公开(公告)号：US20080155992A1

公开(公告)日：2008-07-03

申请号：US11618056

申请日：2006-12-29

Applicant: Marc Scott Hodes ,  Christopher D.W. Jones ,  Shankar Krishnan ,  Oana Malis

Inventor： Marc Scott Hodes ,  Christopher D.W. Jones ,  Shankar Krishnan ,  Oana Malis

IPC: F25B21/02

CPC classification number: F25B21/02 ,  F25B2500/01 ,  H01L23/38 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An apparatus includes a thermoelectric cooler having a first set of one or more metal electrodes, a second set of one or more metal electrodes, and one or more doped semiconductor members. Each member physically joins a corresponding one electrode of the first set to a corresponding one electrode of the second set. Each member has a cross-sectional area that increases along a path from the one metal electrode of the first set to the one metal electrode of the second set.

Abstract translation: 一种装置包括具有第一组一个或多个金属电极的热电冷却器，一个或多个金属电极的第二组和一个或多个掺杂的半导体部件。 每个构件将第一组的对应的一个电极物理地连接到第二组的对应的一个电极。 每个构件具有沿着从第一组的一个金属电极到第二组的一个金属电极的路径增加的横截面面积。

公开(公告)号：US09146156B2

公开(公告)日：2015-09-29

申请号：US13285712

申请日：2011-10-31

Applicant: Guorong V. Zhuang ,  Shankar Krishnan ,  Johannes D. de Veer ,  Klaus Flock ,  David Y. Wang ,  Lawrence D. Rotter

Inventor： Guorong V. Zhuang ,  Shankar Krishnan ,  Johannes D. de Veer ,  Klaus Flock ,  David Y. Wang ,  Lawrence D. Rotter

IPC: G01B11/26 ,  G01J3/02 ,  G01N21/47 ,  G01J3/06 ,  G01J3/10

CPC classification number: G01J3/0264 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0278 ,  G01J3/06 ,  G01J3/10 ,  G01N21/4785

Abstract: The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.

Abstract translation: 本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中 照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小 到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

公开(公告)号：US20130033704A1

公开(公告)日：2013-02-07

申请号：US13285712

申请日：2011-10-31

Applicant: Guorong V. Zhuang ,  Shankar Krishnan ,  Johannes D. de Veer ,  Klaus Flock ,  David Y. Wang ,  Lawrence D. Rotter

Inventor： Guorong V. Zhuang ,  Shankar Krishnan ,  Johannes D. de Veer ,  Klaus Flock ,  David Y. Wang ,  Lawrence D. Rotter

IPC: G01C1/00

CPC classification number: G01J3/0264 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0278 ,  G01J3/06 ,  G01J3/10 ,  G01N21/4785

Abstract: The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.

Abstract translation: 本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中 照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小 到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

公开(公告)号：US08040511B1

公开(公告)日：2011-10-18

申请号：US12357294

申请日：2009-01-21

Applicant: Shankar Krishnan ,  Haixing Zhou ,  Haiming Wang ,  David Lidsky ,  Walter Dean Mieher

Inventor： Shankar Krishnan ,  Haixing Zhou ,  Haiming Wang ,  David Lidsky ,  Walter Dean Mieher

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01B11/26

Abstract: Methods and apparatus for measuring an optical azimuth angle φO of a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and −A. A combination signal may be computed from the polarization-dependent signals obtained at +A and −A and a property of the combination signal may be calculated for several mechanical Azimuth angles φM. A relationship between the optical azimuth angle φO and the mechanical azimuth angle φM may be determined from a behavior of the property as a function of mechanical azimuth angle φM.

Abstract translation: 公开了用于测量基底相对于散射测量工具中的检测平面的光学方位角＆lt; O的方法和装置。 可以照射散射测量工具的台上的光栅目标，并且可以观察所得衍射级的位置。 光学方位角可以从衍射级的位置确定。 或者，可以测量从线光栅散射的辐射的偏振相关信号，以获得相等和相反的偏振角+ A和-A。 可以从在+ A和-A处获得的偏振相关信号计算组合信号，并且可以针对若干机械方位角＆amp; M来计算组合信号的特性。 可以根据作为机械方位角的函数的性质的行为来确定光学方位角＆lt; O和机械方位角＆amp; M之间的关系。

公开(公告)号：US07907264B1

公开(公告)日：2011-03-15

申请号：US12193450

申请日：2008-08-18

Applicant: Shankar Krishnan

Inventor： Shankar Krishnan

IPC: G01N21/41 ,  G01N15/08 ,  G01B11/00 ,  G01B11/22 ,  G01R31/26

CPC classification number: G01N15/08

Abstract: A method of measuring a porosity of a film, by measuring a refractive index of the film in a first environment having a first relative humidity to produce a first refractive index measurement. The refractive index of the film is measured in a second environment having a second relative humidity, where the first relative humidity is different from the second relative humidity, to produce a second refractive index measurement. Multiple gases can be used to create the first and second environments. The first refractive index measurement and the second refractive index measurement are input into a model that correlates refractive index to film porosity, to output the porosity of the film.

Abstract translation: 一种通过在具有第一相对湿度的第一环境中测量膜的折射率来测量膜的孔隙率以产生第一折射率测量的方法。 在具有第二相对湿度的第二环境中测量膜的折射率，其中第一相对湿度与第二相对湿度不同，以产生第二折射率测量。 可以使用多种气体来创建第一和第二种环境。 第一折射率测量和第二折射率测量被输入到将折射率与膜孔隙度相关联的模型中，以输出膜的孔隙率。

公开(公告)号：US07869040B1

公开(公告)日：2011-01-11

申请号：US12184419

申请日：2008-08-01

Applicant: Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

Inventor： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC: G01J4/00

CPC classification number: G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

Abstract: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

Abstract translation: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

公开(公告)号：US07831090B1

公开(公告)日：2010-11-09

申请号：US11480044

申请日：2006-06-30

Applicant: Shankar Krishnan ,  Pei Yean Lee ,  John Barrett Moore ,  Suresh Venkatasubramanian

Inventor： Shankar Krishnan ,  Pei Yean Lee ,  John Barrett Moore ,  Suresh Venkatasubramanian

IPC: G06K9/00 ,  G06T15/00

CPC classification number: G06K9/00214 ,  G06K9/6211 ,  G06T7/30 ,  G06T17/00 ,  G06T2207/10028

Abstract: A method for registering multiple 3D point sets by determining optimal relative positions and orientations of the 3D point sets. Initial values are determined for the rotation matrices corresponding to the relative orientations of reference frames of the 3D point sets. A registration error cost function is optimized on a product manifold of all of the rotation matrices to determine optimal values of the rotation matrices. The optimal values of the rotation matrices are used to determine optimal values for translation vectors corresponding to the relative positions of the reference frames of the 3D point sets. The 3D point sets are registered on a common reference frame using the optimal rotation matrices and the optimal translation vectors.

Abstract translation: 一种用于通过确定3D点集合的最佳相对位置和取向来登记多个3D点集的方法。 对于与3D点集的参考帧的相对取向相对应的旋转矩阵确定初始值。 在所有旋转矩阵的乘积歧管上优化注册误差成本函数，以确定旋转矩阵的最佳值。 旋转矩阵的最佳值用于确定对应于3D点集的参考帧的相对位置的平移向量的最优值。 使用最佳旋转矩阵和最优平移向量将3D点集登记在公共参考帧上。

公开(公告)号：US20100088415A1

公开(公告)日：2010-04-08

申请号：US12246973

申请日：2008-10-07

Applicant: AARON ARCHER ,  Shankar Krishnan

Inventor： AARON ARCHER ,  Shankar Krishnan

IPC: G06F15/16

CPC classification number: H04L41/0826 ,  H04L41/12

Abstract: A method and apparatus for providing facility location plans for a network are disclosed. For example, the method identifies a facility and a number of nearest active clients associated with a minimized cost per unit demand of connecting these clients to this facility. The method then connects the number of nearest active clients to the facility associated with the minimized cost per unit demand. In one embodiment, the method iterates this process with the remaining clients until all demands have been assigned to facilities.

Abstract translation: 公开了一种用于为网络提供设施位置计划的方法和装置。 例如，该方法识别与将这些客户端连接到该设施的每单位需求的最小化成本相关联的设施和最近的活动客户端的数量。 然后，该方法将最近的活动客户端的数量连接到与每单位需求的最小化成本相关联的设施。 在一个实施例中，该方法与剩余的客户端重复该过程，直到所有需求都被分配给设施。

公开(公告)号：US20090321045A1

公开(公告)日：2009-12-31

申请号：US12165225

申请日：2008-06-30

Applicant: Domhnaill Hernon ,  Marc Hodes ,  Alan Lyons ,  Alan O'Loughlin ,  Shankar Krishnan

Inventor： Domhnaill Hernon ,  Marc Hodes ,  Alan Lyons ,  Alan O'Loughlin ,  Shankar Krishnan

IPC: F28F7/00

CPC classification number: H05K7/20009 ,  B22D25/02 ,  B33Y80/00 ,  F28F13/003 ,  F28F2255/00 ,  H01L23/367 ,  H01L23/3672 ,  H01L23/467 ,  H01L2924/0002 ,  Y10T29/4935 ,  H01L2924/00

Abstract: A heat sink includes a base and a heat exchange element monolithically connected to the base. The heat exchange element has a surface that at least partially bounds first and second paths through the heat exchange element. The surface forms an upper boundary of the first and second paths and includes an opening therethrough connecting the first and second paths.

Abstract translation: 散热器包括基部和与基座单片连接的热交换元件。 热交换元件具有至少部分地限定穿过热交换元件的第一和第二路径的表面。 所述表面形成所述第一和第二路径的上边界，并且包括连接所述第一和第二路径的开口。

公开(公告)号：US20090315173A1

公开(公告)日：2009-12-24

申请号：US12143594

申请日：2008-06-20

Applicant: Roger Scott Kempers ,  Shankar Krishnan ,  Alan Michael Lyons ,  Todd Richard Salamon

Inventor： Roger Scott Kempers ,  Shankar Krishnan ,  Alan Michael Lyons ,  Todd Richard Salamon

IPC: H01L23/36 ,  H01L21/58 ,  B21D53/02

CPC classification number: B23P15/26 ,  B21D53/02 ,  B21D53/022 ,  B21D53/04 ,  F28F21/00 ,  F28F21/081 ,  H01L23/367 ,  H01L23/3677 ,  H01L23/3736 ,  H01L23/42 ,  H01L24/64 ,  H01L24/66 ,  H01L24/69 ,  H01L25/0657 ,  H01L2225/06527 ,  H01L2225/06575 ,  H01L2225/06589 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01057 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/14 ,  Y10T29/4935 ,  Y10T428/12396 ,  Y10T428/24562 ,  Y10T428/24851

Abstract: An apparatus 100 comprising a first substrate 130 having a first surface 125, a second substrate 132 having a second surface 127 facing the first surface and an array 170 of metallic raised features 170 being located on the first surface, each raised feature being in contact with the first surface to the second surface, a portion of the raised features being deformed via a compressive force 305.

Abstract translation: 装置100包括具有第一表面125的第一基底130，具有面向第一表面的第二表面127的第二基底132和位于第一表面上的金属凸起特征170的阵列170，每个凸起特征与 第一表面到第二表面，凸起特征的一部分经由压缩力305变形。