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    Metal alloy elements in micromachined devices
    21.
    发明授权
    Metal alloy elements in micromachined devices 有权
    微加工装置中的金属合金元素

    公开(公告)号：US07244367B2

    公开(公告)日：2007-07-17

    申请号：US10015086

    申请日：2001-12-11

    Applicant: Jonathan J. Bernstein ,  William P. Taylor

    Inventor： Jonathan J. Bernstein ,  William P. Taylor

    IPC: H01L21/00 ,  B44C1/22 ,  C23F1/00

    CPC classification number: H01H1/0036 ,  B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118 ,  C23C14/165 ,  H01H1/023 ,  H01H2001/0057 ,  Y10T428/12597

    Abstract: A micromechanical device is provided, which includes at least one flexible member formed from an alloy, where the alloy is made up of one or more noble metals and one or more alloying elements, wherein each of the alloying elements has an equilibrium solid solubility in the noble metal, and wherein the one or more alloying elements are present in an amount that does not result in precipitates. A method for making a micromechanical device includes depositing an alloy on a substrate to form at least one flexible member, the alloy comprising one or more noble metals and one or more alloying elements, wherein the one or more alloying elements form a solid solution with the one or more noble metals; and removing a portion of the substrate or a sacrificial layer beneath the deposited alloy layer to obtain a flexible member.

    Abstract translation: 提供了一种微机械装置，其包括由合金形成的至少一个柔性构件，其中所述合金由一种或多种贵金属和一种或多种合金元素构成，其中每种合金元素在所述合金元素中具有平衡的固体溶解度 贵金属，并且其中所述一种或多种合金元素以不会导致沉淀物的量存在。 一种用于制造微机械装置的方法包括在基底上沉积合金以形成至少一个柔性构件，所述合金包括一种或多种贵金属和一种或多种合金元素，其中所述一种或多种合金元素形成固溶体， 一种或多种贵金属; 以及去除所沉积的合金层下面的衬底或牺牲层的一部分以获得柔性构件。

    Atomic layer deposition for turbine components
    25.
    发明申请
    Atomic layer deposition for turbine components 失效
    涡轮机部件的原子层沉积

    公开(公告)号：US20050158590A1

    公开(公告)日：2005-07-21

    申请号：US10759810

    申请日：2004-01-16

    Applicant: Chien-Wei Li

    Inventor： Chien-Wei Li

    IPC: B32B15/04 ,  C23C16/40 ,  C23C16/455 ,  C23C28/04 ,  C23C30/00 ,  F01D5/28

    CPC classification number: F01D5/284 ,  C23C16/403 ,  C23C16/45525 ,  C23C16/45555 ,  C23C28/321 ,  C23C28/3215 ,  C23C28/325 ,  C23C28/34 ,  C23C28/341 ,  C23C28/345 ,  C23C28/3455 ,  C23C28/42 ,  C23C30/00 ,  F01D5/288 ,  F05D2230/31 ,  F05D2230/313 ,  Y10T428/12576 ,  Y10T428/12597 ,  Y10T428/12611 ,  Y10T428/2462

    Abstract: A method and superalloy component for depositing a layer of material onto gas turbine engine components by atomic layer deposition. A superalloy component may have a ceramic thermal barrier coating on at least a portion of its surface, comprising a superalloy substrate and a bonding coat; and aluminum oxide (Al2O3) layer may be deposited on top of an yttria-stabilized zirconia layer and form a bonding coat by atomic layer deposition. The yttria-stabilized zirconia layer may have a plurality of micron sized gaps extending from the top surface of the ceramic coating towards the substrate and defining a plurality of columns of the yttria-stabilized zirconia layer. Also, atomic layer deposition may be used to lay an aluminum oxide (Al2O3) layer over a tantalum oxide (Ta2O5) layer on a silicon-based substrate. Using atomic layer deposition to coat the gas turbine engine components permits conformal coating of the columnar surface to permit gap expansion and contraction without sintering of the columnar surface or spalling of the coating, and form an oxidation resistant bonding coat.

    Abstract translation: 一种用于通过原子层沉积将材料层沉积到燃气涡轮发动机部件上的方法和超合金部件。 超级合金部件可以在其表面的至少一部分上具有陶瓷热障涂层，其包括超合金基底和粘合涂层; 并且氧化铝（Al 2 O 3 3）层可以沉积在氧化钇稳定的氧化锆层的顶部上，并通过原子层沉积形成粘结层。 氧化钇稳定的氧化锆层可以具有从陶瓷涂层的顶表面朝向衬底延伸的多个微米尺寸的间隙并且限定多个氧化钇稳定的氧化锆层的柱。 此外，原子层沉积可以用于在氧化钽（Ta 2 O 3）上铺设氧化铝（Al 2 O 3 O 3）层， SUB> 5 ）层。 使用原子层沉积来涂覆燃气涡轮发动机部件允许圆柱形表面的共形涂覆以允许间隙膨胀和收缩，而不会烧结柱状表面或剥落涂层，并形成抗氧化粘合涂层。

    Magnetic transparent conducting oxide film and method of making
    29.
    发明授权
    Magnetic transparent conducting oxide film and method of making 失效
    磁性透明导电氧化膜及其制造方法

    公开(公告)号：US06761985B2

    公开(公告)日：2004-07-13

    申请号：US09972237

    申请日：2001-10-04

    Applicant: Charles F. Windisch, Jr. ,  Gregory J. Exarhos ,  Shiv K. Sharma

    Inventor： Charles F. Windisch, Jr. ,  Gregory J. Exarhos ,  Shiv K. Sharma

    IPC: B32B1500

    CPC classification number: G02B5/208 ,  C03C17/245 ,  C03C17/25 ,  C03C17/256 ,  C03C2217/212 ,  C03C2217/217 ,  C03C2217/228 ,  C03C2217/23 ,  C03C2218/116 ,  C03C2218/156 ,  C23C18/1212 ,  C23C18/1216 ,  C23C18/1245 ,  C23C18/1676 ,  C23C18/31 ,  G02B1/10 ,  H01B1/08 ,  H01L31/022466 ,  Y10T428/12528 ,  Y10T428/12597 ,  Y10T428/1266 ,  Y10T428/12667 ,  Y10T428/12736

    Abstract: Cobalt-nickel oxide films of nominal 100 nm thickness, and resistivity as low as 0.06 &OHgr;·cm have been deposited by spin-casting from both aqueous and organic precursor solutions followed by annealing at 450° C. in air. Films deposited on sapphire substrates exhibit a refractive index of about 1.7 and are relatively transparent in the wavelength region from 0.6 to 10.0 &mgr;m. They are also magnetic. The electrical and spectroscopic properties of the oxides have been studied as a function of x=Co/(Co+Ni) ratio. An increase in film resistivity was found upon substitution of other cations (e.g., Zn2+, Al3+) for Ni in the spinel structure. However, some improvement in the mechanical properties of the films resulted. On the other hand, addition of small amounts of Li decreased the resistivity. A combination of XRD, XPS, UV/Vis and Raman spectroscopy indicated that NiCo2O4 is the primary conducting component and that the conductivity reaches a maximum at this stoichiometry. When x 0.67, the oxide was all spinel but the increased Co content lowered the conductivity. The influence of cation charge state and site occupancy in the spinel structure markedly affects calculated electron band structures and contributes to a reduction of p-type conductivity, the formation of polarons, and the reduction in population of mobile charge carriers that tend to limit transmission in the infrared.

    Abstract translation: 标称厚度为100nm，电阻率低至0.06Ω·cm的钴 - 镍氧化物膜已经通过旋转浇铸从水性和有机前体溶液中沉积，然后在450℃在空气中退火。 沉积在蓝宝石衬底上的膜表现出约1.7的折射率，并且在0.6至10.0μm的波长区域中相对透明。 他们也是磁性的。 已经研究了氧化物的电学和光谱性质作为x = Co /（Co + Ni）比的函数。 当尖晶石结构中的Ni取代其它阳离子（例如，Zn 2+，Al 3+）时，发现膜电阻率增加。 然而，导致膜的机械性能的一些改进。 另一方面，少量的Li的添加降低了电阻率。 XRD，XPS，UV / Vis和拉曼光谱的组合表明，NiCo2O4是主要的导电组分，并且在该化学计量下电导率达到最大值。 当x <0.67时，NiO导致电阻率增加; 当x> 0.67时，氧化物均为尖晶石，但增加的Co含量降低了导电率。 尖晶石结构中的阳离子电荷状态和位置占据的影响显着影响计算的电子带结构，并有助于降低p型导电性，形成极化子，并且有助于限制传输的移动电荷载体的数量减少 红外线。

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