公开(公告)号：US20090146226A1

公开(公告)日：2009-06-11

申请号：US11951535

申请日：2007-12-06

申请人： Carl O. Bozler

发明人： Carl O. Bozler

IPC分类号： H01L29/78

CPC分类号： H01L29/84 ,  B82Y10/00 ,  G11C23/00 ,  H01H59/0009 ,  H01L29/685 ,  H01L29/78

摘要： A mechanical memory transistor includes a substrate having formed thereon a source region and a drain region. An oxide is formed upon a portion of the source region and upon a portion of the drain region. A pull up electrode is positioned above the substrate such that a gap is formed between the pull up electrode and the substrate. A movable gate has a first position and a second position. The movable gate is located in the gap between the pull up electrode and the substrate. The movable gate is in contact with the pull up electrode when the movable gate is in a first position and is in contact with the oxide to form a gate region when the movable gate is in the second position. The movable gate, in conjunction with the source region and the drain region and when the movable gate is in the second position, form a transistor that can be utilized as a non-volatile memory element.

摘要翻译： 机械存储晶体管包括其上形成有源极区和漏极区的衬底。 在源区的一部分上和漏极区的一部分上形成氧化物。 上拉电极位于衬底之上，使得在上拉电极和衬底之间形成间隙。 可动门具有第一位置和第二位置。 可移动栅极位于上拉电极和基板之间的间隙中。 当可移动栅极处于第一位置时，可移动栅极与上拉电极接触并且当可移动栅极处于第二位置时与可动栅极接触以形成栅极区域。 可移动栅极与源极区域和漏极区域结合，并且当可移动栅极处于第二位置时，形成可用作非易失性存储元件的晶体管。

公开(公告)号：US20080135386A1

公开(公告)日：2008-06-12

申请号：US11943146

申请日：2007-11-20

申请人： Carl O. Bozler ,  Craig L. Keast ,  Jeremy Muldavin

发明人： Carl O. Bozler ,  Craig L. Keast ,  Jeremy Muldavin

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

摘要： A micro-electromechanical system switch includes a substrate and a plurality of actuating electrodes formed the substrate wherein each actuating electrode is activatable. A cantilever beam has a first end and a second end and a plurality of stops formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area is formed in the substrate and located to engage the second end of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes.

摘要翻译： 微机电系统开关包括基板和形成基板的多个致动电极，其中每个致动电极都是可激活的。 悬臂梁具有形成在其上的第一端和第二端以及多个挡块。 多个止动件与多个致动电极之间的基板接合。 接触区域形成在基板中并且被定位成接合悬臂梁的第二端。 电压源以与从悬臂梁的第一端相邻的致动电极的顺序独立地向每个致动电极施加电压到与悬臂梁的第二端相邻的致动电极，使得多个停止件顺序地接合 多个致动电极之间的基板。

公开(公告)号：US4619894A

公开(公告)日：1986-10-28

申请号：US722818

申请日：1985-04-12

申请人： Carl O. Bozler ,  Daniel J. Ehrlich ,  Jeffrey Y. Tsao

发明人： Carl O. Bozler ,  Daniel J. Ehrlich ,  Jeffrey Y. Tsao

IPC分类号： C23C14/00 ,  C23C14/08 ,  C23C14/58 ,  H01L21/033 ,  H01L21/3105 ,  H01L21/311 ,  C23C15/00

CPC分类号： H01L21/31111 ,  C23C14/081 ,  C23C14/5813 ,  C23C14/5873 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3105 ,  Y10S430/143 ,  Y10S430/146 ,  Y10S430/168

摘要： A negative resist and masking process for microfabrication comprising an evaporated film of aluminum and oxygen which, in the as-deposited state, is highly conductive and has low resistance to etching, but when exposed to active radiation, such as by pulse laser thermal excitation, converts to a low electrical conductivity, high etchant resistive phase.

摘要翻译： 用于微细加工的负型抗蚀剂和掩模工艺包括铝和氧的蒸发膜，其沉积状态是高导电性的并且具有低的耐蚀刻性，但是当暴露于主动辐射时，例如通过脉冲激光热激发， 转化为低导电性，高耐蚀性相。

公开(公告)号：US4420873A

公开(公告)日：1983-12-20

申请号：US115420

申请日：1980-01-25

申请人： Frederick J. Leonberger ,  Ivars Melngailis ,  Carl O. Bozler ,  Robert W. McClelland

发明人： Frederick J. Leonberger ,  Ivars Melngailis ,  Carl O. Bozler ,  Robert W. McClelland

IPC分类号： G02B6/122 ,  G02B6/13 ,  G02B5/172

CPC分类号： G02B6/122 ,  G02B6/131 ,  Y10S117/918

摘要： A method for fabricating three-dimensional optical waveguides is disclosed. In this method, a single crystal semiconductor layer is grown upon an insulator which has an index of refraction lower than the semiconductor. The semiconductor layer is deposited to a thickness which provides confinement of light propagating in the semiconductor layer in the vertical direction. An effective larger index of refraction over a cross-sectional region of the semiconductor layer is then formed to provide confinement of light in the lateral direction. In the preferred method, the growth of single crystal semiconductor upon the insulator is achieved by a vapor-phase lateral epitaxial overgrowth technique.Devices fabricated according to the method are also disclosed.

摘要翻译： 公开了制造三维光波导的方法。 在该方法中，单晶半导体层生长在折射率低于半导体的绝缘体上。 半导体层被沉积成在垂直方向上提供在半导体层中传播的光的限制的厚度。 然后在半导体层的横截面区域上形成有效的较大的折射率，以在侧向方向上提供光的约束。 在优选的方法中，单晶半导体在绝缘体上的生长通过气相横向外延生长技术实现。 还公开了根据该方法制造的器件。

公开(公告)号：US20160109760A1

公开(公告)日：2016-04-21

申请号：US14845924

申请日：2015-09-04

申请人： Valerie A. Finnemeyer ,  Robert K. Reich ,  Harry R. Clark ,  Carl O. Bozler ,  Shaun R. Berry ,  Philip J. Bos ,  Douglas R. Bryant

发明人： Valerie A. Finnemeyer ,  Robert K. Reich ,  Harry R. Clark ,  Carl O. Bozler ,  Shaun R. Berry ,  Philip J. Bos ,  Douglas R. Bryant

IPC分类号： G02F1/1337 ,  G02F1/1333

CPC分类号： G02F1/133711 ,  C09K19/56 ,  G02F1/133377 ,  G02F1/133788 ,  G02F2001/133726 ,  G02F2202/043

摘要： Liquid crystal photonic devices and microcavities filled with liquid crystal materials are becoming increasingly popular. These devices often present a challenge when it comes to creating a robust alignment layer in pre-assembled cells. Previous research on photo-definable alignment layers has shown that they have limited stability, particularly against subsequent light exposure. A method of infusing a dye into a microcavity to produce an effective photo-definable alignment layer is described, along with a method of utilizing a pre-polymer infused into the microcavity mixed with the liquid crystal to provide photostability. In this method, the polymer layer, formed under optical irradiation of liquid crystal cells, is effectively localized to a thin region near the substrate surface and thus provides a significant improvement in the photostability of the liquid crystal alignment. This versatile alignment layer method, which can be used in microcavities to displays, offers significant promise for new photonics applications.

摘要翻译： 充满液晶材料的液晶光子器件和微腔变得越来越受欢迎。 当在预组装电池中创建稳健的配向层时，这些器件通常会面临挑战。 以前对光可定义对准层的研究表明，它们具有有限的稳定性，特别是对后续的曝光。 描述了将染料注入微腔以产生有效的光可定义取向层的方法，以及利用注入到与液晶混合的微腔中的预聚物以提供光稳定性的方法。 在该方法中，在液晶单元的光照射下形成的聚合物层有效地定位于基板表面附近的薄区域，从而显着地提高了液晶取向的光稳定性。 这种可用于显微镜的多功能对准层方法为新光子学应用提供了重要的前景。

公开(公告)号：US07218191B2

公开(公告)日：2007-05-15

申请号：US11092462

申请日：2005-03-29

申请人： Carl O. Bozler ,  Shaun R. Berry ,  Jeremy Muldavin ,  Craig L. Keast

发明人： Carl O. Bozler ,  Shaun R. Berry ,  Jeremy Muldavin ,  Craig L. Keast

IPC分类号： H01P1/10 ,  H03K17/975

CPC分类号： H01H59/0009 ,  H01G5/18 ,  H01G5/40 ,  H01H2059/0081

摘要： A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode.

摘要翻译： 电容RF开关和DC RF开关包括具有薄层金属和至少一个下拉电极的固定电极。 移动板具有多个波纹和选择性手指设计。 电容开关包括与固定电极接触的选择性手指，以便当开关闭合时使移动板和固定电极之间的静摩擦最小化。 DC开关包括形成在移动板的选择部分上并且当开关闭合时定位成与固定电极接触的多个凹坑，以便增加接触力并降低移动板之间的电阻 和固定电极。

公开(公告)号：US07061447B1

公开(公告)日：2006-06-13

申请号：US10911762

申请日：2004-08-02

申请人： Carl O. Bozler ,  Mark A. Gouker ,  Sean M. Duffy

发明人： Carl O. Bozler ,  Mark A. Gouker ,  Sean M. Duffy

IPC分类号： H01Q15/02

CPC分类号： H01Q19/065

摘要： A reconfigurable antenna is presented that uses MEMs shutters to reconfigure a Fresnel zone plate antenna. It can be used to either point a main beam in different directions or to point multiple beams in different directions.

摘要翻译： 提出了一种可重新配置的天线，其使用MEMs快门来重新配置菲涅尔区带天线。 它可以用于将主光束指向不同方向，或者指向不同方向的多个光束。

公开(公告)号：US06907153B2

公开(公告)日：2005-06-14

申请号：US09799923

申请日：2001-03-05

申请人： Carl O. Bozler ,  Steven Rabe

发明人： Carl O. Bozler ,  Steven Rabe

IPC分类号： B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC分类号： B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

摘要翻译： 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US5959763A

公开(公告)日：1999-09-28

申请号：US31487

申请日：1998-02-26

申请人： Carl O. Bozler ,  Steven Rabe

发明人： Carl O. Bozler ,  Steven Rabe

IPC分类号： G02B26/02 ,  G02B26/08 ,  G09F9/37 ,  H01H59/00 ,  G02B26/00 ,  G02F1/03

CPC分类号： G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G09F9/372 ,  G01J3/0232 ,  H01H2001/0042 ,  H01H2059/0018 ,  H01H2059/0081 ,  H01H59/0009

摘要： A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.

摘要翻译： 由可移动电极形成的空间光调制器，所述可移动电极与固定电极相对设置，并且在跨过电极施加电场以偏置以在优选方向上滚动以产生光阀或光闸。 在一个实施例中，可移动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。

公开(公告)号：US5233459A

公开(公告)日：1993-08-03

申请号：US665345

申请日：1991-03-06

申请人： Carl O. Bozler ,  Steven Rabe

发明人： Carl O. Bozler ,  Steven Rabe

IPC分类号： G02B26/02 ,  G02B26/08 ,  G09F9/37 ,  H01H59/00

CPC分类号： G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G09F9/372 ,  G01J3/0232 ,  H01H2001/0042 ,  H01H2059/0018 ,  H01H2059/0081 ,  H01H59/0009

摘要： A bistable electrostatic light valve display in which a movable electrode is disposed opposite a fixed electrode and is biased to move in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the movable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness. In another embodiment, the moveable electrode is restrained at both ends and is biased upwardly by anisotropic stress or stiffening.

摘要翻译： 一种双稳态静电光阀显示器，其中可动电极与固定电极相对地设置并且在施加电场两端的电场之后被偏置以沿优选方向移动以产生光阀或光闸。 在一个实施例中，可动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。 在另一个实施例中，可移动电极在两端被限制并且由各向异性的应力或加强向上偏置。