Methods of forming conductive elements using organometallic layers and flowable, curable conductive materials
    22.
    发明申请
    Methods of forming conductive elements using organometallic layers and flowable, curable conductive materials 有权
    使用有机金属层和可流动的可固化导电材料形成导电元件的方法

    公开(公告)号:US20060115926A1

    公开(公告)日:2006-06-01

    申请号:US11336540

    申请日:2006-01-20

    IPC分类号: H01L21/50

    摘要: A conductive element is formed on a substrate by forming an organometallic layer on at least a portion of a surface of the substrate, heating a portion of the organometallic layer, and removing an unheated portion of the organometallic layer. In other methods, a flowable, uncured conductive material may be deposited on a surface of the substrate, the flowable, uncured conductive material may be selectively cured over at least a portion of the surface of the substrate, and a portion of the cured conductive material may be removed. A conductive via is formed by forming a hole at least partially through a thickness of a substrate, depositing an organometallic material within at least a portion of the hole, and selectively heating at least a portion of the organometallic material.

    摘要翻译: 通过在基板表面的至少一部分上形成有机金属层,加热部分有机金属层,去除有机金属层的未加热部分,在基板上形成导电元件。 在其他方法中,可流动的未固化的导电材料可以沉积在基底的表面上,可流动的未固化的导电材料可以选择性地固化在基底表面的至少一部分上,并且一部分固化的导电材料 可能被删除。 通过至少部分地穿过衬底的厚度形成孔,在孔的至少一部分内沉积有机金属材料并选择性地加热至少一部分有机金属材料来形成导电通孔。

    Methods for thinning semiconductor substrates that employ support structures formed on the substrates
    24.
    发明授权
    Methods for thinning semiconductor substrates that employ support structures formed on the substrates 有权
    减薄采用在基板上形成的支撑结构的半导体衬底的方法

    公开(公告)号:US07713841B2

    公开(公告)日:2010-05-11

    申请号:US10666742

    申请日:2003-09-19

    IPC分类号: H01L21/46

    摘要: A support structure for use with a semiconductor substrate in thinning, or backgrinding, thereof, as well as during post-thinning processing of the semiconductor substrate includes a portion which extends substantially along and around an outer periphery of the semiconductor substrate to impart the thinned semiconductor substrate with rigidity. The support structure may be configured as a ring or as a member which substantially covers an active surface of the semiconductor substrate and forms a protective structure over each semiconductor device carried by the active surface. Assemblies that include the support structure and a semiconductor substrate are also within the scope of the present invention, as are methods for forming the support structures and thinning and post-thinning processes that include use of the support structures.

    摘要翻译: 在半导体衬底的薄化或后研磨以及后稀化处理期间与半导体衬底一起使用的支撑结构包括基本上沿半导体衬底的外周延伸并且围绕半导体衬底的外周延伸的部分,以使薄化半导体 基板具有刚性。 支撑结构可以被配置为环或作为基本上覆盖半导体衬底的有源表面并且在由有源表面承载的每个半导体器件上形成保护结构的构件。 包括支撑结构和半导体衬底的组件也在本发明的范围内,形成支撑结构的方法和包括使用支撑结构的减薄和后变薄工艺也是如此。

    Integrated optics units and methods of manufacturing integrated optics units for use with microelectronic imagers
    28.
    发明申请
    Integrated optics units and methods of manufacturing integrated optics units for use with microelectronic imagers 有权
    集成光学单元和制造与微电子成像器一起使用的集成光学单元的方法

    公开(公告)号:US20050254133A1

    公开(公告)日:2005-11-17

    申请号:US10845303

    申请日:2004-05-13

    摘要: Microelectronic imagers, optical devices for microelectronic imagers, methods for manufacturing integrated optical devices for use with microelectronic imagers, and methods for packaging microelectronic imagers. The optical devices are manufactured in optical device assemblies that provide efficient and highly accurate fabrication of the optics that are used in microelectronic imagers. The optical device assemblies are particularly useful for packaging a plurality of microelectronic imagers at the wafer level. Wafer-level packaging is expected to significantly enhance the efficiency of manufacturing microelectronic imagers because a plurality of imagers can be packaged simultaneously using highly accurate and efficient processes developed for packaging processors, memory devices and other semiconductor devices.

    摘要翻译: 微电子成像器,用于微电子成像器的光学器件,用于制造用于微电子成像器的集成光学器件的方法,以及用于封装微电子成像器的方法。 光学器件在光学器件组件中制造,其提供用于微电子成像器的光学器件的有效且高精度的制造。 光学器件组件特别适用于在晶片级封装多个微电子成像器。 预期晶圆级封装将显着提高制造微电子成像器的效率,因为可以使用为封装处理器,存储器件和其它半导体器件开发的高精度和有效的工艺来同时封装多个成像器。