,  H05K2201/0209 ,  Y10T428/249978 ,  Y10T428/259

摘要： In accordance with the present invention, compositions and methods are provided in which the mechanical strength and durability of a precursor material having a plurality of pores is increased by a) providing a precursor material; b) treating the precursor material to form a nanoporous aerogel, preferably by using a supercritical drying process; c) providing a blending material having a reinforcing component and a volatile component; d) combining the nanoporous aerogel and the blending material to form an amalgamation layer; and e) treating the amalgamation layer to increase the mechanical strength of the layer by a substantial amount and to ultimately form a low dielectric material that can be utilized in various applications.

摘要翻译： 根据本发明，提供了组合物和方法，其中通过以下方式提高具有多个孔的前体材料的机械强度和耐久性：a）提供前体材料; b）优选通过使用超临界干燥方法处理前体材料以形成纳米多孔气凝胶; c）提供具有增强组分和挥发性组分的共混材料; d）结合纳米多孔气凝胶和共混材料以形成合并层; 和e）处理合并层以增加层的机械强度大量并最终形成可用于各种应用的低介电材料。

公开(公告)号：US06797777B2

公开(公告)日：2004-09-28

申请号：US09902924

申请日：2001-07-10

申请人： Kreisler Lau ,  Feng Quan Liu ,  Boris Korolev ,  Emma Brouk ,  Rusian Zherebin ,  Roger Leung

发明人： Kreisler Lau ,  Feng Quan Liu ,  Boris Korolev ,  Emma Brouk ,  Rusian Zherebin ,  Roger Leung

IPC分类号： C08F28100

CPC分类号： C08F257/02 ,  C08F8/00 ,  C08G61/02 ,  C08G61/12 ,  C08G81/00 ,  C08L51/003 ,  H01B3/307 ,  H01B3/427 ,  C08L2666/02

摘要： A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslinked via the first and second reactive groups in a crosslinking reaction without an additional crosslinker, and wherein a cage structure having at least 10 atoms is covalently bound to at least one of the first and second backbone.

摘要翻译： 低介电常数材料具有具有芳族部分和第一反应性基团的第一主链和具有芳族部分和第二反应性基团的第二主链，其中第一和第二主链通过第一和第二反应性基团在 交联反应而没有额外的交联剂，并且其中具有至少10个原子的笼状结构与第一和第二主链中的至少一个共价结合。

公开(公告)号：US06444495B1

公开(公告)日：2002-09-03

申请号：US09761529

申请日：2001-01-11

申请人： Roger Leung ,  Denis Endisch ,  Songyuan Xie ,  Nigel Hacker ,  Yanpei Deng

发明人： Roger Leung ,  Denis Endisch ,  Songyuan Xie ,  Nigel Hacker ,  Yanpei Deng

IPC分类号： H01L2144

CPC分类号： H01L21/7682 ,  H01L21/02126 ,  H01L21/02129 ,  H01L21/022 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/316 ,  H01L21/31695 ,  H01L21/76224 ,  H01L21/76837 ,  H01L23/5329 ,  H01L2221/1047 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

摘要： A colloidal suspension of nanoparticles composed of a dense material dispersed in a solvent is used in forming a gap-filling dielectric material with low thermal shrinkage. The dielectric material is particularly useful for pre-metal dielectric and shallow trench isolation applications. According to the methods of forming a dielectric material, the colloidal suspension is deposited on a substrate and dried to form a porous intermediate layer. The intermediate layer is modified by infiltration with a liquid phase matrix material, such as a spin-on polymer, followed by curing, by infiltration with a gas phase matrix material, followed by curing, or by curing alone, to provide a gap-filling, thermally stable, etch resistant dielectric material.

摘要翻译： 使用由分散在溶剂中的致密材料构成的纳米颗粒的胶体悬浮液来形成具有低热收缩率的间隙填充介电材料。 电介质材料特别适用于预金属电介质和浅沟槽隔离应用。 根据形成电介质材料的方法，将胶体悬浮液沉积在基底上并干燥以形成多孔中间层。 通过用液相基质材料（例如旋涂聚合物）渗透，然后通过用气相基质材料渗透，随后固化，或通过单独固化来改性中间层，从而提供间隙填充 ，耐热稳定的，耐蚀刻的介电材料。

公开(公告)号：US06313185B1

公开(公告)日：2001-11-06

申请号：US09538276

申请日：1998-09-24

申请人： Kreisler Lau ,  Tian-An Chen ,  Roger Leung

发明人： Kreisler Lau ,  Tian-An Chen ,  Roger Leung

IPC分类号： C08J902

CPC分类号： C08J9/26 ,  C08J2201/046 ,  H05K1/0313

摘要： Nanoporous materials are fabricated from polymers having backbones with reactive groups used in crosslinking. In one aspect of preferred methods and compositions, the reactive groups in the backbone comprise a diene and a dienophile. The diene may advantageously comprise a tetracyclone, and the dienophile may advantageously comprise an ethynyl. In another aspect of preferred methods and compositions, the reactive groups in the backbone are included in a conjugated system. Especially preferred polymeric strands comprise a poly(arylene ether) synthesized from a difluoroaromatic portion and an aromatic bisphenolic portion. It is still more preferred that the difluoroaromatic portions of the poly(arylene ether) are modified in such a way that some difluoroaromatic portions carry a thermolabile portion. In still other aspects crosslinking may advantageously occur without reliance on an exogenous crosslinker.

摘要翻译： 纳米多孔材料由具有用于交联的反应性基团的主链的聚合物制成。 在优选的方法和组合物的一个方面，主链中的反应性基团包含二烯和亲二烯体。 二烯可有利地包含四环，并且亲二烯体可有利地包含乙炔基。 在优选方法和组合物的另一方面，骨架中的反应性基团包括在共轭体系中。 特别优选的聚合物链包含由二氟芳族部分和芳族双酚部分合成的聚（亚芳基醚）。 更优选的是，聚（亚芳基醚）的二氟芳香族部分以使得一些二氟芳香族部分携带不可热热部分的方式被改性。 在其它方面，交联可有利地发生，而不依赖于外源交联剂。

公开(公告)号：US06214746B1

公开(公告)日：2001-04-10

申请号：US09420611

申请日：1999-10-18

申请人： Roger Leung ,  Wenya Fan ,  John Silkonia ,  Hui-Jung Wu

发明人： Roger Leung ,  Wenya Fan ,  John Silkonia ,  Hui-Jung Wu

IPC分类号： H01L2131

CPC分类号： H01B3/30

摘要： Nanoporous low dielectric constant materials are fabricated from a first reagent and a second reagent. The reagents are mixed to give a reagent mixture and a polymeric structure is formed from the reagent mixture. Nanosized voids are created by removing at least in part the second reagent from the polymeric structure by a method other than thermolysis, and other than evaporation.

摘要翻译： 纳米多孔低介电常数材料由第一试剂和第二试剂制成。 将试剂混合以得到试剂混合物，并由试剂混合物形成聚合物结构。 通过除了热分解之外的方法，除了蒸发之外，至少部分地从聚合物结构中除去第二试剂来产生纳米化的空隙。