公开(公告)号：US20230197494A1

公开(公告)日：2023-06-22

申请号：US18083635

申请日：2022-12-19

申请人： SEMES CO., LTD.

发明人： Sung Ho LEE

IPC分类号： H01L21/677 ,  H01L21/673

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/67709 ,  H01L21/67389 ,  H01L21/67766

摘要： Proposed are article storage equipment in a semiconductor fabrication facility, the article storage equipment being capable of power supply with a more simplified configuration, and a logistics system of a semiconductor fabrication facility including the same. Article storage equipment in a semiconductor fabrication facility according to one aspect includes a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated, a purge unit configured to supply an inert gas into the transport container, a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container, and a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit.

公开(公告)号：US20230142207A1

公开(公告)日：2023-05-11

申请号：US17884575

申请日：2022-08-10

申请人： Stroke Precision Advanced Engineering Co., Ltd.

发明人： Chingju Lin ,  Yi Xian Wu

IPC分类号： H01L21/677 ,  H01L21/687 ,  H01L21/683

CPC分类号： H01L21/67766 ,  H01L21/687 ,  H01L21/6838

摘要： An apparatus for transferring an electronic component from a flexible carrier substrate to a flexible target substrate is provided. The apparatus includes a first frame, a second frame, an abutment element and a deformation generating mechanism. The first frame is used to carry the flexible carrier substrate. The second frame is used to carry the flexible target substrate. The abutment element is arranged adjacent to the first frame, and is controlled by a braking mechanism, and move repeatedly toward and away from the second frame. The deformation generating mechanism is adjacent to the second frame and arranged opposite to the abutment element. When the abutment element moves toward the second frame, the deformation generating mechanism forms a relative force toward the abutment element at a position where the surface of the flexible target substrate carried by the second frame is relative to the abutment element.

公开(公告)号：US20190022705A1

公开(公告)日：2019-01-24

申请号：US15708943

申请日：2017-09-19

申请人： Applied Materials, Inc.

发明人： Markus J. STOPPER ,  Asaf SCHLEZINGER

IPC分类号： B07C5/36

CPC分类号： B07C5/362 ,  B07C5/36 ,  B07C2501/0063 ,  H01L21/67763 ,  H01L21/67766

摘要： In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.

公开(公告)号：US20180264654A1

公开(公告)日：2018-09-20

申请号：US15838082

申请日：2017-12-11

申请人： Boe Technology Group Co., Ltd. ,  Hefei Xinsheng Optoelectronics Technology Co., Ltd.

发明人： Erfeng Shen ,  Jie Wang ,  Qingshuang Ren

IPC分类号： B25J11/00 ,  B25J9/00 ,  H01L21/677

CPC分类号： B25J11/0095 ,  B25J9/0009 ,  B25J9/0087 ,  B25J9/042 ,  B25J13/088 ,  G05B2219/45031 ,  H01L21/67742 ,  H01L21/67766

摘要： The present disclosure relates to a field of display technology, which provides a substrate transfer robot including: a base; a column provided on the base; a number of robotic arm groups protruding from the column in different directions, each of the number of robotic arm groups including at least one robotic arm; and elevating mechanisms corresponding to the robotic arm groups one by one and fixedly connected to the robotic arm groups; wherein the number of robotic arm groups can be driven by the respective elevating mechanisms, to move in a longitudinal direction of the column respectively. The substrate transfer robot of the present disclosure can improve the handling efficiency.

公开(公告)号：US20180229361A1

公开(公告)日：2018-08-16

申请号：US15897525

申请日：2018-02-15

申请人： Persimmon Technologies, Corp.

发明人： Martin Hosek ,  Scott Wilkas ,  Jacob Lipcon

IPC分类号： B25J9/04 ,  B25J9/16

CPC分类号： H01L21/68707 ,  B25J9/0021 ,  B25J9/0084 ,  B25J9/042 ,  B25J9/043 ,  B25J9/046 ,  B25J9/104 ,  B25J9/1664 ,  B25J11/0095 ,  B25J17/02 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S901/02 ,  Y10S901/15 ,  Y10S901/16 ,  Y10S901/19 ,  Y10S901/29 ,  Y10S901/30

摘要： A method including, based upon a desired path of a reference point from a start position to an end position, where the reference point is on an end effector on a robot arm, determine an included angle that corresponds to the start position and the end position, calculating a trajectory in radial coordinates of the reference point on the end effector at least partially based upon the included angles; calculating corresponding angular coordinates of the reference point on the end effector, based on the calculated radial coordinates, so that the reference point follows the desired path; using a modified formulation of inverse kinematics, converting the radial and angular coordinates supplemented with the included angles of the trajectory and corresponding angular velocity and acceleration of the end effector to form motion setpoints for the robot arm; and controlling the motors of the robot drive.

公开(公告)号：US10011437B2

公开(公告)日：2018-07-03

申请号：US14906126

申请日：2015-07-22

申请人： BOE TECHNOLOGY GROUP CO., LTD. ,  BOE OPTICAL SCIENCE AND TECHNOLOGY CO., LTD.

发明人： Chunlei Cao ,  Ying Zang ,  Yuqi Mei ,  Wei Sun

IPC分类号： B65G49/05 ,  B65G49/06 ,  B23Q7/16 ,  B65G47/248 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683

CPC分类号： B65G47/248 ,  B65G49/061 ,  B65G49/064 ,  B65G49/067 ,  B65G2249/02 ,  B65G2249/04 ,  H01L21/67259 ,  H01L21/67736 ,  H01L21/67766 ,  H01L21/6838

摘要： An overturning and shifting mechanism, comprising: a carrier platform (10) on which a first item-sensing device (12) is disposed; a transporting device (11) on which a second item-sensing device (13) is disposed; an overturning device (14) which is positioned between the carrier platform (10) and the transporting device (11) and which comprises a driving device (141) and a rotating arm (142), the rotating arm (142) being provided with a suction structure (15) thereon; and a control device which is connected with the first item-sensing device (12), the second item-sensing device (13), the driving device (141) and the suction structure (15), wherein according to sensing signals of the first item-sensing device (12) and the second item-sensing device (13), the control device controls the driving device to drive the rotating arm (142) to rotate reciprocatingly between the carrier platform (10) and the transporting device (11), while at the same time the control device controls sucking or releasing operation of the suction structure (15). The mechanism is mainly used in production process of display devices and solves problems in contaminations and deformations due to overturning and shifting of display panels by manual operations in the conventional arts.

公开(公告)号：US20180155135A1

公开(公告)日：2018-06-07

申请号：US15828603

申请日：2017-12-01

申请人： Senju Metal Industry Co., Ltd.

发明人： Yuta Saito

IPC分类号： B65G47/51 ,  B65G47/49 ,  B65G25/10 ,  B23K1/002 ,  B23K1/00

CPC分类号： B65G47/5127 ,  B23K1/0008 ,  B23K1/0016 ,  B23K1/002 ,  B23K1/008 ,  B23K1/203 ,  B23K3/087 ,  B23K2101/42 ,  B65G15/20 ,  B65G25/10 ,  B65G47/49 ,  B65G47/82 ,  B65G2203/0233 ,  H01L21/67 ,  H01L21/67028 ,  H01L21/6704 ,  H01L21/67138 ,  H01L21/67144 ,  H01L21/67276 ,  H01L21/67294 ,  H01L21/677 ,  H01L21/67766 ,  H01L21/67778 ,  H05K3/3494

摘要： A soldering apparatus as a conveyance apparatus includes a substrate loading portion to load a substrate on the soldering apparatus, an intermittent feeding unit to intermittently feed the substrate loaded on the soldering apparatus, a substrate discharge portion to discharge the intermittently fed substrate to the outside of the soldering apparatus and a controller to control conveyance of the substrate. The substrate loading portion includes a first conveyance path to convey the substrate, a first sensor provided in the vicinity of a substrate loading inlet of the substrate loading portion, and a second sensor arranged in a downstream side of the first sensor along the substrate conveyance direction. The intermittent feeding unit includes a second conveyance path for conveying the substrate, and a third sensor placed in the vicinity of an upstream end of the intermittent feeding unit along the substrate conveyance direction.

公开(公告)号：US20180151403A1

公开(公告)日：2018-05-31

申请号：US15878153

申请日：2018-01-23

申请人： Eryn Smith

发明人： Eryn Smith

IPC分类号： H01L21/683 ,  H02N13/00

CPC分类号： H01L21/6833 ,  H01L21/67092 ,  H01L21/6719 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/67778 ,  H01L21/6831 ,  H01L21/68785 ,  H02N13/00

摘要： An automated electrostatic bonding/de-bonding apparatus is used to automate a mating or separating process between a semiconductive wafer and a mobile electrostatic carrier (MESC). The apparatus includes a transfer enclosure, a robot arm, a bonding/de-bonding station, input/output (I/O) ports, I/O cassettes, and a control unit. The I/O cassettes house the different dispensable items that are used during the mating or separating process, such as semiconductive wafers, MESCs, and mated assemblies thereof. The robot arm moves the dispensable items between the I/O cassettes and the bonding/de-bonding station. The transfer enclosure prevents any external physical interference with the movement of the robot arm. The I/O ports integrated into the transfer enclosure allow the robot arm to access the I/O cassettes, which are located outside of the transfer enclosure. The control unit is used to manage the functionalities of the robot arm and the bonding/de-bonding station.

公开(公告)号：US09975709B2

公开(公告)日：2018-05-22

申请号：US15145392

申请日：2016-05-03

申请人： BOE Technology Group Co., Ltd. ,  Hefei Xinsheng Optoelectronics Technology Co., Ltd.

发明人： Feng Li ,  Kai Wang

IPC分类号： B66F19/00 ,  B65G49/06 ,  H01L21/673 ,  H01L21/677

CPC分类号： B65G49/061 ,  H01L21/6734 ,  H01L21/67766

摘要： A substrate transfer apparatus and a substrate transfer system are disclosed. The substrate transfer apparatus including a main body and a plurality of main arms arranged side by side on the main body, wherein a plurality of branch arms are disposed on both sides of each of the main arms, and the plurality of main arms and the plurality of branch arms are disposed in a same supporting plane. When a substrate is transferred, the plurality of main arms and the plurality of branch arms are both disposed beneath the substrate and support the substrate together. Therefore, the downward recess of the substrate due to gravity action can be greatly reduced, so that the flatness of the substrate can be effectively improved, therefore, the display quality of the display product produced can be improved.

公开(公告)号：US09960063B2

公开(公告)日：2018-05-01

申请号：US14969529

申请日：2015-12-15

申请人： TOKYO ELECTRON LIMITED

发明人： Tokutaro Hayashi

IPC分类号： G06K9/00 ,  H01L21/67 ,  H01L21/677

CPC分类号： H01L21/67259 ,  H01L21/67766 ,  H01L21/67781

摘要： An apparatus for transporting a substrate includes a base, a holding device which retracts relative to the base and holds multiple substrates in multiple stages, respectively, a detection device including three detection components such that the three detection components are positioned to detect peripheries of the substrates held by the holding device from different positions, respectively, and a control device including circuitry which estimates a position of the substrates based on detection result of the detection device, calculates an amount of shifting between a base position and an estimated position of the substrates, determines whether a calculated amount of shifting is within a threshold value, and executes transport of the substrates held by the holding device when the calculated amount of shifting is determined to be within the threshold value.