公开(公告)号：US09413134B2

公开(公告)日：2016-08-09

申请号：US14753275

申请日：2015-06-29

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong

IPC: H01S3/10 ,  H01S5/00 ,  H01S3/11 ,  G02F1/37 ,  H01S3/00 ,  C30B29/10 ,  C30B33/02 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  C03B33/02 ,  C30B1/02 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  G02F1/35 ,  G02F1/355

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: A frequency-conversion crystal annealing process includes a first ramp-up period (e.g., increasing the crystal's temperature to a first set point in the range of 100° C. to 150° C. over about 2 hours), a first fixed temperature period (e.g., maintaining at the first set point for 10 to 20 hours), a second ramp-up period (e.g., increasing from the first set point to a second set point above 150° C. over about 1 hour or more), a second fixed period (e.g., maintaining at the second set point for 48 to 300 hours), and then a temperature ramp-down period (e.g., decreasing from the second set point to room temperature over about 3 hours). Transitions from the first and second fixed temperature periods are optionally determined by —OH bonds absorption levels that are measured using Fourier transform infrared spectroscopy, e.g., by monitoring the absorption of —OH bonds (including H2O) near 3580 cm−1 in the infra-red spectrum.

Abstract translation: 频率转换晶体退火处理包括第一斜坡上升​​周期（例如，在约2小时内将晶体的温度提高到在100℃至150℃的范围内的第一设定点），第一固定温度周期 （例如，在第一设定点保持10至20小时），第二加速时间段（例如，在大约1小时或更长时间内从第一设定点增加到高于150℃的第二设定点），a 第二固定时间（例如，在第二设定点保持48至300小时），然后温度降低时间（例如，从大约3小时的第二设定点降低到室温）。 从第一和第二固定温度周期的转变可任选地由使用傅立叶变换红外光谱法测量的-OH键吸收水平确定，例如通过监测基底内的3580cm-1附近的-OH键（包括H 2 O）的吸收， 红色光谱。

公开(公告)号：US20160061784A1

公开(公告)日：2016-03-03

申请号：US14844773

申请日：2015-09-03

Applicant: Kalaga Venu Madhav ,  Swapnil Sushilendra Deshpande ,  Abhijeet Vikram Kshirsagar ,  Chinmaya Rajiv Dandekar ,  Yogesh Shinde ,  Sarin Kumar Anakkat Koyilothu

Inventor： Kalaga Venu Madhav ,  Swapnil Sushilendra Deshpande ,  Abhijeet Vikram Kshirsagar ,  Chinmaya Rajiv Dandekar ,  Yogesh Shinde ,  Sarin Kumar Anakkat Koyilothu

IPC: G01N29/24 ,  G01N29/22 ,  G01N21/17

CPC classification number: G01N29/2425 ,  G01N21/1702 ,  G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N2021/1704 ,  G01N2201/0637 ,  G01N2291/021 ,  G01N2291/0427

Abstract: A sensor head is described herein. The sensor head can include a first piece, where the first piece can include a body having an outer surface and an inner surface. The first piece can also include a light source cavity disposed in the body at the inner surface. The first piece can further include an optical device cavity disposed in the body at the inner surface. The first piece can also include an ellipsoidal cavity disposed in the body at the inner surface, where the ellipsoidal cavity is disposed adjacent to the optical device cavity. The first piece can further include a receiving device cavity disposed in the body adjacent to the inner surface that forms the ellipsoidal cavity. The first piece can also include at least one channel disposed in the body.

Abstract translation: 这里描述了传感器头。 传感器头可以包括第一件，其中第一件可以包括具有外表面和内表面的本体。 第一件还可以包括在内表面上设置在主体中的光源腔。 第一件还可以包括在内表面上设置在主体中的光学装置空腔。 第一部件还可以包括在内表面处设置在主体中的椭圆形空腔，其中椭圆形空腔邻近光学装置空腔设置。 第一件可以进一步包括设置在与形成椭圆形空腔的内表面相邻的主体中的接收装置空腔。 第一件还可以包括设置在身体中的至少一个通道。

公开(公告)号：US20150299893A1

公开(公告)日：2015-10-22

申请号：US14753275

申请日：2015-06-29

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong

IPC: C30B1/02 ,  C30B29/14 ,  C30B29/30 ,  G02F1/355 ,  C30B29/22

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: A frequency-conversion crystal annealing process includes a first ramp-up period (e.g., increasing the crystal's temperature to a first set point in the range of 100° C. to 150° C. over about 2 hours), a first fixed temperature period (e.g., maintaining at the first set point for 10 to 20 hours), a second ramp-up period (e.g., increasing from the first set point to a second set point above 150° C. over about 1 hour or more), a second fixed period (e.g., maintaining at the second set point for 48 to 300 hours), and then a temperature ramp-down period (e.g., decreasing from the second set point to room temperature over about 3 hours). Transitions from the first and second fixed temperature periods are optionally determined by —OH bonds absorption levels that are measured using Fourier transform infrared spectroscopy, e.g., by monitoring the absorption of —OH bonds (including H2O) near 3580 cm−1 in the infra-red spectrum.

Abstract translation: 频率转换晶体退火处理包括第一斜坡上升​​周期（例如，在约2小时内将晶体的温度提高到在100℃至150℃的范围内的第一设定点），第一固定温度周期 （例如，在第一设定点保持10至20小时），第二加速时间段（例如，在大约1小时或更长时间内从第一设定点增加到高于150℃的第二设定点），a 第二固定时间（例如，在第二设定点保持48至300小时），然后温度降低时间（例如，从大约3小时的第二设定点降低到室温）。 从第一和第二固定温度周期的转变可任选地由使用傅立叶变换红外光谱法测量的-OH键吸收水平确定，例如通过监测基底内的3580cm-1附近的-OH键（包括H 2 O）的吸收， 红色光谱。

公开(公告)号：US09097683B2

公开(公告)日：2015-08-04

申请号：US14507758

申请日：2014-10-06

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

IPC: H01S3/13 ,  G01N21/88 ,  H01S3/11 ,  H01S3/10 ,  H01S5/00 ,  G02F1/37 ,  H01S3/00 ,  C30B29/10 ,  C03B33/02 ,  G01N21/94 ,  G01N21/95 ,  G02F1/35 ,  G02F1/355

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: An optical system for detecting contaminants and defects on a test surface includes an improved laser system for generating a laser beam and optics directing the laser beam along a path onto the test surface, and producing an illuminated spot thereon. A detector and ellipsoidal mirrored surface are also provided with an axis of symmetry about a line perpendicular to the test surface. In one embodiment, an optical system for detecting anomalies of a sample includes the improved laser system for generating first and second beams, first optics for directing the first beam of radiation onto a first spot on the sample, second optics for directing the second beam onto a second spot on the sample, with the first and second paths at different angles of incidence to the sample surface. In another embodiment, a surface inspection apparatus includes an illumination system configured to focus beams at non-normal incidence angles.

Abstract translation: 用于检测测试表面上的污染物和缺陷的光学系统包括用于产生激光束的改进的激光系统和将激光束沿着路径引导到测试表面上并在其上产生照明点的光学系统。 检测器和椭圆形镜面也具有围绕垂直于测试表面的线的对称轴。 在一个实施例中，用于检测样本异常的光学系统包括用于产生第一和第二光束的改进的激光系统，用于将第一辐射束引导到样品上的第一光点上的第一光学器件，用于将第二光束引导到 样品上的第二个点，第一和第二个路径与样品表面的入射角不同。 在另一个实施例中，表面检查装置包括被配置为以非正常入射角聚焦光束的照明系统。

公开(公告)号：US08873596B2

公开(公告)日：2014-10-28

申请号：US13412564

申请日：2012-03-05

Applicant: Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

IPC: H01S3/098 ,  G01N21/94 ,  C30B29/10 ,  G02F1/37 ,  C30B33/02 ,  G01N21/95 ,  H01S3/00 ,  G01N21/88 ,  G02F1/35 ,  G02F1/355

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section.

Abstract translation: 可在低温下操作的模式锁定激光系统可以包括退火的频率转换晶体和壳体，以在低温下的标准操作期间保持晶体的退火状态。 在一个实施例中，晶体可以具有增加的长度。 第一光束整形光学元件可以被配置成将来自光源的光束聚焦到位于或接近晶体的光束腰部处的椭圆形横截面。 谐波分离块可以将来自晶体的输出分成在空间中分离的不同频率的波束。 在一个实施例中，锁模激光系统还可以包括第二光束整形光学器件，其被配置为将期望的频率波束的椭圆形横截面转换成具有期望的纵横比的光束，例如圆形横截面。

公开(公告)号：US20050006585A1

公开(公告)日：2005-01-13

申请号：US10884348

申请日：2004-07-02

Applicant: Hsueh-Mei Graham ,  Harris Carter

Inventor： Hsueh-Mei Graham ,  Harris Carter

IPC: G01B11/06 ,  G01N21/21 ,  G01N21/35 ,  G01N21/55 ,  G01N21/57 ,  G01N21/84 ,  G01J5/02

CPC classification number: G01N21/21 ,  G01B11/0625 ,  G01N21/3563 ,  G01N21/57 ,  G01N21/8422 ,  G01N2021/558 ,  G01N2021/8427 ,  G01N2201/0637

Abstract: The present invention provides a method and system to correct for angular spread within an HDR used to determine IR optical constants. An algorithm simulates the transmission and polarized reflection actually observed. This is achieved by averaging power scattering over an angular spread corresponding to the size of the HDR mirror. Such an algorithm may incorporate corrections for angular spread that may be used to determine the thickness of a film (coating) as well as the optical constants of the film or coating on low loss ranges.

Abstract translation: 本发明提供了一种校正用于确定IR光学常数的HDR内的角度扩展的方法和系统。 一种算法模拟实际观察到的透射和偏振反射。 这通过在对应于HDR反射镜的尺寸的角度扩展上平均功率散射来实现。 这种算法可以包括用于确定膜（涂层）的厚度以及在低损耗范围上的膜或涂层的光学常数的角度扩展的校正。

公开(公告)号：US20240319079A1

公开(公告)日：2024-09-26

申请号：US18581378

申请日：2024-02-20

Applicant: InnoSpectra Corporation

Inventor： Fei-Peng Chang ,  Kuo-Sheng Huang ,  Cheng-Hsiung Chen ,  Hsi-Pin Li

IPC: G01N21/25 ,  G01N21/27

CPC classification number: G01N21/255 ,  G01N21/27 ,  G01N2201/0637 ,  G01N2201/0638 ,  G01N2201/0664 ,  G01N2201/0668 ,  G01N2201/08

Abstract: A detecting system using a spectrum measurement device and detecting an object is provided. The system includes: a sampling module and spectrum measurement devices assembled to the sampling module. The sampling module provides an illumination beam to the object and collects measurement beams reflected by the object to the spectrum measurement devices. The illumination beam has an illumination light waveband. The measurement beams have the illumination light waveband. The spectrum measurement devices include first and second spectrum measurement devices. The first spectrum measurement device includes a digital micromirror device. The measurement beams include first and second measurement beams transmitted to the first and second spectrum measurement devices respectively. The first spectrum measurement device detects a portion of the illumination light waveband of the first measurement beam, and at the same time the second spectrum measurement device detects another portion of the illumination light waveband of the second measurement beam.

公开(公告)号：US20240035958A1

公开(公告)日：2024-02-01

申请号：US18358022

申请日：2023-07-25

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Shota ISSHIKI ,  Keiichiro KUWATA ,  Yuji IKEDA

IPC: G01N21/25 ,  G01N21/3504

CPC classification number: G01N21/255 ,  G01N21/3504 ,  G01N2201/0637

Abstract: A small-sized gas detection apparatus with high measurement accuracy is provided. The gas detection apparatus includes a light emitting portion (1); a light receiving portion (2); a first mirror (3) that has a quadric reflective surface and reflects light emitted from the light emitting portion; and a second mirror (4) that has a quadric reflective surface and reflects the light reflected by the first mirror to the first mirror. The quadric surfaces of the first mirror and the second mirror have convex portions facing in a same direction. The first mirror reflects the light reflected by the second mirror to the light receiving portion. When one surface of a substrate on which the light emitting portion and the light receiving portion are mounted is used as a reference plane, the first mirror and the second mirror are provided at positions higher than the reference plane and have different heights.

公开(公告)号：US20180306641A1

公开(公告)日：2018-10-25

申请号：US16024156

申请日：2018-06-29

Applicant: Phoseon Technology, Inc.

Inventor： Doug Childers

IPC: G01J1/42 ,  G01N21/88 ,  C03C25/12 ,  G01N21/27 ,  G01N21/952 ,  B05D3/06 ,  G01N21/84

CPC classification number: G01J1/429 ,  B05D3/067 ,  B05D2256/00 ,  C03C25/12 ,  G01N21/274 ,  G01N21/8806 ,  G01N21/952 ,  G01N2021/8416 ,  G01N2201/062 ,  G01N2201/0637

Abstract: A system and method for monitoring and operating one or more light emitting devices is disclosed. In one example, light intensity within a dual elliptical reflecting chamber is sensed and operation of a fiber curing system is adjusted in response to an amount of sensed light energy.

公开(公告)号：US10082462B2

公开(公告)日：2018-09-25

申请号：US15042354

申请日：2016-02-12

Applicant: Yokogawa Electric Corporation

Inventor： Yasuyuki Suzuki ,  Yukihiro Nakamura ,  Tetsushi Namatame

IPC: G01N21/00 ,  G02B17/00 ,  G01N21/59 ,  G01N21/85 ,  G01N21/03

CPC classification number: G01N21/59 ,  G01N21/8507 ,  G01N2021/0307 ,  G01N2201/0637 ,  G01N2201/08 ,  G01N2201/086 ,  G02B17/006

Abstract: An optical element includes a main body formed of a light transmissive material and including an arc-shaped optical path, and a gap formed on the arc-shaped optical path in the main body. The gap may have a notch shape. The main body may have a semicircular plate shape. The main body may have a hemispherical shape.