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    Wide band and radio frequency waveguide and hybrid integration in a silicon package
    1.
    发明授权
    Wide band and radio frequency waveguide and hybrid integration in a silicon package 有权
    宽带和射频波导以及混合集成在硅封装中

    公开(公告)号：US08587106B2

    公开(公告)日：2013-11-19

    申请号：US11761108

    申请日：2007-06-11

    申请人： Carl O. Bozler ,  Jeremy Muldavin ,  Peter W. Wyatt ,  Craig L. Keast ,  Steven Rabe

    发明人： Carl O. Bozler ,  Jeremy Muldavin ,  Peter W. Wyatt ,  Craig L. Keast ,  Steven Rabe

    IPC分类号： H01L23/02

    CPC分类号： H01P3/08 ,  B81B7/0064 ,  B81B2201/014 ,  B81B2207/07 ,  B81C2203/0109 ,  B81C2203/036 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.

    摘要翻译： 一种器件包括具有形成在其上的电路部件并且具有形成在其中的通孔的器件晶片和结合到器件晶片的帽晶片。 盖晶片在其中具有空腔。 空腔具有形成在其中的柱，并且柱被定位成机械地支撑形成在器件晶片中的通孔。 空腔具有体积，该体积基本上包围形成在器件晶片上的电路部件。 空腔具有宽度和高度，使得传输线的阻抗取决于空腔的宽度和高度，或者传输线的阻抗取决于腔内的中心导体的宽度。

    WIDE BAND AND RADIO FREQUENCY WAVEGUIDE AND HYBRID INTEGRATION IN A SILICON PACKAGE
    2.
    发明申请
    WIDE BAND AND RADIO FREQUENCY WAVEGUIDE AND HYBRID INTEGRATION IN A SILICON PACKAGE 有权
    宽带和无线电频率波形和硅包装中的混合集成

    公开(公告)号：US20100019872A1

    公开(公告)日：2010-01-28

    申请号：US11761108

    申请日：2007-06-11

    申请人： Carl O. Bozler ,  Jeremy Muldavin ,  Peter W. Wyatt ,  Craig L. Keast ,  Steven Rabe

    发明人： Carl O. Bozler ,  Jeremy Muldavin ,  Peter W. Wyatt ,  Craig L. Keast ,  Steven Rabe

    IPC分类号： H01P1/00 ,  H05K5/00

    CPC分类号： H01P3/08 ,  B81B7/0064 ,  B81B2201/014 ,  B81B2207/07 ,  B81C2203/0109 ,  B81C2203/036 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.

    摘要翻译： 一种器件包括具有形成在其上的电路部件并且具有形成在其中的通孔的器件晶片和结合到器件晶片的帽晶片。 盖晶片在其中具有空腔。 空腔具有形成在其中的柱，并且柱被定位成机械地支撑形成在器件晶片中的通孔。 空腔具有体积，该体积基本上包围形成在器件晶片上的电路部件。 空腔具有宽度和高度，使得传输线的阻抗取决于空腔的宽度和高度，或者传输线的阻抗取决于腔内的中心导体的宽度。

    Micro-electro mechanical tunneling switch
    3.
    发明授权
    Micro-electro mechanical tunneling switch 有权
    微电机械隧道开关

    公开(公告)号：US08432239B2

    公开(公告)日：2013-04-30

    申请号：US11943146

    申请日：2007-11-20

    申请人： Carl O. Bozler ,  Craig L. Keast ,  Jeremy Muldavin

    发明人： Carl O. Bozler ,  Craig L. Keast ,  Jeremy Muldavin

    IPC分类号： H01H51/22

    CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

    摘要： A micro-electromechanical system switch includes a substrate and a plurality of actuating electrodes formed the substrate wherein each actuating electrode is activatable. A cantilever beam has a first end and a second end and a plurality of stops formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area is formed in the substrate and located to engage the second end of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes.

    摘要翻译： 微机电系统开关包括基板和形成基板的多个致动电极，其中每个致动电极都是可激活的。 悬臂梁具有形成在其上的第一端和第二端以及多个挡块。 多个止动件与多个致动电极之间的基板接合。 接触区域形成在基板中并且被定位成接合悬臂梁的第二端。 电压源以与从悬臂梁的第一端相邻的致动电极的顺序独立地向每个致动电极施加电压到与悬臂梁的第二端相邻的致动电极，使得多个停止件顺序地接合 多个致动电极之间的基板。

    MICRO-ELECTRO MECHANICAL TUNNELING SWITCH
    4.
    发明申请
    MICRO-ELECTRO MECHANICAL TUNNELING SWITCH 有权
    微电机械隧道开关

    公开(公告)号：US20080135386A1

    公开(公告)日：2008-06-12

    申请号：US11943146

    申请日：2007-11-20

    申请人： Carl O. Bozler ,  Craig L. Keast ,  Jeremy Muldavin

    发明人： Carl O. Bozler ,  Craig L. Keast ,  Jeremy Muldavin

    IPC分类号： H01H57/00

    CPC分类号： H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

    摘要： A micro-electromechanical system switch includes a substrate and a plurality of actuating electrodes formed the substrate wherein each actuating electrode is activatable. A cantilever beam has a first end and a second end and a plurality of stops formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area is formed in the substrate and located to engage the second end of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes.

    摘要翻译： 微机电系统开关包括基板和形成基板的多个致动电极，其中每个致动电极都是可激活的。 悬臂梁具有形成在其上的第一端和第二端以及多个挡块。 多个止动件与多个致动电极之间的基板接合。 接触区域形成在基板中并且被定位成接合悬臂梁的第二端。 电压源以与从悬臂梁的第一端相邻的致动电极的顺序独立地向每个致动电极施加电压到与悬臂梁的第二端相邻的致动电极，使得多个停止件顺序地接合 多个致动电极之间的基板。

    Micro-electro mechanical switch designs
    5.
    发明授权
    Micro-electro mechanical switch designs 有权
    微电机械开关设计

    公开(公告)号：US07218191B2

    公开(公告)日：2007-05-15

    申请号：US11092462

    申请日：2005-03-29

    申请人： Carl O. Bozler ,  Shaun R. Berry ,  Jeremy Muldavin ,  Craig L. Keast

    发明人： Carl O. Bozler ,  Shaun R. Berry ,  Jeremy Muldavin ,  Craig L. Keast

    IPC分类号： H01P1/10 ,  H03K17/975

    CPC分类号： H01H59/0009 ,  H01G5/18 ,  H01G5/40 ,  H01H2059/0081

    摘要： A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode.

    摘要翻译： 电容RF开关和DC RF开关包括具有薄层金属和至少一个下拉电极的固定电极。 移动板具有多个波纹和选择性手指设计。 电容开关包括与固定电极接触的选择性手指，以便当开关闭合时使移动板和固定电极之间的静摩擦最小化。 DC开关包括形成在移动板的选择部分上并且当开关闭合时定位成与固定电极接触的多个凹坑，以便增加接触力并降低移动板之间的电阻 和固定电极。

    Mechanical memory transistor
    6.
    发明授权
    Mechanical memory transistor 有权
    机械记忆晶体管

    公开(公告)号：US08704314B2

    公开(公告)日：2014-04-22

    申请号：US11951535

    申请日：2007-12-06

    申请人： Carl O. Bozler

    发明人： Carl O. Bozler

    IPC分类号： H01L21/00 ,  H01L27/12 ,  H01L29/84 ,  H01L21/48

    CPC分类号： H01L29/84 ,  B82Y10/00 ,  G11C23/00 ,  H01H59/0009 ,  H01L29/685 ,  H01L29/78

    摘要： A mechanical memory transistor includes a substrate having formed thereon a source region and a drain region. An oxide is formed upon a portion of the source region and upon a portion of the drain region. A pull up electrode is positioned above the substrate such that a gap is formed between the pull up electrode and the substrate. A movable gate has a first position and a second position. The movable gate is located in the gap between the pull up electrode and the substrate. The movable gate is in contact with the pull up electrode when the movable gate is in a first position and is in contact with the oxide to form a gate region when the movable gate is in the second position. The movable gate, in conjunction with the source region and the drain region and when the movable gate is in the second position, form a transistor that can be utilized as a non-volatile memory element.

    摘要翻译： 机械存储晶体管包括其上形成有源极区和漏极区的衬底。 在源区的一部分上和漏极区的一部分上形成氧化物。 上拉电极位于衬底之上，使得在上拉电极和衬底之间形成间隙。 可动门具有第一位置和第二位置。 可移动栅极位于上拉电极和基板之间的间隙中。 当可移动栅极处于第一位置时，可移动栅极与上拉电极接触并且当可移动栅极处于第二位置时与可动栅极接触以形成栅极区域。 可移动栅极与源极区域和漏极区域结合，并且当可移动栅极处于第二位置时，形成可用作非易失性存储元件的晶体管。

    Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
    7.
    发明授权
    Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same 有权
    微电子机械系统致动器装置和利用其的可重构电路

    公开(公告)号：US06646525B2

    公开(公告)日：2003-11-11

    申请号：US09885713

    申请日：2001-06-20

    申请人： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

    发明人： Carl O. Bozler ,  Richard G. Drangmeister ,  Robert J. Parr ,  Lawrence J. Kushner

    IPC分类号： H01P110

    CPC分类号： B81B3/0021 ,  B81B2201/014 ,  B81B2203/0118 ,  B81C1/00214 ,  H01G5/18 ,  H01G5/40 ,  H01H59/0009 ,  H01H2059/0081 ,  H01P1/12 ,  H01P1/20327 ,  H01P1/20363 ,  H01P1/20381 ,  H01P1/2039 ,  H01P5/04

    摘要： A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves.

    摘要翻译： 一种微电子机械装置，其包括形成在基板上的固定电极，所述固定电极包括透明的高电阻层和在预定方向上形成有各向异性应力并且邻近所述固定电极设置的可移动电极。 该器件包括通过固定电极彼此隔离的第一和第二导电区域。 可移动电极移动以覆盖固定电极并且电耦合到第二导电区域，从而响应于施加在固定和可移动电极上的电势而电耦合第一和第二导电区域。 固定电极对电磁信号或波是透明的，并且可移动电极阻止或允许电磁信号或波的传输。