Plasma immersion ion processing for coating of hollow substrates
    22.
    发明授权
    Plasma immersion ion processing for coating of hollow substrates 有权
    用于涂覆中空基板的等离子浸渍离子处理

    公开(公告)号:US08029875B2

    公开(公告)日:2011-10-04

    申请号:US11752787

    申请日:2007-05-23

    IPC分类号: H05H1/24

    摘要: The present disclosure relates to a method for plasma ion deposition and coating formation. A vacuum chamber may be supplied, wherein the vacuum chamber is formed by a hollow substrate having a length, diameter and interior surface. A plasma may be formed within the chamber while applying a negative bias to the hollow substrate to draw ions from the plasma to the interior surface of the hollow substrate to deposit ions onto the interior surface and forming a coating. The coating may have a Vickers Hardness Number (Hv) of at least 500.

    摘要翻译: 本公开涉及等离子体离子沉积和涂层形成的方法。 可以提供真空室,其中真空室由具有长度,直径和内表面的中空衬底形成。 可以在室内形成等离子体,同时向中空衬底施加负偏压以将离子从等离子体吸入中空衬底的内表面,以将离子沉积到内表面上并形成涂层。 该涂层可具有至少500的维氏硬度值(Hv)。

    MODIFIED CARBON NANOTUBE ARRAYS
    23.
    发明申请
    MODIFIED CARBON NANOTUBE ARRAYS 审中-公开
    改性碳纳米管阵列

    公开(公告)号:US20110003109A1

    公开(公告)日:2011-01-06

    申请号:US12496207

    申请日:2009-07-01

    IPC分类号: B32B5/02 C23F1/00

    摘要: The invention relates to carbon nanotube arrays and methods for the preparation and modification of carbon nanotube arrays. The method includes synthesizing a plurality of carbon nanotubes on a substrate such that the carbon nanotubes are substantially vertically aligned and exposing the array to a plasma to change the topography of the array, change the structure or chemical nature of the individual nanotubes, remove at least a portion of the carbon nanotubes, and/or removing nanotubes to expose monodispserse groupings of nanotubes.

    摘要翻译: 本发明涉及碳纳米管阵列及碳纳米管阵列的制备和改性方法。 该方法包括在基板上合成多个碳纳米管,使得碳纳米管基本上垂直取向并将阵列暴露于等离子体以改变阵列的形貌,改变单个纳米管的结构或化学性质,至少去除 碳纳米管的一部分,和/或去除纳米管以暴露纳米管的单分散组。

    Method for magnetron sputter deposition
    24.
    发明授权
    Method for magnetron sputter deposition 有权
    磁控溅射沉积方法

    公开(公告)号:US07790003B2

    公开(公告)日:2010-09-07

    申请号:US11397878

    申请日:2006-04-04

    IPC分类号: C23C14/35

    摘要: A method for depositing a nanostructured coating comprising chromium or a copper-chromium mixture on a workpiece. The workpiece may comprise a hollowed structure such as a rocket or jet engine combustion chamber liner. The method comprises providing a magnetron and an external sputter target material comprising chromium or a copper-chromium composite and effecting a magnetron sputter deposition to deposit a substantially uniform nanostructured coating comprising said sputter target material on said workpiece. The method may include plasma enhancement wherein a filament is utilized to produce a plasma that effects an ion bombardment on the workpiece during the magnetron sputter deposition process. The invention also includes the nanostructured coatings deposited by these methods and workpieces coated thereby.

    摘要翻译: 一种在工件上沉积包含铬或铜 - 铬混合物的纳米结构涂层的方法。 工件可以包括中空结构,例如火箭或喷气式发动机燃烧室衬套。 该方法包括提供磁控管和包含铬或铜 - 铬复合材料的外部溅射靶材料,并进行磁控溅射沉积,以将包含所述溅射靶材料的基本均匀的纳米结构涂层沉积在所述工件上。 该方法可以包括等离子体增强,其中使用丝来产生在磁控溅射沉积工艺期间对工件进行离子轰击的等离子体。 本发明还包括通过这些方法沉积的纳米结构涂层和由此涂覆的工件。

    Method for magnetron sputter deposition
    26.
    发明申请
    Method for magnetron sputter deposition 审中-公开
    磁控溅射沉积方法

    公开(公告)号:US20060076231A1

    公开(公告)日:2006-04-13

    申请号:US10962772

    申请日:2004-10-12

    申请人: Ronghua Wei

    发明人: Ronghua Wei

    IPC分类号: C23C14/00 C23C14/32

    摘要: A method for depositing a coating on an interior surface of a hollowed workpiece. The method comprises providing the hollowed workpiece in a vacuum chamber, the hollowed workpiece comprising an interior surface substantially defining a bore having a longitudinal axis; positioning a magnetron within thed bore along substantially the length of said longitudinal axis and substantially radially equidistant from the interior surface, said magnetron comprising an external sputter target material; and, generating a circumferential magnetic field about the sputter target material for a time and under sputter deposition conditions effective to produce an interior surface comprising a substantially uniform coating comprising said sputter target material.

    摘要翻译: 一种在中空工件的内表面上沉积涂层的方法。 所述方法包括在真空室中设置所述中空工件,所述中空工件包括基本上限定具有纵向轴线的孔的内表面; 将磁控管沿所述纵向轴线的大致长度定位在所述钻孔内,并且与所述内表面基本上径向等距离地定位,所述磁控管包括外部溅射靶材料; 以及在有效产生包括包括所述溅射靶材料的基本上均匀的涂层的内表面的时间和溅射沉积条件下,围绕溅射靶材料产生周向磁场。

    Oxidation resistant nanocrystalline MCrAl(Y) coatings and methods of forming such coatings
    29.
    发明授权
    Oxidation resistant nanocrystalline MCrAl(Y) coatings and methods of forming such coatings 有权
    耐氧化纳米晶MCrAl(Y)涂层和形成这种涂层的方法

    公开(公告)号:US08790791B2

    公开(公告)日:2014-07-29

    申请号:US12760864

    申请日:2010-04-15

    摘要: The present disclosure relates to an oxidation resistant nanocrystalline coating and a method of forming an oxidation resistant nanocrystalline coating. An oxidation resistant coating comprising an MCrAl(Y) alloy may be deposited on a substrate, wherein M, includes iron, nickel, cobalt, or combinations thereof present greater than 50 wt % of the MCrAl(Y) alloy, chromium is present in the range of 15 wt % to 30 wt % of the MCrAl(Y) alloy, aluminum is present in the range of 6 wt % to 12 wt % of the MCrAl(Y) alloy and yttrium, is optionally present in the range of 0.1 wt % to 0.5 wt % of the MCrAl(Y) alloy. In addition, the coating may exhibit a grain size of 200 nm or less as deposited.

    摘要翻译: 本公开内容涉及抗氧化纳米晶体涂层和形成耐氧化纳米晶体涂层的方法。 包含MCrAl(Y)合金的抗氧化涂层可以沉积在基底上,其中M包括大于MCrAl(Y)合金的50重量%的铁,镍,钴或其组合,铬存在于 范围为MCrAl(Y)合金的15重量%〜30重量%,铝以MCrAl(Y)合金和钇的6重量%〜12重量%的范围存在,任选以0.1重量% %至0.5wt%的MCrAl(Y)合金。 此外,涂层可以表现出沉积的200nm或更小的晶粒尺寸。

    Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode
    30.
    发明授权
    Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode 有权
    使用加热的中心电极等离子体浸没离子处理和沉积在中空基板中的涂层的方法

    公开(公告)号:US08753725B2

    公开(公告)日:2014-06-17

    申请号:US13046181

    申请日:2011-03-11

    IPC分类号: H05H1/24

    摘要: A method for plasma immersion ion processing including providing a hollow substrate having an interior surface defining an interior and a gas feed tube extending through the interior, wherein the gas feed tube is hollow and includes a wall having a plurality of holes defined therein and applying tension to said gas feed tube by affixing a spring to one end of said gas feed tube and said vacuum chamber. The method may also include heating the gas feed tube to a temperature in the range of 50° C. to 650° C.; supplying a precursor gas to the interior of the hollow substrate through the plurality of holes in the gas feed tube and generating a plasma; and applying a negative bias to the hollow substrate relative to the gas feed tube to draw ions from the plasma to the interior surface to form a coating on the interior surface.

    摘要翻译: 一种用于等离子体浸没离子处理的方法,包括提供具有限定内部的内表面的中空基板和延伸穿过内部的气体供给管,其中气体供给管是中空的,并且包括壁,其中限定有多个孔并施加张力 通过将弹簧固定到所述气体供给管和所述真空室的一端而连接到所述气体供给管。 该方法还可以包括将气体进料管加热至50℃至650℃的温度范围内。 通过气体供给管中的多个孔将前体气体供应到中空基板的内部并产生等离子体; 以及相对于所述气体供给管将负偏压施加到所述中空衬底以将离子从所述等离子体吸入所述内表面以在所述内表面上形成涂层。