Method and apparatus for cooling electrodeless lamps
    21.
    发明授权
    Method and apparatus for cooling electrodeless lamps 失效
    冷却无电极灯的方法和装置

    公开(公告)号:US5021704A

    公开(公告)日:1991-06-04

    申请号:US482534

    申请日:1990-02-21

    CPC classification number: G03F7/70016 H01J65/04 H01J7/26

    Abstract: Apparatus for cooling the lamp envelope of an electrodeless lamp which includes a conduit for carrying cooling gas into the vicinity of the lamp envelope and directing the cooling gas towards the lamp envelope through a slotted orifice in a wall of the conduit. The slotted orifice is preferably oriented with its long dimension substantially perpendicular to the conduct orifice and substantially parallel to the axis of a rotating lamp envelope.

    Abstract translation: 用于冷却无电极灯的灯壳的设备,其包括用于将冷却气体输送到灯壳附近的导管,并且通过导管壁中的开槽孔将冷却气体引向灯壳。 开槽孔优选地取向为其长尺寸基本上垂直于导流孔,并且基本上平行于旋转的灯壳的轴线。

    Substrate treatment installation
    26.
    发明授权
    Substrate treatment installation 有权
    基材处理装置

    公开(公告)号:US09076635B2

    公开(公告)日:2015-07-07

    申请号:US14113472

    申请日:2012-04-27

    CPC classification number: H01J37/32522 H01J7/26 H01L21/67115

    Abstract: A substrate treatment installation includes an installation chamber and a light source for the exposure of substrates to light. The light source is arranged in the interior of the substrate treatment installation and includes at least one discharge lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating the lamp, and also at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.

    Abstract translation: 基板处理装置包括安装室和用于将基板曝光的光源。 光源布置在基板处理设备的内部,并且包括布置在壳体中的至少一个放电灯,其至少部分地透光,并且具有用于容纳灯的真空密封腔,并且还至少 一个反射器元件布置成与所述至少一个灯空间接近且具有电连接。

    Scavengers for reducing contaminants in liquid-filled LED bulbs
    27.
    发明授权
    Scavengers for reducing contaminants in liquid-filled LED bulbs 失效
    用于减少液体填充LED灯泡污染物的清除剂

    公开(公告)号:US08558436B2

    公开(公告)日:2013-10-15

    申请号:US13231855

    申请日:2011-09-13

    Abstract: A liquid-cooled light emitting diode (LED) bulb which includes a base, a shell connected to the base forming an enclosed volume, and a plurality of LEDs attached to the base and disposed within the shell. The LED bulb also includes a volume of thermally-conductive liquid held within the enclosed volume. A scavenger element comprising a scavenger material is attached to the base and is exposed to the thermally-conductive liquid. The scavenger material is configured to capture contaminants in the thermally-conductive liquid.

    Abstract translation: 一种液冷发光二极管(LED)灯泡,其包括基座,连接到形成封闭容积的基座的壳体,以及附接到基座并且设置在壳体内的多个LED。 LED灯泡还包括保持在封闭容积内的一定体积的导热液体。 包含清除剂材料的清除剂元件附着到基底并暴露于导热液体中。 清除剂材料构造成捕获导热液体中的污染物。

    ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED ON A GAS DISCHARGE PLASMA AND METHOD FOR THE PRODUCTION OF COOLANT-CARRYING ELECTRODE HOUSING
    28.
    发明申请
    ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED ON A GAS DISCHARGE PLASMA AND METHOD FOR THE PRODUCTION OF COOLANT-CARRYING ELECTRODE HOUSING 有权
    基于气体放电等离子体生成短波辐射的布置方法以及制造冷凝器电极壳体的方法

    公开(公告)号:US20070114946A1

    公开(公告)日:2007-05-24

    申请号:US11560118

    申请日:2006-11-15

    CPC classification number: H01J17/28 H01J7/26 H05G2/003

    Abstract: The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.

    Abstract translation: 本发明涉及一种用于产生基于由气体放电产生的热等离子体的短波长辐射的装置以及用于制造承载冷却剂的电极壳体的方法。 本发明的目的是在准连续放电操作中找到具有高平均辐射输出的基于气体放电的短波长辐射源的新颖可能性,通过该方法可以使用廉价和简单的方法来实现有效的冷却原理,以便防止 暂时熔化电极表面,因此确保电极寿命长。 根据本发明,由于用于循环冷却剂的特殊冷却通道集成在电极壳体的电极环中,所以满足了该目的。 冷却通道从高度受热应力的表面区域径向推进到几毫米以内,并且通过与对称轴线同轴设置的颈缩通道部分连接,并且设置有用于增加内表面的通道结构, 以增加冷却剂的流量。

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